A lifting and rotating mechanism for a main furnace chamber

Abstract

The present application discloses a lifting and rotating mechanism of a main furnace chamber, which belongs to the technical field of single crystal furnaces. It includes a base and a rotating assembly, a lifting assembly is connected to the center position of the side of the base, the lifting assembly and the rotating assembly are fixedly connected, a lifting rod is rotatably passed through the lower part of the rotating assembly, the lifting rod is slidably connected to the auxiliary furnace body, the lower end of the auxiliary furnace body is connected to the isolation valve chamber, and the lower end of the isolation valve chamber is connected to the main furnace body. The beneficial effect of the present application is to provide a lifting and rotating mechanism of the main furnace chamber, through the setting of the rotating assembly, it is convenient to drive the lifting rod to rotate slowly, thereby ensuring that the crystal grows around the lifting rod, through the setting of the lifting assembly, under the cooperation of two groups of limit rods, limit grooves and round holes, the hydraulic cylinder drives the lifting plate to rise evenly, preventing the lifting plate from tilting up at a single fulcrum, thereby ensuring the smooth rise of the lifting rod and avoiding uneven crystallization.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal furnaces, and in particular to a lifting and rotating mechanism for a main furnace chamber. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment (mainly nitrogen and helium) and uses the direct pulling method to grow single crystals without dislocation. When the single crystal growth is completed, a lifting and rotating mechanism is required to pull the single crystal upward.

[0003] Chinese patent CN213232570U discloses a crystal lifting and rotating mechanism for a single crystal furnace, comprising a hydraulic cylinder, a first fixed plate is fixedly installed on the outside of the hydraulic cylinder, hexagonal fixing rods are longitudinally installed on both the front and rear sides of the first fixed plate, the lower end of the hexagonal fixing rod is fixed to the plate wall of the bearing plate, a lifting connecting piece is installed on the top of the telescopic rod of the hydraulic cylinder, and a guide shaft fixing seat is installed on the right side of the lower end surface of the lifting connecting piece.

[0004] The above patent drives the lifting connecting rod to move upward and drives the guide shaft to move upward through the hydraulic cylinder. However, when the hydraulic cylinder moves upward, it first drives one end of the lifting connecting piece upward. Since there is a crystal at the lower part of the other end, it is easy for the fulcrum near the hydraulic cylinder to be tilted upward, causing the crystal to rise unsteadily. Therefore, a technical measure is proposed to solve the problem that when the hydraulic cylinder moves upward, it is easy to drive the fulcrum near the hydraulic cylinder to be tilted upward, causing the crystal to rise unsteadily. Utility Model Content

[0005] The content of this application is used to introduce concepts in a brief form, which will be described in detail in the detailed implementation section below. The content of this application is not intended to identify the key features or essential features of the technical solution claimed for protection, nor is it intended to limit the scope of the technical solution claimed for protection.

[0006] In order to solve the technical problems mentioned in the above background technology part, some embodiments of the present application provide a lifting and rotating mechanism for a main furnace chamber, including a base and a rotating assembly, a lifting assembly is connected to the center position of the side surface of the base, the lifting assembly and the rotating assembly are fixedly connected, a lifting rod is rotatably passed through the lower part of the rotating assembly, the lifting rod is slidably connected to a secondary furnace body, the lower end of the secondary furnace body is connected to an isolation valve chamber, and the lower end of the isolation valve chamber is connected to the main furnace body. Thanks to the setting of the lifting assembly, with the cooperation of two sets of limit rods, limit grooves and circular holes, the hydraulic cylinder drives the lifting plate to rise evenly, preventing the lifting plate from tilting up at a single fulcrum, thereby ensuring the smooth rise of the lifting rod and avoiding uneven crystallization.

[0007] Furthermore, a plurality of groups of support rods are evenly distributed on the upper surface of the base, and the upper ends of the support rods are fixedly connected to the lower part of the main furnace body.

[0008] Furthermore, a control cabinet is provided on the side of the base, an observation window and a material injection pipe are provided on the side of the isolation valve chamber, and a furnace door is provided on the auxiliary furnace body.

[0009] Furthermore, a flange is sleeved on the lower part of the lifting rod, a fixing ring is provided at the lower end of the flange, the flange and the fixing ring are inside the main furnace body, and a crucible lifting mechanism is provided at the lower part of the main furnace body.

