Equipment pipeline protection structure

Abstract

The equipment pipeline protection structure comprises a base, an outer pipe and an inner pipe and further comprises a baffle, one end of the outer pipe is open and connected with the base, the other end of the outer pipe is closed, an enclosed space is formed between the other end of the outer pipe and the base, and the end, away from the outer pipe, of the base is connected with an external instrument so that the enclosed space can be closed. The inner pipe is arranged in the enclosure space, one end of the inner pipe is connected with the base, the baffle is arranged in the enclosure space and located between the outer pipe and the inner pipe, an air inlet and an air outlet are formed in the base, and the air inlet and the air outlet are both communicated with the enclosure space; the baffle is arranged between the outer pipe and the inner pipe, so that SiO2 films growing on the inner wall of the outer pipe are reduced, part of the SiO2 films grow on the baffle, workers do not need to frequently clean the outer pipe to avoid breakage of the outer pipe, equipment maintenance gaps are longer, manpower is saved, meanwhile, the outer pipe is not prone to breakage under the influence of the baffle, the frequency of replacing the outer pipe is reduced, and the production efficiency is improved. And material resources are saved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, in particular to an equipment pipeline protection structure. Background Art

[0002] The semiconductor HTO process (High Temperature Oxide) is a commonly used process in the semiconductor manufacturing process. Through high-temperature treatment, oxygen and silicon materials react chemically to form a SiO2 layer on the surface of the product to be processed. This layer of SiO2 has good electrical insulation properties and can be used to isolate currents and signals between different circuits.

[0003] The HTO equipment has a mutually nested quartz outer tube and a quartz inner tube for forming a reaction chamber. During the use of the equipment, the gas used for film formation with the semiconductor reaction will cause the SiO2 film to grow on the quartz outer tube and the quartz inner tube. Since both ends of the quartz inner tube are open and both the inside and outside can contact the gas used for molding, the SiO2 film can grow on both the inside and outside of the quartz inner tube. The top of the quartz outer tube is sealed, and the gas only contacts the inside of the quartz outer tube, which makes the SiO2 film grow only on the inside of the quartz outer tube.

[0004] However, the thermal expansion coefficient of SiO2 is greater than that of quartz. Therefore, at the same temperature, the expansion degree of SiO2 and quartz is different. Therefore, during the temperature rise, the SiO2 film will pull the inner wall of the quartz outer tube. When the thickness of the SiO2 film on the inner side of the quartz outer tube exceeds 3um, the quartz outer tube will be damaged due to the stress on the inner side being greater than the stress on the outer side. Therefore, when the thickness of the SiO2 film reaches 3um, the quartz outer tube needs to be removed for cleaning. Otherwise, if the quartz outer tube is broken, a new outer tube needs to be replaced. This makes cleaning very frequent, wastes manpower and material resources, reduces the working efficiency of the equipment, and replacing the quartz outer tube also greatly increases the processing cost. Utility Model Content

[0005] In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is to provide an equipment pipeline protection structure.

[0006] In order to solve the above technical problems, a technical solution adopted by the utility model is: to provide an equipment pipeline protection structure, including a base, an outer tube and an inner tube, and also including a baffle, the outer tube, the inner tube and the baffle are all arranged on the base, one end of the outer tube is open and connected to the base, the other end of the outer tube is closed and forms an enclosed space with the base, the end of the base away from the outer tube is connected to an external instrument to make the enclosed space airtight, the inner tube is arranged in the enclosed space and one end is connected to the base, the baffle is arranged in the enclosed space at a position between the outer tube and the inner tube, and an air inlet and an exhaust port are opened on the base, and the air inlet and the exhaust port are both connected to the enclosed space.

[0007] Furthermore, the base includes a base body and a first flange, the base body is annular, the air inlet and the exhaust port are both opened on the base body, the first flange is arranged on the outer peripheral wall of the base body, the open end of the outer tube is installed on the first flange to form the enclosed space with the base, and the inner tube and the baffle are both installed in the base body.

[0008] Furthermore, a placement groove is recessed downward on the upper wall surface of the first convex edge, and the placement groove matches the open end of the outer tube so that the outer tube can be placed therein. At this time, the internal space of the seat body and the internal space of the outer tube jointly form the enclosed space.

