Graphite boat conveying device and graphite boat loading and unloading machine

Abstract

The utility model discloses a graphite boat conveying device and a graphite boat loading and unloading machine, and relates to the photovoltaic technical field, the graphite boat conveying device comprises a conveying assembly, a first clamping assembly, a second clamping assembly and a first driving member, a conveying member of the conveying assembly is used for conveying a graphite boat to a target position along a first direction; the positioning piece is used for fixing the graphite boat to a target position, a first clamping piece and a second clamping piece of the first clamping assembly clamp the graphite boat along two sides of a first direction after the graphite boat reaches the target position, and a third clamping piece and a fourth clamping piece of the second clamping assembly are arranged on two opposite sides of the conveying assembly along a second direction; the first driving part is used for driving the conveying assembly to move towards the side close to the third clamping part in the second direction after the first clamping assembly clamps the graphite boat, and then the fourth clamping part clamps the graphite boat in the second direction. The graphite boat conveying device can adapt to graphite boats of various specifications, is convenient to control and can reduce cost.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, in particular to a graphite boat conveying device and a graphite boat loading and unloading machine. Background Art

[0002] With the continuous development of equipment structure in the field of solar technology, the structure of solar cell production equipment is approaching the demand for high production capacity, and customers' demands for the production capacity and installation structure of solar cell manufacturing equipment are also getting higher and higher.

[0003] As a typical representative of automated equipment in the photovoltaic manufacturing industry, the fully automatic graphite boat loading and unloading machine is used to automatically load silicon wafers into a graphite boat or automatically load silicon wafers from a graphite boat into a wafer basket before and after the PECVD process in the production of solar cells. It has the characteristics of high automation and production efficiency, reduces contact pollution between humans and silicon wafers, and greatly increases the stability of wafer loading and unloading. It is recognized by the industry as a key equipment in the photovoltaic manufacturing industry.

[0004] When loading and unloading the graphite boat, the graphite boat needs to be clamped and positioned so that it can be loaded and unloaded accurately. However, in the actual processing operation of the graphite boat loading and unloading machine, due to the different numbers or specifications of silicon wafers and the different size specifications of the graphite boat, the graphite boat loading and unloading machine has poor versatility and increased production costs. Utility Model Content

[0005] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a graphite boat conveying device, which is used to adapt and clamp graphite boats of various sizes, has a simple structure, is easy to control, and reduces production costs.

[0006] The utility model also provides a graphite boat loading and unloading machine comprising the graphite boat conveying device.

[0007] According to the first aspect of the utility model, the graphite boat conveying device comprises:

[0008] A conveying assembly, comprising a conveying member and a positioning member, wherein the conveying member is used to convey the graphite boat to a target position along a first direction, and the positioning member is disposed on a side of the conveying member close to the target position in the first direction and is used to fix the graphite boat to the target position;

[0009] A first clamping assembly, comprising a first clamping member and a second clamping member, wherein the first clamping member and the second clamping member are disposed on opposite sides of the conveying assembly along the first direction and are used to clamp the graphite boat along both sides of the first direction after the graphite boat reaches the target position;

[0010] a second clamping assembly, comprising a third clamping member and a fourth clamping member, wherein the third clamping member and the fourth clamping member are disposed on opposite sides of the conveying assembly along a second direction, wherein the first direction and the second direction intersect; and

[0011] The first driving member is drivingly connected to the third clamping member. The first driving member is used to drive the conveying assembly to move along the second direction toward the side close to the third clamping member after the first clamping assembly clamps the graphite boat. The fourth clamping member is used to approach along the second direction to clamp the graphite boat after the third clamping member abuts against the graphite boat.

[0012] The graphite boat conveying device according to the embodiment of the utility model has at least the following beneficial effects:

[0013] Firstly, by arranging the positioning member on the conveying member and being able to move with the conveying member, the position of the graphite boat is conveniently positioned and the structure of the graphite boat conveying device is simplified; secondly, the clamping positions of the first clamping assembly and the second clamping assembly are adjusted according to the actual size of the graphite boat to achieve positioning and clamping of the graphite boat, and it can adapt to graphite boats of various specifications, which is not only convenient to control but also can reduce costs.

[0014] According to some embodiments of the present utility model, the first clamping member includes a first roller, and the second clamping member includes a second roller. When the first driving member drives the conveying assembly to move along the second direction, the graphite boat moves along the second direction relative to the first clamping member through the rotation of the first roller, and the graphite boat moves along the second direction relative to the second clamping member through the rotation of the second roller.

