Regulating devices, infrared temperature measuring devices and semiconductor process equipment

Abstract

The utility model provides an adjusting device, an infrared temperature measuring device and a semiconductor process equipment. The adjusting device includes a first adjusting mechanism and a second adjusting mechanism; the second adjusting mechanism is arranged on the first adjusting mechanism, and the second adjusting mechanism is used to install an infrared thermometer; the first adjusting mechanism is used to make the second adjusting mechanism move around a first axis to adjust the emission angle of the infrared thermometer on the first axis; the second adjusting mechanism is used to make the infrared thermometer move around a second axis to adjust the emission angle of the infrared thermometer on the second axis; the first axis is perpendicular to and intersects with the second axis, and the second adjusting mechanism is configured as follows: after being assembled with the infrared thermometer, the temperature measuring light emitted by the infrared thermometer passes through the intersection of the first axis and the second axis, so that the temperature measuring light only rotates around the intersection of the first axis and the second axis without translation, thereby reducing the difficulty of adjusting the temperature measuring light to be parallel to the temperature measuring channel.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor temperature measurement, and specifically relates to an adjustment device, an infrared temperature measurement device and a semiconductor process equipment. Background Art

[0002] With the rapid development of the third-generation semiconductors, silicon carbide (SiC) has been widely used as a representative material of the third-generation semiconductors. Correspondingly, physical vapor transport (PVT) has also been widely used as the mainstream method for preparing silicon carbide crystals. Specifically, the physical vapor transport method is a method of growing crystals on seed crystals by physical sublimation of the substrate at high temperature. In the physical vapor transport process, the process temperature is a key factor affecting crystal growth, so the accuracy of the process temperature measurement is also very critical. Since the process temperature of the physical vapor transport process is usually extremely high, even up to 2300°C, an infrared thermometer is usually used to monitor the process temperature in the process, and an infrared thermometer is used to use infrared light to measure the temperature over a long distance to monitor the process temperature.

[0003] The infrared thermometer used in physical vapor transmission equipment is usually set outside the reaction chamber to detect the temperature inside the reaction chamber by injecting infrared light into the temperature measuring channel in the side wall of the reaction chamber. In practical applications, the temperature measuring channel is often an elongated hole to ensure the strength and thermal insulation of the reaction chamber wall. Since the temperature measuring channel is an elongated hole, even if the infrared light emitted by the infrared thermometer is aligned with the narrow opening of the temperature measuring channel, if the infrared light emitted by the infrared thermometer deviates from the axis of the temperature measuring channel by a small angle, the infrared light is very easy to irradiate the hole wall of the temperature measuring channel and cannot enter the reaction chamber, resulting in the temperature actually detected by the infrared thermometer being the temperature of the hole wall, rather than the temperature inside the reaction chamber. However, the adjustment device of the infrared thermometer used in the prior art usually has difficulty in adjusting the temperature measuring angle of the infrared thermometer, which makes it difficult to adjust the infrared thermometer before temperature measurement and takes a long time to adjust. Utility Model Content

[0004] The utility model provides an adjusting device of an infrared thermometer, an infrared temperature measuring device and semiconductor process equipment, so as to solve the problem that it is difficult to adjust the temperature measuring angle of the infrared thermometer in the prior art.

[0005] An embodiment of the utility model provides an adjustment device for an infrared thermometer, which is used to fix the infrared thermometer at the entrance of a temperature measurement channel; the device comprises a first adjustment mechanism and a second adjustment mechanism; the second adjustment mechanism is arranged on the first adjustment mechanism, and the second adjustment mechanism is used to install the infrared thermometer; the first adjustment mechanism is used to make the second adjustment mechanism move around a first axis to adjust the emission angle of the infrared thermometer in the direction around the first axis; the second adjustment mechanism is used to make the infrared thermometer move around a second axis to adjust the emission angle of the infrared thermometer in the direction around the second axis; wherein the first axis is perpendicular to and intersects with the second axis, and the second adjustment mechanism is configured such that after being assembled with the infrared thermometer, the temperature measurement light emitted by the infrared thermometer passes through the intersection of the first axis and the second axis.

[0006] Optionally, the first adjusting mechanism includes: a first fixing member; a swinging member, which is swingably disposed on the first fixing member, the swinging axis of the swinging member is the first axis, and the second adjusting mechanism is mounted on the swinging member.

[0007] Optionally, a first guide portion is provided on the first fixing member, and a second guide portion matching the first guide portion is provided on the swinging member, the first guide portion and the second guide portion are slidably matched in a direction around the first axis, and the first guide portion and the second guide portion are limitedly matched in a direction along the first axial direction.

[0008] Optionally, the first guide portion is a guide rail or a guide groove, and the second guide portion is a guide groove or a guide rail; the guide rail and the guide groove both extend along a specified arc, and the center of the circle containing the specified arc is located on the first axis.