[0009] Furthermore, the inner peripheral wall of the seat body is provided with a second convex edge, the baffle is annular and is provided on the second convex edge, the second convex edge is also detachably provided with a bottom ring, and the inner tube is arranged inside the baffle through the bottom ring.

[0010] Furthermore, the bottom ring is annular and the outer diameter of the bottom ring matches the inner diameter of the second convex edge, the outer peripheral wall of the bottom ring is provided with a plurality of limiting protrusions, each of the limiting protrusions is formed by the outer peripheral wall of the bottom ring extending radially outwardly, and a plurality of through grooves matching the limiting protrusions are provided one by one at the positions corresponding to the limiting protrusions on the second convex edge.

[0011] Furthermore, a plurality of stop columns are provided on the upper end surface of the second convex edge, and the plurality of stop columns are arranged in one-to-one correspondence with the plurality of through grooves, each of the stop columns is located on one circumferential side of the corresponding through groove, and the circumferential distance between each stop column and the corresponding through groove is greater than or equal to the circumferential width of the limiting protrusion.

[0012] Furthermore, a plurality of limiting columns are convexly provided on the upper end surface of the bottom ring, and the plurality of limiting columns together enclose a limiting space matching the inner tube. When the inner tube is placed on the bottom ring, it is located in the limiting space and the inner tube is in contact with the plurality of limiting columns.

[0013] Furthermore, the outer diameter of the baffle plate matches the inner diameter of the seat body, a first clearance groove is provided on the baffle plate at a position corresponding to the air inlet, and a second clearance groove is provided on the baffle plate at a position corresponding to the exhaust port.

[0014] Furthermore, a plurality of third give-way grooves are provided at the lower end of the baffle plate at positions corresponding to the plurality of the limiting protrusions and the plurality of the passing grooves, each of the third give-way grooves matches a limiting protrusion and the passing groove corresponding to the limiting protrusion, the third give-way grooves are provided along the circumference of the baffle plate, and the circumferential width of the third give-way grooves is greater than the sum of the circumferential widths of the corresponding limiting protrusions and the passing grooves.

[0015] Furthermore, a plurality of the limiting protrusions are evenly spaced along the circumference of the bottom ring.

[0016] The equipment pipeline protection structure of the utility model has at least the following beneficial effects: by arranging a baffle between the outer tube and the inner tube, the SiO2 film grown on the inner wall of the outer tube is reduced, so that part of the SiO2 film grows on the baffle instead, so that the staff does not need to frequently clean the outer tube to avoid the outer tube from breaking, the equipment maintenance interval is longer, and manpower is saved. At the same time, the outer tube is less likely to break under the influence of the baffle, which reduces the number of times the outer tube is replaced and saves material resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0018] Figure 1 This is a structural schematic diagram of an embodiment of the equipment pipeline protection structure of the utility model;

[0019] Figure 2 It is a cross-sectional structural diagram of an embodiment of the equipment pipeline protection structure of the utility model;

[0020] Figure 3 for Figure 2 Schematic diagram of the local structure at A in the middle;

[0021] Figure 4 This is a structural schematic diagram of the bottom ring in an embodiment of the equipment pipeline protection structure of the utility model;

[0022] Figure 5 This is a structural schematic diagram of a base, a baffle and a bottom ring in an embodiment of the equipment pipeline protection structure of the utility model;

[0023] Figure 6 This is a schematic cross-sectional structure diagram of a base, a baffle and a bottom ring in an embodiment of the equipment pipeline protection structure of the utility model;

[0024] Figure 7 This is a structural schematic diagram of a baffle in an embodiment of the equipment pipeline protection structure of the utility model.

[0025] The meanings of the symbols in the accompanying drawings are:

[0026] Base 1, air inlet 11, exhaust port 12, seat body 13, first convex edge 14, placement groove 141, second convex edge 15, through groove 151, blocking column 152, outer tube 2, inner tube 3, third convex edge 31, blocking edge 32, baffle 4, first make way groove 41, second make way groove 42, third make way groove 43, enclosed space 5, bottom ring 6, limiting protrusion 61, limiting column 62, limiting space 63. DETAILED DESCRIPTION

[0027] The utility model will be further described below in conjunction with the accompanying drawings.

