A disassembly and assembly auxiliary device

Abstract

The utility model provides a disassembly and assembly auxiliary device, wherein a rotating tray includes a groove, and the rotating tray can be rotatably installed on a bearing platform; a lifting structure is connected to the bottom surface of the bearing platform; the lifting structure is located on a chassis; the chassis is located on a moving platform, and a limiter is fixed to the edge of the moving platform. The utility model sets a rotating tray so that the components to be disassembled can be rotated to align with the positions to be disassembled, thereby reducing the difficulty of rotating and aligning the components to be disassembled; at the same time, the positioning marks of the rotating tray and the bearing platform are used to improve the alignment efficiency; in addition, the limiter is used to achieve the alignment engagement between the chassis, the moving platform and the position to be disassembled, thereby improving the alignment efficiency; finally, the lifting structure is used to transport the components to be disassembled, thereby saving the time and manpower required for disassembly and assembly, shortening the equipment recovery time, improving the equipment maintenance efficiency and utilization rate, reducing the probability of generating dust particles during disassembly and assembly, improving the environmental cleanliness of the reaction chamber, and improving the product yield.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor equipment, in particular to a disassembly and assembly auxiliary device. Background Art

[0002] In the field of integrated circuit manufacturing, dry etching is a common etching process. Dry etching is to pass a specific etching gas into the surface of the wafer placed in the reaction chamber. Under specific conditions, the etching gas reacts chemically with the substances on the surface of the wafer to achieve the purpose of etching. During the dry etching process, the pressure of the reaction chamber will affect the etching rate, and then affect the stability of the etching process. Therefore, it is particularly important to control the pressure of the reaction chamber.

[0003] During the dry etching process, the pressure in the etching chamber is usually controlled by an adaptive pressure controller (APC) at the bottom of the etcher. The adaptive pressure controller is connected to the turbomolecular pump. The servo motor of the adaptive pressure controller controls the rotation angle of the valve disc. The locking ring of the turbomolecular pump controls the opening of the turbomolecular pump. The locking ring and the valve disc are correspondingly buckled, and they work together to control the opening of the pipeline for vacuuming the etching chamber, thereby adjusting the gas pressure in the reaction chamber. In daily production, the adaptive pressure controller and the locking ring need regular maintenance. During the maintenance of the locking ring, due to its unique structure and installation position, it is more laborious to install, and it often requires two people to install it together. The installation efficiency is low, and it is easy to generate dust particles that affect the environmental cleanliness of the reaction chamber and the yield of the wafers after the reaction in the etching chamber.

[0004] Therefore, there is an urgent need for a disassembly and assembly structure that can improve the disassembly and assembly efficiency of the lock ring of the adaptive pressure controller and reduce the generation of dust particles during the disassembly and assembly process.

[0005] It should be noted that the above introduction to the technical background is only for the convenience of providing a clear and complete description of the technical solutions of the present application and for the convenience of understanding by those skilled in the art. It cannot be considered that the above technical solutions are well known to those skilled in the art simply because these solutions are described in the background technology part of the present application. Utility Model Content

[0006] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a disassembly and assembly auxiliary device for solving the problems of low disassembly and assembly efficiency and easy generation of dust particles of the lock ring of the adaptive pressure controller in the prior art.

[0007] In order to achieve the above purpose and other related purposes, the utility model provides the following technical solutions:

[0008] In a first aspect, the utility model provides a disassembly and assembly assisting device, the disassembly and assembly assisting device comprising: a rotating tray, a bearing platform, a lifting structure, a chassis, a stopper and a moving platform;

[0009] The rotating tray includes a groove;

[0010] The rotating tray can be rotatably mounted on the supporting platform; the upper end of the lifting structure is connected to the bottom surface of the supporting platform to drive the lifting and lowering of the supporting platform and the rotating tray; the lower end of the lifting structure is connected to the chassis; the mobile platform can move to a position, and the chassis is located on the mobile platform; the limiter is fixed to the edge of the mobile platform to limit the position of the chassis.

[0011] Optionally, a gap of a preset size is provided at a preset position of the groove.