[0009] Optionally, the first adjustment mechanism further includes: a first limit member, which is arranged parallel to the first axis and movably penetrates the swing member; the first limit member is configured to be able to move to the first fixing member to abut against the surface of the first fixing member.

[0010] Optionally, the second adjustment mechanism includes: a second fixing member fixedly connected to the first adjustment mechanism; a first turntable rotatably disposed on the second fixing member, the rotation axis of the first turntable being the second axis; and the infrared thermometer is mounted on the first turntable.

[0011] Optionally, the second adjustment mechanism also includes: a second turntable, which is arranged on the first turntable, and the rotation axis of the second turntable is the second axis; a second limit member, which is arranged on the first turntable, and the second limit member has a first position and a second position; in the first position, the second turntable cooperates with the first turntable in the circumferential upper limit position through the second limit member, so that the first turntable and the second turntable rotate synchronously; in the second position, the second limit member is disengaged from the first turntable, and the second turntable is rotatable relative to the first turntable.

[0012] Optionally, the adjustment device also includes: a third adjustment mechanism, connected to the first adjustment mechanism, for adjusting the position of the infrared thermometer along the first axis direction; a fourth adjustment mechanism, connected to the third adjustment mechanism, for adjusting the position of the infrared thermometer in a direction perpendicular to the second axis direction.

[0013] Optionally, at least one first strip hole arranged along the first axis is opened on the surface of the third adjustment mechanism; the first strip hole and the first adjustment mechanism are fixed by bolts and nuts, and the bolt can translate relative to the first strip hole along the first axis; at least one second strip hole arranged along the second axis is opened on the surface of the fourth adjustment mechanism; the second strip hole and the third adjustment mechanism are fixed by bolts and nuts, and the bolt can translate relative to the second strip hole along the second axis.

[0014] As another technical solution, the utility model further provides an infrared temperature measuring device, which includes an adjusting device as in the above embodiment and an infrared thermometer, wherein the infrared thermometer is arranged on the second adjusting mechanism of the adjusting device.

[0015] Optionally, the temperature measurement window of the infrared thermometer is located at the intersection of the first axis and the second axis.

[0016] As another technical solution, the utility model further provides a semiconductor process equipment, which includes the infrared temperature measuring device as in the above embodiment.

[0017] The adjusting device of the infrared thermometer provided by the embodiment of the utility model can respectively make the infrared thermometer move around the first axis and around the second axis by setting the first adjusting mechanism and the second adjusting mechanism; and the temperature measuring light emitted by the infrared thermometer passes through the intersection of the first axis and the second axis, that is, the intersection is located on the first axis and on the second axis, therefore, when the position of the infrared thermometer is adjusted by the first adjusting mechanism, the infrared thermometer rotates around the first axis, and since the intersection is located on the first axis, the temperature measuring light will rotate around the first axis with the intersection as the rotation center; similarly, when the position of the infrared thermometer is adjusted by the second adjusting mechanism, the infrared thermometer rotates around the second axis, and since the intersection is also located on the second axis, the temperature measuring light will rotate around the second rotation axis with the intersection as the rotation center, therefore, no matter the infrared thermometer rotates around the first axis or the second axis, the temperature measuring light emitted by the infrared thermometer rotates with the intersection of the first axis and the second axis as the center, and will not be translated relative to the temperature measuring channel, thereby reducing the difficulty of adjusting the temperature measuring light to be parallel to the axis of the temperature measuring channel. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of an adjustment device of an infrared thermometer in the related art;

[0019] Figure 2 A stereogram of the adjusting device of the infrared thermometer provided by the utility model;

[0020] Figure 3A A view of the adjustment device provided by the utility model in the direction of the first axis when the first adjustment mechanism is adjusting;

[0021] Figure 3B for Figure 3A A second axial view of the adjustment device shown;

[0022] Figure 4A A view of the adjustment device provided by the utility model in the direction of the second axis when the second adjustment mechanism is adjusting;

[0023] Figure 4B for Figure 4A A first axial view of the adjustment device shown;

[0024] Figure 5A A three-dimensional view of the adjustment device provided by the utility model when the first adjustment mechanism and the second adjustment mechanism are adjusted;

[0025] Figure 5B for Figure 5A A bottom view of the adjustment device shown;

[0026] Figure 5C for Figure 5AA second axial view of the adjustment device shown;

[0027] Figure 5D for Figure 5A A first axial view of the adjustment device shown;

[0028] Figure 6 A positional relationship diagram of the infrared thermometer, the adjustment device and the temperature measurement channel provided by the utility model;

[0029] Figure 7 Another stereoscopic view of the adjusting device of the infrared thermometer provided by the utility model;

[0030] Fig. 8A A three-dimensional diagram of the first adjustment mechanism provided by the utility model when it is not adjusted;

