SMD (Surface Mount Device) ring conveying arm

Abstract

The utility model discloses a patch ring conveying arm. The patch ring conveying arm comprises a rack, a synchronous belt module, a clamping jaw mechanism and patch rings, the machine frame comprises a shell, a shell extending part and a supporting piece. The synchronous belt module is located in the shell. The synchronous belt module comprises a synchronous belt, a linear sliding rail, a sliding block and a servo motor. The clamping jaw mechanism comprises a clamping jaw and a cross beam; the clamping jaw mechanism is installed on the sliding block and connected with the synchronous belt, and the servo motor rotates to drive the synchronous belt to rotate, so that the clamping jaw mechanism moves on the linear sliding rail, the position of a surface mount ring can be monitored in real time, and the surface mount ring can be accurately positioned. According to the patch ring conveying arm, self-protection of the patch ring conveying arm is achieved, meanwhile, expensive wafers are prevented from being damaged when the patch rings and the wafers are transferred and transported in the production process, the pressure regulating valve is further arranged to control the pressure of the clamping jaws, it is guaranteed that the patch rings move stably in the transportation process, and the patch ring conveying arm is wide in applicability, high in safety performance and suitable for popularization and application. And the production and transportation efficiency can be obviously improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor equipment, and in particular relates to a patch ring transmission arm. Background Art

[0002] Wafer patch ring transport equipment is one of the key equipment in the electronics manufacturing industry. In the semiconductor process, special adhesive films are used to fix the wafer in the center of the patch ring to protect, position and support the wafer during transmission. Although the wafer patch ring can fix the wafer in the frame box very well, it still cannot guarantee absolute safety. Therefore, the stability and safety of the patch ring transportation turnover are very high. It is necessary to ensure that the expensive wafers will not be scratched during the production process. The existing technology often transports the patch ring to the specified position and determines whether it is in place through external sensing. Sometimes, the material is turned over or the warning signal is delayed. Utility Model Content

[0003] In order to solve the above problems existing in the prior art, the present application provides a patch ring transmission arm to overcome the shortcomings of the above prior art. The specific technical solution is as follows:

[0004] A patch ring transmission arm comprises: a frame, a synchronous belt module, a clamping mechanism and a patch ring; the frame comprises: a shell, a shell extension and a support; the synchronous belt module is located in the shell; the synchronous belt module comprises: a synchronous belt, a linear slide rail, a slider and a servo motor; the clamping mechanism comprises: a clamping claw and a crossbeam; the clamping mechanism is installed on the slider and connected to the synchronous belt, the servo motor rotates to drive the synchronous belt to rotate, so that the clamping mechanism moves on the linear slide rail.

[0005] Preferably, the patch ring transfer arm proposed in the present application also includes a pressure regulating valve, and the pressure regulating valve is installed on the support member.

[0006] Further preferably, the clamping mechanism further comprises a clamping cylinder, the pressure regulating valve is connected to the clamping cylinder via an air pipe, and the clamping pressure is adjusted by controlling the pressure of the clamping cylinder.

[0007] Preferably, the patch ring conveying arm proposed in the present application also includes a drag chain, which is located above the shell extension and connected to the crossbeam, the crossbeam is connected to the slider, the crossbeam is connected to the clamping cylinder through a connecting element, and the clamping cylinder is connected to the clamping claw.

[0008] Further preferably, the clamp mechanism also includes a spring, which is installed on the connecting element. When the clamp is moving to clamp the patch ring, if an obstacle is encountered in the middle, the spring can be used for buffering. When the overpressure sensor sends a signal, it means that the overpressure has reached the maximum. At this time, the machine will stop and send a warning signal, which protects the clamp from being damaged.

[0009] Preferably, the clamping mechanism further includes: a presence sensor, an overpressure sensor and an optical fiber amplifier; the presence sensor is a counter-fiber sensor installed on the upper and lower plates of the clamp, that is, the presence sensor is a counter-fiber sensor respectively on the upper and lower parts of the clamp, the presence sensor is used to detect whether the patch ring is located on the clamp, the optical fiber amplifier is installed on the crossbeam, the overpressure sensor is installed on the crossbeam, and the optical fiber amplifier is used to receive and amplify the optical signal emitted by the counter-fiber sensor, thereby outputting a specific optical signal value for the user's reference and judgment.

