A filter device for clean room return air

Abstract

The utility model relates to a filter device for return air in a clean room. A return air wall is built in the clean area of ​​the clean room as a building enclosure, and a return air outlet is opened on the return air wall. The filter device includes a sintered mesh, and the sintered mesh is detachably arranged at the opening of the return air outlet. The filter device provided by the utility model is easy to disassemble and clean, and can be flexibly installed, so that the airflow organization flow pattern in the clean area can be reasonably adjusted, and the tools and objects at the air outlet can be effectively blocked, and the filter device is corrosion-resistant, quiet and noise-free.

Description

Technical Field

[0001] The utility model relates to the field of clean room return air filtering, in particular to a filter device for clean room return air. Background Art

[0002] The air flow in the clean room is achieved through the air supply and return air system. In the design of the air conditioning box of some clean rooms, the return air outlet is not arranged reasonably, resulting in dead corners in the air flow of the whole room, making it difficult for clean air to reach, increasing dust particles in the area and affecting the cleanliness. In some clean rooms, the return air outlet is too few and the return air speed is too high, which will produce negative pressure near the return air outlet or even at the height of the work surface.

[0003] The air sucked in by the return air vent may return to the air conditioning box or be discharged. The previous clean room return air design was to set return air louvers at the return air vents and adjust the return air volume by controlling the angle of the return air louvers.

[0004] Nowadays, the return air volume is adjusted by the return air valve. Although the return air louver is no longer used to adjust the return air volume in the current design, the return air louver is still installed at the return air outlet. Its purpose is only to prevent tools and objects from being sucked in during cleaning. However, the return air louver is not only difficult to clean, but also a great sterile hazard in the Class B area. It also generates huge noise and is the source of noisy sounds in the clean area.

[0005] Although the existing clean room return air vent design has certain specifications, there are still many defects in actual application, such as unreasonable return air vent layout, excessive return air speed, difficulty in cleaning, high noise and other problems.

[0006] Therefore, it is urgent to develop a filter device for clean room return air to overcome the above defects. Utility Model Content

[0007] In view of the above defects of the prior art, in order to solve the above technical problems or at least alleviate one or more of the above problems and other problems existing in the prior art, the utility model provides a filter device for clean room return air, and the utility model adopts the following technical solutions:

[0008] In order to achieve the above-mentioned purpose, the utility model provides a filter device for return air in a clean room, wherein the clean room has a return air wall as a building enclosure in the clean area, a return air outlet is opened on the return air wall, and the filter device includes a sintered mesh, which is detachably arranged at the opening of the return air outlet.

[0009] In the filter device as described above, optionally, the sintered mesh is made of stainless steel and is made by sintering stainless steel wire; the pore size of the sintered mesh ranges from 4 to 20 meshes; the wire diameter size of the stainless steel wire ranges from

[0010]

[0011] In the filter device as described above, optionally, stainless steel round bars are sintered around the sintered mesh for reinforcement; the wire diameter size range of the stainless steel round bars is

[0012] In the filter device as described above, optionally, reinforcing ribs are provided on the plane formed by the sintered mesh.

[0013] In the filter device as mentioned above, optionally, it also includes an elastic contact piece; the elastic contact piece is arranged between the sintered mesh and the return air port to avoid vibration and noise.

[0014] In the filter device as mentioned above, optionally, it further includes a limiting member, which is arranged on the sintered mesh and is used to fix the sintered mesh at the opening of the return air outlet.

[0015] In the filter device as described above, optionally, the sintered mesh is horizontally arranged at the return air outlet and parallel to the wall surface of the return air wall.

[0016] In the filter device as described above, optionally, the sintered mesh is arranged at a top edge of the return air outlet and perpendicular to the wall surface of the return air wall.

[0017] In the filter device as described above, optionally, the sintered mesh is arranged obliquely from the upper edge of the return air outlet to the inner corner of the return air outlet.

[0018] In the filter device as described above, optionally, the number of sintered meshes is 1, 2 or 3, corresponding to the upper edge length of the return air outlet being equal to the inner corner side length of the return air outlet and both ends being aligned, the upper edge length of the return air outlet being less than the inner corner side length of the return air outlet and one end being aligned, or the upper edge length of the return air outlet being less than the inner corner side length of the return air outlet and both ends being not aligned.

