Wafer defect detection rack

Abstract

The utility model discloses a wafer defect detection rack, comprising a placement rack, an outer wall of the placement rack is fixedly provided with a display screen, an interior of the placement rack is provided with an adjustment component, and a first placement box and a second placement box are respectively provided inside the placement rack, two of the first placement box and the second placement box are provided, a clamping component is provided inside the first placement box and the second placement box, and a placement plate is provided on one side of the clamping component, the adjustment component comprises a dual-axis motor, a fixed rod and a worm, the dual-axis motor is fixedly arranged inside the placement rack, and both ends of the dual-axis motor are fixedly connected with fixed rods, one end of the two fixed rods is fixedly connected with a worm, the outer walls of the two fixed rods are provided with limiting sleeves, and the outer walls of the limiting sleeves are fixedly connected to the bottom of the placement rack, so that the internal space of the detection rack can be adjusted to improve the scope of application, and the wafer can be stably clamped while being convenient for protecting it, and the utility model has practicality.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer production, in particular to a wafer defect detection rack. Background Art

[0002] Wafers are the basic materials for manufacturing semiconductor chips. The main raw material for semiconductor integrated circuits is silicon, so the corresponding material is silicon wafers. Wafers need to be inspected after they are produced. The surface of the wafer may have scratches, uneven wafer weight and other quality problems.

[0003] The existing patent with announcement number CN213026066U proposes a wafer defect detection rack, which is provided with a rack main body, and the rack main body includes a plurality of storage frames, and a plurality of symmetrical rows of clamping parts with openings facing inward are installed on both sides of the inner wall of the storage frame, and the clamping parts are covered with a first soft rubber layer, and the outer wall of the clamping part on one side of the inner wall of the storage frame is connected with an adjusting rod, and the plurality of adjusting rods pass through the side wall of the rack main body and are connected with linkage blocks, and the adjusting rods are located on the outer wall of the storage frame and are provided with a limit clamp.

[0004] Although the above-mentioned inspection rack can stably place the wafers during production, it does not have the function of adjusting the internal dimensions of the space of the inspection rack. When placing the semiconductor materials on the wafers, some semiconductor wafers are relatively large in size, and the placement boxes of ordinary inspection racks are relatively fixed. When the number of wafers is large or the volume is large, the placement boxes cannot be adjusted according to the stacking of multiple groups of wafers, which reduces the application scope of the inspection rack and is inconvenient to use. In view of the above problems, an improved and upgraded wafer defect inspection rack is proposed. Utility Model Content

[0005] The purpose of the utility model is to provide a wafer defect detection rack to solve the problems raised in the above background technology.

[0006] In order to solve the above problems, the following technical solutions are provided:

[0007] A wafer defect detection rack is designed, comprising a placing rack, wherein a display screen is fixedly arranged on the outer wall of the placing rack, an adjusting component is arranged inside the placing rack, and a first placing box and a second placing box are respectively arranged inside the placing rack, two of the first placing box and the second placing box are each provided, a clamping component is arranged inside the first placing box and the second placing box, and a placing plate is arranged on one side of the clamping component.

[0008] Furthermore, the adjustment assembly includes a dual-axis motor, a fixed rod and a worm gear. The dual-axis motor is fixedly arranged inside the placement frame, and both ends of the dual-axis motor are fixedly connected to the fixed rods, and one end of the two fixed rods is fixedly connected to the worm gear.

[0009] Furthermore, the outer walls of the two fixed rods are provided with limiting sleeves, and the outer walls of the limiting sleeves are fixedly connected to the bottom of the placement frame, the outer wall of the worm is meshingly connected with a worm wheel, the worm and the worm wheel are both rotatably installed inside the placement frame, and a bidirectional screw is threadedly connected to the middle part of the worm wheel.

[0010] Furthermore, two limit blocks are symmetrically screwed on the outer wall of the bidirectional screw rod, and a sliding block is provided on the outer wall of the limit block, and the sliding block is slidably connected to the inner wall of the placement frame.

[0011] Furthermore, the first placement box is fixedly mounted on the inner wall of the placement frame, the outer wall of the second placement box is fixedly connected to the limit block, the clamping assembly comprises a telescopic rod, a clamping plate and a limit rod, the telescopic rod is fixedly mounted on the inner wall of the first placement box and one end of the telescopic rod is fixedly connected to the clamping plate.

