A water-cooled chiller for temperature control in integrated circuit production
By adding filter devices and temperature control devices to ice water machines, the problems of limited temperature control accuracy and insufficient cooling water purification of existing ice water machines are solved, and high-precision temperature control and multiple filtration and purification of cooling water are achieved, meeting the high-standard needs of integrated circuit production.
Patent Information
- Application Number
- CN202421398054.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-19
- Publication Date
- 2025-04-04
- Estimated Expiration
- 2034-06-19
AI Technical Summary
The temperature control accuracy of existing ice water machines is limited and cannot meet the high-precision temperature requirements of process engineers. At the same time, there is a lack of equipment for purification of cooling water, which leads to the purity of cooling water during the circulation process that cannot meet the needs of industrial production.
A water-cooled ice water machine for temperature control of integrated circuit production was designed, and a filtration device was added, including a water storage tank, a degassing device, a microfiltration device, an ultrafiltration device, a temperature control device and an ultraviolet disinfection device. Through these devices, the cooling water is filtered and purified multiple times to ensure the cleanliness and precision control of the cooling water.
Through the setting of the filter device, the purity of the cooling water is significantly improved, the microorganisms are eliminated, and the precision control of the cooling water temperature is achieved, meeting the demand for high-precision temperature and pure water in the integrated circuit production industry.
Smart Images
Figure CN222718477U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of ice water machines, in particular to a water-cooled ice water machine for temperature control in integrated circuit production. Background Art
[0002] A water chiller is a machine that achieves a cooling effect through the circulation of a refrigerant. These liquids can flow through a heat exchanger to cool the air or water. A water chiller is a water cooling device that can provide constant temperature, constant flow, and constant pressure. First, a certain amount of water is injected into the water tank inside the machine, and the water is cooled by the water chiller refrigeration system. Then, the water pump sends the low-temperature cooling water to the equipment to be cooled. The chilled water of the water chiller takes away the heat, and then the temperature rises and flows back to the water tank to achieve the cooling effect. Water chillers are of great significance to the electronics industry. With the continuous improvement of semiconductor manufacturing technology, process engineers have higher and higher requirements for temperature control accuracy; the current general accuracy requirements are ±0.1℃ to ±0.01℃, and there are also higher requirements for the purity of cooling water.
[0003] At present, a Chinese patent with the authorization announcement number CN220380073U discloses a temperature-controlled chiller, including a chiller housing, a mounting plate installed on the outer wall of the chiller housing, a protective component for protection installed on the mounting plate, and two adjacent protective components are connected by a connecting component, the protective component includes a protective plate, the inner wall of the protective plate is connected to a support plate through a plurality of buffers, and a first T-shaped strip is provided on the inner wall of the support plate. The utility model is provided with four mounting plates on the four outer walls of the chiller housing, and the protective component is installed on each mounting plate. A protective plate, a support plate and a buffer are provided in the protective component, and two adjacent protective plates are connected by a connecting component, so that the protective component can better protect the chiller housing and improve practicality.
[0004] The above-mentioned prior art solutions have the following defects: the temperature control accuracy of the above-mentioned solutions is limited and cannot meet the needs of process engineers, and there is no equipment capable of purifying cooling water. The purity of the cooling water during the circulation process may not meet the needs of industrial production. Utility Model Content
[0005] The purpose of the utility model is to provide a water-cooled ice machine for temperature control in integrated circuit production to solve the problems existing in the above-mentioned prior art.
[0006] The above technical objectives of the utility model are achieved through the following technical solutions:
[0007] A water-cooled chiller for temperature control in integrated circuit production, comprising a chiller body and a filter device, wherein the chiller body is assembled from a housing, an evaporator, a compressor, a condenser, a liquid storage tank, a filter and an expansion valve, and the filter device is arranged on the left side of the housing;
[0008] The filtering device includes a water storage tank, a degassing device, a microfiltration device, an ultrafiltration device, a temperature control device and an ultraviolet disinfection device. The cooling water inlet of the water storage tank is connected with the cooling water outlet of the outer shell through a cooling water pipeline. The top of the water storage tank is provided with a temperature control device, the inner bottom of the water storage tank is provided with a degassing device, the cooling water inlet is provided with a microfiltration device, the outlet of the microfiltration device is provided with an ultrafiltration device, and the inner top of the water storage tank is provided with an ultraviolet disinfection device.
