Cryogenic grinding equipment for target production

Abstract

The utility model relates to the technical field of target material production, and in particular to a low-temperature grinding device for target material production, comprising an airflow control component and a processing component, wherein the airflow control component comprises a compressor, an electric heater, an evaporator, a condenser and a nozzle, wherein the compressor generates high-pressure gas which passes through the electric heater through a pipeline, a drain valve is arranged at the bottom of the condenser, the processing component comprises a processing table, a control motor, an electric telescopic rod, a spring air cushion and a detachable grinding disc, a target material is mounted on the upper surface of the processing table, the low-temperature grinding device for target material production applies pressure to the detachable grinding disc through the spring air cushion, ensures that the detachable grinding disc effectively grinds the surface of the target material while avoiding damage to the surface of the target material caused by excessive extrusion, and achieves dust removal and cooling effects by spraying the grinding area with external cooling water during the grinding process, and timely dries the grinding area through high-pressure dry air to ensure the surface quality of the target material and the use effect of the target material.

Description

Technical Field

[0001] The utility model relates to the technical field of target material production, in particular to a low-temperature grinding device for target material production. Background Art

[0002] Target material is the core material used in the thin film preparation process. It serves as a target for high-speed energetic particles and forms various functional thin films on the substrate by sputtering. Target materials are usually located in the middle of the semiconductor industry chain, and there are many types of them. At present, in the target material production process, when processing the surface of the flat target material, most of them use sandpaper to grind the target surface, and then use an air gun to blow away the dust particles after grinding, or use dust-free tape to remove them. However, using an air gun to blow away dust particles can easily cause ground pollution. The surface of the target material ground by sandpaper is easy to cause ignition difficulties and abnormal sputtering rate after the target material is put on the machine. Utility Model Content

[0003] The utility model aims at the defects in the prior art and provides a low-temperature grinding device for target material production.

[0004] The utility model is realized through the following technical solutions:

[0005] A low-temperature grinding device for target material production comprises an airflow control component and a processing component, wherein the airflow control component comprises a compressor, an electric heater, an evaporator, a condenser and a nozzle, wherein the compressor generates high-pressure gas which passes through the electric heater through a pipeline, a drain valve is arranged at the bottom of the condenser, and the processing component comprises a processing table, a control motor, an electric telescopic rod, a spring air cushion and a detachable grinding disc, wherein a target material is mounted on the upper surface of the processing table, an adjustment frame is arranged on the top of the processing table, the control motor is mounted on one side of the adjustment frame on the top of the processing table, the electric telescopic rod is mounted on the output end of the control motor, the spring air cushion is mounted on the bottom of the telescopic end of the electric telescopic rod, and the detachable grinding disc is mounted on the bottom of the spring air cushion.

[0006] In a preferred embodiment of the utility model, coils are arranged inside the condenser and the evaporator, and the coil inside the condenser is connected in series with the coil inside the evaporator in a closed circuit.

[0007] In a preferred embodiment of the utility model, a target material is arranged on the upper surface of the processing table, and the bottom of the removable grinding disc is in contact with the upper surface of the target material;

[0008] The removable grinding disc is used to grind the target surface through the spring air cushion to effectively ensure the grinding effect while avoiding excessive extrusion of the target surface.

[0009] In a preferred embodiment of the utility model, a cooling water pipe is provided on one side of the control motor, and a water outlet end of the cooling water pipe is located outside one side of the detachable grinding disc.

[0010] In a preferred embodiment of the utility model, the nozzle air outlet end is located outside the top of the target material, and its air outlet end is located outside one side of the removable grinding disc;

[0011] The cooling water pipe sprays cooling water on the grinding area to reduce dust and effectively cool it. The nozzle sprays dry air to clean the coolant and dust generated by grinding.

[0012] The beneficial effects of the utility model are:

[0013] The low-temperature grinding device for target material production applies pressure to the removable grinding disc through a spring air cushion to ensure that the removable grinding disc can effectively grind the surface of the target material while avoiding damage to the target surface caused by excessive squeezing. During the grinding process, the grinding area is sprayed with external cooling water to achieve dust reduction and temperature reduction effects, and the grinding area is dried in time with high-pressure dry air to ensure the surface quality of the target material and the use effect of the target material. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the equipment connection structure of the low-temperature grinding device for target material production of the utility model;

[0015] Figure 2 It is a schematic diagram of the structure of the airflow control component of the low-temperature grinding device for target material production of the utility model;

[0016] Figure 3 It is a schematic diagram of the structure of the processing components of the low-temperature grinding device for target material production of the utility model;

[0017] Figure 4 It is a schematic diagram of the top view of the processing components of the low-temperature grinding device for target material production of the utility model.

[0018] In the figure: 1. air flow control component; 11. compressor; 12. electric heater; 13. evaporator; 14. condenser; 15. drain valve; 16. nozzle; 2. processing component; 21. processing table; 22. control motor; 23. electric telescopic rod; 24. spring air cushion; 25. removable grinding disc; 26. cooling water pipe; 3. target material. DETAILED DESCRIPTION

[0019] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more specific definition of the protection scope of the present invention. The directional terms mentioned in the present invention, such as "up", "down", "front", "back", "left", "right", "top", "bottom", etc., are only for reference to the directions of the attached drawings. Therefore, the directional terms used are used to illustrate and understand the present invention, rather than to limit the present invention.