[0010] Further preferably, when there is material in the basket slot where the patch ring is placed, that is, when the sensor in the basket detects that there is a patch ring that needs to be transported in the basket, the clamping jaw mechanism moves to a specified position, and the patch ring is clamped by the clamping jaw. At this time, the presence sensor arranged on the clamping jaw detects the patch ring, and the patch ring is taken out.

[0011] Further preferably, when the presence sensor detects the patch ring, the clamping claw starts to move while holding the patch ring, and moves the patch ring to a designated position. During the movement of the patch ring held by the clamping claw, if slippage occurs, the presence sensor will identify and send out a warning signal; if an obstacle is encountered, the spring and overpressure sensor will play a role in protecting the equipment and the wafer patch ring, and the overpressure sensor will identify obstacles in transit and send out a warning signal. When the clamping claw holds the patch ring and moves, that is, when it moves forward or backward through the linear slide rail, or when pushing and pulling, the servo motor moves. If an obstacle is encountered during the pushing process, the overpressure sensor will send out a warning signal, and if the patch ring slips during the pulling process, the presence sensor will send out a warning signal.

[0012] Preferably, the patch ring is guided by a hard limit, and according to the hard limit guide, the clamping force of the clamp needs to be controllable, and the clamp pressure is adjusted by a pressure regulating valve to ensure that the patch ring can float in the clamp when it is tensioned.

[0013] Preferably, the patch ring is equipped with a wafer and a fixing film, the fixing film is used to fix the wafer, and the fixing film can be a UV film or a blue film. The patch ring can float in the clamp when it is tensioned.

[0014] Compared with the prior art, the beneficial results of the utility model are:

[0015] The utility model provides a patch ring conveying arm for automatically taking and placing patch rings. The arm is integrated with a presence sensor and an overpressure sensor, which can monitor the position of the patch ring in real time. A warning signal can be issued immediately when a patch is dropped or overpressure occurs. The patch ring conveying arm can achieve self-protection in conjunction with a spring to prevent the patch ring and wafer from damaging expensive wafers during turnover transportation in the production process. At the same time, a pressure regulating valve is configured to control the pressure of the clamping claws to ensure smooth movement of the patch ring during transportation. The patch ring conveying arm proposed in the present application has wide applicability, high safety performance, and can significantly improve the efficiency of production and transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings are included to provide a further understanding of the embodiments and are incorporated into and constitute a part of this specification. The accompanying drawings illustrate the embodiments and are used together with the description to explain the principles of the utility model. It will be easy to recognize other embodiments and many expected advantages of the embodiments because they become better understood by reference to the following detailed description. Other features, objects and advantages of the present application will become more apparent by reading the detailed description of the non-limiting embodiments made with reference to the following drawings:

[0017] Figure 1 It is a structural diagram of one side of a patch ring transmission arm according to a specific embodiment of the utility model;

[0018] Figure 2 is a structural diagram of the other side of the patch ring transmission arm according to a specific embodiment of the utility model;

[0019] Figure 3 It is a diagram showing the internal structure of a synchronous belt module of a patch ring transmission arm according to a specific embodiment of the utility model;

[0020] Figure 4 It is a front view of a patch ring transmission arm according to a specific embodiment of the utility model;

[0021] Figure 5 is a rear view of a patch ring transfer arm according to a specific embodiment of the utility model;

[0022] Figure 6 It is a left view of a patch ring transmission arm according to a specific embodiment of the utility model;

[0023] Figure 7 It is a right side view of a patch ring transmission arm according to a specific embodiment of the utility model;

[0024] Figure 8 It is a top view of a patch ring transmission arm according to a specific embodiment of the utility model;

[0025] Fig. 9 It is a bottom view of a patch ring conveying arm according to a specific embodiment of the utility model;

[0026] Fig.10 It is a structural diagram of the clamping mechanism of the patch ring transmission arm according to a specific embodiment of the utility model;

