MOCVD chamber gear ball replacement fixture
By designing the MOCVD cavity gear ball replacement fixture, the linkage switch and protective structure of the silo and feed pipes are used to solve the problems of falling and contamination during the ball replacement process, and the effect of rapid replacement and efficient cleaning is achieved.
Patent Information
- Application Number
- CN202421705891.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-18
- Publication Date
- 2025-04-04
- Estimated Expiration
- 2034-07-18
AI Technical Summary
In MOCVD equipment, the ball drop, tweezers drop, and the ball sticking to external impurities when the gears replace the balls, resulting in operational errors and difficulty in cleaning.
A MOCVD cavity gear ball replacement fixture is designed, including the silo, the material conveying body and the linkage switch. The balls are controlled to be transported from the feed pipe individually to the gears in turn to avoid human operation errors, and to reduce external material pollution through the protection of the silo and the feed pipe.
The rapid replacement and installation of balls is achieved, which improves work efficiency, reduces labor intensity, reduces frequent ball cleaning operations, and avoids the risk of ball drop and tweezers falling.
Smart Images
Figure CN222712053U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of auxiliary jigs for epitaxial wafer manufacturing equipment, in particular to a MOCVD cavity gear ball replacement jig. Background Art
[0002] MOCVD is a new type of vapor phase epitaxial growth technology developed on the basis of vapor phase epitaxy (VPE), which generally performs vapor phase epitaxy on a substrate in the form of a thermal decomposition reaction.
[0003] At present, MOCVD equipment needs to use a variety of auxiliary tools to cooperate when replacing the ball of the gear, such as tweezers, dust-free cloth, etc. The ball is clamped by tweezers and placed in the gear. The dust-free cloth can be used to wipe and clean the ball and tweezers. At the same time, it can also be used to prevent the ball from rolling to other places or falling. Therefore, in the process of replacing the gear ball, there is a risk of human operational error of the ball falling, the risk of tweezers falling, and the risk of the ball adhering to external impurities and not being cleaned. Utility Model Content
[0004] The embodiment of the present application provides a MOCVD chamber gear ball replacement jig, which can conveniently control the balls to fall from the feed pipe into the gears through a linkage switch, and is less likely to have the risk of the balls falling elsewhere. The balls can be quickly replaced and installed with high work efficiency. At the same time, the balls are protected by the silo and the feed pipe and are not easily contaminated by external substances, thus avoiding the frequent cleaning of the balls and saving time.
[0005] An embodiment of the present application provides a MOCVD chamber gear ball replacement jig, comprising a material bin, a material delivery body and a linkage switch, wherein the material bin is used to hold balls, the material delivery body is connected to the bottom of the material bin, and a material delivery pipe vertically connected to the material bin is arranged in the material delivery body, and the lower part of the material delivery pipe is matched with the ball gap, wherein the linkage switch is arranged on the material delivery body in a manner that can control the material delivery pipe to deliver balls one by one in sequence.
[0006] In a possible implementation, the linkage switch includes an operating rod and a first baffle and a second baffle that are sequentially and parallelly distributed along the length direction of the material delivery pipe, the distance between the first baffle and the second baffle is adapted to the outer diameter of the ball, the first baffle and the second baffle are connected to the operating rod through an adapter plate at one end close to each other, the operating rod protrudes vertically to the outside of the material delivery body, the material delivery pipe includes a first section, a second section and a third section that are sequentially distributed, wherein the first section is vertically connected to the silo, the third section is fixed to the bottom of the material delivery body, and the second section is between the The first partition plate is between the second partition plate and is fixedly connected to the inner wall of the material feeding body on the side away from the adapter plate. The second partition plate has a material blocking section away from the operating rod relative to the first partition plate. The second partition plate is provided with a leakage hole, so that when the operating rod is not pressed, the first partition plate does not block the first section at the top, and at the same time, the second partition plate blocks the third section at the bottom through the material blocking section, and when the operating rod is pressed into place, the first partition plate blocks the first section at the top, and the leakage hole is opposite to the third section, so as to realize the connection between the second section and the third section.
