A liquid phase crystal furnace rotary pulling structure

Abstract

The utility model discloses a liquid phase crystal furnace rotary pulling structure, comprising a lifting module and a seed crystal rod, the lifting module is equipped with a lifting tray, the lifting tray is provided with a vacuum chamber, a weighing instrument is provided in the vacuum chamber, a rotating motor is connected to the weighing instrument, a joint is provided at the bottom of the vacuum chamber, and the output shaft of the rotating motor passes through the joint; a mounting block is provided on the seed crystal rod, and a clamping structure is provided between the output shaft of the rotating motor and the mounting block; the utility model can make the installation and disassembly of the seed crystal rod safer and more convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor materials, in particular to a liquid phase crystal furnace rotary pulling structure. Background Art

[0002] With the development of science and technology, the requirements for crystal materials are getting higher and higher, which also means that the requirements for the growth process and growth equipment of crystal materials are getting higher and higher. The Czochralski method is a common method for preparing artificial crystals. This method can be used to pull and grow high-quality single crystal materials from the melt. Compared with other crystal growth technologies, the crystals grown by the Czochralski method have the characteristics of low crystal dislocation density, high optical uniformity, and low internal stress. The Czochralski method usually installs the seed crystal rod on the shaft of a rotating motor and then performs crystal pulling and growth. The existing seed crystal rod installation method is mostly threaded installation. This method requires waiting for the equipment to cool down when removing the crystal rod, and there may be a risk of burns. Utility Model Content

[0003] In view of the defects in the prior art, the utility model provides a liquid phase crystal furnace rotary pulling structure.

[0004] The utility model is realized by the following technical solutions:

[0005] A liquid phase crystal furnace rotary pulling structure comprises a lifting module and a seed crystal rod, wherein the lifting module is a lifting slide, a lifting tray is installed on the sliding block of the lifting slide, a vacuum chamber is arranged on the lifting tray, a weighing instrument is arranged in the vacuum chamber, a rotating motor is connected to the weighing instrument, a joint is arranged at the bottom of the vacuum chamber, and the output shaft of the rotating motor passes through the joint; blocks are elastically arranged on both sides of the end of the output shaft of the rotating motor, a mounting block is arranged on the seed crystal rod, a groove matching the output shaft is arranged on the mounting block, and grooves matching the block are arranged on both side walls of the groove, a pushing block is slidably installed in the groove, and the end of the pushing block is an arc structure matching the output shaft, a connecting rod extending out of the mounting block is arranged on the pushing block, and a pressure head is arranged at the end of the connecting rod.

[0006] Preferably, the lifting slide is driven by a slide motor.

[0007] Preferably, a socket is provided on the top of the vacuum chamber, the socket is electrically connected to the weighing instrument and the rotating motor, and a vacuum plug is provided on the socket.

[0008] Preferably, the end surface of the clamping block is a sloped structure, and the end of the clamping block is an arc-shaped structure matched with the output shaft.

[0009] Preferably, the connector is a KF50 connector.

[0010] Preferably, a plane groove is provided at the pressure head of the side wall of the mounting block, and an anti-slip layer is provided at the plane groove.

[0011] Preferably, the planar groove is provided with a slot matched with the pressure head.

[0012] Preferably, a travel groove is symmetrically arranged in the output shaft, a clamping block is slidably installed in the travel groove, and a spring is arranged between the clamping block and the bottom of the travel groove.

[0013] Preferably, snap rings are provided on the top and bottom of the mounting block.

[0014] The beneficial effect of the utility model is embodied in that the utility model can make the installation and disassembly of the seed crystal rod more convenient through the clamping structure between the mounting block on the seed crystal rod and the output shaft of the rotating motor, and the seed crystal rod can be directly and safely removed after the work is completed. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the specific implementation of the utility model or the technical solution in the prior art, the following is a brief introduction to the drawings required for the specific implementation or the prior art description. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, each element or part is not necessarily drawn according to the actual scale.