[0027] The meaning of the numbers in the figure are: 1. Frame; 11. Housing; 12. Housing extension; 13. Support; 2. Synchronous belt module; 21. Synchronous belt; 22. Linear guide rail; 23. Slider; 24. Servo motor; 3. Gripper mechanism; 31. Gripper; 32. Beam; 33. Spring; 35. Overpressure sensor; 36. Fiber optic amplifier; 37. Gripper cylinder; 4. Patch ring; 41. Wafer; 42. Fixed film; 5. Drag chain; 6. Pressure regulating valve. DETAILED DESCRIPTION

[0028] In the following detailed description, reference is made to the accompanying drawings, which form a part of the detailed description and are shown by illustrative specific embodiments in which the present application can be practiced. To this end, directional terms, such as "top", "bottom", "left", "right", "up", "down", etc., are used with reference to the orientation of the figures described. Because the components of the embodiments can be positioned in several different orientations, directional terms are used for the purpose of illustration and are by no means limiting. It should be understood that other embodiments may be utilized or logical changes may be made without departing from the scope of the present application. Therefore, the following detailed description should not be adopted in a limiting sense, and the scope of the present application is defined by the appended claims.

[0029] To facilitate understanding by those skilled in the art, the present invention is further described in detail below with reference to the accompanying drawings and embodiments.

[0030] like Figures 1 to 10 As shown, a patch ring transmission arm is used for automatically picking up and placing patch rings, comprising: a frame 1, a synchronous belt module 2, a clamping claw mechanism 3 and a patch ring 4; the frame 1 comprises: a shell 11, a shell extension 12 and a support member 13; the synchronous belt module 2 is located in the shell 11; wherein according to Figure 3 The internal structure diagram of a synchronous belt module of a patch ring transmission arm is shown, wherein the synchronous belt module 2 includes: a synchronous belt 21, a linear slide rail 22, a slider 23 and a servo motor 24; the clamping mechanism 3 includes: a clamping jaw 31 and a crossbeam 32; the clamping mechanism 3 is installed on the slider 23 and is connected to the synchronous belt 21, and the rotation of the servo motor 24 drives the synchronous belt 21 to rotate, so that the clamping mechanism 3 moves on the linear slide rail 22.

[0031] In some specific embodiments, the patch ring transfer arm proposed in the present application further includes a pressure regulating valve 6 , and the pressure regulating valve 6 is installed on the support member 13 .

[0032] In some specific embodiments, the clamping mechanism 31 further includes a clamping cylinder 37 , and the pressure regulating valve 6 is connected to the clamping cylinder 37 via an air pipe, and the pressure of the clamping cylinder 37 is controlled to adjust the pressure of the clamping mechanism 31 .

[0033] In some specific embodiments, the patch ring conveying arm proposed in the present application also includes a drag chain 5, which is located above the shell extension 12 and connected to the cross beam 32, the cross beam 32 is connected to the slider 23, the cross beam 32 is connected to the clamp cylinder 37 through a connecting element, and the clamp cylinder 37 is connected to the clamp 31.

[0034] In some specific embodiments, Fig.10 As shown in the schematic diagram of the clamp mechanism, the clamp mechanism 3 also includes a spring 33, which is mounted on the connecting element. When the clamp 31 clamps the patch ring 4 and moves, if an obstacle is encountered during the movement, the spring 33 can buffer and protect the device.

[0035] In some specific embodiments, the clamping mechanism 3 also includes: a presence sensor, an overpressure sensor 35 and an optical fiber amplifier 36; the presence sensor is a counter-fiber sensor installed inside the upper and lower plates of the clamp 31, that is, the presence sensor is a counter-fiber sensor respectively on the upper and lower parts of the clamp, the presence sensor is used to detect whether the patch ring 4 is located on the clamp 31, the optical fiber amplifier 36 is installed on the crossbeam 32, and the overpressure sensor 35 is installed on the crossbeam 32.

[0036] In some specific embodiments, when there is material in the basket slot where the patch ring 4 is placed, that is, when the sensor in the basket detects that there is a patch ring 4 that needs to be transported in the basket, the clamping jaw mechanism 3 moves to the specified position, and the patch ring 4 is clamped by the clamping jaw 31. At this time, the presence sensor arranged on the clamping jaw 31 detects the patch ring 4, and then the patch ring 4 is taken out.