[0012] Optionally, 3. the lifting structure includes a lifting rod, a sliding rod, a transmission rod and a driving rod;

[0013] The carrying platform comprises a carrying surface and two oppositely arranged fixing plates, wherein the two fixing plates of the carrying platform are respectively located at two parallel edges below the carrying surface; the chassis comprises a bottom surface and two oppositely arranged fixing plates, wherein the two fixing plates of the chassis are respectively located at two parallel edges above the bottom surface; the four fixing plates are parallel to each other;

[0014] Each group of the lifting rods includes a first cross rod and a second cross rod, and the first cross rod and the second cross rod in each group of the lifting rods are cross-connected and rotatably connected at the midpoint; the transmission rod includes a first transmission rod and a second transmission rod, the upper end of the first cross rod of each group of the lifting rods is slidably connected to the second transmission rod, the lower end of the second cross rod of each group of the lifting rods is slidably connected to the first preset position of the first transmission rod, the lower end of the first cross rod of each group of the lifting rods is rotatably connected to the chassis, and the upper end of the second cross rod of each group of the lifting rods is rotatably connected to the bearing platform;

[0015] The sliding rod comprises a first group of sliding rods and a second group of sliding rods; the first transmission rod is slidably mounted on the first group of sliding rods, and each of the sliding rods in the first group of sliding rods is slidably connected to the lower end of the second cross rod in a group of corresponding lifting rods through the first transmission rod; the second transmission rod is slidably mounted on the second group of sliding rods, and each of the sliding rods in the second group of sliding rods is slidably connected to the upper end of the first cross rod in a group of corresponding lifting rods through the second transmission rod; the two ends of the second group of sliding rods sleeved with the second transmission rod are respectively fixedly connected to the two fixed plates of the bearing platform, and the two ends of the first group of sliding rods sleeved with the first transmission rod are respectively fixedly connected to the two fixed plates of the chassis, and all the sliding rods are parallel to each other; the length direction of the transmission rod is perpendicular to the length direction of the lifting rod and the length direction of the sliding rod;

[0016] A threaded hole is provided at the second preset position of the first transmission rod, and the driving rod is provided with a thread. The driving rod passes through one of the fixed plates of the chassis to form a threaded transmission connection with the first transmission rod. The direction of the central axis of the thread of the driving rod is consistent with the length direction of the sliding rod, and the projections of the first preset position and the second preset position in the length direction of the first transmission rod do not overlap.

[0017] Optionally, the lifting structure includes more than or equal to 2 groups of lifting rods, and the planes where the first cross rods and the second cross rods of each group of lifting rods are located are parallel.

[0018] Optionally, the driving rod includes a pushing shaft, a connecting shaft and a transmission shaft, the transmission shaft is provided with the thread which is threadedly connected to the transmission rod, the connecting shaft is perpendicular to the transmission shaft, and the pushing shaft is parallel to the transmission shaft; one end of the connecting shaft is fixedly connected to the transmission shaft, and the other end of the connecting shaft is fixedly connected to the pushing shaft; the length of the connecting shaft is smaller than the distance between the transmission shaft and the chassis in a direction perpendicular to the chassis, and the length of the pushing shaft is smaller than the minimum distance between the connecting shaft and the limiter in a direction parallel to the pushing shaft.

[0019] Optionally, the disassembly and assembly auxiliary device is used to disassemble and assemble a locking ring that is adaptively connected to the turbomolecular pump and the adaptive pressure controller, and the side wall height of the groove of the rotating tray is less than or equal to the thickness of the locking ring.

[0020] Optionally, the limiter is a baffle whose edge of the moving platform forms a preset angle with the chassis, and a projection of the baffle on the plane where the chassis is located is located within a projection of the moving platform on the plane where the chassis is located.

[0021] Optionally, the limiter further includes a locking structure, and the locking structure can be locked and aligned with the position to be disassembled and assembled.

[0022] Optionally, a first positioning mark is provided on an edge and / or an outer surface of a top of the groove opening of the rotating tray.

[0023] Optionally, a second positioning mark is provided on the edge of the support platform that contacts the rotating tray.

[0024] As described above, the disassembly and assembly auxiliary device of the utility model has the following beneficial effects:

[0025] The utility model provides a rotating tray so that the components to be disassembled can be rotated to align with the positions to be disassembled, thereby reducing the difficulty of rotating and aligning the components to be disassembled.

[0026] The utility model cooperates with the positioning marks of the rotating tray and the bearing platform to improve the alignment efficiency;

[0027] The utility model cooperates with the limiter to realize the alignment and engagement between the chassis, the moving platform and the position to be disassembled and assembled, thereby improving the alignment efficiency;

[0028] The utility model realizes the transportation of the components to be disassembled and assembled through the lifting structure, saves the time and manpower required for disassembly and assembly, shortens the equipment restart time, improves the equipment maintenance efficiency and utilization rate, reduces the probability of dust particles being generated during the disassembly and assembly process, improves the environmental cleanliness of the reaction chamber, and improves the product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 Shown is a schematic front view of the disassembly and assembly auxiliary device in the present utility model.