[0028] Please refer to Figure 1 and Figure 2 The equipment pipeline protection structure of the utility model comprises a base 1, an outer tube 2, an inner tube 3 and a baffle 4 arranged between the outer tube 2 and the inner tube 3. The outer tube 2, the inner tube 3 and the baffle 4 are all arranged on the base 1, the outer tube 2 is installed on the upper end of the base 1 and forms an enclosed space 5 with the base 1, and the end of the base 1 away from the outer tube 2 is connected to an external instrument (not shown in the figure) to make the enclosed space 5 airtight. The baffle 4 and the inner tube 3 are both located in the enclosed space 5, and an air inlet 11 and an exhaust port 12 are opened on the base 1, and the air inlet 11 and the exhaust port 12 are both connected to the enclosed space 5.

[0029] Please continue to refer to Figure 3The base 1 includes a base 13 and a first flange 14. The base 13 is annular. The air inlet 11 and the air outlet 12 are both opened on the base 13 and penetrate the side wall of the base 13. The air inlet 11 allows the external gas supply equipment to communicate with the inside of the base 1. The number of the air inlets 11 is two so as to introduce two gases at the same time according to the needs of the process. The two gases used for chemical reaction enter the base 1 (enter the enclosed space 5) through the two air inlets 11 respectively, and are discharged through the air outlet after reacting with the processed product. The inner peripheral wall of the base 13 is provided with a second flange 15 on which the inner tube 3 and the baffle 4 are installed. The second flange 15 is formed by the inner peripheral wall of the base 13 protruding inward along its own radial direction, that is, the second flange 15 is coaxial with the base 13. The first flange 14 is annular and is provided on the outer peripheral wall of the base 13. The first flange 14 is coaxial with the base 13. The upper wall surface of the first flange 14 is concavely provided with a placement groove 141 for mounting the outer tube 2 . The placement groove 141 is annular and coaxial with the first flange 14 .

[0030] Please refer to Figure 1 and Figure 2 The cross-section of the outer tube 2 is circular and one end of the outer tube 2 is open and the other end is closed. The open end of the outer tube 2 matches the placement groove 141 so that it can be placed in the placement groove 141. Therefore, the outer tube 2 and the base 1 together form the enclosed space 5 with an open lower end.

[0031] The inner tube 3 is in a hollow cylindrical shape and the outer diameter of the inner tube 3 is smaller than the inner diameter of the outer tube 2 so that it can be placed inside the outer tube 2. A third flange 31 is radially extended outward from the lower end of the inner tube 3 (i.e., the end of the inner tube 3 close to the base 1), and a rib 32 is arranged around the outer periphery of the third flange 31. The height of the rib 32 is greater than that of the third flange 31. The third flange 31 and the rib 32 are both coaxially arranged with the inner tube 3. The inner tube 3 is mounted on the second flange 15 through a bottom ring 6.

[0032] Please refer to Figure 4 and Figure 5The bottom ring 6 is annular and its outer diameter matches the inner diameter of the second convex edge 15. The outer peripheral wall of the bottom ring 6 is provided with a plurality of limiting protrusions 61. The plurality of limiting protrusions 61 are evenly spaced along the circumference of the bottom ring 6. Each of the limiting protrusions 61 is formed by the outer peripheral wall of the bottom ring 6 extending outward along its own radial direction. The second convex edge 15 is provided with a plurality of through grooves 151 corresponding to the positions of the limiting protrusions 61. The upper end surface of the second convex edge 15 is provided with a plurality of blocking columns 152 corresponding to the plurality of through grooves 151. Each of the blocking columns 152 is located on one side of the corresponding through groove 151 in the circumferential direction. The circumferential distance between each blocking column 152 and the corresponding through groove 151 is greater than or equal to the circumferential width of the limiting protrusion 61. A plurality of limiting columns 62 are convexly provided on the upper end surface of the bottom ring 6, and the limiting columns 62 are evenly spaced around the center of the bottom ring 6, and the limiting columns 62 together enclose a limiting space 63 that matches the inner tube 3. Specifically, the inner diameter of the limiting space 63 matches the outer diameter of the retaining edge 32 so that the retaining edge 32 can be clamped therein, so that the inner tube 3 can be stably placed on the bottom ring 6 without horizontal movement.