[0009] By adopting the above technical solution, in addition to the chiller body, a filtering device is also added. This filtering device is different from the filter for filtering impurities from the coolant in the chiller. It is mainly responsible for filtering impurities from the cooling water. There are microfiltration devices and ultrafiltration devices to ensure the cleanliness of the cooling water, while the degassing device can separate the air dissolved in the water, and the ultraviolet disinfection device can eliminate the microorganisms and viruses therein. In addition to these devices, a liquid level detection device is also provided in the water storage tank. If energy saving is required, continuous ultraviolet disinfection and degassing can be changed to putting the cooled liquid into the water storage tank at one time through the chiller, and then starting the purification work after accumulating to the preset value. During this process, the temperature may change to a certain extent. A heating plate and a temperature sensor are also affixed to the pipe between the subsequent water storage tank and the water use device to ensure that the preset constant temperature is maintained when the purified water reaches the water use device.
[0010] In a further embodiment, the outer shell is assembled from an upper shell and a lower shell, a water inlet and a water outlet are provided on the right side of the upper shell, a filter and a plurality of liquid storage tanks are provided inside the upper shell, a filter is provided on the left side of the inner bottom end of the upper shell, a plurality of liquid storage tanks are provided on the right side of the filter, a condenser is provided on the right side of the liquid storage tank, the inlet of the filter is connected with the outlet of the liquid storage tank through a circulating liquid pipe, the inlet of the liquid storage tank is connected with the outlet of the condenser through a circulating liquid pipe, a cooling water circuit is provided on the right side of the condenser, one end of the cooling water circuit is provided on the water inlet of the upper shell, and the other end of the cooling water circuit is provided on the water outlet of the upper shell.
[0011] By adopting the above technical solution, the filter can filter out impurities in the circulating liquid, and the condenser can take away the heat through an external heat exchange water circuit to re-solidify the circulating liquid. A large amount of circulating liquid can be stored in multiple liquid storage tanks, so that the waste heat in the cooling water that needs to be cooled can be taken away by the heat exchange water circuit.
[0012] In a further embodiment, an evaporator is arranged on the left side of the inner bottom end of the lower shell, the outlet of the filter is connected to the inlet of the evaporator, an expansion valve is arranged on the pipeline between the filter and the evaporator, a compressor is arranged on the right side of the evaporator, the compressor is fixedly connected to the inner bottom end of the lower shell, the outlet of the evaporator is connected to the inlet of the compressor, and the outlet of the compressor is connected to the inlet of the condenser through a circulating liquid pipeline.
[0013] By adopting the above technical solution, the expansion valve arranged on the pipeline between the liquid storage tank and the evaporator can throttle and adjust the pressure, and the evaporator can absorb the waste heat in the cooling water through the circulating liquid, and help the cooling water to dissipate heat during the evaporation of the circulating liquid. The heated gaseous circulating liquid enters the compressor and is re-compressed into a high-temperature and high-pressure circulating liquid, and then enters the condenser through the circulating liquid pipeline and turns back into a liquid circulating liquid, and then becomes a low-temperature and low-pressure circulating liquid after throttling through the capillary.
[0014] In a further embodiment, pressure sensors are provided at the inlet and outlet of the compressor.
[0015] By adopting the above technical solution and setting a pressure sensor, the pressure of the high-pressure environment inside the compressor can be effectively monitored to determine whether its operating status is normal, whether adjustment is required, etc., which can help the effective operation and application of the device.