[0015] According to some embodiments of the utility model, the first clamping member includes a second driving member and a first limiting portion, the first roller is arranged at the first limiting portion, and the second driving member is drivingly connected to the first limiting portion; the second driving member is used to drive the first limiting portion to approach the graphite boat along a third direction so that the first roller abuts against one side of the graphite boat in the first direction, and the third direction intersects with the first direction and the second direction in pairs.

[0016] According to some embodiments of the utility model, the second clamping member includes a third driving member and a second limiting portion, the second roller is arranged at the second limiting portion, and the third driving member is drivingly connected to the second limiting portion; the third driving member is used to drive the second limiting portion to approach the graphite boat along the first direction so that the second roller abuts against the other side of the graphite boat in the first direction.

[0017] According to some embodiments of the present invention, the third driving member includes a first stroke driving portion and a second stroke driving portion, and the first stroke driving portion and the second stroke driving portion are configured to drive the second limiting portion to move different stroke distances.

[0018] According to some embodiments of the utility model, the third clamping member includes a first side frame and a third limiting portion, the third limiting portion is arranged on the first side frame and is used to abut against one side of the graphite boat in the second direction; the installation position of the third limiting portion on the first side frame is adjustable, and / or the third limiting portion has an avoidance hole, and the avoidance hole is extended along the first direction.

[0019] According to some embodiments of the utility model, the fourth clamping member includes a second side frame and an elastic abutment portion, and the fourth clamping member also includes a fourth driving member, which is drivingly connected to the second side frame and is used to drive the second side frame to drive the elastic abutment portion to move along the second direction until it elastically abuts against the graphite boat.

[0020] According to some embodiments of the utility model, the elastic abutment portion includes a first connecting plate, an elastic member and a second connecting plate, the elastic member is elastically connected between the first connecting plate and the second connecting plate; the first connecting plate is movably arranged on the second side frame along the first direction, and the second connecting plate is used to abut against the graphite boat.

[0021] According to some embodiments of the present invention, a side of the second connecting plate facing away from the first connecting plate has an avoidance groove.

[0022] A graphite boat loading and unloading machine according to a second aspect of the utility model comprises a graphite boat conveying device as in any of the above embodiments.

[0023] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0025] Figure 1 It is a schematic diagram of the three-dimensional structure of a graphite boat of a certain size;

[0026] Figure 2 is a schematic diagram of the three-dimensional structure of a graphite boat of another size specification;

[0027] Figure 3 This is a schematic diagram of the three-dimensional structure of a graphite boat conveying device according to an embodiment of the utility model;

[0028] Figure 4 for Figure 3 Graphite boat conveying device and Figure 1 A schematic diagram of the structure of the graphite boat in the embodiment of the present invention;

[0029] Figure 5 for Figure 3 Graphite boat conveying device and Figure 2 A schematic diagram of the structure of the graphite boat in the embodiment of the present invention;

[0030] Figure 6 for Figure 3 A schematic diagram of the three-dimensional structure of the conveying assembly and the first driving assembly of the graphite boat conveying device;

[0031] Figure 7 for Figure 3 A schematic diagram of the three-dimensional structure of the first clamping member of the graphite boat conveying device;

[0032] Figure 8 for Figure 3 A schematic diagram of the three-dimensional structure of the second clamping member of the graphite boat conveying device;

[0033] Fig. 9 for Figure 3 A schematic diagram of the three-dimensional structure of the third clamping member of the graphite boat conveying device;

[0034] Fig.10 for Figure 1 A schematic diagram of the three-dimensional structure of the fourth clamping member of the graphite boat conveying device;

[0035] Fig.11 for Fig.10 A schematic diagram of the three-dimensional structure of the elastic abutment portion of the fourth clamping member;

[0036] Fig.12 for Fig.11 Schematic diagram of the planar structure of the second connecting plate of the elastic abutment portion.

[0037] Figure Number:

[0038] 100. Graphite boat conveying device;

[0039] 10. Conveying component; 11. Transmitting member; 12. Positioning member;

[0040] 20. First clamping assembly; 21. First clamping member; 211. First position-limiting portion; 212. First roller; 213. Second driving member; 214. Connecting member; 215. First main frame; 22. Second clamping member; 221. Second position-limiting portion; 222. Second roller; 223. Third driving member; 2231. First stroke driving portion; 2232. Second stroke driving portion; 224. Second main frame;

[0041] 30. second clamping assembly; 31. third clamping member; 311. first side frame; 312. third limiting portion; 3121. avoidance hole; 32. fourth clamping member; 321. fourth driving member; 322. second side frame; 323. elastic abutment portion; 3231. first connecting plate; 3232. elastic member; 3233. second connecting plate; 3233a. avoidance groove;

[0042] 40. A first driving member;

[0043] 200, graphite boat; 200a, silicon wafer; 210, first surface; 220, second surface; 230, third surface; 240, fourth surface; 250, card point; 260, ceramic rod;