[0010] Furthermore, the rotating assembly includes a base plate, which is rotatably connected to the lifting rod, a box body is provided on the upper surface of the base plate, a reducer is installed at the center position of the side of the box body, a motor is installed at the end of the reducer away from the box body, the reducer is connected to a connecting rod, the connecting rod is rotatably connected to the box body, the connecting rod is connected to a worm, the worm is meshed with a gear, and a vertical rod is installed on the lower surface of the gear. Thanks to the setting of the rotating assembly, it is convenient to drive the lifting rod to rotate slowly, thereby ensuring that the crystal grows around the lifting rod.

[0011] Furthermore, the lower portion of the vertical rod is fixedly connected to the upper portion of the lifting rod.

[0012] Furthermore, the lifting assembly includes a side plate, which is fixedly installed at the center position of the side of the base, and two groups of vertical plates are provided on the upper surface of the side plate. A limiting groove is opened on the upper part of the vertical plate, and a limiting rod is installed in the limiting groove.

[0013] Furthermore, the lifting assembly also includes a hydraulic cylinder, which is fixedly mounted on the upper surface of the side plate. A lifting plate is connected to the upper part of the hydraulic cylinder. The lifting plate has a circular hole, which is slidably fitted with a limiting rod, and the lifting plate is slidably fitted with a limiting groove.

[0014] The beneficial effect of the present application is that through the setting of the rotating component, it is convenient to drive the lifting rod to rotate slowly, thereby ensuring that the crystal grows around the lifting rod, starting the motor and the reducer, the reducer reduces the speed of the motor, so as to achieve the purpose of slowly lifting the lifting rod, the rotation of the reducer drives the vertical rod to rotate, and the rotation of the vertical rod drives the lifting rod to rotate.

[0015] By setting the lifting assembly, with the cooperation of two sets of limit rods, limit grooves and round holes, the hydraulic cylinder drives the lifting plate to rise evenly to prevent the lifting plate from tilting at a single fulcrum, thereby ensuring the smooth rise of the lifting rod and avoiding uneven crystallization. Starting the hydraulic cylinder to move upward drives the lifting plate to move upward along the limit grooves and limit rods. The upward movement of the lifting plate drives the rotating assembly upward, thereby driving the lifting rod upward. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The drawings constituting a part of this application are used to provide a further understanding of this application, so that other features, purposes and advantages of this application become more obvious. The illustrative embodiment drawings and their descriptions of this application are used to explain this application and do not constitute an improper limitation on this application.

[0017] In addition, throughout the drawings, the same or similar reference numerals represent the same or similar elements. It should be understood that the drawings are schematic and that the components and elements are not necessarily drawn to scale.

[0018] In the attached picture:

[0019] Figure 1 It is a schematic diagram of the structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the internal structure of the main furnace;

[0021] Figure 3 It is a structural schematic diagram of the rotating component in a separated state;

[0022] Figure 4 Schematic diagram of the lifting component structure.

[0023] Reference numerals:

[0024] 1. Base; 2. Rotating assembly; 3. Lifting assembly; 4. Support rod; 5. Main furnace body; 6. Control cabinet; 7. Observation window; 8. Injection pipe; 9. Isolation valve chamber; 10. Auxiliary furnace body; 11. Furnace door; 12. Lifting rod; 13. Flange; 14. Fixed ring; 15. Crucible lifting mechanism; 201. Bottom plate; 202. Box body; 203. Vertical rod; 204. Gear; 205. Worm; 206. Connecting rod; 207. Reducer; 208. Motor; 301. Side plate; 302. Vertical plate; 303. Hydraulic cylinder; 304. Limiting groove; 305. Limiting rod; 306. Round hole; 307. Lifting plate. DETAILED DESCRIPTION

[0025] Embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided to provide a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are only for exemplary purposes and are not intended to limit the scope of protection of the present disclosure.

[0026] It should also be noted that, for ease of description, only the parts related to the invention are shown in the drawings. In the absence of conflict, the embodiments and features in the embodiments of the present disclosure can be combined with each other.

[0027] It should be noted that the concepts such as "first" and "second" mentioned in the present disclosure are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0028] It should be noted that the modifications of "one" and "plurality" mentioned in the present disclosure are illustrative rather than restrictive, and those skilled in the art should understand that unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0029] The present disclosure will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments.