[0033] Please continue to refer to Figure 6 and Figure 7The baffle plate 4 is annular, and the outer diameter of the baffle plate 4 matches the inner diameter of the seat body 13, and the inner diameter of the baffle plate 4 is larger than the outer diameter of the inner tube 3. Two first clearance grooves 41 are provided on the baffle plate 4 at positions corresponding to the two air inlets 11, and the two first clearance grooves 41 penetrate the side wall of the baffle plate 4 so that the two air inlets 11 are connected to the enclosed space 5. A second clearance groove 42 is provided on the baffle plate 4 at a position corresponding to the exhaust port 12, and the second clearance groove 42 penetrates the side wall of the baffle plate 4 so that the exhaust port 12 is connected to the enclosed space 5. A plurality of third clearance grooves 43 are provided at the lower end of the baffle plate 4 at positions corresponding to the plurality of the limiting protrusions 61 and the plurality of the passing grooves 151. Each of the third clearance grooves 43 corresponds to a limiting protrusion 61 and the passing groove 151 corresponding to the limiting protrusion 61. The third clearance grooves 43 penetrate downward through the lower end wall of the baffle plate 4 and penetrate through the side wall of the baffle plate 4 along the radial direction of the baffle plate 4. The circumferential width of the third give way groove 43 matches the sum of the circumferential widths of one of the through grooves 151 and the blocking column 152 corresponding to the through groove 151, that is, when the bottom ring 6 is mounted on the second convex edge 15, the limiting protrusion 61 is located between one of the through grooves 151 and the blocking column 152 adjacent to the through groove 151, and the circumferential width of the third give way groove 43 is greater than the sum of the circumferential distances between the side of the through groove 151 away from the blocking column 152 and the side of the blocking column 152 away from the through groove 151.

[0034] One embodiment of the equipment pipeline protection structure of the utility model works as follows: during assembly, the retaining ring is first inserted downward from the upper end opening of the base 1 until the lower end surface of the retaining ring contacts the upper end surface of the second flange 15, and the retaining ring is rotated to adjust the position of the retaining ring so that the two first clearance grooves 41 are connected to the two air inlets 11, and the second clearance groove 42 is connected to the exhaust port 12. Then the bottom ring 6 is installed on the second flange 15, that is, after aligning the plurality of limiting protrusions 61 on the bottom ring 6 with the plurality of through grooves 151 on the second flange 15 one by one, the bottom ring 6 is pushed upward into the base 1, and when the limiting protrusion 61 enters the third clearance groove 43, the bottom ring 6 is rotated so that the limiting protrusion 61 is staggered with the corresponding through groove 151, and the rotation is completed when the limiting protrusion 61 abuts against the corresponding blocking column 152, and the bottom ring 6 is put down so that the lower end surface is placed on the upper end surface of the second flange 15, and the assembly of the bottom ring 6 is completed.

[0035] The inner tube 3 is placed on the bottom ring 6 from top to bottom, so that the outer peripheral wall of the baffle edge abuts against the plurality of limit columns 62 to stabilize the inner tube 3 so that it does not move in the horizontal direction, and the gravity of the inner tube 3 prevents it from moving in the vertical direction. The open end of the outer tube 2 is placed downward in the placement groove 141, and an enclosed space 5 with an opening downward is formed between the outer tube 2 and the base 1, and the baffle 4, the inner tube 3 and the bottom ring 6 are all located in the enclosed space 5.

[0036] When processing a product, the product to be processed is supported by an external device and enters the enclosed space 5 from the lower end opening of the enclosed space 5. At the same time, the external device for supporting the product blocks the lower end opening of the enclosed space 5 to make the enclosed space 5 airtight. A heating device is provided on the outside of the outer tube 2. The gas to be reacted enters the enclosed space 5 from the two air inlets 11 and is discharged from the exhaust port 12 after reacting with the product under high temperature.