[0044] L1, first direction; L2, second direction; L3, third direction. DETAILED DESCRIPTION

[0045] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0046] In the description of the present invention, it should be understood that the descriptions involving orientation, such as the orientation or positional relationship indicated as up, down, etc., are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0047] In the description of the present utility model, "a plurality" means more than two. If there is a description of "first" or "second", it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0048] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0049] See also Figure 1The graphite boat 200 includes a plurality of silicon wafers 200a (graphite wafers), and the plurality of silicon wafers 200a are arranged in a manner that the polarities of two adjacent silicon wafers 200a are opposite. The silicon wafers 200a with the same polarity are separated by conductive spacers and connected by ceramic rods 260. In addition, a clamping point 250 is provided on the surface of the silicon wafer 200a to fix the silicon wafer 200a.

[0050] When coating the surface of the silicon wafer 200a, the uncoated silicon wafer 200a is inserted into the graphite boat 200 loading and unloading machine of the PECVD vacuum coating equipment, that is, the uncoated silicon wafer 200a is inserted into the graphite boat 200, and the silicon wafer 200a is clamped by the clamping point 250, and then the graphite boat 200 carrying the silicon wafer 200a is moved into the cavity of the PECVD vacuum coating equipment, and the silicon wafer 200a is coated by the PECVD process. After the coating is completed, the graphite boat 200 is taken out from the cavity of the vacuum coating equipment, and the coated silicon wafer 200a is removed from the graphite boat 200 to complete the coating of the silicon wafer 200a.

[0051] During the processing, the disassembly process of the graphite boat 200 needs to be repeated. For example, a robot arm is used to suck the silicon wafer 200a and load and unload it in the graphite boat 200. Before loading and unloading the silicon wafer 200a, the graphite boat 200 needs to be clamped and positioned so that it can be loaded and unloaded accurately. However, due to the different numbers or specifications of the silicon wafers 200a, the specifications of different graphite boats 200 are also different, so that the length, width and height of the graphite boat 200 may be different. Figure 1 to Figure 2 Two types of graphite boats 200 having different numbers of silicon wafers 200 a and different lengths are provided.

[0052] Since the specifications of the graphite boat 200 are different, different positioning dimensions are required for clamping and positioning boats of different specifications. Therefore, the traditional graphite boat loading and unloading machine can only be applied to one specification of the graphite boat 200. If the size type of the graphite boat 200 is changed, the structure of the graphite boat loading and unloading machine needs to be changed, resulting in poor versatility of the graphite boat loading and unloading machine and increased production costs.

[0053] Based on this, the present application provides a graphite boat conveying device 100, provides a clamping and positioning solution, and can be adapted to graphite boats 200 of various specifications. Specifically, refer to Figures 3 to 6The graphite boat conveying device 100 includes a conveying component 10, a first clamping component 20, a second clamping component 30 and a first driving component 40. The conveying component 10 includes a conveying component 11 and a positioning component 12. The conveying component 11 is used to convey the graphite boat 200 to the target position 10a along the first direction L1. The positioning component 12 is arranged on one side of the conveying component in the first direction L1 and is used to fix the graphite boat 200 to the target position 10a. The first clamping component 20 includes a first clamping component 21 and a second clamping component 22. The first clamping component 21 and the second clamping component 22 are arranged on opposite sides of the conveying component 10 along the first direction L1 and are used to, after the graphite boat 200 arrives at the target position 10a, move the graphite boat 200 to the target position 10a along the first direction L1. The graphite boat 200 is clamped on both sides of a direction L1, the second clamping assembly 30 includes a third clamping member 31 and a fourth clamping member 32, the third clamping member 31 and the fourth clamping member 32 are arranged on opposite sides of the conveying assembly 10 along the second direction L2, the first driving member 40 is drivingly connected to the third clamping member 31, the first driving member 40 is used to drive the conveying assembly 10 to move along the second direction L2 toward the side close to the third clamping member 31 after the first clamping assembly 20 clamps the graphite boat 200, the fourth clamping member 32 is used to approach to the graphite boat 200 along the second direction L2 after the third clamping member 31 abuts against the graphite boat 200, the first direction L1 and the second direction L2 intersect.

[0054] The conveying member 11 can be a structure such as a belt, a rolling wheel, etc. that can be transmitted along the first direction L1. At both ends of the first direction L1, an initial position and a target position 10a are formed. The initial position refers to the initial position where the graphite boat 200 is initially placed on the conveying member 11. After the graphite boat 200 is located at the initial position, the conveying member 11 is transmitted along the first direction L1 to transport the graphite boat 200 to the target position 10a. The positioning member 12 is arranged on one side of the conveying member 11 close to the target position 10a in the first direction L1, so that after the graphite boat 200 arrives at the target position 10a, it is fixed at the target position 10a to stop the graphite boat 200 from moving further.

