Adjustable Mapping support suitable for wafers of different sizes

Abstract

The utility model discloses an adjustable Mapping support suitable for wafers of different sizes, which belongs to the technical field of wafers, and comprises a fixed frame and two movable arms, the two movable arms are connected on the fixed frame in a relatively movable manner along the same direction, each movable arm is provided with a locking piece and a positioning piece, and the locking piece and the positioning piece are fixed on the fixed frame. The locking piece is used for locking the movable arm at any position on the fixed frame, the positioning piece is used for limiting the movable arm at a preset position on the fixed frame, and a plurality of positioning grooves matched with the positioning piece are correspondingly formed in the fixed frame. The wafer mapping detection device is simple in structure and reasonable in design, and can adapt to mapping condition detection of wafers of different sizes by adjusting the relative positions of the two movable arms.

Description

Technical Field

[0001] The utility model relates to the technical field of wafers, and in particular to an adjustable Mapping bracket suitable for wafers of different sizes. Background Art

[0002] Wafer refers to the silicon chip used in the production of silicon semiconductor integrated circuits. Because of its round shape, it is called a wafer. Wafer is the carrier used in the production of integrated circuits and is the most commonly used semiconductor material. It is divided into 4-inch, 6-inch, 8-inch, 12-inch and other specifications according to its diameter.

[0003] Semiconductor production and testing equipment often have automatic transmission functions to achieve accurate material identification, feeding, processing and management. Mapping detection of wafer distribution in wafer cassettes is one of the common functions. Through mapping detection, the distribution of wafers in the wafer cassette is detected and judged. The output results of wafer distribution judgment generally include: F = normal one, E = empty, D = overlapping, T = tilt in the slot, C = cross between slots, U = unknown, N = unmeasured.

[0004] At present, the position of the wafer is mainly detected by a through-beam sensor. For a through-beam sensor, the distance between its transmitter and receiver needs to change with the size of the wafer. In the prior art, the transmitter and receiver in the through-beam sensor are fixedly mounted on the finger connector respectively. Therefore, for each size of wafer, a finger connector of a certain model and specification needs to be configured separately. This results in the need to replace the finger connector when the size of the wafer changes. The finger connector is usually also used as a mounting carrier for the wafer suction finger. When replacing the finger connector, the wafer suction finger is also involved in the disassembly and assembly, which makes the sensor replacement procedure more cumbersome, seriously affecting the wafer production efficiency. Utility Model Content

[0005] In view of the problem in the prior art that when the wafer specifications targeted by mapping situation detection change, the sensor replacement is cumbersome, thereby affecting production efficiency, the purpose of the utility model is to provide an adjustable Mapping bracket suitable for wafers of different sizes, so as to at least partially solve the above problem.

[0006] To achieve the above purpose, the technical solution of the utility model is:

[0007] An adjustable Mapping bracket suitable for wafers of different sizes, comprising a fixed frame and a movable arm, wherein the movable arms are two, and the two movable arms are connected to the fixed frame in a relatively movable manner in the same direction, and each movable arm is installed with a locking member and a positioning member, wherein the locking member is used to lock the movable arm at any position on the fixed frame, and the positioning member is used to limit the movable arm to a predetermined position on the fixed frame, and the fixed frame is correspondingly provided with a plurality of positioning grooves adapted to the positioning members.

[0008] In some preferred embodiments, a slide groove or a slide rail is provided on the fixed frame, and the two movable arms are installed on the slide groove or the slide rail.

[0009] In some preferred embodiments, the locking member is a screw, and a threaded hole matching the screw is provided on the movable arm.

[0010] In some preferred embodiments, the positioning member is a positioning bead.

[0011] In some preferred embodiments, there are two pairs of four positioning grooves, and the four positioning grooves are arranged in a row along the moving direction of the movable arm.

[0012] In some preferred embodiments, the fixing frame is further provided with a mounting hole.

[0013] In some preferred embodiments, the movable arm includes a connecting section and an extension section which are vertically connected to each other, and the connecting section is relatively movably connected to the fixing frame.