[0012] Furthermore, the outer wall of the clamping plate is symmetrically provided with limit rods, and one end of the limit rods is fixedly connected to the inner wall of the first placement box, and the outer wall of the clamping plate is fixedly provided with an anti-slip protection pad.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. The utility model is provided with components such as a dual-axis motor, a fixed rod, a worm, a worm gear, a bidirectional lead screw, a limit block, and a second placement box. The dual-axis motor is driven to drive the fixed rods at both ends to rotate, so that the two fixed rods respectively drive the worm gear on the outer wall of the worm to rotate, and then the two worm gears drive the two limit blocks on the outer wall of the middle bidirectional lead screw to move, thereby driving the two second placement boxes to move relative to each other, which is conducive to adjusting the positions of the two placement boxes, improving space utilization, and facilitating the improvement of the application range of the detection rack. Semiconductor wafers of different sizes can be placed, and the structure is simple.

[0015] 2. The utility model is provided with components such as telescopic rods, limit rods, clamping plates, and anti-skid protection pads. The telescopic rods on both sides of the placement box are driven to drive the clamping plates to clamp and limit the wafers. The anti-skid protection pads are used to protect the wafers when clamping. Limit rods are provided on both sides of the clamping plates to ensure relative stability when the clamping plates move. This is beneficial for stably clamping the semiconductor wafers while protecting them, and the operation is simple.

[0016] With reference to the following description and drawings, specific embodiments of the present invention are disclosed in detail, indicating the manner in which the principles of the present invention can be adopted. It should be understood that the embodiments of the present invention are not limited in scope. Within the spirit and scope of the appended claims, the embodiments of the present invention include many changes, modifications and equivalents. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0018] Figure 1 This is a schematic diagram of the overall structure of a wafer defect detection rack of the utility model;

[0019] Figure 2 This is a schematic diagram of a space adjustment structure of a wafer defect detection rack of the utility model;

[0020] Figure 3 for Figure 2 Schematic diagram of the internal split structure;

[0021] Figure 4 for Figure 3 Schematic diagram of the partially enlarged split structure.

[0022] In the figure: 1. placement rack; 2. display screen; 3. adjustment assembly; 31. dual-axis motor; 32. fixing rod; 33. limiting sleeve; 34. worm gear; 35. worm; 36. bidirectional screw; 37. limiting block; 38. slider; 4. first placement box; 5. second placement box; 6. clamping assembly; 61. telescopic rod; 62. limiting rod; 63. clamping plate; 64. anti-slip protection pad; 7. placement tray. DETAILED DESCRIPTION

[0023] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0024] like Figure 1 - Figure 4 As shown, the present embodiment provides a design of a wafer defect detection rack, including a placement rack 1, a display screen 2 is fixedly arranged on the outer wall of the placement rack 1, an adjustment component 3 is arranged inside the placement rack 1, and a first placement box 4 and a second placement box 5 are respectively arranged inside the placement rack 1, two of the first placement box 4 and the second placement box 5 are each provided, a clamping component 6 is arranged inside the first placement box 4 and the second placement box 5, and a placement plate 7 is arranged on one side of the clamping component 6.

[0025] Preferably, the adjustment component 3 includes a dual-axis motor 31, a fixed rod 32 and a worm 35, the dual-axis motor 31 is fixedly arranged inside the placement frame 1, and both ends of the dual-axis motor 31 are fixedly connected to the fixed rods 32, one end of the two fixed rods 32 is fixedly connected to the worm 35, the outer walls of the two fixed rods 32 are provided with limiting sleeves 33, and the outer walls of the limiting sleeves 33 are fixedly connected to the bottom of the placement frame 1, the outer wall of the worm 35 is meshingly connected with a worm wheel 34, the worm 35 and the worm wheel 34 are both rotatably installed inside the placement frame 1, the middle part of the worm wheel 34 is threadedly connected with a bidirectional lead screw 36, the outer wall of the bidirectional lead screw 36 is symmetrically screwed with two limit blocks 37, the outer wall of the limit block 37 is provided with a slider 38, and the slider 38 is slidably connected to the inner wall of the placement frame 1.

[0026] By driving the dual-axis motor 31 to work, the fixed rods 32 at both ends are driven to rotate, so that the two fixed rods 32 respectively drive the worm gear 34 on the outer wall of the worm 35 to rotate, and then the two worm gears 34 drive the two limit blocks 37 on the outer wall of the middle bidirectional screw 36 to move, thereby driving the two second placement boxes 5 to move relative to each other.