[0055] For example, the positioning member 12 may be a positioning cylinder. When the driving shaft of the positioning cylinder protrudes relative to the conveying member 11, the graphite boat 200 that has reached the target position 10a on the conveying member 11 abuts against the driving shaft of the positioning cylinder, thereby achieving the fixing of the graphite boat 200 by the positioning member 12. At this time, the graphite boat 200 has reached the target position 10a, and the first clamping assembly 20 and the second clamping assembly 30 are used to clamp the graphite boat 200 in the first direction L1 and the second direction L2. It can be understood that the first direction L1 and the second direction L2 are the length direction and the width direction of the graphite boat 200, respectively.

[0056] The specific steps of the first clamping assembly 20 and the second clamping assembly 30 clamping the graphite boat 200 in the first direction L1 and the second direction L2 are as follows:

[0057] First, the first clamping member 21 and the second clamping member 22 provided on opposite sides of the conveying assembly 10 in the first direction L1 are close to each other, so as to respectively abut against different sides of the graphite boat 200 from both sides of the first direction L1, thereby clamping the graphite boat 200 in the first direction L1. Figure 1 The first direction L1 may be the length direction of the graphite boat 200. At this time, it is considered that the first clamping member 21 and the second clamping member 22 respectively abut against the first surface 210 and the second surface (not shown) of the graphite boat 200 from the front and rear sides of the graphite boat 200, and the first surface 210 and the second surface are arranged opposite to each other along the first direction L1.

[0058] Then, the conveying assembly 10 (including the conveying member 11 and the positioning member 12) and the graphite boat 200 thereon are driven by the first driving member 40 to move as a whole along the second direction L2 and approach the third clamping member 31, until the third clamping member 31 abuts against one side of the graphite boat 200 in the second direction L2 from one side in the second direction L2, and three-side positioning is achieved. At this time, the fourth clamping member 32 is controlled to move along the second direction L2 toward the side close to the third clamping member 31, until the fourth clamping member 32 abuts against the other side of the graphite boat 200 in the second direction L2. Figure 1 and Figure 3 The second direction L2 may be the width direction of the graphite boat 200. At this time, it is considered that the third clamping member 31 and the fourth clamping member 32 respectively abut against the third surface 230 and the fourth surface 240 of the graphite boat 200 from the left and right sides of the graphite boat 200, and the third surface 230 and the fourth surface 240 are arranged opposite to each other along the second direction L2.

[0059] At this time, the first clamping assembly 20 and the second clamping assembly 30 work together to achieve multi-directional positioning and clamping of the graphite boat 200, making it easier to load and unload the graphite boat 200.

[0060] In actual operation, when the first clamping member 21, the second clamping member 22, the third clamping member 31 and the fourth clamping member 32 move close to the graphite boat 200, they are controlled according to the actual specifications and size of the graphite boat 200 until the first clamping member 21, the second clamping member 22, the third clamping member 31 and the fourth clamping member 32 respectively abut against the graphite boat 200 and stop, completing the clamping process.

[0061] In this way, the graphite boat conveying device 100 of the present application, first, sets the positioning member 12 on the conveying member 11 and can move with the conveying member 11, conveniently locates the position of the graphite boat 200 and simplifies the structure of the graphite boat conveying device 100, and secondly, adjusts the clamping position of the first clamping assembly 20 and the second clamping assembly 30 according to the actual size of the graphite boat 200 to achieve positioning and clamping of the graphite boat 200, and can adapt to graphite boats 200 of various specifications, which is not only convenient to control but also can reduce costs.

[0062] like Figure 4 and Figure 5 , providing Figure 1 The graphite boat 200 of the length shown and Figure 2 The clamping scheme of the graphite boat 200 of the length shown can be understood that at this time, due to Figure 1 The graphite boat 200 shown is smaller than or greater than Figure 2 The graphite boat 200 shown, therefore, Figure 1 When the graphite boat 200 of the specification shown in the figure is clamped, the distance between the first clamping member 21 and the second clamping member 22 in the first direction L1 is small. Figure 2 When the graphite boat 200 of the specification shown is clamped, the distance between the first clamping member 21 and the second clamping member 22 in the first direction L1 is relatively large.

[0063] In one embodiment, the first driving member 40 may be a driving cylinder or other structure, and the specific configuration is not limited in this application. After the graphite boat 200 is clamped, the graphite boat 200 can be taken away from above the graphite boat 200 along the height direction of the graphite boat 200 by an external mechanical arm, thereby completing the conveying process of the graphite boat conveying device 100, that is, the graphite boat conveying device 100 of this application has the dual functions of conveying the graphite boat 200 to the target position 10a and clamping the graphite boat 200 at the target position 10a.