[0037] In some specific embodiments, when the presence sensor detects the patch ring 4, the clamp 31 starts to move while clamping the patch ring 4, and moves the patch ring 4 to a specified position. During the movement of the patch ring 4 clamped by the clamp 31, if slippage occurs, the presence sensor identifies and issues a warning signal; if an obstacle is encountered, the spring 33 and the overpressure sensor 35 play a role in protecting the equipment and the wafer patch ring 4, and the overpressure sensor 35 identifies obstacles in the transportation process and issues a warning signal. When the clamp 31 clamps the patch ring 4 and moves, that is, when it moves forward or backward through the linear slide 22, or when pushing and pulling, the servo motor 24 moves. If an obstacle is encountered during the pushing process, the overpressure sensor 35 will issue a warning signal, and if the patch ring 4 slips during the pulling process, the presence sensor will issue a warning signal.

[0038] In some specific embodiments, the patch ring 4 is guided by a hard limit. According to the hard limit guidance, the clamping force of the clamp 31 needs to be controllable, and the pressure of the clamp 31 is adjusted by the pressure regulating valve 6 to ensure that the patch ring 4 can float in the clamp 31 when it is tightened.

[0039] In some specific embodiments, the patch ring 4 is equipped with a wafer 41 and a fixing film 42 . The fixing film 42 is used to fix the wafer 41 . The fixing film 42 may be a UV film or a blue film. The patch ring 4 may float in the clamp 31 when being tightened.

[0040] In a specific embodiment, Figure 1 The structure diagram of one side of a patch ring conveying arm according to a specific embodiment of the utility model is shown, including: a frame 1, a clamping mechanism 3, a patch ring 4, a drag chain 5 and a pressure regulating valve 6; the frame 1 includes: a shell 11, a shell extension 12 and a support 13; the clamping mechanism 3 includes: a clamping claw 31, a crossbeam 32, a spring 33, an overpressure sensor 35, an optical fiber amplifier 36 and a clamping claw cylinder 37, the crossbeam 32 is connected to the clamping claw cylinder 37 through a connecting element, and the spring 33 is installed on the On the connecting element, the clamp cylinder 37 is connected to the clamp 31, and the clamp 31 can clamp the patch ring 4 and move. The overpressure sensor 35 and the optical fiber amplifier 36 are installed on the beam 32. The patch ring 4 is equipped with a wafer 41 and a fixed film 42. The fixed film 42 is used to fix the wafer 41. The drag chain 5 is located above the shell extension 12 and connected to the beam 32. The pressure regulating valve 6 is installed on the support 13, and the pressure regulating valve 6 is connected to the clamp cylinder 37 through an air pipe.

[0041] Figure 2A structural diagram of the other side of a patch ring conveying arm of a specific embodiment of the utility model is shown, including: a shell 11, a shell extension 12, a support 13, a servo motor 24, a crossbeam 32, a patch ring 4, a wafer 41, a fixed film 42, a drag chain 5, and a pressure regulating valve 6. The shell 11 is installed on two supports 13, the shell extension 12 is installed on the shell 11, the servo motor 24 is installed on the shell 11, the patch ring 4 is equipped with a wafer 41 and a fixed film 42, the crossbeam 32 passes through the shell 11 to connect the drag chain 5, the drag chain 5 is located above the shell extension 12, and the pressure regulating valve 6 is installed on the support 13.

[0042] Figure 3 The internal structure diagram of the synchronous belt module of the patch ring transmission arm of a specific embodiment of the utility model is shown, and the synchronous belt module 2 includes: a synchronous belt 21, a linear slide rail 22, a slider 23 and a servo motor 24; a clamping mechanism is installed on the slider 23 and is connected to the synchronous belt 21, and the rotation of the servo motor 24 drives the synchronous belt 21 to rotate, so that the clamping mechanism moves on the linear slide rail 22, and the servo motor 24 is installed on the frame.

[0043] Figure 4 It is a front view of a patch ring conveying arm of a specific embodiment of the utility model, including: a shell 11, a shell extension 12, a support 13, a servo motor 24, a clamp 31 and a clamp cylinder 37, the shell 11 is installed on two supports 13, the shell extension 12 is installed on the shell 11, the servo motor 24 is installed on the shell 11, and the clamp cylinder 37 is connected to the clamp 31.