[0019] Compared with the prior art, the beneficial effects of the utility model are: the filter device provided by the utility model is easy to disassemble and clean, can be flexibly installed, has a high degree of freedom so that the air flow organization flow pattern in the clean area can be reasonably adjusted, can effectively block tools and objects at the air outlet, is corrosion-resistant, and is quiet and noiseless.

[0020] The concept, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings to fully understand the purpose, characteristics and effects of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic structural diagram of an embodiment of a filter device for clean room return air of the utility model;

[0022] Figure 2 It is a schematic cross-sectional view of the structure of the filter device arranged horizontally;

[0023] Figure 3 It is a schematic cross-sectional view of the structure in which the filter device is vertically arranged;

[0024] Figure 4 It is a schematic cross-sectional view of the structure in which the filter device is arranged obliquely.

[0025] Figure 1: Return air outlet; 2: Sintered mesh; 3: Reinforcement rib; 4: Color steel plate; 5: Return air duct; 6: Elastic contact piece; 7: Limiting piece. DETAILED DESCRIPTION

[0026] In order to make the technical means, creative features, objectives and effects of the utility model easier to understand, the utility model is further described below with reference to specific diagrams. However, the utility model is not limited to the following implementation cases.

[0027] It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings in this specification are only used to match the contents disclosed in the specification so that people familiar with this technology can understand and read them. They are not used to limit the conditions under which the present utility model can be implemented, so they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical contents disclosed in the present utility model without affecting the effects and purposes that can be achieved by the present utility model.

[0028] In addition, for any single technical feature described or implied in the embodiments mentioned in this document, or any single technical feature displayed or implied in the accompanying drawings, the utility model still allows for continued arbitrary combination or deletion between these technical features (or their equivalents) without any technical obstacles, and thus it should be considered that these more embodiments according to the utility model are also within the scope of the description in this document.

[0029] It should also be noted that the directions or positional relationships indicated by the terms "inside", "upper", "lower", etc. are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present disclosure.

[0030] Figure 1The utility model is a structural schematic diagram of an embodiment of a filter device for clean room return air.

[0031] Cleanrooms are used in precision machining, semiconductor integrated circuits, pharmaceutical production and other environments where parameters such as air cleanliness and noise need to be controlled. A return air wall is built in the clean area of ​​the cleanroom as a building enclosure. Figure 1 It can be seen from the figure that a return air port 1 is provided on the return air wall.

[0032] In the existing clean room return air design, some return air outlets 1 are arranged too little, resulting in a high return air speed, generating negative pressure near the return air outlet 1 or even at the height of the work surface, or only one return air outlet 1 is arranged, resulting in all the air in the room flowing to one place, and there are dead corners, making it difficult for clean air to reach, increasing the number of dust particles in a certain area and affecting the cleanliness. Therefore, in an optional embodiment, the number of return air outlets 1 can be multiple, and the staff can arrange them in the clean area according to the actual return air volume requirements. The return air outlets 1 on the return air wall should be opened to the same extent as possible around the clean room.

[0033] In this embodiment, whether the return air outlet 1 is opened on site or in a secondary in-depth design, it is necessary to use a stainless steel U-shaped wire to trim the opening of the color steel plate 4 of the return air wall. The stainless steel used for trimming is the same material as the sintered mesh 2 of the filter device. In the purification project, the color steel plate 4 is a steel plate with an organic coating and has good corrosion resistance. In this embodiment, the color steel plate 4 is a part of the wall or wall surface of the return air wall. After the return air outlet 1 is opened, the burrs will be left. This burrs must be trimmed with materials.

[0034] The filter device may include a sintered mesh 2, which is arranged at the junction of the return air wall and the ground at the opening of the return air outlet 1, and its permeability is much higher than that of the return air louver. In order to avoid noise caused by vibration, a local elastic contact member 6 may be added between the sintered mesh 2 and the return air outlet 1. In order to avoid displacement caused by vibration, a limiter 7 ( Figure 2 ) so that it is fixed at the opening of the return air outlet 1.

[0035] In an optional embodiment, the elastic contact member 6 may be a rubber pad, and the limiting member 7 may be a stainless steel support member.