[0016] In a further embodiment, a display screen is provided on the front panel of the lower shell, a start button, a pause button and a close button are provided below the display screen, an observation hole is vertically provided below the start button, and a accommodating groove is provided on the left side of the front panel of the lower shell, and a built-in handle is embedded in the accommodating groove.
[0017] By adopting the above technical solution, various data and log information of the operation of the water chiller are displayed on the display screen of the lower shell, including information such as the temperature and flow rate of the chemical liquid. The operation and stop of the water chiller can be controlled by the start, pause and close buttons. The operating status of each component inside the shell can be effectively observed through the observation hole, and the accommodating groove and handle on the front panel allow the front panel to be easily opened and closed.
[0018] In a further embodiment, a plurality of universal wheels are provided at the bottom end of the lower shell.
[0019] In a further embodiment, a plurality of ventilation holes are evenly arranged on the front plate of the upper shell.
[0020] By adopting the above technical solution, the universal wheels can ensure that the chiller can move within a certain range, which is convenient for installation or fine-tuning of the position of the chiller after installation. The multiple vents set on the front panel of the upper shell can keep the chiller in a state of circulation with external air, avoiding the internal heat exchange process from causing adverse effects on the various components of the chiller.
[0021] In a further embodiment, the temperature control device is electrically connected to the display screen through wires, the temperature control device includes a temperature controller body and multiple temperature sensors, the multiple temperature sensors are evenly arranged on the inner surface of the water storage tank, and the temperature controller body and the temperature sensors are electrically connected through wires.
[0022] By adopting the above technical solution, the temperature control device can detect the cooling water temperature of the chiller in real time. The temperature sensor used in the temperature control device is PT100. This temperature sensor can effectively improve the detection accuracy and control the temperature error of the cooling water within ±0.1°C, effectively meeting the needs of the integrated circuit production industry.
[0023] In summary, the utility model has the following beneficial effects:
[0024] 1. Through the setting of the filtering device, the purity of the production water needed by the integrated circuit production industry can be greatly improved, the microorganisms therein can be eliminated, and multiple filtrations can be performed to cooperate with the ice water machine to efficiently produce pure water at a specific temperature;
[0025] 2. Through the setting of the temperature control device, the temperature of pure water can be detected in real time by using multiple temperature sensors, and then the temperature of pure water can be precisely controlled by adjusting the compressor, condenser and other devices, so that the temperature difference range is kept at a very low level;
[0026] 3. Through the setting of the display screen, the process and data of the device operation can be intuitively understood, and the touch screen can be used to program and adjust the chiller in real time. In addition, there are ten sets of refrigeration processes for different chemical liquids preset in it, which greatly improves the user usability. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] Figure 1 It is an overall schematic diagram of the utility model;
[0028] Figure 2 It is a schematic diagram of the internal structure of the ice water machine body in the utility model;
[0029] Figure 3 It is a schematic diagram for reflecting the internal structure of the filtering device in the utility model.
[0030] In the figure, 1. ice machine body; 11. shell; 111. upper shell; 112. lower shell; 113. display screen; 114. start button; 115. pause button; 116. close button; 117. observation hole; 118. built-in handle; 119. universal wheel; 12. evaporator; 13. compressor; 14. condenser; 15. liquid storage tank; 16. filter; 17. expansion valve; 2. filter device; 21. water storage tank; 22. degassing device; 23. microfiltration device; 24. ultrafiltration device; 25. temperature control device; 251. temperature controller body; 252. temperature sensor; 26. ultraviolet disinfection device. DETAILED DESCRIPTION
[0031] The utility model is further described in detail below in conjunction with the accompanying drawings.
[0032] The same parts are denoted by the same reference numerals. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the attached Figure 1 In the description of this specification, the words "bottom" and "top", "inside" and "outside" refer to directions toward or away from a particular component geometry, respectively. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this specification, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.