[0044] Figure 5 It is a rear view of a patch ring conveying arm of a specific embodiment of the utility model, including: a shell 11, a shell extension 12, a support 13, a servo motor 24, a drag chain 5 and a pressure regulating valve 6, the shell 11 is installed on two supports 13, the shell extension 12 is installed on the shell 11, the servo motor 24 is installed on the shell 11, the drag chain 5 is located above the shell extension 12, and the pressure regulating valve 6 is installed on the support 13.

[0045] Figure 6A left view of a patch ring conveying arm of a specific embodiment of the utility model is shown, comprising: a shell 11, a shell extension 12, a support 13, a clamp 31, a beam 32, an overpressure sensor 35, an optical fiber amplifier 36, a patch ring 4, a drag chain 5 and a pressure regulating valve 6, the shell 11 is installed on two supports 13, the shell extension 12 is installed on the shell 11, the optical fiber amplifier 36 is installed on the beam 32, the overpressure sensor 35 is installed on the beam 32, the clamp 31 clamps the patch ring 4, the drag chain 5 is located above the shell extension 12, and the pressure regulating valve 6 is installed on the support 13.

[0046] Figure 7 It is a right view of a patch ring conveying arm of a specific embodiment of the utility model, comprising: a shell 11, a shell extension 12, a support 13, a servo motor 24, a crossbeam 32, an optical fiber amplifier 36, a patch ring 4, a drag chain 5 and a pressure regulating valve 6, wherein the shell 11 is connected to two support members 13, the shell extension 12 is mounted on the shell 11, the servo motor 24 is mounted on the shell 11, the optical fiber amplifier 36 is mounted on the crossbeam 32, the crossbeam 32 passes through the shell 11 to connect the drag chain 5, the drag chain 5 is located above the shell extension 12, the clamping claw mechanism clamps the patch ring 4, and the pressure regulating valve 6 is mounted on the support 13.

[0047] Figure 8 A top view of a patch ring conveying arm of a specific embodiment of the utility model is shown, comprising: a shell 11, a shell extension 12, a clamp 31, a beam 32, a fiber amplifier 36, a clamp cylinder 37, a patch ring 4, a wafer 41, a fixed film 42, a drag chain 5 and a pressure regulating valve 6, the shell extension 12 is installed on the shell 11, the fiber amplifier 36 is installed on the beam 32, the beam 32 is connected to the clamp cylinder 37 through a connecting element, the clamp cylinder 37 is connected to the clamp 31, the clamp 31 clamps the patch ring 4, the patch ring 4 is equipped with a wafer 41 and a fixed film 42, the beam 32 passes through the shell 11 to connect the drag chain 5, the drag chain 5 is located above the shell extension 12, and the pressure regulating valve 6 is located below the shell extension 12.

[0048] Fig. 9 A bottom view of a patch ring conveying arm of a specific embodiment of the utility model is shown, comprising: a shell 11, a shell extension 12, a support 13, a clamp 31, a crossbeam 32, a patch ring 4, a drag chain 5 and a pressure regulating valve 6, the shell extension 12 is installed on the shell 11, the shell 11 connects two support members 13, the clamp 31 clamps the patch ring 4, the drag chain 5 is located above the shell extension 12, and the pressure regulating valve 6 is located below the shell extension 12.

[0049] Fig.10 The structure diagram of the clamping mechanism of the patch ring conveying arm of a specific embodiment of the utility model is shown, including: a clamping jaw 31, a beam 32, a spring 33, an overpressure sensor 35, an optical fiber amplifier 36 and a clamping jaw cylinder 37, the beam 32 is connected to the clamping jaw cylinder 37 through a connecting element, the clamping jaw cylinder 37 is connected to the clamping jaw 31, the spring 33 is installed on the connecting element, and the overpressure sensor 35 and the optical fiber amplifier 36 are installed on the beam 32.