[0030] Figure 2 Shown is a side view schematic diagram of the disassembly and assembly auxiliary device in the utility model.

[0031] Figure 3 Shown is a schematic top view of the disassembly and assembly auxiliary device in the present utility model.

[0032] Figure 4 Shown is a schematic three-dimensional diagram of the disassembly and assembly auxiliary device in the utility model.

[0033] Figure 5 Shown is a schematic diagram of the structural position of the locking ring installation in the prior art.

[0034] Figure 6 It is a schematic diagram before the disassembly and assembly auxiliary device is used to perform positioning and alignment in the present invention.

[0035] Figure 7 It is a schematic diagram showing the use of the disassembly and assembly auxiliary device in the present invention for positioning and alignment.

[0036] Figure 8 Shown is a schematic top view of a disassembly and assembly auxiliary device with a notch in an example of the utility model.

[0037] Fig. 9 Shown is a schematic structural diagram of a lock ring for installing a disassembly and assembly auxiliary device in an example of the utility model.

[0038] Fig.10 Shown is a schematic structural diagram of an APC housing for installing a disassembly and assembly auxiliary device in an example of the present utility model.

[0039] Fig.11 Shown is an enlarged schematic diagram of a pin hole for installing a disassembly and assembly auxiliary device in an example of the utility model.

[0040] Component number description

[0041] 1. Rotating tray; 11. Groove; 12. Notch; 13. First positioning mark; 2. Carrying platform; 21. Second positioning mark; 22. Fixed plate; 3. Lifting structure; 31. Lifting rod; 311. First cross rod; 312. Second cross rod; 32. Sliding rod; 33. First transmission rod; 34. Driving rod; 341. Pushing shaft; 342. Connecting shaft; 343. Transmission shaft; 35. Second transmission rod; 36. Connecting structure; 361. Screw; 362. Nut; 363. First through hole; 364. Second through hole; 4. Chassis; 5. Moving platform; 51. Limiter; 511. Positioning structure; 61. Etching chamber; 62. APC housing; 621. Pin needle; 63. Locking ring; 631. Pin hole; 632. Handle. DETAILED DESCRIPTION

[0042] The following is an explanation of the implementation of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0043] For example, when describing the embodiments of the present invention in detail, for the sake of convenience, the schematic diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0044] For convenience of description, spatially relative terms such as "under", "below", "below", "below", "above", "on", etc. may be used herein to describe the relationship of one element or feature shown in the drawings to other elements or features. It will be understood that these spatially relative terms are intended to encompass other orientations of the device in use or operation in addition to the orientation depicted in the drawings.

[0045] In the context of the present application, a structure in which a first feature is described as being "above" a second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.

[0046] It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the present invention in a schematic manner, and therefore the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed at will, and the component layout may also be more complicated.

[0047] like Figure 1-Figure 4 As shown, the utility model provides a disassembly and assembly auxiliary device, wherein Figure 1 is a front view of the disassembly and assembly auxiliary device, Figure 2 is a side view of the disassembly and assembly auxiliary device, Figure 3 is a top view of the disassembly and assembly auxiliary device, Figure 4 is a three-dimensional structural diagram of the disassembly and assembly auxiliary device, which includes: a rotating tray 1, a carrying platform 2, a lifting structure 3, a chassis 4, a stopper 51 and a moving platform 5;

[0048] The rotating tray 1 includes a groove 11;

[0049] The rotating tray 1 can be rotatably mounted on the supporting platform 2; the upper end of the lifting structure 3 is connected to the bottom surface of the supporting platform 2 to drive the supporting platform 2 and the rotating tray 1 to move up and down; the lower end of the lifting structure 3 is connected to the chassis 4; the moving platform 5 can be moved, and the chassis 4 is located on the moving platform 5; the limiter 51 is fixed to the edge of the moving platform 5 to limit the position of the chassis 4.

[0050] In the prior art, the adaptive pressure controller (APC) at the bottom of the etching chamber 61 often requires the valve disc driven by the servo motor and the lock ring 63 of the turbomolecular pump to cooperate to realize the control of the pipe opening degree of the vacuum pumping of the etching chamber 61. In daily production, the lock ring 63 needs to be regularly maintained. In the process of installing the lock ring 63, due to its unique structure and installation position, such as Figure 5 As shown, one person is often required to control the height of the lock ring 63 for installation from the inside of the etching chamber 61, and another person holds the handle 632 of the lock ring 63 to rotate the lock ring 63 to align with the pin needle 621 (thrust pin) of the APC housing 62 at the bottom of the etching chamber 61 to achieve locking with the pin needle 621 (the arrow in the figure indicates the force direction of installation). This process is time-consuming and labor-intensive, with low installation efficiency, and dust particles are easily generated during the installation process, affecting the environmental cleanliness of the reaction chamber, thereby affecting the wafer production yield after the reaction in the etching chamber 61.