[0016] Figure 1 This is a structural view of the utility model.

[0017] Figure 2 It is a partial view of the installation block of the utility model.

[0018] Figure 3 for Figure 2 A-section view.

[0019] Figure 4 For clamps.

[0020] In the attached drawings, 1. lifting slide; 2. sliding block; 3. slide motor; 4. lifting tray; 5. vacuum chamber; 6. weighing instrument; 7. rotating motor; 8. socket; 9. vacuum plug; 10. output shaft; 11. travel groove; 12. clamping block; 13. spring; 14. clamping groove; 15. pushing block; 16. connecting rod; 17. pressure head; 18. slot; 19. flat groove; 20. anti-skid layer; 21. retaining ring; 22. mounting block; 23. seed crystal rod. DETAILED DESCRIPTION

[0021] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0022] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element at the same time.

[0023] For ease of description, spatial relative terms such as "upper," "lower," "left," and "right" may be used herein to describe the relationship of one element or feature shown in a figure relative to another element or feature. It should be understood that the spatial terms are intended to include different orientations of the device in use or operation in addition to the orientation shown in the figures. For example, if the device in the figure is inverted, elements described as being "below" other elements or features will be positioned "above" the other elements or features. Thus, the exemplary term "below" may include both upper and lower orientations.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0025] The utility model is described in detail below with reference to the accompanying drawings: a liquid phase crystal furnace rotary pulling structure of the utility model comprises a lifting module and a seed crystal rod 23, wherein the lifting module is a lifting slide 1, and the lifting slide 1 is driven by a slide motor 3, and a lifting tray 4 is installed on the sliding block 2 of the lifting slide 1, and an integrally stamped sheet metal shell is provided on the lifting tray 4, which functions to prevent electromagnetic interference so as not to affect the weighing accuracy, and has a protective function, and a stainless steel vacuum chamber 5 is provided in the sheet metal shell, in which a weighing instrument 6 is provided, and a rotating motor 7 is connected to the bottom of the weighing instrument 6, and the bottom of the vacuum chamber 5 A KF50 joint is provided, and the output shaft 10 of the rotating motor 7 passes through the KF50 joint; blocks 12 are elastically provided on both sides of the end of the output shaft 10 of the rotating motor 7, and a mounting block 22 is provided on the seed crystal rod 23. The mounting block 22 is provided with a groove matching the output shaft 10, and the two side walls of the groove are provided with a groove 14 matching the block 12. A pushing block 15 is slidably installed in the groove 14, and the end of the pushing block 15 is an arc structure matching the output shaft 10. A connecting rod 16 extending out of the mounting block 22 is provided on the pushing block 15, and a pressure head 17 is provided at the end of the connecting rod 16.

[0026] A socket 8 is provided on the top of the vacuum chamber 5, and the socket 8 is electrically connected to the weighing instrument 6 and the rotating motor 7. A vacuum plug 9 is provided on the socket 8, and the vacuum plug 9 is electrically connected to the PLC. After the weight of the growing crystal is obtained by the weighing instrument 6, the electrical signal can be transmitted to the PLC through the vacuum plug 9.

[0027] The end face of the clamping block 12 is a bevel structure, and the end of the clamping block 12 is an arc structure that matches the output shaft 10; the side wall pressure head 17 of the mounting block 22 is provided with a plane groove 19, and the plane groove 19 is provided with an anti-slip layer 20, and the top and bottom of the mounting block 22 are provided with a snap ring 21; the plane groove 19 is provided with a slot 18 that matches the pressure head 17. The length of the connecting rod 16 should be such that after the pressure head 17 is pressed into the slot 18, the pressure head 17 and the plane groove 19 are on the same plane, and at this time, the arc structure of the push block 15 just fits the output shaft 10, that is, when the pressure head 17 and the plane groove 19 are on the same plane, there is no limit between the clamping block 12 and the slot 14.