[0033] Example:
[0034] like Figure 1-2As shown, a water-cooled chiller for temperature control in integrated circuit production includes a chiller body 1 and a filter device 2. The chiller body 1 is assembled from a shell 11, an evaporator 12, a compressor 13, a condenser 14, a liquid storage tank 15, a filter 16 and an expansion valve 17. The filter device 2 is arranged on the left side of the shell 11. The shell is assembled from an upper shell 111 and a lower shell 112. A water inlet and a water outlet are arranged on the right side of the upper shell 111. A filter 16, a condenser 14 and a plurality of liquid storage tanks 15 are arranged inside the upper shell 111. A filter 16 is arranged on the left side of the inner bottom end of the upper shell 111. A plurality of liquid storage tanks 15 are arranged on the right side of the filter 16. A condenser 14 is arranged on the right side of the liquid storage tank 15. The inlet of the filter 16 is connected to the circulating liquid pipeline through the circulating liquid pipeline. The outlet of the liquid storage tank 15 is connected, and the inlet of the liquid storage tank 15 is connected to the outlet of the condenser 14 through a circulating liquid pipeline. A cooling water loop is arranged on the right side of the condenser 14, one end of the cooling water loop is arranged on the water inlet of the upper shell 111, and the other end of the cooling water loop is arranged on the water outlet of the upper shell 111. A plurality of vents are evenly arranged on the front plate of the upper shell 111. Through the arrangement of the upper and lower shells, different components in the ice machine can be placed above and below respectively to avoid affecting the heat exchange process. The filter 16 can filter out fine impurities in the circulating liquid. The condenser 14 can cool down the high-temperature and high-pressure gaseous circulating liquid compressed by the compressor 13 to make it a high-pressure and low-temperature circulating liquid, and these circulating liquids can be stored in the liquid storage tank 15 for subsequent use.
[0035] like Figure 1-2As shown, an evaporator 12 is arranged on the left side of the inner bottom end of the lower shell 112, the outlet of the filter 16 is communicated with the inlet of the evaporator 12, an expansion valve 17 is arranged on the pipeline between the filter 16 and the evaporator 12, a compressor 13 is arranged on the right side of the evaporator 12, and pressure sensors are arranged at the inlet and outlet of the compressor 13, the compressor 13 is fixedly connected to the inner bottom end of the lower shell 11, the outlet of the evaporator 12 is communicated with the inlet of the compressor 13, and the outlet of the compressor 13 is communicated with the inlet of the condenser 14 through a circulating liquid pipeline, a display screen 113 is arranged on the front panel of the lower shell 112, a start button 114, a pause button 115 and a close button 116 are arranged below the display screen 113, an observation hole 117 is vertically arranged below the start button 114, a receiving groove is arranged on the left side of the front panel of the lower shell 112, a built-in handle 118 is embedded in the receiving groove, and a plurality of universal wheels 119 are arranged at the bottom end of the lower shell 112. After the low-temperature circulating liquid flows through the expansion valve 17, its pressure and flow rate are adjusted to a suitable range, and it becomes a low-temperature and low-pressure circulating liquid and enters the evaporator 12. In the evaporator 12, the circulating liquid and the cooling water exchange heat, and the waste heat in the cooling water is exchanged into the circulating liquid. The circulating liquid enters the compressor 13 for compression, and the cooled cooling water enters the filter device 2 for the next step of processing. The pressure sensors arranged at both ends of the compressor 13 can ensure that its internal pressure is always controllable and can be adjusted at any time as needed. The touch screen 113 has a lot of data during the operation of the water chiller. The buttons below can control the start, pause and shut down of the water chiller. Due to the particularity of the operation of the water chiller itself, whether it is turned on or off, it needs to run for a period of time and cannot be paused at will, so these buttons need to be pressed only under specific circumstances. The universal wheel 119 at the bottom of the lower shell 112 can allow the water chiller to move within a certain range, which is conducive to the position adjustment of the water chiller.