[0037] In this process, SiO2 film will grow on the inner wall of the outer tube 2 and the inner and outer walls of the inner tube 3. After the baffle 4 is set, part of the SiO2 film will grow on the baffle 4, thereby reducing the SiO2 film attached to the inner wall of the outer tube 2, thereby reducing the pulling of the SiO2 film on the outer tube 2 and making the outer tube 2 less likely to break. In this case, the frequency of cleaning the outer tube 2 by the staff can also be reduced, and there is no need to frequently maintain the equipment, which greatly saves manpower and material resources. It is worth noting that since the lower end of the outer tube 2 is closer to the air inlet 11 and the air outlet, the thickness of the SiO2 film at the lower end of the outer tube 2 is greater than the thickness of the SiO2 film at the upper end of the outer tube 2, and the rupture point of the outer tube 2 is also mostly located at the lower end of the outer tube 2, so the baffle 4 only needs to match the lower half of the outer tube 2 to achieve the beneficial effects of this solution.

Claims

1. An equipment pipeline protection structure, comprising a base, an outer pipe and an inner pipe, characterized in that: It also includes a baffle, the outer tube, the inner tube and the baffle are all arranged on the base, one end of the outer tube is open and connected to the base, the other end of the outer tube is closed and forms an enclosed space with the base, one end of the base away from the outer tube is connected to an external instrument to make the enclosed space airtight, the inner tube is arranged in the enclosed space and one end is connected to the base, the baffle is arranged in the enclosed space at a position between the outer tube and the inner tube, and an air inlet and an exhaust port are opened on the base, and the air inlet and the exhaust port are both connected to the enclosed space.

2. The equipment pipeline protection structure according to claim 1, characterized in that: The base includes a base body and a first flange, the base body is annular, the air inlet and the exhaust port are both opened on the base body, the first flange is arranged on the outer peripheral wall of the base body, the open end of the outer tube is installed on the first flange to form the enclosed space with the base, and the inner tube and the baffle are both installed in the base body.

3. The equipment pipeline protection structure according to claim 2, characterized in that: The upper wall surface of the first convex edge is concavely provided with a placement groove, which matches the open end of the outer tube so that the outer tube can be placed therein. At this time, the internal space of the seat body and the internal space of the outer tube jointly form the enclosed space.

4. The equipment pipeline protection structure according to claim 2, characterized in that: The inner peripheral wall of the seat body is provided with a second convex edge, the baffle is annular and arranged on the second convex edge, the second convex edge is also detachably provided with a bottom ring, and the inner tube is arranged inside the baffle through the bottom ring.

5. The equipment pipeline protection structure according to claim 4, characterized in that: The bottom ring is annular and its outer diameter matches the inner diameter of the second convex edge. The outer peripheral wall of the bottom ring is provided with a plurality of limiting protrusions, each of which is formed by the outer peripheral wall of the bottom ring extending radially outwardly, and a plurality of through grooves matching the limiting protrusions are provided one by one at positions corresponding to the limiting protrusions on the second convex edge.

6. The equipment pipeline protection structure according to claim 5, characterized in that: A plurality of stop posts are provided on the upper end surface of the second convex edge, and the plurality of stop posts are arranged in one-to-one correspondence with the plurality of through grooves, each of the stop posts is located on one circumferential side of the corresponding through groove, and the circumferential distance between each stop post and the corresponding through groove is greater than or equal to the circumferential width of the limiting protrusion.

7. The equipment pipeline protection structure according to claim 4, characterized in that: The upper end surface of the bottom ring is convexly provided with a plurality of limiting columns, which together enclose a limiting space matching the inner tube. When the inner tube is placed on the bottom ring, it is located in the limiting space and the inner tube abuts against the plurality of limiting columns.

8. The equipment pipeline protection structure according to claim 4, characterized in that: The outer diameter of the baffle plate matches the inner diameter of the seat body, a first clearance groove is provided on the baffle plate at a position corresponding to the air inlet, and a second clearance groove is provided on the baffle plate at a position corresponding to the exhaust port.

9. The equipment pipeline protection structure according to claim 5, characterized in that: A plurality of third give-way grooves are provided at the lower end of the baffle plate at positions corresponding to the plurality of the limit protrusions and the plurality of the passing grooves, each of the third give-way grooves matches a limit protrusion and the passing groove corresponding to the limit protrusion, the third give-way grooves are provided along the circumference of the baffle plate, and the circumferential width of the third give-way grooves is greater than the sum of the circumferential widths of the corresponding limit protrusions and the passing grooves.

10. The equipment pipeline protection structure according to claim 5, characterized in that: A plurality of the limiting protrusions are evenly spaced along the circumference of the bottom ring.

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