[0051] The utility model uses a rotatable rotating tray 1 on the carrier 2 to allow the lock ring 63 to rotate to align with the pin 621 of the APC housing 62, thereby reducing the difficulty of rotating the lock ring 63; at the same time, the limiter 51 is used to limit the chassis 4 to a preset position on the mobile platform 5, further ensuring the alignment with the APC housing 62, thereby improving the alignment efficiency; finally, Figure 6-Figure 7 As shown, Figure 6 is a schematic diagram of the disassembly and assembly auxiliary device before positioning and aligning. Figure 7 Schematic diagram of the disassembly and assembly auxiliary device after being aligned, the lifting structure 3 is used to carry the lock ring 63 to the pin needle 621 on the APC housing 62, and the lock ring 63 and the pin needle 621 of the APC housing 62 are aligned and locked ( Figure 7 The arrow in the figure indicates the movement direction of the lifting structure 3), which saves the time and manpower required for disassembly and assembly, shortens the maintenance time of the equipment, improves the maintenance efficiency and utilization rate of the equipment, and also reduces the probability of dust particles being generated during the disassembly and assembly process, improves the environmental cleanliness of the reaction chamber, and is beneficial to improving the yield of products produced in the etching chamber 61 after the lock ring 63 has been maintained.

[0052] Specifically, in this embodiment, the structure and function are mainly explained by taking the locking installation of the locking ring 63 between the pin needles 621 of the APC housing 62 as an example, but the solution of the utility model can also be applied to the disassembly and assembly processes of other similar structures to be installed in position, all of which are within the protection scope of the utility model.

[0053] In one embodiment, Figure 8As shown, a notch 12 of a preset size is provided at a preset position of the groove 11. Specifically, when the disassembly and assembly auxiliary device is applied to the locking ring 63 to be locked and installed on the pin 621 on the APC housing 62 at the bottom of the etching chamber 61, the notch 12 of the groove 11 is used to place the handle 632 of the locking ring 63, and the locking ring 63 is provided with a handle 632 for rotational alignment operation.

[0054] The utility model provides the notch 12 of the groove 11 so that Fig. 9 The handle 632 of the locking ring 63 can be placed at the notch 12, so that the position of the locking ring 63 in the rotating tray 1 is relatively fixed, and then the rotating tray 1 is rotated ( Figure 8 The arrow in the figure indicates the rotatable movement of the rotating tray 1, so that Fig. 9 The pin hole 631 on the locking ring 63 shown can be aligned as shown in FIG. Fig.10 The pin 621 on the APC housing 62 shown in FIG. Fig.11 The figure shows an enlarged structural diagram of the pin hole 631 in an example, which improves the convenience of alignment and the operation efficiency.

[0055] In one embodiment, the bottom of the notch 12 is flush with the bottom surface of the groove 11. Specifically, the shapes and positional relationship of the notch 12 and the groove 11 need to be set according to the position and installation relationship between the lock ring 63 and its handle 632, so that when the lock ring 63 is placed flat in the groove 11, the handle 632 can also be placed flat on the notch 12.

[0056] In one embodiment, Figure 1-Figure 2 and Figure 4 As shown, the lifting structure 3 includes a lifting rod 31, a sliding rod 32, a transmission rod 33 and a driving rod 34;

[0057] The carrying platform 2 includes a carrying surface and two oppositely arranged fixing plates 22, and the two fixing plates 22 of the carrying platform 2 are respectively located at two parallel edges below the carrying surface; the chassis 4 includes a bottom surface and two oppositely arranged fixing plates 22, and the two fixing plates 22 of the chassis 4 are respectively located at two parallel edges above the bottom surface; the four fixing plates 22 are parallel to each other;

[0058] Each group of the lifting rods 31 includes a first cross rod 311 and a second cross rod 312, and the first cross rod 311 and the second cross rod 312 in each group of the lifting rods 31 are cross-connected and rotatably connected at the midpoint; the transmission rod includes a first transmission rod 33 and a second transmission rod 35, the upper end of the first cross rod 311 of each group of the lifting rods 31 is slidably connected to the second transmission rod 35, the lower end of the second cross rod 312 of each group of the lifting rods 31 is slidably connected to the first preset position of the first transmission rod 33, the lower end of the first cross rod 311 of each group of the lifting rods 31 is rotatably connected to the chassis 4, and the upper end of the second cross rod 312 of each group of the lifting rods 31 is rotatably connected to the supporting platform 2;