[0050] In a specific embodiment, Figures 1 to 10 As shown,

[0051] Removal process: When the sensor in the basket detects that there is a patch ring 4 that needs to be transported in the basket, the clamping jaw mechanism 3 moves to the specified position, and the patch ring 4 is clamped by the clamping jaw 31. At this time, the presence sensor set on the clamping jaw 31 detects the patch ring 4, and the patch ring 4 is taken out. The clamping jaw 31 can move through the servo motor 24 to clamp the patch ring 4 and pull the patch ring 4 to the required position. During this period, if the patch ring 4 slips, it can be identified by the presence sensor and a warning signal can be issued.

[0052] Placement process: When the work on the patch ring is completed, the clamp 31 clamps the patch ring 4 and moves through the servo motor 24 to push the patch ring 4 forward to the basket. If an obstacle is encountered during the movement, the spring 33 and the overpressure sensor 35 can identify and protect the device and the patch ring 4.

[0053] In the above process, the clamping jaw pressure can be adjusted by the pressure regulating valve 6 to ensure that the patch ring 4 can float in the clamping jaw 31 when in a tensioned state.

[0054] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the utility model involved in the present application is not limited to the technical solution formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the above utility model concept. For example, the above features are replaced with the technical features with similar functions disclosed in this application (but not limited to) by each other.

[0055] Obviously, those skilled in the art can make various modifications and changes to the embodiments of the present application without departing from the spirit and scope of the present application. In this way, if these modifications and changes are within the scope of the claims of the present application and their equivalents, the present application is also intended to cover these modifications and changes. The word "comprising" does not exclude the presence of other elements or steps not listed in the claims. The simple fact that certain measures are recorded in mutually different dependent claims does not indicate that the combination of these measures cannot be used to profit. Any figure mark in the claims should not be considered to limit the scope.

Claims

1. A patch ring transmission arm, characterized in that: include: Frame, synchronous belt module, clamping mechanism and patch ring; The frame comprises: a shell, a shell extension and a support member; the synchronous belt module is located in the shell; The synchronous belt module comprises: a synchronous belt, a linear slide rail, a slider and a servo motor; The clamping mechanism comprises: a clamping jaw and a crossbeam; the clamping mechanism is installed on the sliding block and connected to the synchronous belt, and the rotation of the servo motor drives the synchronous belt to rotate, so that the clamping mechanism moves on the linear slide rail.

2. A patch ring conveying arm according to claim 1, characterized in that: It also includes a pressure regulating valve, which is installed on the support member.

3. A patch ring conveying arm according to claim 2, characterized in that: The clamping mechanism also includes a clamping cylinder, and the pressure regulating valve is connected to the clamping cylinder through an air pipe, and the clamping pressure is adjusted by controlling the pressure of the clamping cylinder.

4. A patch ring conveying arm according to claim 3, characterized in that: It also includes a drag chain, which is located above the shell extension and connected to the crossbeam, the crossbeam is connected to the slider, the crossbeam is connected to the clamping claw cylinder through a connecting element, and the clamping claw cylinder is connected to the clamping claw.

5. A patch ring conveying arm according to claim 4, characterized in that: The clamping mechanism further comprises a spring, and the spring is mounted on the connecting element.

6. A patch ring conveying arm according to claim 1, characterized in that: The clamping mechanism also includes: a seat presence sensor, an overpressure sensor and an optical fiber amplifier; the seat presence sensor is a corresponding optical fiber sensor installed on the upper and lower clamping plates of the clamping jaw, the optical fiber amplifier is installed on the crossbeam, and the overpressure sensor is installed on the crossbeam.

7. A patch ring conveying arm according to claim 6, characterized in that: When there is material in the basket groove where the patch ring is placed, the clamping claw mechanism moves to a specified position, and the patch ring is clamped by the clamping claw. At this time, the patch ring is detected by the on-site sensor, and the patch ring is taken out.

8. A patch ring conveying arm according to claim 6, characterized in that: When the presence sensor detects the patch ring, the clamping claw clamps the patch ring and starts to move, and moves the patch ring to a specified position.

9. A patch ring conveying arm according to claim 1, characterized in that: The patch ring is guided by a hard limit.

10. A patch ring conveying arm according to claim 1, characterized in that: The patch ring is equipped with a wafer and a fixing film, and the patch ring can float in the clamping jaws when being tensioned.

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