[0020] like Figure 1-4 A low-temperature grinding device for target material production shown in the figure includes an airflow control component 1 and a processing component 2. The airflow control component 1 includes a compressor 11, an electric heater 12, an evaporator 13, a condenser 14 and a nozzle 16. The compressor 11 generates high-pressure gas that passes through the electric heater 12 through a pipeline. A drain valve 15 is provided at the bottom of the condenser 14. The processing component 2 includes a processing table 21, a control motor 22, an electric telescopic rod 23, a spring air cushion 24 and a detachable grinding disc 25. A target material 3 is installed on the upper surface of the processing table 21, an adjustment frame is provided on the top of the processing table 21, the control motor 22 is installed on one side of the adjustment frame at the top of the processing table 21, the electric telescopic rod 23 is installed at the output end of the control motor 22, the spring air cushion 24 is installed at the bottom of the telescopic end of the electric telescopic rod 23, and the detachable grinding disc 25 is installed at the bottom of the spring air cushion 24.

[0021] Specifically, coils are provided inside the condenser 14 and the evaporator 13. The coils inside the condenser 14 are connected in series in a closed circuit with the coils inside the evaporator 13. A target material 3 is provided on the upper surface of the processing table 21. The bottom of the removable grinding disc 25 contacts the upper surface of the target material 3. A cooling water pipe 26 is provided on one side of the control motor 22. The water outlet end of the cooling water pipe 26 is located on the outside of one side of the removable grinding disc 25. The air outlet end of the nozzle 16 is located on the outside of the top of the target material 3, and its air outlet end is located on the outside of one side of the removable grinding disc 25.

[0022] In this embodiment, the target material is first installed and fixed on the surface of the processing table 21, and then the compressor 11 is started. The compressor 11 passes the high-pressure gas through the evaporator 13 and the condenser 14 to separate the internal moisture, so that the gas sprayed from the nozzle 16 is a low-temperature dry gas, and the moisture in the air will be discharged from the drain valve 15 at the bottom of the evaporator 13.

[0023] Furthermore, the adjustment frame on the top of the processing table 21 will adjust the control motor 22 to move along the X and Y directions, so as to evenly grind the surface of the target material. The adjustment of the telescopic end of the electric telescopic rod 23 adjusts the pressure exerted on the spring air cushion 24, thereby changing the pressure exerted by the spring air cushion 24 on the removable grinding disc 25, and ensuring that no excessive pressure is applied during the grinding process, thereby protecting the surface quality of the target material, and controlling the rotation of the motor 22 to achieve grinding work. During the grinding process, the cooling water pipe 26 connected to the external cooling water source sprays coolant to quickly cool the grinding area and avoid dust generation. At this time, the high-speed dry airflow ejected from the air outlet end of the nozzle 16 dries and cleans the surface of the target material, thereby ensuring the surface quality of the target material and the use effect of the target material.

[0024] It should be noted that the parts not covered in the present invention are the same as the prior art or can be implemented by the prior art; the various drives in the present invention can be implemented by corresponding power structures such as cylinders, oil cylinders, electric cylinders, motors, etc. in combination with connecting rods, guide rods, etc., and are not limited to the description in the specification and the structures in the drawings.

[0025] In the description of the embodiments of the present utility model, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "set", "provided with", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0026] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model.

Claims

1. A cryogenic grinding device for target material production, comprising an airflow control component (1) and a processing component (2), characterized in that: The airflow control assembly (1) comprises a compressor (11), an electric heater (12), an evaporator (13), a condenser (14) and a nozzle (16); the compressor (11) generates high-pressure gas which passes through the electric heater (12) through a pipeline; a drain valve (15) is provided at the bottom of the condenser (14); The processing assembly (2) comprises a processing table (21), a control motor (22), an electric telescopic rod (23), a spring air cushion (24) and a detachable grinding disc (25); a target material (3) is mounted on the upper surface of the processing table (21); an adjustment frame is arranged on the top of the processing table (21); the control motor (22) is mounted on one side of the adjustment frame on the top of the processing table (21); the electric telescopic rod (23) is mounted on the output end of the control motor (22); the spring air cushion (24) is mounted on the bottom of the telescopic end of the electric telescopic rod (23); and the detachable grinding disc (25) is mounted on the bottom of the spring air cushion (24).

2. The cryogenic grinding device for target material production according to claim 1, characterized in that: Coils are arranged inside the condenser (14) and the evaporator (13), and the coils inside the condenser (14) and the coils inside the evaporator (13) are connected in series in a closed circuit.

3. The cryogenic grinding device for target material production according to claim 1, characterized in that: A target material (3) is arranged on the upper surface of the processing table (21), and the bottom of the detachable grinding disc (25) is in contact with the upper surface of the target material (3).

4. The cryogenic grinding device for target production according to claim 1, characterized in that: A cooling water pipe (26) is disposed on one side of the control motor (22), and a water outlet end of the cooling water pipe (26) is located outside one side of the detachable grinding disc (25).

5. The cryogenic grinding device for target material production according to claim 3, characterized in that: The air outlet end of the nozzle (16) is located outside the top of the target material (3), and the air outlet end is located outside one side of the detachable grinding disc (25).

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