[0007] In a possible implementation, a button is vertically connected to the outer end of the operating rod.
[0008] In a possible implementation, a spring is sleeved on the operating rod, and the spring is abutted between the button and the feeding body in a compressed manner.
[0009] In a possible implementation, a conical opening is provided at the top of the first section, the size of the top opening of the conical opening and the size of the bottom opening are the same, and the bottom opening matches the clearance of the ball.
[0010] In one possible implementation, the bottom of the feeding body is coaxially connected to a conical discharge portion, the upper opening size of the conical discharge portion is larger than the tube diameter of the third section, and the lower opening size of the conical discharge portion is equal to the tube diameter of the third section.
[0011] Beneficial effects: Compared with the prior art, the MOCVD chamber gear ball replacement jig provided by the present application is provided with a material bin for holding balls, and is also provided with a material delivery pipe and a linkage switch, which can control the balls to be delivered one by one through the material delivery pipe, thereby realizing the rapid installation and replacement of the balls in the gears, convenient operation, high work efficiency, and at the same time, the balls are protected by the material bin and the material delivery pipe and are not easy to adhere to other external substances, thereby effectively reducing the operation of cleaning the balls, reducing labor intensity, and further improving work efficiency;
[0012] When the operating lever is not pressed, a single ball automatically falls between the first partition and the second partition. When the operating lever is pressed, the first partition isolates the ball above to prevent it from falling. At the same time, the single ball between the first partition and the second partition falls from the leakage hole to the third section and is then discharged through the feed pipe. In this way, the ball can be quickly installed in the gear by pressing one ball at a time, and it is not easy to have the problem of wrong installation position and wrong installation quantity.
[0013] After the button is pressed to discharge the material, the spring can automatically rebound and reset the linkage switch based on its own elastic potential energy. After the rebound and reset, the ball automatically falls between the first partition and the second partition to automatically load the material, which makes the operation more convenient.
[0014] The lower opening of the conical discharge part can realize accurate feeding of the balls. Meanwhile, the upper part of the conical discharge part has a larger outer dimension, which can increase the contact area with the feeding body, thereby improving the structural connection strength between the conical discharge part and the feeding body.
[0015] These and other purposes, features and advantages of the present invention are fully reflected in the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 A three-dimensional structural schematic diagram of the MOCVD chamber gear ball replacement fixture of the present application is shown.
[0017] Figure 2 A schematic cross-sectional structure diagram of the MOCVD chamber gear ball replacement fixture of the present application is shown.
[0018] Figure 3 A schematic structural diagram of the MOCVD chamber gear ball replacement jig of the present application when the operating lever is not pressed is shown.
[0019] Figure 4 A schematic diagram of the structure of the MOCVD chamber gear ball replacement jig of the present application when the operating rod is pressed is shown. DETAILED DESCRIPTION
[0020] The following description is used to disclose the utility model so that those skilled in the art can implement the utility model. The preferred embodiments described below are only examples, and those skilled in the art can think of other obvious variations. The basic principles of the utility model defined in the following description can be applied to other embodiments, variations, improvements, equivalents, and other technical solutions that do not deviate from the spirit and scope of the utility model.
[0021] Those skilled in the art should understand that, in the disclosure of the specification, the orientation or position relationship indicated by the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. are based on the orientation or position relationship shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above terms should not be understood as limiting the present invention.
[0022] It is to be understood that the term "one" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element may be one, while in another embodiment, the number of the element may be multiple, and the term "one" should not be understood as a limitation on the quantity.