[0064] In one embodiment, see Figures 7 and 8 The first clamping member 21 includes a first roller 212, and the second clamping member 22 includes a second roller 222. When the first driving member 40 drives the conveying assembly 10 to move along the second direction L2, the graphite boat 200 rotates relative to the first clamping member 21 along the second direction L2 through the first roller 212, and the graphite boat 200 rotates relative to the second clamping member 22 along the second direction L2 through the second roller 222.

[0065] After the first clamping assembly 20 clamps the graphite boat 200 along the first direction L1, it is necessary to move the position of the graphite boat 200, so as to clamp the graphite boat 200 along the second direction L2 through the second clamping assembly 30. When the graphite boat 200 moves, it is necessary to maintain the clamping state of the first clamping assembly 20. At this time, the first clamping assembly 20 as a whole can move with the conveying assembly 10, or in order to simplify the structure, the overall position of the first clamping assembly 20 can be kept unchanged, and the graphite boat 200 moves relative to the first clamping assembly 20. At the same time, after the graphite boat 200 moves to abut against the third clamping member 31, the first clamping assembly 20 can still maintain abutment against the graphite boat 200.

[0066] Specifically, the first clamping assembly 20 includes a first limiting portion 211, the first limiting portion 211 has a first limiting surface, the first roller 212 is arranged on the first limiting portion 211, the first limiting portion 211 abuts against the first surface 210 of the graphite boat 200 through the first roller 212, and at this time, the first limiting surface faces the first surface 210 of the graphite boat 200, and then, when the conveying assembly 10 drives the graphite boat 200 to move along the second direction L2, the first roller 212 rotates relative to the first limiting portion 211, so that the graphite boat 200 moves relative to the first abutting surface. It can be understood that during the movement, the position of the graphite boat 200 relative to the first limiting portion 211 in the second direction L2 changes.

[0067] The first limiting portion 211 may be a plate-shaped, block-shaped structure, etc., which is provided with a groove for assembling the first roller 212, and the first roller 212 can rotate in the groove around the third direction L3, so as to realize the movement of the graphite boat 200 in the second direction L2. It can be understood that the third direction L3 can be the height direction of the graphite boat 200, which is arranged to intersect with the first direction L1 and the second direction L2.

[0068] Similarly, the second clamping assembly 30 includes a second limiting portion 221, a second roller 222 is disposed on the second limiting portion 221, the second limiting portion 221 has a second limiting surface, and the second limiting portion 221 abuts against the second surface 220 of the graphite boat 200 through the second roller 222. At this time, the second limiting surface faces the second surface 220. Then, when the conveying assembly 10 drives the graphite boat 200 to move along the second direction L2, the second roller 222 rotates relative to the first limiting portion 211, so that the graphite boat 200 moves relative to the second limiting portion 221. It can be understood that during the movement, the position of the graphite boat 200 relative to the second limiting portion 221 in the second direction L2 changes.

[0069] The second limiting portion 221 may be a plate-shaped or block-shaped structure, etc., and has a groove for assembling the second roller 222 , and the second roller 222 can also rotate in the groove around the third direction L3 , thereby realizing the movement of the graphite boat 200 in the second direction L2 .

[0070] In a specific embodiment, a plurality of first rollers 212 may be arranged at intervals along the second direction L2, and a plurality of second rollers 222 may be arranged along the second direction L2, so as to achieve continuous transmission of the graphite boat 200.

[0071] In one embodiment, see Figure 7 The first clamping member 21 includes a second driving member 213, which is drivingly connected to the first limiting portion 211. The second driving member 213 is used to drive the first limiting portion 211 to approach the graphite boat 200 along the third direction L3, so that the first roller 212 is limited to one side of the graphite boat 200 in the first direction L1.

[0072] Specifically, the first clamping member 21 includes a first main frame 215 and a connecting member 214. The second driving member 213 is arranged on the first main frame 215 and has a driving shaft that can be telescopically arranged along the third direction L3. The driving shaft of the second driving member 213 is connected to the second limiting portion 221 through the connecting member 214. When the driving shaft of the second driving member 213 is extended, the connecting member 214 drives the first limiting portion 211 to move along the third direction L3 close to the graphite boat 200 until the first roller 212 is limited to one side of the graphite boat 200 in the first direction L1.