[0059] The slide bar 32 includes a first group of slide bars 32 and a second group of slide bars 32; the first transmission rod 33 is slidably mounted on the first group of slide bars 32, and each of the slide bars 32 in the first group of slide bars 32 is slidably connected to the lower end of the second cross bar 312 in a group of corresponding lifting rods 31 through the first transmission rod 33; the second transmission rod 35 is slidably mounted on the second group of slide bars 32, and each of the slide bars 32 in the second group of slide bars 32 is slidably connected to the upper end of the first cross bar 311 in a group of corresponding lifting rods 31 through the second transmission rod 35; the two ends of the second group of slide bars 32 sleeved with the second transmission rod 35 are respectively fixedly connected to the two fixed plates 22 of the bearing platform 2, and the two ends of the first group of slide bars 32 sleeved with the first transmission rod 33 are respectively fixedly connected to the two fixed plates 22 of the chassis 4, and all the slide bars 32 are parallel to each other; the length direction of the transmission rod is perpendicular to the length direction of the lifting rod 31 and the length direction of the slide bar 32;

[0060] A threaded hole is provided at the second preset position of the first transmission rod 33, and a thread is provided on the driving rod 34. The driving rod 34 passes through one of the fixing plates 22 of the chassis 4 to form a threaded transmission connection with the first transmission rod 33. The direction of the central axis of the thread of the driving rod 34 is consistent with the length direction of the sliding rod 32, and the projections of the first preset position and the second preset position in the length direction of the first transmission rod 33 do not overlap.

[0061] The utility model realizes the lifting function of the lifting structure 3 through the structural coordination of the lifting rod 31, the sliding rod 32, the transmission rod 33 and the driving rod 34, and has a simple structure and is easy to set up.

[0062] In one embodiment, Figure 4As shown, the first preset position is located at the end of the first transmission rod 33, and the second preset position is located at the midpoint of the first transmission rod 33 in the length direction. Other suitable positions on the first transmission rod 33 can also be selected as the first preset position and the second preset position to adapt to specific application scenarios.

[0063] Specifically, the rotation of the driving rod 34 can drive the first transmission rod 33 to translate along the length direction of the sliding rod 32, so as to pull the crossing angle of the first cross rod 311 and the second cross rod 312 of the lifting rod 31 to change, thereby realizing the height change of the second transmission rod 35 connected to the upper end of the lifting rod 31, thereby realizing the lifting and lowering of the supporting platform 2 and the rotating tray 1.

[0064] In one embodiment, Figure 4 As shown, the connecting structure 36 includes a screw 361, a nut 362, a first through hole 363 and a second through hole 364. The central axis of the first through hole 363 is parallel to the length direction of the first transmission rod 33. The ends of the lifting rod and the transmission rod that are slidably connected are both provided with third through holes that are the same size and corresponding to the first through hole 363. The ends of the transmission rod and the sliding rod 32 that are slidably connected are both provided with fourth through holes that are the same size and corresponding to the first through hole 363. The screw 361 passes through the corresponding third through hole of the lifting rod, the first through hole 363 of the connecting structure and the fourth through hole of the transmission rod to achieve threaded connection with the nut 362, so that a sliding connection is formed between the lifting rod and the transmission rod; the central axis of the second through hole 364 is parallel to the length direction of the sliding rod 32, and the sliding rod 32 passes through the second through hole 364 to form a sliding connection with the transmission rod.

[0065] In one embodiment, the rotation of the driving rod 34 can be manual rotation or electric rotation.

[0066] In one embodiment, the lifting structure 3 includes more than or equal to 2 groups of lifting rods 31, and the planes where the first cross rods 311 and the second cross rods 312 of each group of lifting rods 31 are located are parallel. Figure 4 As shown, two sets of lifting rods 31 are provided.

[0067] The utility model can improve the stability of the lifting speed of the lifting rods 31 and the supporting strength of the structure by arranging multiple groups of lifting rods 31, thereby ensuring the reliability of the lifting structure 3.

[0068] Specifically, each group of the lifting rods 31 is evenly distributed on the bottom surface of the supporting platform 2 .

[0069] The utility model further improves the stability and reliability of the lifting structure 3 by arranging each group of lifting rods 31 to be evenly distributed.