[0036] The sintered mesh 2 of the utility model is a mesh made of stainless steel wire by sintering, and is made of stainless steel. Its main function is to block cleaning supplies or other objects, such as tools, that may be accidentally inhaled during cleaning. The staff should make the stainless steel sintered mesh 2 of the utility model according to the actual size of the return air outlet 1, and the actual size of the sintered mesh 2 is also related to the three settings mentioned later, namely, setting parallel to the wall, setting vertically to the wall at the upper edge of the return air outlet 1, and obliquely installing from the upper edge of the return air outlet 1 to the inner corner of the return air outlet 1. Among them, the area of ​​the sintered mesh 2 is the largest when it is installed diagonally from the upper edge of the return air outlet 1 to the inner corner of the return air outlet 1.

[0037] In an optional embodiment, the stainless steel material used for the sintered mesh 2 can be selected according to the corrosion degree of disinfectants such as hydrogen peroxide and sporicides used in the actual work site, such as 304, 304L, 316, 316L or even more chemically resistant stainless steel.

[0038] It should be noted that if the pore size of the sintered mesh 2 is too dense, it will affect the permeability of the airflow, and if it is too sparse, it will cause objects to be accidentally inhaled. Therefore, the optimal range of the pore size of the sintered mesh 2 is 4 to 20 meshes. According to the size of the stainless steel sintered mesh 2, the optimal size of the stainless steel wire of the sintered mesh 2 can be

[0039] In an optional embodiment, in order to increase the strength of the stainless steel sintered mesh 2, stainless steel round bars are sintered around the sintered mesh 2 for reinforcement. According to the size of the stainless steel sintered mesh 2, the optimal size of the stainless steel round bars used to strengthen the strength of the sintered mesh 2 can be

[0040] If the size of the return air outlet 1 of the clean room is large, the size of the sintered mesh 2 will also be large, so a reinforcing rib 3 can be sintered in the middle of the plane of the stainless steel sintered mesh 2 to increase the plane strength. The number of the reinforcing ribs 3 can be multiple, and the staff can set them according to the actual work and environmental needs.

[0041] The sintered mesh 2 of the utility model does not need to consider the obstruction of the stainless steel wire when calculating the wind pass area. Therefore, under the premise of the same size of the return air port 1 opening size, its wind pass area should be larger than the return air louver, and its surface wind speed should be lower than the surface wind speed of the return air louver to prevent the return air speed from being too high and causing negative pressure at the working surface height.

[0042] In addition, after the sintered mesh 2 is used to replace the return air louver at the return air inlet 1, the source of the whistling sound generated by the return air louver has been eliminated, so no whistling sound will be generated under a certain wind volume such as a wind speed greater than 2.5 m / s.

[0043] Moreover, when the area of ​​the return air outlet 1 is the same, the height of the upper edge of the return air outlet 1 is reduced as much as possible to optimize the rationality of the airflow organization in the clean area. After the return air outlet 1 adopts the sintered mesh 2, under the condition of the same return air volume, the hole size of the return air outlet 1 using the stainless steel sintered mesh 2 is smaller than the size of the return air outlet 1 using the return air louver. In this way, compared with the use of return air louvers, the upper edge of the return air outlet 1 of the utility model can be appropriately moved downward. The downward movement of the upper edge of the return air outlet 1 will optimize the airflow organization flow shape of the clean room, thereby significantly improving the self-purification effect of the clean room.

[0044] The filter device of the utility model can be arranged parallel to the wall at the return air outlet 1, or can be arranged perpendicular to the wall at the upper edge of the return air outlet 1, or can be arranged diagonally from the upper edge of the return air outlet 1 to the inner corner of the return air outlet 1. The specific structural arrangement of the filter device will be described in Figure 2-Figure 4 The embodiments shown are described in sequence.

[0045] The part of the return air port 1 leading to the clean area is a return air duct 5, which is used to transmit the return air to the clean area of ​​the clean room to clean the work surface.

[0046] Figure 2 It is a schematic cross-sectional view of the structure of a horizontally arranged filter device.

[0047] In such Figure 2 In the illustrated embodiment, the sintered mesh 2 is disposed at the upper edge of the return air port 1 perpendicular to the color steel plate 4 of the return air wall, and the sintered mesh 2 is located in the cross section of the return air duct 5 .

[0048] Figure 3 It is a schematic cross-sectional view of the structure of a vertically arranged filter device.