[0014] In some preferred embodiments, a strip groove is provided on the surface of the extension section along the length direction, and a sensor is arranged at one end of the strip groove away from the fixed frame; the movable arm also includes a closing cover for closing the strip groove and pressing the sensor at the same time, and the closing cover is detachably fixedly connected to the extension section.

[0015] In some preferred embodiments, the extension section and / or the closing cover is provided with a threading hole, and the wire is passed through the threading hole and then inserted into the strip groove to be electrically connected to the sensor.

[0016] By adopting the above technical scheme, the beneficial effect of the utility model is that: through the setting of a fixed frame, two movable arms equipped with sensors and movably connected relative to the fixed frame, and a locking part and a positioning part for locking and positioning the movable arms, the two movable arms can be relatively fixed at a set distance, thereby meeting the layout distance requirements of wafers of different sizes for the through-type sensor, so that mapping situation detection of wafers of different specifications can be realized without disassembling the bracket, thereby improving production efficiency compared with the existing technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the utility model.

[0018] Figure 2 It is the front view of the utility model.

[0019] Figure 3 It is the right view of the utility model.

[0020] Figure 4 For along Figure 2 Section view along line AA.

[0021] Figure 5 For along Figure 3 Cross-sectional view along line BB.

[0022] Figure 6 for Figure 5 A partial enlarged view of point C in the middle.

[0023] Figure 7 For along Figure 2 Sectional view along line DD.

[0024] In the figure: 1-fixed frame, 2-movable arm, 21-connecting section, 22-extension section, 23-strip groove, 24-closing cover, 25-threading hole, 3-locking piece, 4-positioning piece, 5-positioning groove, 6-mounting hole, 7-sensor. DETAILED DESCRIPTION

[0025] The specific implementation methods of the present invention are further described below in conjunction with the accompanying drawings. It should be noted that the description of these implementation methods is used to help understand the present invention, but does not constitute a limitation of the present invention. In addition, the technical features involved in each implementation method of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0026] It should be noted that, in the description of the present invention, the directions or positional relationships indicated by the terms "upper", "lower", "left", "right", "front", "back", etc. are based on the description of the structure of the present invention as shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0027] The "first" and "second" in this technical solution are only used to distinguish the names of the same or similar structures, or corresponding structures with similar functions, and are not an arrangement of the importance of these structures, nor do they have a ranking, comparison of size, or other meanings.

[0028] In addition, unless otherwise clearly specified and limited, the terms "installation" and "connection" should be understood in a broad sense. For example, the connection can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be a connection between the two structures. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood based on the overall idea of ​​the utility model and the specific context of the scheme.

[0029] Example

[0030] The utility model provides an adjustable mapping bracket suitable for wafers of different sizes, such as Figure 1-7 As shown, it includes a fixed frame 1 and a movable arm 2.

[0031] The fixing frame 1 is in a long strip shape, and a slide groove, such as a T-shaped slide groove or a dovetail-shaped slide groove, is provided on one side of the fixing frame 1 along its length. The two ends of the slide groove extend to the two end surfaces of the fixing frame 1, respectively, so as to facilitate the disassembly and assembly of the movable arm 2. Of course, in other preferred embodiments, the slide groove can also be replaced by a slide rail, which is integrally formed on the fixing frame 1.

[0032] There are two movable arms 2, and one end of each of the two movable arms 2 is provided with a slider used in conjunction with the above-mentioned slide slot, so that the two movable arms 2 can be relatively movably connected to the fixed frame 1 in the same direction. In order to improve the stability of the movable arm 2, the movable arm 2 is configured to have an L-shaped structure as a whole, that is, the movable arm 2 includes a connecting section 21 and an extension section 22 that are perpendicular to each other, and the two are integrally formed and manufactured. The connecting section 21 is provided with a slider of a similar length, so that the movable arm 2 increases the matching length with the fixed frame 1 through the slider with an increased size of the section.