[0073] In one of the embodiments, a boat carrier plate may be further provided under the graphite boat 200, and the boat carrier plate and the graphite boat 200 move synchronously to the target position 10a, and the second limit portion 221 and the positioning member 12 form dual positioning and position fixation. When the boat carrier plate and the graphite boat 200 arrive at the target position 10a, the positioning member 12 blocks the boat carrier plate for rough positioning, and the second limit portion 221 is the final positioning reference, so that the first roller 212 abuts against the first surface 210 of the graphite boat 200, and the movement of the second limit portion and the movement of the positioning member 12 can act simultaneously to ensure the accuracy of positioning.

[0074] In one embodiment, see Figure 8 The second clamping member 22 includes a third driving member 223. The second roller 222 is disposed on the second limiting portion 221. The third driving member 223 is drivingly connected to the second limiting portion 221. The third driving member 223 is used to drive the second limiting portion 221 to approach the graphite boat 200 along the first direction L1, so that the second roller 222 abuts against the other side of the graphite boat 200 in the first direction L1.

[0075] Specifically, the second clamping member 22 includes a second main frame 224, the third driving member 223 is arranged on the second main frame 224 and has a driving shaft that can be telescopically arranged along the first direction L1, the driving shaft of the third driving member 223 is connected to the second limiting portion 221, when the driving shaft of the third driving member 223 is extended, the second limiting portion 221 moves along the first direction L1 close to the graphite boat 200 until the second roller 222 abuts against the second surface 220 of the graphite boat 200, at this time, the first roller 212 and the second roller 222 abut against the opposite sides of the graphite boat 200 in the first direction L1, that is, they abut against the first surface 210 and the second surface 220 respectively.

[0076] It can be understood that when the size of the graphite boat 200 in the first direction L1 changes, the travel distance of the first limiter 211 in the third direction L3 does not change. When the size of the graphite boat 200 in the third direction L3 changes, the travel distance of the first limiter 211 in the third direction L3 changes, so that the first limiter 211 can determine the contact position of the first roller 212 on the first surface 210 according to the height of the graphite boat 200. When the size of the graphite boat 200 in the first direction L1 changes, the travel distance of the second limiter 221 in the first direction L1 changes. For example, when the size of the graphite boat 200 in the first direction L1 decreases, the formed distance of the second limiter 221 in the first direction L1 increases.

[0077] In order to facilitate the application of graphite boats 200 of various lengths, in one embodiment, refer to Figure 8 The third driving member 223 includes a first stroke driving portion 2231 and a second stroke driving portion 2232 , and the first stroke driving portion 2231 and the second stroke driving portion 2232 are configured to drive the second limiting portion 221 to move different stroke distances.

[0078] The first stroke driving part 2231 and the second stroke driving part 2232 can both be structures such as cylinders and driving motors, and the first stroke driving part 2231 has a first length driving shaft, and the second stroke driving part 2232 has a second length driving shaft, forming two driving shafts, one long and one short. For example, when the stroke distance of the second limit part 221 driven by the first length driving shaft is smaller than the stroke distance of the second limit part 221 driven by the second length driving shaft, when the first stroke driving part 2231 cannot achieve the abutment between the second roller 222 and the second surface 220 of the graphite boat 200, the second stroke driving part 2232 is used to drive the second limit part 221 so that the second roller 222 abuts against the second surface 220 of the graphite boat 200. For example, refer to Figure 4 and Figure 5 , Figure 5If the length of the graphite boat 200 in the first direction L1 is longer, a first stroke driving unit 2231 having a shorter stroke distance is used. Figure 4 If the length of the graphite boat 200 in the first direction L1 is shorter, a second stroke driving part 2232 with a longer stroke distance is used, so as to effectively perform post-positioning and clamping on the graphite boats 200 of different lengths.

[0079] In one embodiment, see Fig. 9 The third clamping member 31 includes a first side frame 311 and a third limiting portion 312 . The third limiting portion 312 is disposed on the first side frame 311 and is used to limit the graphite boat 200 at one side in the second direction L2 .

[0080] The first side frame 311 serves as an installation base for the third limiting portion 312, and the position of the first side frame 311 does not need to be changed. The third limiting portion 312 has a third limiting surface. The conveying assembly 10 can drive the graphite boat 200 along the second direction L2 to approach the first side frame 311 so that the third limiting surface abuts against the third surface 230 of the graphite boat 200, thereby realizing the positioning of the graphite boat 200 on one side in the second direction L2.

[0081] A ceramic rod 260 and a card point 250 are provided on the third surface 230 of the graphite boat 200 that abuts against the third limit surface. Therefore, when the third limit member abuts against the third surface 230, it is necessary to consider the avoidance of the third limit member to the ceramic rod 260 and the card point 250. Therefore, the installation position of the third limit part 312 on the first side frame 311 is adjustable, so that when the third limit surface abuts against the third surface 230, the ceramic rod 260 and the card point 250 are avoided.