[0070] Specifically, the lifting rods 31 in the present invention may be provided in only one group, and the group of lifting rods 31 is arranged at the center of the supporting platform 2 , so as to improve the stability of the lifting structure 3 .

[0071] In one embodiment, Figure 4 As shown, the driving rod 34 includes a pushing shaft 341, a connecting shaft 342 and a transmission shaft 343, the transmission shaft 343 is provided with the threaded connection with the transmission rod 33, the connecting shaft 342 is perpendicular to the transmission shaft 343, and the pushing shaft 341 is parallel to the transmission shaft 343; one end of the connecting shaft 342 is fixedly connected to the transmission shaft 343, and the other end of the connecting shaft 342 is fixedly connected to the pushing shaft 341; the length of the connecting shaft 342 is smaller than the distance between the transmission shaft 343 and the chassis 4 in a direction perpendicular to the chassis 4, and the length of the pushing shaft 341 is smaller than the minimum distance between the connecting shaft 342 and the limiter 51 in a direction parallel to the pushing shaft 341.

[0072] The utility model provides a driving rod 34 including a pushing shaft 341 and a connecting shaft 342, so as to improve the convenience of manually rotating the driving rod 34, save effort and time, and help improve work efficiency. By setting the dimensions of various parts of the driving rod 34, the driving rod 34 has enough space to rotate without being affected by the limiter 51.

[0073] In one embodiment, by hollowing out the parts of the limiter 51 and the driving rod 34 that hinder the rotation, the rotation space requirement of the driving rod 34 is met without affecting the limiting function of the limiter 51.

[0074] In one embodiment, a rotary bearing is provided between the support platform 2 and the rotating tray 1 , and the support platform 2 and the rotating tray 1 are rotatably connected via the rotary bearing.

[0075] In one embodiment, the support platform 2 and / or the rotating tray 1 are provided with a rotating track on their contact surfaces, and rollers are provided in the rotating track. The support platform 2 and the rotating tray 1 are rotatably connected by the rolling of the rollers in the rotating track.

[0076] In one embodiment, a friction force is provided between the support platform 2 and the rotating tray 1 so that the rotating tray 1 can be easily rotated and will not be automatically rotated and misaligned due to external disturbances when not rotating, thereby ensuring the accuracy of the rotation alignment.

[0077] In one embodiment, the disassembly and assembly auxiliary device is used to disassemble and assemble a locking ring 63 that is adaptively connected to the turbomolecular pump and the adaptive pressure controller, and the side wall height of the groove 11 of the rotating tray 1 is less than or equal to the thickness of the locking ring 63 .

[0078] The utility model sets the side wall height of the groove 11 of the rotating tray 1 so that the locking ring 63 can be placed in the groove 11, while the locking ring 63 will not be sunk into the groove 11 and will be difficult to be locked and connected with the APC housing 62 at the bottom of the etching chamber 61 by the pin needle 621.

[0079] In one embodiment, Figure 4 As shown, the stopper 51 is a baffle whose edge of the moving platform 5 forms a preset angle with the chassis 4, and the projection of the baffle on the plane where the chassis 4 is located is located within the projection of the moving platform 5 on the plane where the chassis 4 is located. Specifically, Figure 4 The details of the moving platform 5 are omitted, and only the rollers are used as an illustration. The actual structure has a placement surface for preventing the disassembly and assembly auxiliary device, and the chassis 4 is placed on the placement surface of the moving platform 5.

[0080] The utility model sets the limiter 51 as a baffle and folds it toward the direction where the chassis 4 is located, so that the baffle can limit the position of the chassis 4 relative to the moving platform 5, thereby avoiding the difficulty of alignment caused by excessive movement of the chassis 4 relative to the moving platform 5, and also preventing the chassis 4 from shifting out of the moving platform 5 and causing the structure to fall, thereby improving the use stability and safety reliability of the disassembly and assembly auxiliary device.

[0081] In one embodiment, the mobile platform 5 is a movable cart.

[0082] In one embodiment, the moving platform 5 and the chassis 4 may be an integrated structure, the chassis 4 is the plane of the moving platform 5 , and a moving structure (such as a roller or a universal wheel) is disposed below the chassis 4 .

[0083] In one embodiment, Figure 6-Figure 7 As shown, the stopper 51 further includes a locking structure 511, and the locking structure 511 can be locked and aligned with the position to be disassembled and assembled.