[0031] Figure 8B A three-dimensional diagram of the first adjustment mechanism provided by the utility model during adjustment;

[0032] Figure 8C for Figure 8B A three-dimensional diagram of the first adjustment mechanism shown when performing reverse adjustment;

[0033] Fig. 9 A three-dimensional diagram of the first adjusting mechanism with a threaded tooth structure provided by the utility model during adjustment;

[0034] Fig. 10A A stereogram of the second adjustment mechanism provided by the utility model;

[0035] Fig. 10B Another stereoscopic diagram of the second adjustment mechanism provided by the utility model;

[0036] Fig.11 This is a structural schematic diagram of the semiconductor process equipment provided by the utility model. DETAILED DESCRIPTION

[0037] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0038] It should be understood that the specific embodiments and drawings described herein are only used to explain the present invention, rather than to limit the present invention.

[0039] It can be understood that, in the absence of conflict, the various embodiments of the present utility model and the various features in the embodiments can be combined with each other.

[0040] It can be understood that, for the convenience of description, the drawings of the present invention only show the parts related to the embodiments of the present invention, while the parts unrelated to the embodiments of the present invention are not shown in the drawings.

[0041] It is understandable that, in the absence of conflict, the functions and steps marked in the flowcharts and block diagrams of the embodiments of the present utility model may occur in an order different from that marked in the drawings.

[0042] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

[0043] like Figure 1 As shown, the related technical solutions usually use a corner plate to install the infrared thermometer 01 at a position corresponding to the temperature measurement channel of the semiconductor process equipment. Specifically, the corner plate includes two vertically arranged mounting plates 02, and arc-shaped through holes 03 are provided on the two mounting plates 02. Two protrusions are provided on the side of the infrared thermometer 01, and the two protrusions are respectively slidably matched with the two arc-shaped through holes 03, so as to adjust the angle of the light path of the infrared thermometer 01 by rotating the infrared thermometer 01 around the axis of the two arc-shaped through holes 03. However, when the protrusion slides in the arc-shaped through hole 03, the infrared thermometer 01 will not only perform a rotational motion, but also a translational motion, which will cause the overall light to shift when the light angle of the infrared thermometer 01 is adjusted, resulting in greater difficulty in adjusting the angle of the temperature measurement optical path.

[0044] In order to solve the above technical problems, this embodiment provides an adjustment device, which is used to fix the infrared thermometer at the entrance of the temperature measurement channel. Figure 2 As shown, the regulating device includes a first regulating mechanism 1 and a second regulating mechanism 2. The second regulating mechanism 2 is arranged on the first regulating mechanism 1, and the second regulating mechanism 2 is used to install an infrared thermometer 5. Specifically, the infrared thermometer 5 emits infrared rays and receives echo rays, and analyzes the waveform changes of the echo rays to obtain the temperature of the target object.

[0045] The first adjustment mechanism 1 is used to move the second adjustment mechanism 2 around the first axis L1 to adjust the emission angle of the infrared thermometer 5 in the direction around the first axis L1; specifically, the emission angle around the first axis L1 refers to the angle between the path of the infrared ray and the second axis L2. The second adjustment mechanism 2 is used to move the infrared thermometer 5 around the second axis L2 to adjust the emission angle of the infrared thermometer 5 in the direction around the second axis L2; ​​specifically, the emission angle around the second axis L2 refers to the angle between the path of the infrared ray and the first axis L1. The first axis L1 is perpendicular to and intersects the second axis L2. Moreover, the second adjustment mechanism 2 is configured such that after being assembled with the infrared thermometer 5, the temperature measuring light emitted by the infrared thermometer 5 passes through the intersection of the first axis L1 and the second axis L2.

[0046] like Figure 3A and Figure 3B As shown, in the process of adjusting the angle of the detection light emitted by the infrared thermometer 5, the first adjustment mechanism 1 can drive the second adjustment mechanism 2 to rotate around the first axis L1, thereby causing the infrared thermometer 5 mounted on the second adjustment mechanism 2 to rotate around the first axis L1 synchronously. Since the temperature measurement light emitted by the infrared thermometer 5 passes through the intersection of the first axis L1 and the second axis L2, that is, the intersection is located on both the first axis L1 and the second axis L2. In this way, when the position of the infrared thermometer 5 is adjusted by the first adjustment mechanism 1, the infrared thermometer 5 rotates around the first axis L1. Since the intersection is located on the first axis L1, the temperature measurement light will rotate around the first axis L1 with the intersection as the rotation center; similarly, when the position of the infrared thermometer 5 is adjusted by the second adjustment mechanism 2, the infrared thermometer 5 rotates around the second axis L2. Since the intersection is also located on the second axis L2, the temperature measurement light will rotate around the second rotation axis L2 with the intersection as the rotation center. When the position of the adjustment device is fixed, the first axis L1 and the second axis L2 are two fixed lines, so the intersection of the first axis L1 and the second axis L2 is a fixed point. Therefore, no matter how the first adjustment mechanism 1 and the second adjustment mechanism 2 are adjusted, the temperature measurement light emitted by the infrared thermometer 5 rotates with the intersection of the first axis L1 and the second axis L2 as the center, and will not be translated. Similarly, if Figure 4A and Figure 4B As shown, the second adjustment mechanism 2 can directly drive the infrared thermometer 5 mounted thereon to move around the second axis L2, and the temperature measuring light rotates around the intersection of the first axis L1 and the second axis L2 without translation.