[0028] The output shaft 10 is symmetrically provided with a travel groove 11 , a clamping block 12 is slidably installed in the travel groove 11 , and a spring 13 is provided between the clamping block 12 and the bottom of the travel groove 11 .

[0029] Before the pulling operation is performed, the seed crystal rod 23 needs to be installed. When installing, align the card slot 14 in the installation block 22 with the card block 12 and insert it until the card block 12 is inserted into the card slot 14. When disassembling the seed crystal rod 23, the following method should be used: Figure 4The clamp shown is a straight-face clamp of a translation type, so as to ensure that the pressing head 17 can be pressed better, and at the same time, the clamp can be clamped on the anti-slip layer 20.

[0030] During the pulling operation, the seed crystal is lifted and lowered by the lifting module to control the size of the crystal growth, and the shape and weight of the crystal after growth are controlled by the weighing instrument 6 and the rotating motor 7. The rotating motor 7 drives the seed crystal to rotate through the output shaft 10, drives the seed crystal to pull the growing crystal through the lifting slide 1, measures the crystal growth status through the weighing instrument 6, and transmits the weighed value to the PLC.

[0031] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. These modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model, and they should all be included in the scope of the claims and specification of the utility model.

Claims

1. A liquid phase crystal furnace rotary lifting structure, comprising a lifting module and a seed crystal rod (23), characterized in that: The lifting module is a lifting slide (1), a lifting tray (4) is installed on the sliding block (2) of the lifting slide (1), a vacuum chamber (5) is arranged on the lifting tray (4), a weighing instrument (6) is arranged in the vacuum chamber (5), a rotating motor (7) is connected to the weighing instrument (6), a joint is arranged at the bottom of the vacuum chamber (5), and an output shaft (10) of the rotating motor (7) passes through the joint; blocks (12) are elastically arranged on both sides of the end of the output shaft (10) of the rotating motor (7), and the seed crystal A mounting block (22) is provided on the rod (23), a groove matching the output shaft (10) is provided on the mounting block (22), and two side walls of the groove are provided with a clamping groove (14) matching the clamping block (12), a pushing block (15) is slidably installed in the clamping groove (14), an end of the pushing block (15) is an arc-shaped structure matching the output shaft (10), and a connecting rod (16) extending out of the mounting block (22) is provided on the pushing block (15), and a pressure head (17) is provided at the end of the connecting rod (16).

2. The liquid phase crystal furnace rotary pulling structure according to claim 1, characterized in that: The lifting slide (1) is driven by a slide motor (3).

3. The liquid phase crystal furnace rotary pulling structure according to claim 1, characterized in that: A socket (8) is provided on the top of the vacuum chamber (5); the socket (8) is electrically connected to the weighing instrument (6) and the rotating motor (7); and a vacuum plug (9) is provided on the socket (8).

4. The liquid phase crystal furnace rotary pulling structure according to claim 1, characterized in that: The end surface of the clamping block (12) is an inclined surface structure, and the end of the clamping block (12) is an arc-shaped structure that matches the output shaft (10).

5. The liquid phase crystal furnace rotary pulling structure according to claim 1, characterized in that: The connector is a KF50 connector.

6. The liquid phase crystal furnace rotary pulling structure according to claim 1, characterized in that: A plane groove (19) is provided at the pressure head (17) on the side wall of the mounting block (22), and an anti-slip layer (20) is provided at the plane groove (19).

7. The liquid phase crystal furnace rotary pulling structure according to claim 6, characterized in that: The plane groove (19) is provided with a slot (18) that matches the pressure head (17).

8. The liquid phase crystal furnace rotary pulling structure according to claim 1, characterized in that: A travel groove (11) is symmetrically arranged in the output shaft (10), a clamping block (12) is slidably mounted in the travel groove (11), and a spring (13) is arranged between the clamping block (12) and the bottom of the travel groove (11).

9. The liquid phase crystal furnace rotary pulling structure according to claim 1, characterized in that: The top and bottom of the mounting block (22) are provided with snap rings (21).

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