[0036] like Figure 1-3As shown, the filtering device 2 includes a water storage tank 21, a degassing device 22, a microfiltration device 23, an ultrafiltration device 24, a temperature control device 25 and an ultraviolet disinfection device 26. The cooling water inlet of the water storage tank 21 is connected to the cooling water outlet of the shell 11 through a cooling water pipeline. The top of the water storage tank 21 is provided with a temperature control device 25, the inner bottom end of the water storage tank 21 is provided with a degassing device 22, the cooling water inlet is provided with a microfiltration device 23, the outlet of the microfiltration device 23 is provided with an ultrafiltration device 24, and the inner top of the water storage tank 21 is provided with an ultraviolet disinfection device 26. The temperature control device 25 is electrically connected to the display screen 113 through wires. The temperature control device 25 includes a temperature controller body 251 and a plurality of temperature sensors 252. The plurality of temperature sensors 252 are evenly arranged on the inner surface of the water storage tank 21. The temperature controller body 251 and the temperature sensors 252 are electrically connected through wires. When the cooling water enters the filtering device 2, it undergoes a further purification process. First, a microfiltration device 23 is detachably installed at the entrance of the water storage tank 21, and an ultrafiltration device 24 is detachably installed at one end of the microfiltration device 23. After the cooling water enters the water storage tank 21 through two processes, the degassing device 22 arranged at the bottom of the water storage tank 21 is operated to extract the air dissolved in the cooling water from the cooling water, and the ultraviolet disinfection device 26 at the top is responsible for killing the bacteria and microorganisms inside the cooling water. A plurality of temperature sensors 252 are evenly arranged inside the water storage tank 21 to monitor the cooling water temperature, and these temperature sensors 252 are all connected to the temperature controller body 251. A heating plate and a temperature sensor 252 are also laid on the water pipe connected to the water use device to ensure that the cooling water remains at a constant temperature when entering the water use device.
[0037] Specific implementation process: before the water chiller starts to operate, a large amount of low-temperature and high-pressure circulating liquid is stored in the liquid storage tank 15. When the user clicks the touch screen, sets the temperature and other preset values and presses the start button 114, the water chiller starts to operate, and the cooling water is pumped to the evaporator 12 through the cooling water circuit of the water pump, and then enters the water storage tank 21, and the bacteria and aquatic organisms are eliminated by the ultraviolet disinfection device 26, and the air dissolved in the water is separated by the degassing device 22, and the impurities in the water are separated by the microfiltration device 23 and the ultrafiltration device 24, so as to further purify the water. After circulating for a few minutes, the water chiller officially starts to work, and the high-pressure and low-temperature circulating liquid in the liquid storage tank 15 passes through the filter 16 and the expansion valve 17, and enters the evaporator 12, and circulates. The liquid takes away the waste heat in the cooling water and enters the compressor 13, and is compressed by the compressor 13 to become a high-temperature and high-pressure circulating liquid. The high-temperature and high-pressure circulating liquid enters the condenser 14, and is heat-exchanged through a hot water exchange circuit connected to a water tower provided in the condenser 14. The high temperature in the circulating liquid is taken away and becomes a low-temperature and high-pressure circulating liquid. The low-temperature and high-pressure circulating liquid re-enters the liquid storage tank 15 for storage, and the pure water in the water storage tank 21 is ensured to be at a preset temperature at all times through the temperature sensors 252 evenly arranged on the tank body, and through the heating plate and the temperature sensor 252 arranged on the delivery pipeline between the water storage tank 21 and the water-using device, it is ensured that when the cooling water enters the water-using device, the temperature difference is still controlled within the required high precision.
[0038] In the embodiments disclosed in the present invention, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense. For example, "connect" can be a fixed connection, a detachable connection, or an integral connection; "connect" can be a direct connection or an indirect connection through an intermediate medium. For those skilled in the art, the specific meanings of the above terms in the embodiments disclosed in the present invention can be understood according to specific circumstances.
[0039] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed. However, as long as they are within the scope of the claims of the present invention, they are protected by the patent law.