[0084] The utility model provides the stopper 51 including the locking structure 511, so that the locking structure 511 can be directly engaged with the position to be disassembled (such as the APC shell 62), thereby achieving accurate alignment of the mobile platform 5 and the position to be disassembled, further improving the accuracy of alignment.

[0085] In one embodiment, the positioning structure 511 is a positioning plate extending outward from the edge of the mobile platform 5, and the length of the positioning plate is longer than the length of the structure to be disassembled in the same direction when the disassembly auxiliary device is located below the position to be disassembled, so that the mobile platform 5 is fixed below the position to be disassembled. Specifically, the positioning structure 511 can be set according to the position structure of the structure to be disassembled and the disassembly auxiliary device in alignment.

[0086] In one embodiment, Figure 6 As shown, the limiter 51 can be a locking structure 511 and a baffle at the same time, and its angle and length can be set to meet the position of the chassis 4 and the moving platform 5.

[0087] In one embodiment, a first positioning mark 13 is provided on the edge and / or outer surface of the top of the opening of the groove 11 of the rotating tray 1 .

[0088] The utility model sets a first positioning mark 13 on the rotating tray 1, so that after the locking ring 63 is placed in the rotating tray 1, the angle of the locking ring 63 can be adjusted according to the first positioning mark 13, so that the pin hole 631 on the locking ring 63 is aligned with the first positioning mark 13. In particular, in actual applications, the size of the notch 12 of the groove 11 on the rotating tray 1 is generally not exactly consistent with the handle 632 of the locking ring 63, and a certain gap needs to be left. Therefore, the first positioning mark 13 can further accurately position the locking ring 63 on the rotating tray 1, thereby improving the alignment accuracy and efficiency.

[0089] In one embodiment, a second positioning mark 21 is provided on the edge of the carrying platform 2 that contacts the rotating tray 1 .

[0090] The utility model sets a second positioning mark 21 on the carrier platform 2, so that the rotating tray 1 can be rotated to the corresponding second positioning mark 21 and just aligned with the pin needle 621 on the APC shell 62, so that the lifting structure 3 can be directly used to vertically rise the rotating tray 1 to the position to be disassembled and assembled, and the locking ring 63 can be realized, thereby further improving the alignment and installation efficiency of the locking ring 63.

[0091] In one embodiment, the first positioning mark 13 and the second positioning mark 21 may be provided simultaneously to improve the alignment accuracy and alignment efficiency.

[0092] In one embodiment, Figure 8As shown, the first positioning mark 13 and the second positioning mark 21 can be complementary figures that fit each other. When the complementary figures are aligned and matched, the position of the locking ring 63 on the rotating tray 1 and the positional relationship between the rotating tray 1 and the supporting platform 2 can satisfy the locking ring 63 and the pin needle 621 of the APC shell 62 after the chassis 4, the moving platform 5 and the APC shell 62 are engaged and positioned, thereby improving the efficiency of the alignment judgment and improving the efficiency of the disassembly and assembly of the locking ring 63.

[0093] To sum up, the disassembly and assembly auxiliary device of the utility model can enable the parts to be disassembled to be rotated to align with the positions to be disassembled and assembled by setting a rotating tray, thereby reducing the difficulty of rotating and aligning the parts to be disassembled and assembled; at the same time, the positioning marks of the rotating tray and the carrier table are cooperated to improve the alignment efficiency; in addition, the limiter is cooperated to realize the alignment engagement between the chassis, the moving table and the positions to be disassembled and assembled, thereby improving the alignment efficiency; finally, the lifting structure is used to realize the transportation of the parts to be disassembled and assembled, thereby saving the time and manpower required for disassembly and assembly, shortening the equipment restart time, improving the equipment maintenance efficiency and utilization rate, reducing the probability of generating dust particles during disassembly and assembly, improving the environmental cleanliness of the reaction chamber, and improving the product yield.

[0094] Therefore, the utility model effectively overcomes various shortcomings in the prior art and has high industrial utilization value.

[0095] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A disassembly and assembly auxiliary device, characterized in that: The disassembly and assembly auxiliary device comprises: a rotating tray, a bearing platform, a lifting structure, a chassis, a stopper and a moving platform; The rotating tray includes a groove; The rotating tray can be rotatably mounted on the supporting platform; the upper end of the lifting structure is connected to the bottom surface of the supporting platform to drive the lifting and lowering of the supporting platform and the rotating tray; the lower end of the lifting structure is connected to the chassis; the mobile platform can move to a position, and the chassis is located on the mobile platform; the limiter is fixed to the edge of the mobile platform to limit the position of the chassis.