[0027] Preferably, the first placement box 4 is fixedly mounted on the inner wall of the placement rack 1, the outer wall of the second placement box 5 is fixedly connected to the limit block 37, the clamping assembly 6 comprises a telescopic rod 61, a clamping plate 63 and a limit rod 62, the telescopic rod 61 is fixedly mounted on the inner wall of the first placement box 4 and one end of the telescopic rod 61 is fixedly connected to the clamping plate 63, the limit rod 62 is symmetrically arranged on the outer wall of the clamping plate 63 and one end of the limit rod 62 is fixedly connected to the inner wall of the first placement box 4, and the outer wall of the clamping plate 63 is fixedly provided with an anti-slip protection pad 64.

[0028] By driving the telescopic rods 61 on both sides of the placement box, the telescopic rods 61 drive the clamping plates 63 to clamp and limit the wafer, and the anti-slip protection pads 64 are used to protect the wafer when clamping. Limiting rods 62 are set on both sides of the clamping plates 63 to facilitate relative stability when the clamping plates 63 move.

[0029] The use principle and use process of the utility model are as follows: first, the staff puts the wafers on the placing plate 7 inside the placing box. When the number of wafers is too large, the external power supply is turned on, and the two-axis motor 31 is driven to drive the fixed rods 32 at both ends to rotate, so that the two fixed rods 32 respectively drive the worm gear 34 on the outer wall of the worm 35 to rotate, and then the two worm gears 34 drive the two limit blocks 37 on the outer wall of the middle bidirectional screw 36 to move, thereby driving the two second placing boxes 5 to move relative to each other, so that more wafer semiconductor materials can be placed in the second placing box 5. The position of the placement box is then adjusted to improve space utilization, so that more or larger wafers can be stacked. The limit block 37 is limited by the slider 38 when moving. At this time, the telescopic rods 61 on both sides of the placement box are driven to drive the clamping plate 63 to clamp and limit the wafer. The anti-slip protection pad 64 is used to protect the wafer when clamping to prevent wear and scratches. Limit rods 62 are set on both sides of the clamping plate 63 to facilitate the relative stability of the clamping plate 63 when moving, so that the semiconductor wafer can be relatively fastened when placed.

[0030] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

Claims

1. A wafer defect detection rack, characterized in that: The invention comprises a placing frame (1), wherein a display screen (2) is fixedly arranged on the outer wall of the placing frame (1), an adjusting component (3) is arranged inside the placing frame (1), and a first placing box (4) and a second placing box (5) are arranged inside the placing frame (1), two of each of the first placing box (4) and the second placing box (5) are arranged, a clamping component (6) is arranged inside each of the first placing box (4) and the second placing box (5), and a placing plate (7) is arranged on one side of the clamping component (6).

2. A wafer defect detection rack according to claim 1, characterized in that: The adjustment assembly (3) comprises a dual-axis motor (31), a fixed rod (32) and a worm (35); the dual-axis motor (31) is fixedly arranged inside the placement frame (1), and both ends of the dual-axis motor (31) are fixedly connected to the fixed rod (32), and one end of the two fixed rods (32) is fixedly connected to the worm (35).

3. The wafer defect detection rack according to claim 2, characterized in that: The outer walls of the two fixed rods (32) are both provided with limiting sleeves (33), and the outer walls of the limiting sleeves (33) are fixedly connected to the bottom of the placement frame (1); the outer wall of the worm (35) is meshingly connected with a worm wheel (34); the worm (35) and the worm wheel (34) are both rotatably mounted inside the placement frame (1); and a bidirectional screw rod (36) is threadedly connected to the middle of the worm wheel (34).

4. The wafer defect detection rack according to claim 3, characterized in that: The outer wall of the bidirectional screw rod (36) is symmetrically threaded with two limit blocks (37), and the outer wall of the limit block (37) is provided with a slider (38), and the slider (38) is slidably connected to the inner wall of the placement frame (1).

5. The wafer defect detection rack according to claim 1, characterized in that: The first placement box (4) is fixedly mounted on the inner wall of the placement frame (1); the outer wall of the second placement box (5) is fixedly connected to the limit block (37); the clamping assembly (6) comprises a telescopic rod (61), a clamping plate (63) and a limit rod (62); the telescopic rod (61) is fixedly mounted on the inner wall of the first placement box (4) and one end of the telescopic rod (61) is fixedly connected to the clamping plate (63).

6. The wafer defect detection rack according to claim 5, characterized in that: The outer wall of the clamping plate (63) is symmetrically provided with a limit rod (62), and one end of the limit rod (62) is fixedly connected to the inner wall of the first placement box (4). The outer wall of the clamping plate (63) is fixedly provided with an anti-slip protection pad (64).

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