[0082] Specifically, the third limiting portion 312 can be a plate-shaped or block-shaped structure, and the adjustable installation position of the third limiting portion 312 on the first side frame 311 means that the third limiting portion 312 can be movably arranged relative to the first side frame 311, or the third limiting portion 312 can be assembled at different positions of the first side frame 311, so that the third limiting surface avoids the ceramic rod 260 and the card point 250.

[0083] In some embodiments, the third limiting portion 312 has an avoidance hole 3121, and the avoidance hole 3121 extends along the first direction L1. For example, the avoidance hole 3121 can be a waist-shaped hole, so that the card point 250 or the ceramic rod 260 of different specifications of the graphite boat 200 can extend into different positions of the avoidance hole 3121, that is, when the card point 250 or the ceramic rod 260 of the graphite boat 200 produces a slight position change, the avoidance hole 3121 can achieve a fine-tuning effect. At this time, there is no need to readjust the position of the third limiting portion 312, and the operation is convenient and simple.

[0084] It can be understood that in some embodiments, the third limiter 312 can be movably arranged relative to the first side frame 311, and a position avoidance hole 3121 can be provided thereon to better adapt to graphite boats 200 of different specifications. In other embodiments, a plurality of third limiters 312 can be provided along the first direction L1 and / or the third direction L3 to better clamp the graphite boat 200.

[0085] In one embodiment, see Fig.10 and Fig.11 The fourth clamping member 32 includes a second side frame 322 and an elastic abutment portion 323. The fourth clamping member 32 also includes a fourth driving member 321. The fourth driving member 321 is drivingly connected to the second side frame 322 and is used to drive the second side frame 322 to drive the elastic abutment portion 323 to move along the second direction L2 to elastically abut against the graphite boat 200.

[0086] Before the fourth clamping member 32 is actuated, the graphite boat 200 has completed positioning at three positions, namely, the first surface 210, the second surface 220 and the third surface 230 are all abutted. At this time, the fourth driving member 321 controls the fourth clamping member 32 to abut the graphite boat 200 from one side of the fourth surface 240, thereby completing the overall positioning and clamping of the graphite boat 200.

[0087] Specifically, the fourth driving member 321 drives the second side frame 322 to move along the second direction L2 toward the side close to the third clamping member 31 until the elastic contact portion elastically abuts against the fourth surface 240. The elastic abutment of the elastic abutment portion 323 provides a vibration reduction effect, thereby absorbing the force impact of the graphite boat 200 when being clamped, reducing vibration, and effectively protecting the graphite boat 200.

[0088] The fourth driving member 321 may be a driving motor structure that is the same as the first driving member 40 , and the specific configuration thereof is not limited in this application.

[0089] Specifically, see Fig.11 The elastic abutment portion 323 includes a first connecting plate 3231, an elastic member 3232 and a second connecting plate 3233. The elastic member 3232 is elastically connected between the first connecting plate 3231 and the second connecting plate 3233. The first connecting plate 3231 is movably disposed on the second side frame 322 along the first direction L1. The second connecting plate 3233 is used to abut against the graphite boat 200.

[0090] A sliding track can be set on the second side frame 322, and a part of the first connecting plate 3231 can be slidably embedded in the sliding track. When the first connecting plate 3231 moves along the first direction L1 relative to the second side frame 322, the elastic member 3232 and the first connecting plate 3231 are driven to move along the first direction L1. The second connecting plate 3233 has a fourth limiting surface away from the first connecting plate 3231. Under the action of the elastic member 3232, the fourth limiting surface can elastically abut against the fourth surface 240. In some embodiments, a plurality of elastic abutting portions 323 can be set along the first direction L1 to better clamp the graphite boat 200.

[0091] Similarly, a ceramic rod 260 and a clamping point 250 are also provided on one side of the fourth surface 240 of the graphite boat 200 that abuts against the fourth limiting surface. Therefore, during the movement of the second connecting plate 3233, the second connecting plate 3233 may interfere with the clamping point 250. Fig.11 and Fig.12 The second connecting plate 3233 has an avoidance groove 3233a on the side facing away from the first connecting plate 3231, that is, the second connecting plate 3233 forms a side of the fourth limiting surface with an avoidance groove 3233a, and the opening of the avoidance groove 3233a faces the fourth surface 240 of the graphite boat 200. When the second connecting plate 3233 moves along the first direction L1, the card point 250 and / or the ceramic rod 260 can pass through the avoidance groove 3233a, so that the elastic abutment portion 323, the card point 250 and the ceramic rod 260 are avoided.