[0047] The adjustment device of the infrared thermometer 5 proposed in this embodiment is provided with a first adjustment mechanism 1 and a second adjustment mechanism 2, and after the infrared thermometer 5 is installed on the second adjustment mechanism 2, the temperature measuring light emitted by it passes through the intersection of the first axis L1 and the second axis L2. Therefore, no matter the infrared thermometer 5 rotates around the first axis L1 or the second axis L2, the temperature measuring light will pass through the intersection of the first axis L1 and the second axis L2. This is equivalent to that when the infrared thermometer 5 is adjusted, the temperature measuring light will only rotate around the intersection of the first axis L1 and the second axis L2 without being offset, thereby avoiding the light beam from being translated relative to the temperature measuring channel 7, and reducing the difficulty of adjusting the light beam to be parallel to the axis of the temperature measuring channel 7.

[0048] In some embodiments, Figure 7 As shown, the adjustment device also includes a third adjustment mechanism 3 and a fourth adjustment mechanism 4. The third adjustment mechanism 3 is connected to the first adjustment mechanism 1, and is used to adjust the position of the infrared thermometer 5 along the first axis L1; the fourth adjustment mechanism 4 is connected to the third adjustment mechanism 3, and is used to adjust the position of the infrared thermometer 5 along the second axis L2. During the adjustment process, the third adjustment mechanism 3 can drive the infrared thermometer 5 installed thereon to translate along the first axis L1; the fourth adjustment mechanism 4 can drive the third adjustment mechanism 3 to translate along the second axis L2, and then can drive the infrared thermometer 5 mounted on the third adjustment mechanism 3 to translate along the second axis L2 synchronously; in this way, by driving the infrared thermometer 5 to translate along the first axis L1 and the second axis L2 perpendicular to each other, the relative position of the temperature measuring window of the infrared thermometer 5 and the temperature measuring channel 7 in the plane parallel to the first axis L1 and the second axis L2 can be adjusted.

[0049] It should be noted that, since the temperature measurement channel 7 is usually arranged inside the reaction chamber of the semiconductor process equipment, only the port of the temperature measurement channel 7 is exposed to the external environment, and the main part of the temperature measurement channel 7 is invisible. In actual temperature measurement, the high-temperature object usually emits obvious visible light and radiates it to the outside through the temperature measurement channel 7. Therefore, in the process of adjusting the infrared thermometer 5, the operator can first visually observe the positional relationship between the visible light column emitted from the temperature measurement channel and the temperature measurement window, adjust the position of the adjustment device so that the temperature measurement window of the infrared thermometer 5 roughly corresponds to the temperature measurement channel 7, and install the adjustment device in the semiconductor process equipment; then use the third adjustment mechanism 3 and the fourth adjustment mechanism 4 to adjust the position of the temperature measurement window of the infrared thermometer 5, so that after the adjustment device is installed at the entrance of the temperature measurement channel 7, the position of the first adjustment mechanism 1 and the second adjustment mechanism 2 can be adjusted so that the extension line of the temperature measurement channel 7 passes through the intersection of the first axis L1 and the second axis L2, so that the temperature measurement window of the infrared thermometer 5 is located on the extension line of the axis of the temperature measurement channel 7.

[0050] It is easy to understand that the adjustment range of the position of the infrared thermometer 5 is much larger than the adjustment range of the angle adjustment. Therefore, in the actual adjustment process, the position of the temperature measuring window of the infrared thermometer 5 can be adjusted first, and then the emission angle of the infrared thermometer 5 can be adjusted.

[0051] In some embodiments, Fig. 8A As shown, the first adjustment mechanism 1 includes a first fixing member 11 and a swinging member 12. Figure 8B and 8C As shown, the swing member 12 is swingably disposed on the first fixing member 11, the swing axis of the swing member 12 is the first axis L1, and the second adjustment mechanism 2 is installed on the swing member 12, so that the swing member 12 can drive the second adjustment mechanism 2 to swing around the first axis L1, thereby driving the infrared thermometer 5 installed on the second adjustment mechanism 2 to swing around the first axis L1, and then adjusting the emission angle of the infrared thermometer 5 on the first axis L1. In some specific embodiments, such as Figure 8B and 8C As shown, a first guide portion 13 is provided on the first fixing member 11, and a second guide portion 14 matching the first guide portion 13 is provided on the swinging member 12. The first guide portion 13 and the second guide portion 14 are slidably matched in the direction around the first axis L1, and the first guide portion 13 and the second guide portion 14 are limitedly matched in the direction along the first axis.