[0030] Reference Figure 1 , Figure 2 and Figure 3 As shown, it includes a base 1 and a rotating component 2, a lifting component 3 is connected to the center position of the side of the base 1, the lifting component 3 is fixedly connected to the rotating component 2, a lifting rod 12 is rotatably passed through the lower part of the rotating component 2, the lifting rod 12 is slidably connected to the auxiliary furnace body 10, the lower end of the auxiliary furnace body 10 is connected to the isolation valve chamber 9, the lower end of the isolation valve chamber 9 is connected to the main furnace body 5, a plurality of groups of support rods 4 are evenly distributed on the upper surface of the base 1, the upper ends of the support rods 4 are fixedly connected to the lower part of the main furnace body 5, a control cabinet 6 is provided on the side of the base 1, and an observation window 7 is provided on the side of the isolation valve chamber 9 , a material injection pipe 8, a furnace door 11 is provided on the auxiliary furnace body 10, a flange 13 is sleeved on the lower part of the lifting rod 12, a fixing ring 14 is provided at the lower end of the flange 13, the flange 13 and the fixing ring 14 are inside the main furnace body 5, a crucible lifting mechanism 15 is provided at the lower part of the main furnace body 5, the rotating assembly 2 includes a bottom plate 201, the bottom plate 201 is rotatably connected to the lifting rod 12, a box body 202 is provided on the upper surface of the bottom plate 201, a reducer 207 is installed at the center position of the side of the box body 202, and a motor 20 is installed at the end of the reducer 207 away from the box body 202 8, the reducer 207 is connected to a connecting rod 206, the connecting rod 206 is rotatably connected to the box body 202, the connecting rod 206 is connected to a worm 205, the worm 205 is meshed with a gear 204, a vertical rod 203 is installed on the lower surface of the gear 204, and the lower part of the vertical rod 203 is fixedly connected to the upper part of the lifting rod 12. When the single crystal is actually produced, the raw material is put into the crucible lifting mechanism 15 through the injection pipe 8, and then the raw material is melted, and the crystal grows along the lower end of the lifting rod 12. When the crystal grows, the control cabinet 6 is provided to start the rotating group Part 2 and lifting assembly 3 drive the lifting rod 12 to rotate and move upward, start the motor 208 and the reducer 207, the motor 208 starts to drive the reducer 207 to rotate, the reducer 207 reduces the speed of the motor 208, so as to achieve the purpose of slowly lifting the lifting rod 12, the reducer 207 rotates to drive the connecting rod 206 to rotate, the connecting rod 206 rotates to drive the worm 205 to rotate, the worm 205 rotates to drive the gear 204 to rotate, the gear 204 rotates to drive the vertical rod 203 to rotate, and the vertical rod 203 rotates to drive the lifting rod 12 to rotate.

[0031] Reference Figure 1 , Figure 3 and Figure 4 As shown, the lifting component 3 includes a side plate 301, which is fixedly installed at the center position of the side of the base 1. Two groups of vertical plates 302 are provided on the upper surface of the side plate 301. A limiting groove 304 is provided on the upper part of the vertical plate 302, and a limiting rod 305 is installed in the limiting groove 304. The lifting component 3 also includes a hydraulic cylinder 303, which is fixedly installed on the upper surface of the side plate 301. A lifting plate 307 is connected to the upper part of the hydraulic cylinder 303. The lifting plate 307 is provided with a circular hole 306, and the circular hole 306 is slidably adapted to the limiting rod 305. The lifting plate 307 is slidably adapted to the limiting groove 304. The hydraulic cylinder 303 moves upward to drive the lifting plate 307 to move upward along the limiting groove 304 and the limiting rod 305. The lifting plate 307 moves upward to drive the rotating component 2 to move upward, thereby driving the lifting rod 12 to move upward, so that the crystal grows at different heights.

[0032] Working principle: When single crystal production is actually carried out, the raw material is put into the crucible lifting mechanism 15 through the injection pipe 8, and then the raw material is melted, and the crystal grows along the lower end of the lifting rod 12;

[0033] When the crystal grows, the control cabinet 6 is provided to start the rotating assembly 2 and the lifting assembly 3 to drive the lifting rod 12 to rotate and move upward, specifically, the motor 208 and the reducer 207 are started, the motor 208 starts to drive the reducer 207 to rotate, the reducer 207 reduces the speed of the motor 208, so as to achieve the purpose of slowly lifting the lifting rod 12, the reducer 207 rotates to drive the connecting rod 206 to rotate, the connecting rod 206 rotates to drive the worm 205 to rotate, the worm 205 rotates to drive the gear 204 to rotate, the gear 204 rotates to drive the vertical rod 203 to rotate, the vertical rod 203 rotates to drive the lifting rod 12 to rotate, and through the setting of the rotating assembly 2, it is convenient to drive the lifting rod 12 to rotate slowly, thereby ensuring that the crystal grows around the lifting rod 12;