[0049] In such Figure 3 In the illustrated embodiment, the sintered mesh 2 is horizontally arranged at the air outlet 1 , parallel to the wall surface of the color steel plate 4 of the return air wall, and the sintered mesh 2 is located on the side of the return air duct 5 .

[0050] Figure 4 It is a schematic cross-sectional view of the structure in which the filter device is arranged obliquely.

[0051] The sintered mesh 2 is arranged from the upper edge of the return air port 1 to the inner corner of the return air port 1 along the Figure 4 The diagonal lines of the two end points of the color steel plate 4 shown in FIG. 4 are tilted.

[0052] In an optional embodiment, the number of the sintered meshes 2 may be 1, 2 or 3, corresponding to the upper edge length of the return air outlet 1 being equal to the inner corner side length of the return air outlet 1 and both ends being aligned, the upper edge length of the return air outlet 1 being less than the inner corner side length of the return air outlet 1 and one end being aligned, or the upper edge length of the return air outlet 1 being less than the inner corner side length of the return air outlet 1 and both ends being not aligned. It should be noted here that "aligned at both ends" means that the quadrilateral formed by the straight lines connecting the four vertices of the two ends of the upper edge of the return air outlet 1 and the two ends of the inner corner side length of the return air outlet 1 is a rectangle or a square. "One end aligned" means that the quadrilateral formed by the straight lines connecting the four vertices of the two ends of the upper edge of the return air outlet 1 and the two ends of the inner corner side length of the return air outlet 1 is a right trapezoid.

[0053] In any of the three configurations of the filter device, the staff can easily remove the sintered mesh 2 for offline cleaning or even disinfection. For cleaning after the end of normal production, it only needs to be wiped with a rag. If it is used in a solid preparation workshop with large dust, it can be removed on site for wiping inside and outside.

[0054] The preferred specific embodiments of the utility model are described in detail above. It should be understood that ordinary technology in the field can make many modifications and changes according to the concept of the utility model without creative work. Therefore, any technical solution that can be obtained by a technician in the technical field based on the concept of the utility model through logical analysis, reasoning or limited experiments on the basis of the existing technology should be within the scope of protection determined by the claims.

Claims

1. A filter device for clean room return air, characterized in that: The clean room has a return air wall as a building enclosure in the clean area, and a return air inlet (1) is opened on the return air wall. The filter device comprises a sintered mesh (2), and the sintered mesh (2) is detachably arranged at the opening of the return air inlet (1); wherein the sintered mesh (2) is made of stainless steel and is made by sintering stainless steel wire; stainless steel round steel is sintered around the sintered mesh (2) for reinforcement; and reinforcing ribs (3) are arranged on the plane formed by the sintered mesh (2).

2. The filter device according to claim 1, characterized in that: The aperture of the sintered mesh (2) is in the range of 4 to 20 meshes; the diameter of the stainless steel wire is in the range of 3. The filter device according to claim 1, characterized in that: The diameter range of the stainless steel round steel is 4. The filter device according to claim 1, characterized in that: It also comprises an elastic contact piece (6); the elastic contact piece (6) is arranged between the sintering mesh (2) and the return air port (1) to avoid vibration and noise.

5. The filter device according to claim 1, characterized in that: It also comprises a limiting member (7), which is arranged on the sintering mesh (2) and is used to fix the sintering mesh (2) at the opening of the return air port (1).

6. The filter device according to claim 1, characterized in that: The sintered mesh (2) is horizontally arranged at the return air outlet (1) and is parallel to the wall surface of the return air wall.

7. The filter device according to claim 1, characterized in that: The sintered mesh (2) is arranged at the upper edge of the return air outlet (1) perpendicular to the wall surface of the return air wall.

8. The filter device according to claim 1, characterized in that: The sintered mesh (2) is arranged obliquely from the upper edge of the return air outlet (1) toward the inner corner of the return air outlet (1).

9. The filter device according to claim 8, characterized in that: The number of the sintered meshes (2) is 1, 2 or 3, which respectively correspond to the upper edge length of the return air outlet (1) being equal to the inner corner side length of the return air outlet (1) and both ends being aligned, the upper edge length of the return air outlet (1) being less than the inner corner side length of the return air outlet (1) and one end being aligned, or the upper edge length of the return air outlet (1) being less than the inner corner side length of the return air outlet (1) and both ends being not aligned.

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