[0052] Exemplarily, the first fixing member 11 may be connected to the third adjusting mechanism 3 , so that the second adjusting mechanism 2 mounted on the swinging member 12 can be driven to translate synchronously by adjusting the first fixing member 11 to translate along the first axis L1 .

[0053] For example, Fig. 9 As shown, the relative surfaces of the first fixed member 11 and the swing member 12 are both cylindrical arc surfaces, and the cylindrical arc surfaces have the first axis L2 as the axis, so that when the swing member 12 swings relative to the first fixed member 11, the relative surfaces between the two will not interfere with each other.

[0054] In some embodiments, the first guide portion 13 is a guide rail or a guide groove, and the second guide portion 14 is a guide groove or a guide rail. Both the guide rail and the guide groove extend along a designated arc, and the center of the circle of the designated arc is located on the first axis L1.

[0055] For example, the first guide portion 13 may be a guide rail, and the second guide portion 14 may be a guide groove corresponding to the shape of the guide rail, so as to be able to slide with the guide rail. Figure 8BAs shown, the longitudinal section of the guide rail perpendicular to the specified arc direction is trapezoidal; in other words, the guide rail becomes narrower and narrower in the direction from the guide groove to the guide rail, and correspondingly, the guide groove also becomes narrower and narrower in the direction from the guide groove to the guide rail. In this way, when the guide rail is inserted into the guide groove, the two can slide relative to each other along the above-mentioned specified arc, and the two cooperate at the radial upper limit of the specified arc, so that the guide rail and the guide groove will not disengage when they slide relative to each other.

[0056] Exemplarily, a transition fit can be adopted between the guide rail and the guide groove, and lubricant can be filled between the relative surfaces of the guide rail and the guide groove to reduce the vibration caused by the surface friction between the two when the guide rail and the guide groove slide relative to each other, thereby improving the stability of driving the infrared thermometer 5 to swing around the first axis L1.

[0057] In some specific embodiments, Fig. 9 As shown, the second guide portion 14 is provided with a threaded tooth structure 141, and the threaded tooth structure 141 is distributed along the above-mentioned specified arc. The first adjustment mechanism 1 also includes a first threaded rod 15, and the first threaded rod 15 is threadedly matched with the threaded tooth structure 141, so as to drive the threaded tooth structure 141 to rotate around the first axis L1 by rotating around its own axis, thereby driving the threaded tooth structure 141 to rotate around the first axis L1, and then driving the swinging member 12 to swing around the first axis L1. Since the first threaded rod 15 is threadedly matched with the threaded tooth structure 141, the corresponding relationship between the rotation angle of the first threaded rod 15 and the swing angle of the infrared thermometer 5 around the first axis L1 depends on the pitch of the threaded tooth structure 141; specifically, the smaller the pitch of the threaded tooth structure 141, the smaller the angle of the infrared thermometer 5 driven by the first threaded rod 15 to swing around the first axis L1. It can be seen that the adjustment accuracy of the emission angle of the infrared thermometer 5 on the first axis L1 by the first adjustment mechanism 1 can be improved by reducing the pitch of the threaded tooth structure 141 and the threaded structure on the surface of the first threaded rod 15.

[0058] Exemplarily, a first mounting hole is opened inside the first guide portion 13, and a port of the first mounting hole is formed on the surface of the first fixing member 11; the first mounting hole extends along the tangent direction of the above-mentioned specified arc, and one side of the first mounting hole is connected to the threaded tooth structure 141, one end of the first threaded rod 15 is passed through the first mounting hole, and the other end is exposed outside the first mounting hole, so that the threaded structure on the circumference of the first threaded rod 15 can pass through the first mounting hole and threadedly cooperate with the threaded tooth structure 141, and the operator can manually rotate the other end of the first threaded rod 15 to drive the second guide portion 14 threadedly cooperated with the first threaded rod 15 to rotate, thereby driving the swinging portion to swing around the first axis L1, and then causing the second adjustment mechanism 2 and the infrared thermometer 5 to rotate around the first axis L1.

[0059] Exemplarily, the first threaded rod 15 is axially limited and fixed to the first fixing member 11 .

[0060] For example, the first mounting hole also has a threaded structure inside so that the first threaded rod 15 can be threadedly matched with the first mounting hole. In this way, when the operator stops rotating the first threaded rod 15, the self-locking property of the threaded structure inside the first mounting hole can be used to fix the first threaded rod 15 at the current position, and then the swinging part can be stopped at the current position, so that the emission angle of the infrared thermometer 5 on the first axis L1 can be fixed.