Claims
1. A water-cooled chiller for temperature control in integrated circuit production, comprising a chiller body (1) and a filter device (2), characterized in that: The ice machine body (1) is assembled from a shell (11), an evaporator (12), a compressor (13), a condenser (14), a liquid storage tank (15), a filter (16) and an expansion valve (17), and a filter device (2) is provided on the left side of the shell (11); The filtering device (2) comprises a water storage tank (21), a degassing device (22), a microfiltration device (23), an ultrafiltration device (24), a temperature control device (25) and an ultraviolet disinfection device (26); the cooling water inlet of the water storage tank (21) is connected to the cooling water outlet of the housing (11) through a cooling water pipeline; the top of the water storage tank (21) is provided with a temperature control device (25); the inner bottom of the water storage tank (21) is provided with a degassing device (22); the cooling water inlet is provided with a microfiltration device (23); the outlet of the microfiltration device (23) is provided with an ultrafiltration device (24); and the inner top of the water storage tank (21) is provided with an ultraviolet disinfection device (26).
2. The water-cooled chiller for temperature control in integrated circuit production according to claim 1, characterized in that: The housing (11) is assembled from an upper shell (111) and a lower shell (112); a water inlet and a water outlet are arranged on the right side of the upper shell (111); a filter (16), a condenser (14) and a plurality of liquid storage tanks (15) are arranged inside the upper shell (111); a filter (16) is arranged on the left side of the inner bottom end of the upper shell (111); a plurality of liquid storage tanks (15) are arranged on the right side of the filter (16); a condenser (14) is arranged on the right side of the liquid storage tank (15); an inlet of the filter (16) is connected to an outlet of the liquid storage tank (15) through a circulating liquid pipeline; an inlet of the liquid storage tank (15) is connected to an outlet of the condenser (14) through a circulating liquid pipeline; a cooling water circuit is arranged on the right side of the condenser (14); one end of the cooling water circuit is arranged on the water inlet of the upper shell (111); and the other end of the cooling water circuit is arranged on the water outlet of the upper shell (111).
3. The water-cooled chiller for temperature control in integrated circuit production according to claim 2, characterized in that: An evaporator (12) is arranged on the left side of the inner bottom end of the lower shell (112); the outlet of the filter (16) is connected to the inlet of the evaporator (12); an expansion valve (17) is arranged on the pipeline between the filter (16) and the evaporator (12); a compressor (13) is arranged on the right side of the evaporator (12); the compressor (13) is fixedly connected to the inner bottom end of the lower shell (11); the outlet of the evaporator (12) is connected to the inlet of the compressor (13); and the outlet of the compressor (13) is connected to the inlet of the condenser (14) through a circulating liquid pipeline.
4. The water-cooled chiller for temperature control in integrated circuit production according to claim 3, characterized in that: Pressure sensors are provided at the inlet and outlet of the compressor (13).
5. The water-cooled chiller for temperature control in integrated circuit production according to claim 3, characterized in that: A display screen (113) is arranged on the front plate of the lower shell (112); a start button (114), a pause button (115) and a close button (116) are arranged below the display screen (113); an observation hole (117) is vertically arranged below the start button (114); a receiving groove is arranged on the left side of the front plate of the lower shell (112); a built-in handle (118) is embedded in the receiving groove.
6. The water-cooled chiller for temperature control in integrated circuit production according to claim 5, characterized in that: A plurality of universal wheels (119) are provided at the bottom end of the lower housing (112).
7. The water-cooled chiller for temperature control in integrated circuit production according to claim 2, characterized in that: A plurality of ventilation holes are evenly arranged on the front plate of the upper shell (111).
8. The water-cooled chiller for temperature control in integrated circuit production according to claim 1, characterized in that: The temperature control device (25) is electrically connected to the display screen (113) via electric wires. The temperature control device (25) comprises a temperature controller body (251) and a plurality of temperature sensors (252). The plurality of temperature sensors (252) are evenly arranged on the inner surface of the water storage tank (21). The temperature controller body (251) and the temperature sensors (252) are electrically connected via electric wires.
Citation Information
Patent Citations
Temperature control cooling-water machine
CN220380073U