2. The disassembly and assembly auxiliary device according to claim 1, characterized in that: A notch of a preset size is provided at a preset position of the groove.

3. The disassembly and assembly auxiliary device according to claim 1, characterized in that: The lifting structure comprises a lifting rod, a sliding rod, a transmission rod and a driving rod; The carrying platform comprises a carrying surface and two oppositely arranged fixing plates, wherein the two fixing plates of the carrying platform are respectively located at two parallel edges below the carrying surface; the chassis comprises a bottom surface and two oppositely arranged fixing plates, wherein the two fixing plates of the chassis are respectively located at two parallel edges above the bottom surface; the four fixing plates are parallel to each other; Each group of the lifting rods includes a first cross rod and a second cross rod, and the first cross rod and the second cross rod in each group of the lifting rods are cross-connected and rotatably connected at the midpoint; the transmission rod includes a first transmission rod and a second transmission rod, the upper end of the first cross rod of each group of the lifting rods is slidably connected to the second transmission rod, the lower end of the second cross rod of each group of the lifting rods is slidably connected to the first preset position of the first transmission rod, the lower end of the first cross rod of each group of the lifting rods is rotatably connected to the chassis, and the upper end of the second cross rod of each group of the lifting rods is rotatably connected to the bearing platform; The sliding rod comprises a first group of sliding rods and a second group of sliding rods; the first transmission rod is slidably mounted on the first group of sliding rods, and each of the sliding rods in the first group of sliding rods is slidably connected to the lower end of the second cross rod in a group of corresponding lifting rods through the first transmission rod; the second transmission rod is slidably mounted on the second group of sliding rods, and each of the sliding rods in the second group of sliding rods is slidably connected to the upper end of the first cross rod in a group of corresponding lifting rods through the second transmission rod; the two ends of the second group of sliding rods sleeved with the second transmission rod are respectively fixedly connected to the two fixed plates of the bearing platform, and the two ends of the first group of sliding rods sleeved with the first transmission rod are respectively fixedly connected to the two fixed plates of the chassis, and all the sliding rods are parallel to each other; the length direction of the transmission rod is perpendicular to the length direction of the lifting rod and the length direction of the sliding rod; A threaded hole is provided at the second preset position of the first transmission rod, and the driving rod is provided with a thread. The driving rod passes through one of the fixed plates of the chassis to form a threaded transmission connection with the first transmission rod. The direction of the central axis of the thread of the driving rod is consistent with the length direction of the sliding rod, and the projections of the first preset position and the second preset position in the length direction of the first transmission rod do not overlap.

4. The disassembly and assembly auxiliary device according to claim 3, characterized in that: The lifting structure includes more than or equal to 2 groups of lifting rods, and the planes where the first cross rods and the second cross rods of each group of lifting rods are located are parallel.

5. The disassembly and assembly auxiliary device according to claim 3, characterized in that: The driving rod includes a pushing shaft, a connecting shaft and a transmission shaft, the transmission shaft is provided with the thread which is threadedly connected to the transmission rod, the connecting shaft is perpendicular to the transmission shaft, and the pushing shaft is parallel to the transmission shaft; one end of the connecting shaft is fixedly connected to the transmission shaft, and the other end of the connecting shaft is fixedly connected to the pushing shaft; the length of the connecting shaft is smaller than the distance between the transmission shaft and the chassis in a direction perpendicular to the chassis, and the length of the pushing shaft is smaller than the minimum distance between the connecting shaft and the limiter in a direction parallel to the pushing shaft.

6. The disassembly and assembly auxiliary device according to claim 1, characterized in that: The disassembly and assembly auxiliary device is used for disassembling and assembling a lock ring that is adaptively connected to the turbomolecular pump and the adaptive pressure controller, and the side wall height of the groove of the rotating tray is less than or equal to the thickness of the lock ring.

7. The disassembly and assembly assisting device according to claim 1, characterized in that: The limiter is a baffle whose edge of the moving platform forms a preset angle with the chassis, and the projection of the baffle on the plane where the chassis is located is located within the projection of the moving platform on the plane where the chassis is located.

8. The disassembly and assembly auxiliary device according to claim 1, characterized in that: The limiter also includes a locking structure, and the locking structure can be locked and aligned with the position to be disassembled and assembled.

9. The disassembly and assembly auxiliary device according to claim 1, characterized in that: The edge and / or outer surface of the top of the groove opening of the rotating tray is provided with a first positioning mark.

10. The disassembly and assembly auxiliary device according to claim 1, characterized in that: A second positioning mark is provided on the edge of the carrying platform that contacts the rotating tray.

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