[0061] In some specific embodiments, Figure 8B and 8C As shown, the first guide portion 13 further includes an arcuate concave surface, and the second guide portion 14 further includes an arcuate convex surface. The arcuate concave surface and the arcuate convex surface have the same curvature so that they can fit each other; and the central axis of the cylindrical surface corresponding to the arcuate concave surface and the arcuate convex surface coincides with the first axis L1, so that when the second guide portion 14 rotates around the first axis L1, the arcuate concave surface and the arcuate convex surface can slide relative to each other.

[0062] In some embodiments, Figures 8A to 8C As shown, the first adjustment mechanism 1 also includes a first limit member 16. The first limit member 16 is arranged along the first axis L1, and the first limit member 16 can be movably inserted into the swing member 12. Moreover, the first limit member 16 is configured to be movable to the first fixing member 11 to abut against the surface of the first fixing member 11, so as to utilize the friction between the first limit member 16 and the surface of the first fixing member 11 to fix the first limit member 16 relative to the first fixing member 11, thereby fixing the swing member 12 to the first fixing member 11. In this way, after the emission angle of the infrared thermometer 5 on the first axis L1 is rotated to a desired angle, the infrared thermometer 5 is fixed relative to the first adjustment mechanism 1, thereby preventing the emission angle of the infrared thermometer 5 from being offset.

[0063] Exemplarily, the first limit member 16 is a second threaded rod. The swing member 12 has a first threaded hole extending parallel to the first axis L1 inside; one end of the first threaded hole is formed on the surface of the swing member 12, and the other end of the first threaded hole is formed on the inner wall of the guide groove. The second threaded rod is inserted into the first threaded hole and threadedly engaged with the first threaded hole, so that the second threaded rod can be rotated to translate in a direction close to or away from the guide groove. Since the guide rail and the guide groove are slidably engaged, the end of the second threaded rod can be rotated to pass through the other end of the first threaded hole and abut against the surface of the guide rail, thereby fixing the swing member 12 to the first fixing member 11, and then fixing the emission angle of the infrared thermometer 5 on the first axis L1 at the current angle, and when vibration occurs externally or the first threaded rod 15 is misadjusted for the second time, the emission angle of the infrared thermometer 5 on the first axis L1 is ensured to be fixed.

[0064] In the actual adjustment process, based on the first adjustment mechanism 1 having the first threaded rod 15 and the second threaded rod, the operator can first adjust the emission angle of the infrared thermometer 5 on the first axis L1 by rotating the first threaded rod 15; after adjusting the emission angle of the infrared thermometer 5 on the first axis L1 to a desired angle, the operator can fix the emission angle of the infrared thermometer 5 on the first axis L1 by rotating the second threaded rod. It is easy to understand that the above operation can be completed by the operator's hands without the aid of other tools, which is easy to operate and saves time for taking and placing other tools, thereby avoiding the angle deviation caused by the failure to fix the position of the swing member 12 in time after the angle adjustment is completed.

[0065] In some embodiments, Fig. 10A and 10B As shown, the second adjustment mechanism 2 includes a second fixing member 21 and a first turntable 22. The second fixing member 21 is fixedly connected to the first adjustment mechanism 1. The first turntable 22 is rotatably arranged on the second fixing member 21; the rotation axis of the first turntable 22 is the second axis L2, and the infrared thermometer 5 is installed on the first turntable 22, and the first turntable 22 can drive the infrared thermometer 5 to rotate synchronously around the second axis L2. In the actual adjustment process, the operator can manually rotate the first turntable 22 to achieve a large-angle adjustment of the rotation angle of the first turntable 22, so as to achieve a large-angle adjustment of the emission angle of the infrared thermometer 5 around the second axis L2.

[0066] In other feasible embodiments, the first fixing member 11 can also be installed on the first rotating disk 22, and the infrared thermometer 5 can be installed on the swinging member 12. In this way, by making the first rotating disk 22 rotate around the second axis L2 relative to the second fixing member 21, the first fixing member 11 and the swinging member 12 connected thereto can be driven to rotate synchronously around the second axis L2. Further, the second fixing member 21 can be installed on the third adjusting mechanism 3.

[0067] In some embodiments, Figure 2 As shown, the adjustment device also includes a first mounting plate 51 and a second mounting plate 52 which are arranged perpendicular to each other. The first mounting plate 51 is arranged and used to be fixedly connected to the surface of the first turntable 22; specifically, the first mounting plate 51 can be detachably connected to the surface of the first turntable 22 away from the second fixing member 21. The second mounting plate 52 is used to install the infrared thermometer 5 so that the temperature measuring light beam of the infrared thermometer 5 is perpendicular to the second mounting plate 52. In this way, the temperature measuring light beam of the infrared thermometer 5 is perpendicular to the first axis L1 and the second axis L2.

[0068] Exemplarily, the first mounting plate 51 is fixedly connected to the first turntable 22 by a plurality of screws or bolts.