[0033] In addition, each movable arm 2 (the connecting section 21 thereof) is provided with a locking member 3 and a positioning member 4. The locking member 3 is used to lock the movable arm 2 at any position on the fixing frame 1, and the positioning member 4 is used to limit the movable arm 2 to a predetermined position on the fixing frame 1, and the fixing frame 1 is also provided with a plurality of positioning grooves 5 adapted to the positioning member 4.

[0034] In this embodiment, the locking member 3 is configured as a screw, and a threaded hole adapted to the screw is provided on the movable arm 2 (the connecting section 21 thereof). In this configuration, when the locking member 3 is rotated so that its end abuts against the fixing frame 1, the movable arm 2 can be locked at any position on the fixing frame 1 by the friction force between the locking member 3 and the fixing frame 1.

[0035] In this embodiment, the positioning member 4 is configured as a positioning ball, which is fixedly mounted on the movable arm 2 (the connecting section 21 thereof). For example, an assembly hole is opened on the movable arm 2 (the connecting section 21 thereof), and then the positioning member 4 is fixed in the assembly hole so that the ball at the end of the positioning member 4 can be freely exposed. In addition, the two positioning members 4 are respectively arranged at the same position of the two movable arms 2, that is, the two movable arms 2 (including the positioning members 4 arranged thereon) are exactly the same.

[0036] In addition, there are two pairs of positioning grooves 5, four in total, which are arranged in a row along the moving direction of the movable arm 2 (actually along the length direction of the slide groove on the fixed frame 1). Moreover, the two pairs of positioning grooves 5 are symmetrically arranged with respect to the plane of the fixed frame 1 (the bisector perpendicular to the length direction of the fixed frame 1), so as to be adapted to the positioning members 4 on the two movable arms 2.

[0037] In this way, when the two movable arms 2 are positioned at the two inner positioning grooves 5 by the positioning member 4, the two movable arms 2 are symmetrical about the length direction of the fixed frame 1, and the distance between the two movable arms 2 (the extended sections 22 therein) is dimension a. The dimension a configured in this embodiment is 72 mm, so as to be suitable for the mapping situation detection of 4-inch wafers; when the two movable arms 2 are positioned at the two outer positioning grooves 5 by the positioning member 4, the two movable arms 2 are still symmetrical about the length direction of the fixed frame 1, and the distance between the two movable arms 2 (the extended sections 22 therein) is dimension b. The dimension b configured in this embodiment is 112 mm, so as to be suitable for the mapping situation detection of 6-inch, 8-inch or 12-inch wafers. Of course, in other preferred embodiments, the dimensions a and b can also be other values, so as to be suitable for the mapping situation detection of wafers of other sizes, or more than two pairs of positioning grooves 5 (for example, three pairs, corresponding to the third dimension c) are configured, so as to meet the mapping situation detection of wafers of other sizes.

[0038] The fixing frame 1 is provided with a mounting hole 6, for example, the mounting hole 6 is configured as a countersunk hole and is provided at the bottom of the slide slot so as not to affect the installation and movement of the movable arm 2, and the mounting holes 6 are usually arranged in two or more symmetrical shapes with respect to the length direction of the fixing frame 1. When in use, the fixing frame 1 is fixed to the wafer robot by screws or bolts passing through the mounting holes 6 thereof.

[0039] The movable arm 2 (the extended section 22 therein) is fixedly mounted with a sensor 7, and the two sensors 7 constitute a cross-beam sensor for mapping situation detection. In this embodiment, a strip groove 23 is specifically provided on the surface of the extended section 22 along its length direction, and the strip groove 23 passes through to the end of the extended section 22 away from the fixed frame 1, and the sensor 7 is arranged at the end of the strip groove 23 away from the fixed frame 1. In addition, the movable arm 2 also includes a closing cover 24 for closing the strip groove 23, and the closing cover 24 is also used to press the sensor 7, and the closing cover 24 is detachably fixedly connected to the extended section 22 by screws.

[0040] The extension section 22 is also provided with a threading hole 25, which is connected to the strip groove 23. The wire (connected to the sensor 7 and used to transmit electrical energy and signals) passes through the threading hole 25 into the strip groove 23 and is electrically connected to the sensor 7. Of course, in other preferred embodiments, the threading hole 25 can also be provided on the closing cover 24, or the threading hole 25 can be provided on both the closing cover 24 and the extension section 22.