[0023] refer to Figures 1 to 4 The embodiment of the present application provides a MOCVD chamber gear ball replacement fixture, comprising a silo 10, a feeding body 20 and a linkage switch 30, wherein the silo 10 is used to hold balls, wherein the feeding body 20 is connected to the bottom of the silo 10, and a feeding pipe 21 vertically connected to the silo 10 is arranged in the feeding body 20, and the lower part of the feeding pipe 21 cooperates with the ball clearance, so that the balls in the silo 10 can be automatically dropped into the inner cylinder of the feeding pipe 21 one by one, wherein the linkage switch 30 is arranged on the feeding body 20 in a manner that can control the feeding pipe 21 to feed the balls one by one in sequence. In this way, there is no need to use tweezers. Relying on the jig, the balls in the silo 10 can be transported one by one from the delivery pipe 21 to the gears through the linkage switch 30 to complete the loading and installation of the balls. The number of balls transported is controllable, and the installation is faster. At the same time, the risk of the balls falling off and the tweezers falling off due to the balls being clamped by tweezers can be avoided. In addition, during the installation process, the balls are no longer directly exposed to the outside world. Through the protective effect of the silo 10 and the delivery pipe 21, the balls are not easily adhered to and contaminated by foreign substances, thereby reducing the frequency of cleaning the balls, reducing labor intensity, and improving work efficiency.
[0024] Furthermore, the linkage switch 30 includes an operating rod 31 and a first partition 32 and a second partition 33 which are distributed in parallel along the length direction (i.e., the height direction) of the feed pipe 21, wherein the distance between the first partition 32 and the second partition 33 is adapted to the outer diameter of the ball, so that only one ball can be accommodated between the first partition 32 and the second partition 33, and in addition, the first partition 32 and the second partition 33 are connected to the operating rod 31 at one end close to each other through an adapter plate 34, wherein the first partition 32 and the second partition 33 are both vertically connected to the adapter plate 34, and the operating rod is located at the center position of the first partition 32 and the second partition 33. The material delivery pipe 21 includes a first section 211, a second section 212 and a third section 213 distributed in sequence, wherein the first section 211 is vertically connected to the silo 10, wherein the third section 213 is fixed to the bottom of the material delivery body 20, wherein the second section 212 is between the first partition plate 32 and the second partition plate 33, and is fixedly connected to the inner wall of the material delivery body 20 at the end away from the linkage switch 30, and the second partition plate 33 has a material blocking section 331 away from the operating rod 31 relative to the first partition plate 32, and the second partition plate 33 is provided with a leakage hole 301, so that when the operating rod 31 is not pressed, the first partition plate 32 does not block the first section 211 at the top, and the second partition plate 33 blocks the third section 211 at the bottom through the material blocking section 331. Segment 213, in this way, the balls in the first segment 211 will automatically fall to the second segment 212 under the action of gravity. In addition, when the operating rod 31 is pressed into place, the first partition 32 blocks the first segment 211 at the top, and the leakage hole 301 is opposite to the third segment 213 to achieve the connection between the second segment 212 and the third segment 213, so that a single ball in the second segment 212 can be automatically discharged from the feed pipe 21 through the leakage hole 301 and the third segment 213. Compared with the tweezers clamping installation method, the balls move in a directional manner in the preset channel formed by the feed pipe 21. It is only necessary to make the bottom outlet of the feed pipe 21 opposite to the position on the gear where the balls are to be installed, and then press the operating rod 31. Not only is it not easy for the balls to fall elsewhere, but the installation of the balls is also faster.
[0025] In one embodiment, the outer end of the operating rod 31 is vertically connected to a button 35, so that the button 35 can provide a larger contact area, making it more convenient for the staff to press with one hand.
[0026] Further preferably, a spring 36 is sleeved on the operating rod 31, wherein the spring 36 abuts between the button 35 and the feeding body 20 in a compressed manner. In this way, after completing the feeding of a single ball by pressing the operating rod 31, it is only necessary to release the operating rod 31, and the linkage switch 30 will automatically reset under the rebound action of the spring 36. At the same time, after resetting, the first partition 32 opens the channel between the first section 211 and the second section 212, and the second partition 33 disconnects the connection between the second section 212 and the third section 213, so that the automatic feeding of a single ball to the second section 212 can be realized, and the operation is more convenient.
[0027] In one embodiment, a conical opening 201 is provided at the top of the first section 211, and the size of the top opening and the size of the bottom opening of the conical opening 201, and the bottom opening is matched with the ball clearance, so that the top opening 201 can ensure that the balls fall quickly into the conveying pipe 21, and the bottom opening can ensure that the balls automatically fall one by one in the subsequent conveying pipe 21.