[0092] Understandably, see Fig.12 The condition for the card point 250 and / or the ceramic rod 260 to pass through the avoidance groove 3233a is that the groove depth h of the avoidance groove 3233a is greater than the protruding height of the card point 250 relative to the fourth surface 240 in the second direction L2, and greater than the protruding height of the ceramic rod 260 relative to the fourth surface 240 in the second direction L2, so as to avoid interference between the card point 250 and / or the ceramic rod 260 and the groove wall of the avoidance groove 3233a.

[0093] According to another aspect of the present application, a graphite boat loading and unloading machine is also provided, comprising the graphite boat conveying device 100 in any of the above-mentioned embodiments. The graphite boat loading and unloading machine may also include a handling device, such as the robotic arm mentioned above, so as to remove the graphite boat 200 after positioning and clamping from the graphite boat conveying device 100, and repeat the cycle to realize automated operation.

[0094] The graphite boat conveying device 100 and the graphite boat loading and unloading machine of the present application are compatible with graphite boats 200 of various sizes and types, and have a simple structure, convenient control, low cost and high efficiency.

[0095] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A graphite boat conveying device, characterized in that: include: A conveying assembly, comprising a conveying member and a positioning member, wherein the conveying member is used to convey the graphite boat to a target position along a first direction, and the positioning member is disposed on a side of the conveying member close to the target position in the first direction and is used to fix the graphite boat to the target position; A first clamping assembly, comprising a first clamping member and a second clamping member, wherein the first clamping member and the second clamping member are disposed on opposite sides of the conveying assembly along the first direction and are used to clamp the graphite boat along both sides of the first direction after the graphite boat reaches the target position, and the first direction and the second direction intersect; A second clamping assembly, comprising a third clamping member and a fourth clamping member, wherein the third clamping member and the fourth clamping member are arranged on opposite sides of the conveying assembly along the second direction; as well as The first driving member is drivingly connected to the third clamping member. The first driving member is used to drive the conveying assembly to move along the second direction close to the side of the third clamping member after the first clamping assembly clamps the graphite boat. The fourth clamping member is used to approach along the second direction to clamp the graphite boat after the third clamping member abuts against the graphite boat.

2. The graphite boat conveying device according to claim 1, characterized in that: The first clamping member includes a first roller, and the second clamping member includes a second roller. When the first driving member drives the conveying assembly to move along the second direction, the graphite boat moves along the second direction relative to the first clamping member through the rotation of the first roller, and the graphite boat moves along the second direction relative to the second clamping member through the rotation of the second roller.

3. The graphite boat conveying device according to claim 2, characterized in that: The first clamping member includes a second driving member and a first limiting portion, the first roller is arranged on the first limiting portion, and the second driving member is drivingly connected to the first limiting portion; The second driving member is used to drive the first limiting portion to approach the graphite boat along a third direction so that the first roller abuts against one side of the graphite boat in the first direction, and the third direction intersects the first direction and the second direction in pairs.

4. The graphite boat conveying device according to claim 3, characterized in that: The second clamping member includes a third driving member and a second limiting portion, the second roller is arranged on the second limiting portion, and the third driving member is drivingly connected to the second limiting portion; The third driving member is used to drive the second limiting portion to approach the graphite boat along the first direction, so that the second roller abuts against the other side of the graphite boat in the first direction.

5. The graphite boat conveying device according to claim 4, characterized in that: The third driving member includes a first stroke driving portion and a second stroke driving portion, and the first stroke driving portion and the second stroke driving portion are configured to drive the second limiting portion to move different stroke distances.

6. The graphite boat conveying device according to claim 1, characterized in that: The third clamping member includes a first side frame and a third limiting portion, wherein the third limiting portion is disposed on the first side frame and is used to abut against one side of the graphite boat in the second direction; The installation position of the third limiting portion on the first side frame is adjustable, and / or the third limiting portion has a avoiding hole, and the avoiding hole extends along the first direction.

7. The graphite boat conveying device according to claim 1, characterized in that: The fourth clamping member includes a second side frame and an elastic abutment portion; The fourth clamping member further includes a fourth driving member, which is drivingly connected to the second side frame and is used to drive the second side frame to drive the elastic abutment portion to move along the second direction until it elastically abuts against the graphite boat.

8. The graphite boat conveying device according to claim 7, characterized in that: The elastic abutment portion includes a first connecting plate, an elastic member and a second connecting plate, and the elastic member is elastically connected between the first connecting plate and the second connecting plate; The first connecting plate is movably disposed on the second side frame along the first direction, and the second connecting plate is used to abut against the graphite boat.

9. The graphite boat conveying device according to claim 8, characterized in that: A side of the second connecting plate facing away from the first connecting plate has an avoidance groove.

10. Graphite boat loading and unloading machine, characterized in that: The invention comprises a graphite boat conveying device as described in any one of claims 1 to 9.

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