[0041] The use process of the adjustable mapping bracket applicable to wafers of different sizes provided by the embodiment of the utility model is as follows:

[0042] When in use, the fixing frame 1 is fixed on the wafer manipulator, and the wire connected to the sensor 7 is connected to the corresponding device. When it is necessary to perform mapping status detection on a 4-inch wafer, the two movable arms 2 are moved so that the positioning members 4 thereon are positioned at the two inner positioning grooves 5, and then the two movable arms 2 are locked by the locking member 3. At this time, the distance between the two movable arms 2 (the extended sections 22 therein) is dimension a, i.e., 72 mm, so as to be suitable for mapping status detection of 4-inch wafers. When it is necessary to perform mapping status detection on a 6-inch, 8-inch or 12-inch wafer, the two movable arms 2 are moved so that the positioning members 4 thereon are positioned at the two outer positioning grooves 5, and then the two movable arms 2 are locked by the locking member 3. At this time, the distance between the two movable arms 2 (the extended sections 22 therein) is dimension b, i.e., 112 mm, so as to be suitable for mapping status detection of a 6-inch, 8-inch or 12-inch wafer.

[0043] Compared with the mapping bracket in the prior art, the mapping bracket provided by the embodiment of the utility model can be adapted to wafers of different sizes, which can not only reduce the number of types of mapping brackets, but also has the advantages of fast adjustment speed and no drag on the efficiency of mapping situation detection.

[0044] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions and variations of these embodiments are made without departing from the principles and spirit of the present invention, and still fall within the scope of protection of the present invention.

Claims

1. An adjustable mapping bracket suitable for wafers of different sizes, characterized by: The invention comprises a fixed frame (1) and a movable arm (2), wherein there are two movable arms (2), and the two movable arms (2) are connected to the fixed frame (1) in a relatively movable manner in the same direction, and each movable arm (2) is provided with a locking member (3) and a positioning member (4), wherein the locking member (3) is used to lock the movable arm (2) at any position on the fixed frame (1), and the positioning member (4) is used to limit the movable arm (2) to a predetermined position on the fixed frame (1), and the fixed frame (1) is provided with a plurality of positioning grooves (5) corresponding to the positioning members.

2. The adjustable Mapping bracket according to claim 1, characterized in that: The fixed frame (1) is provided with a slide groove or a slide rail, and the two movable arms (2) are both mounted on the slide groove or the slide rail.

3. The adjustable Mapping bracket according to claim 1, characterized in that: The locking member (3) is a screw, and the movable arm (2) is provided with a threaded hole matched with the screw.

4. The adjustable Mapping bracket according to claim 1, characterized in that: The positioning member (4) is a positioning bead.

5. The adjustable Mapping bracket according to claim 1, characterized in that: There are two pairs of the positioning grooves (5), four in total, and the four positioning grooves (5) are arranged in a row along the movement direction of the movable arm (2).

6. The adjustable Mapping bracket according to claim 1, characterized in that: The fixing frame (1) is also provided with a mounting hole (6).

7. The adjustable Mapping bracket according to claim 1, characterized in that: The movable arm (2) comprises a connecting section (21) and an elongated section (22) which are vertically connected to each other, and the connecting section (21) is relatively movably connected to the fixing frame (1).

8. The adjustable Mapping bracket according to claim 7, characterized in that: A strip groove (23) is formed on the surface of the elongated section (22) along the length direction, and a sensor (7) is arranged at one end of the strip groove (23) away from the fixed frame (1); the movable arm (2) further comprises a closing cover (24) for closing the strip groove (23) and pressing the sensor (7) at the same time, and the closing cover (24) is detachably fixedly connected to the elongated section.

9. The adjustable Mapping bracket according to claim 8, characterized in that: The extension section and / or the closing cover (24) is also provided with a threading hole (25), through which a wire is passed into the strip-shaped groove (23) and then electrically connected to the sensor (7).

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