[0028] In one embodiment, the bottom of the feeding body 20 is connected to a conical discharge portion 22 in a coaxially extending manner, wherein the upper opening 202 of the conical discharge portion 22 is larger than the tube diameter of the third section 213, thereby ensuring that the balls in the feeding pipe 21 can fall into the conical discharge portion 22 quickly and unhindered, and at the same time, the upper opening with a larger size can produce a larger contact area with the feeding body 20, which can enhance the structural connection strength between the feeding body 20 and the conical discharge portion 22 and extend the service life of the fixture as a whole. In addition, the lower opening 203 of the conical discharge portion 22 is equal to the tube diameter of the third section 213, thereby ensuring the fixed-point delivery of the balls through the lower opening 203 with a smaller size, and the lower opening 203 can partially extend into the gear, so that the balls are less likely to fall, which can further improve work efficiency.
[0029] It should be noted that the terms "first, second" in the present application are only used for descriptive purposes and do not indicate any order. They cannot be understood as indicating or implying relative importance. These terms can be interpreted as names.
[0030] It should be understood by those skilled in the art that the embodiments of the present invention described above and shown in the accompanying drawings are only examples and do not limit the present invention. The advantages of the present invention have been fully and effectively realized. The functions and structural principles of the present invention have been demonstrated and explained in the embodiments, and the embodiments of the present invention may be deformed or modified in any way without departing from the principles.
Claims
1. MOCVD chamber gear ball replacement fixture, characterized by: It includes a material bin, a material delivery body and a linkage switch, wherein the material bin is used to hold balls, the material delivery body is connected to the bottom of the material bin, and a material delivery pipe vertically connected to the material bin is arranged in the material delivery body, and the lower part of the material delivery pipe is matched with the ball gap, wherein the linkage switch is arranged on the material delivery body in a manner that can control the material delivery pipe to deliver the balls one by one in sequence.
2. The MOCVD chamber gear ball replacement jig according to claim 1, characterized in that: The linkage switch includes an operating rod and a first baffle and a second baffle that are sequentially and parallelly distributed along the length direction of the material delivery pipe, the distance between the first baffle and the second baffle is adapted to the outer diameter of the ball, the first baffle and the second baffle are connected to the operating rod through an adapter plate at one end close to each other, the operating rod vertically protrudes to the outside of the material delivery body, the material delivery pipe includes a first section, a second section and a third section that are sequentially distributed, wherein the first section is vertically connected to the silo, the third section is fixed to the bottom of the material delivery body, and the second section is between the first baffle and the The second partition is between the second partitions and is fixedly connected to the inner wall of the material feeding body on the side away from the adapter plate. The second partition has a material blocking section away from the operating rod relative to the first partition, and the second partition is provided with a leakage hole, so that when the operating rod is not pressed, the first partition does not block the first section at the top, and at the same time, the second partition blocks the third section at the bottom through the material blocking section, and when the operating rod is pressed into place, the first partition blocks the first section at the top, and the leakage hole is opposite to the third section, so as to realize the connection between the second section and the third section.
3. The MOCVD chamber gear ball replacement jig according to claim 2, characterized in that: The outer end of the operating rod is vertically connected with a button.
4. The MOCVD chamber gear ball replacement jig according to claim 3, characterized in that: A spring is sleeved on the operating rod, and the spring abuts between the button and the feeding body in a compressed manner.
5. The MOCVD chamber gear ball replacement jig according to claim 2, characterized in that: A conical opening is arranged at the top of the first section, the size of the top opening of the conical opening and the size of the bottom opening are the same, and the bottom opening is matched with the ball clearance.
6. The MOCVD chamber gear ball replacement jig according to claim 5, characterized in that: The bottom of the feeding body is coaxially connected with a conical discharge portion, the upper opening size of the conical discharge portion is larger than the tube diameter of the third section, and the lower opening size of the conical discharge portion is equal to the tube diameter of the third section.