[0034] When the motor 208 is started, the hydraulic cylinder 303 is started synchronously. The hydraulic cylinder 303 moves upward to drive the lifting plate 307 to move upward along the limit groove 304 and the limit rod 305. The lifting plate 307 moves upward to drive the rotating component 2 to move upward, thereby driving the lifting rod 12 to move upward, so that the crystals grow at different heights. Through the setting of the lifting component 3, with the cooperation of the two groups of limit rods 305, the limit groove 304 and the circular hole 306, the hydraulic cylinder 303 drives the lifting plate 307 to rise evenly, preventing the lifting plate 307 from tilting up at a single fulcrum, thereby ensuring the smooth rise of the lifting rod 12 and avoiding uneven crystallization.

[0035] The above descriptions are only some preferred embodiments of the present disclosure and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the invention involved in the embodiments of the present disclosure is not limited to the technical solutions formed by a specific combination of the above-mentioned technical features, but should also cover other technical solutions formed by any combination of the above-mentioned technical features or their equivalent features without departing from the above-mentioned inventive concept. For example, the above-mentioned features are replaced with the technical features with similar functions disclosed in the embodiments of the present disclosure (but not limited to) and the technical solutions formed.

Claims

1. A lifting and rotating mechanism for a main furnace chamber, comprising a base (1) and a rotating assembly (2), characterized in that: A lifting assembly (3) is connected to the center position of the side of the base (1), and the lifting assembly (3) is fixedly connected to the rotating assembly (2). A lifting rod (12) is rotatably passed through the lower part of the rotating assembly (2), and the lifting rod (12) is slidably connected to an auxiliary furnace body (10). The lower end of the auxiliary furnace body (10) is connected to an isolation valve chamber (9), and the lower end of the isolation valve chamber (9) is connected to the main furnace body (5).

2. The lifting and rotating mechanism of the main furnace chamber according to claim 1 is characterized in that: A plurality of groups of support rods (4) are evenly distributed on the upper surface of the base (1), and the upper ends of the support rods (4) are fixedly connected to the lower part of the main furnace body (5).

3. The lifting and rotating mechanism of the main furnace chamber according to claim 1 is characterized in that: A control cabinet (6) is provided on the side of the base (1), an observation window (7) and a material injection pipe (8) are provided on the side of the isolation valve chamber (9), and a furnace door (11) is provided on the auxiliary furnace body (10).

4. The lifting and rotating mechanism of the main furnace chamber according to claim 1 is characterized in that: The lower part of the lifting rod (12) is sleeved with a flange (13), and the lower end of the flange (13) is provided with a fixing ring (14). The flange (13) and the fixing ring (14) are inside the main furnace body (5), and a crucible lifting mechanism (15) is provided at the lower part of the main furnace body (5).

5. The lifting and rotating mechanism of the main furnace chamber according to claim 1 is characterized in that: The rotating assembly (2) comprises a bottom plate (201), the bottom plate (201) being rotatably connected to the lifting rod (12), a box body (202) being provided on the upper surface of the bottom plate (201), a reducer (207) being installed at the center position of the side of the box body (202), a motor (208) being installed at one end of the reducer (207) away from the box body (202), the reducer (207) being connected to a connecting rod (206), the connecting rod (206) being rotatably connected to the box body (202), the connecting rod (206) being connected to a worm (205), the worm (205) being meshed with a gear (204), and a vertical rod (203) being installed on the lower surface of the gear (204).

6. The lifting and rotating mechanism of the main furnace chamber according to claim 5, characterized in that: The lower part of the vertical rod (203) is fixedly connected to the upper part of the lifting rod (12).

7. The lifting and rotating mechanism of the main furnace chamber according to claim 1 is characterized in that: The lifting assembly (3) comprises a side plate (301), wherein the side plate (301) is fixedly mounted at the center position of the side of the base (1), and two groups of vertical plates (302) are provided on the upper surface of the side plate (301), and a limiting groove (304) is provided on the upper part of the vertical plate (302), and a limiting rod (305) is installed in the limiting groove (304).

8. The lifting and rotating mechanism of the main furnace chamber according to claim 7, characterized in that: The lifting assembly (3) further comprises a hydraulic cylinder (303), wherein the hydraulic cylinder (303) is fixedly mounted on the upper surface of the side plate (301), wherein the upper portion of the hydraulic cylinder (303) is connected to a lifting plate (307), wherein the lifting plate (307) is provided with a circular hole (306), wherein the circular hole (306) is slidably fitted with a limiting rod (305), and wherein the lifting plate (307) is slidably fitted with a limiting groove (304).

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