[0069] Exemplarily, a mounting hole is provided in the second mounting plate 52 and passes through the second mounting plate 52 in the thickness direction, and the top end of the infrared thermometer 5 can pass through the mounting hole and be fixedly connected to the second mounting plate 52 .

[0070] Exemplarily, the first mounting plate 51 may be perpendicular to the second axis L2, and the second mounting plate 52 may be parallel to the plane where the first axis L1 and the second axis L2 are located.

[0071] Exemplarily, after the top end of the infrared thermometer 5 passes through the mounting hole in the second mounting plate 52, the top end surface of the infrared thermometer 5 can be flush with the second axis L2, so that the temperature measuring window of the infrared thermometer 5 can be located at the intersection of the first axis L1 and the second axis L2.

[0072] In some embodiments, Fig. 10A and 10B As shown, the second adjustment mechanism 2 also includes a second turntable 24 and a second stopper 23. The second turntable 24 is arranged on the first turntable 22, and the rotation axis of the second turntable 24 is the second axis L2. The second stopper 23 is arranged on the first turntable 22, and the second stopper 23 has a first position and a second position. Specifically, in the first position, the second turntable 24 cooperates with the first turntable 22 in the circumferential upper limit through the second stopper 23, so that the first turntable 22 and the second turntable 24 rotate synchronously; in the second position, the second stopper 23 is disengaged from the first turntable 22, and the second turntable 24 can rotate relative to the first turntable 22.

[0073] Exemplarily, a second mounting hole is provided in the second rotating disk 24; one end of the second mounting hole is provided on the surface of the first rotating disk 22, and the other end is communicated with the surface of the second rotating disk 24. The second stopper 23 can be interactively inserted into the second mounting hole; specifically, in the first position, the second stopper 23 abuts against the surface of the second rotating disk 24, so as to utilize the friction between the two to fix the position of the second rotating disk 24, thereby circumferentially fixing the first rotating disk 22 and the second rotating disk 24; in the second position, the second stopper 23 is at a position away from the surface of the second rotating disk 24, so as to avoid hindering the first rotating disk 22 from rotating around the second axis L2.

[0074] In some specific embodiments, Fig. 10A and 10BAs shown, the second adjustment mechanism 2 further includes a third threaded rod 25, a fourth threaded rod 26 and a fixing bracket 27. The fixing bracket 27 is fixed to the second fixing member 21. The third threaded rod 25 and the fourth threaded rod 26 are arranged opposite to each other and both extend along the tangent direction of the second rotating disk 24; the third threaded rod 25 and the fourth threaded rod 26 are threadedly matched with the fixing bracket 27, so that by rotating at least one of the third threaded rod 25 and the fourth threaded rod 26, the opposite ends of the third threaded rod 25 and the fourth threaded rod 26 are brought closer to or away from each other. The second turntable 24 has a limiting protrusion 241 on its outer periphery, and the limiting protrusion 241 is arranged between the opposite ends of the third threaded rod 25 and the fourth threaded rod 26, so that when the infrared thermometer 5 rotates around the second axis L2 to a desired angle, the ends of the third threaded rod 25 and the fourth threaded rod 26 are arranged close to each other to clamp the limiting protrusion 241, thereby synchronously fixing the second turntable 24 and the first turntable 22 circumferentially limited therewith, thereby fixing the emission angle of the infrared thermometer 5 on the second axis L2 at the current angle.

[0075] Exemplarily, the third threaded rod 25 and the fourth threaded rod 26 can extend in the vertical direction, and the fourth threaded rod 26 is arranged above the third threaded rod 25, so that the limiting protrusion 241 can be against the end of the third threaded rod 25 under the action of its own gravity, so that the third threaded rod 25 can be raised or lowered by rotating the third threaded rod 25 to push the limiting protrusion 241 to rise or fall, thereby driving the second rotating disk 24 to rotate. Moreover, the pitch of the thread structure on the third threaded rod 25 can be reduced to reduce the amplitude of the third threaded rod 25 pushing the second rotating disk 24 to rotate, thereby achieving fine adjustment of the emission angle of the infrared thermometer 5 on the second axis L2. In other words, the adjustment accuracy of the emission angle of the infrared thermometer 5 on the second axis L2 can be improved. Moreover, when the emission angle of the infrared thermometer 5 on the second axis L2 reaches the desired angle, the third threaded rod 25 can be kept stationary, and the fourth threaded rod 26 can be rotated to make it close to the third threaded rod 25 until it abuts against the upper surface of the limiting protrusion 241, so as to fix the limiting protrusion 241. In this process, the limiting protrusion 241 is always supported by the third threaded rod 25, so that the limiting protrusion 241 can be maintained in the current position without being offset due to its own gravity, thereby avoiding the failure of adjusting the angle of the second turntable 24.

[0076] During the actual adjustment process, based on the second adjustment mechanism 2 having the above-mentioned first turntable 22 and second turntable 24, the operator can first manually rotate the first turntable 22 to adjust the emission angle of the infrared thermometer 5 on the second axis L2 at a large angle, that is, "coarse adjustment"; then, the operator can rotate the third threaded rod 25 to adjust the emission angle of the infrared thermometer 5 on the second axis L2 at a small angle, that is, "fine adjustment"; when the emission angle of the infrared thermometer 5 on the second axis L2 reaches the desired angle, the operator can clamp the limit protrusion 241 by rotating the fourth threaded rod 26 to fix the emission angle of the infrared thermometer 5 on the second axis L2.

[0077] In some embodiments, Figure 7 As shown, at least one first strip hole 31 arranged along the first axis L1 is opened on the surface of the third adjustment mechanism 3; the first strip hole 31 is fixed to the first adjustment mechanism 1 by bolts and nuts, and the bolts can translate relative to the first strip hole 31 along the first axis L1, so that the first adjustment mechanism 1 can translate along the first axis L1, thereby driving the infrared thermometer 5 to translate along the first axis L1, and then the relative position relationship between the temperature measuring light emitted by the infrared thermometer 5 and the temperature measuring channel 7 in the direction of the first axis L1 can be adjusted.

[0078] At least one second strip hole 41 arranged along the second axis L2 is opened on the surface of the fourth adjustment mechanism 4; the second strip hole 41 and the third adjustment mechanism 3 are fixed by bolts and nuts, and the bolts can translate relative to the second strip hole 41 along the second axis L2, so that the third adjustment mechanism 3 can translate along the first axis L1, thereby driving the infrared thermometer 5 to translate along the second axis L2, and then the relative position relationship between the temperature measuring light and the temperature measuring channel 7 in the direction of the second axis L2 can be adjusted.

[0079] After the infrared thermometer 5 is translated to the desired position, all nuts can be tightened so that the first adjustment mechanism 1, the second adjustment mechanism 2 and the infrared thermometer 5 will not translate in the direction of the first axis L1 and the second axis L2. Then, the emission angle of the infrared thermometer 5 can be adjusted.

[0080] For example, Figure 7 As shown, the third adjustment mechanism 3 includes an "L"-shaped plate. Specifically, the "L"-shaped plate includes two perpendicular flat plates, one of which is parallel to the plane where the first axis L1 and the second axis L2 are located, and is used to connect with the fourth adjustment mechanism 4, and the other flat plate is perpendicular to the first axis L1, and is used to connect with the first adjustment mechanism 1.

[0081] For example, Figure 7As shown, the fourth adjustment mechanism 4 is arranged on the side of the third adjustment mechanism 3 close to the temperature measurement channel 7. The fourth adjustment mechanism 4 includes a hollow plate, which is parallel to the plane where the first axis L1 and the second axis L2 are located, and has an avoidance hole for the temperature measurement light to pass through, and the axis of the avoidance hole is perpendicular to the first axis L1 and the second axis L2. During assembly, after the fourth adjustment mechanism 4 is fixed to the bottom of the reaction chamber 6, since the axis of the avoidance hole on the hollow plate of the fourth adjustment mechanism 4 is perpendicular to the first axis L1 and the second axis L2, the axis of the temperature measurement channel 7 corresponding to the avoidance hole is also perpendicular to the first axis L1 and the second axis L2.

[0082] like FIG. 5A to FIG. 5D As shown, since the first axis L1 and the second axis L2 are perpendicular to each other, the first adjustment mechanism 1 and the second adjustment mechanism 2 do not interfere with each other in adjusting the infrared thermometer 5. During adjustment, the first adjustment mechanism 1 can be used to adjust the angle between the temperature measuring light and the second axis L2 so that the temperature measuring light is perpendicular to the second axis L2, and then the second adjustment mechanism 2 can be used to adjust the angle between the temperature measuring light and the first axis L1 so that the temperature measuring light is perpendicular to the first axis L1. When the temperature measuring light is perpendicular to the first axis L1 and the second axis L2 at the same time, it must also be parallel to the axis of the temperature measuring channel 7, thereby completing the adjustment of the infrared thermometer.

[0083] It is understandable that in the above adjustment method, the first adjustment mechanism 1 is adjusted first, and then the second adjustment mechanism 2 is adjusted, but this is not restrictive, and the second adjustment mechanism 2 can also be adjusted first, and then the first adjustment mechanism 1 is adjusted.

[0084] Preferably, the axis of the temperature measuring channel 7 can be set to pass through the intersection of the first axis L1 and the second axis L2, so that the temperature measuring light after adjustment can coincide with the axis of the temperature measuring channel 7.

[0085] As another technical solution, this embodiment further provides an infrared temperature measuring device, which includes the regulating device as described above and an infrared thermometer 5. The infrared thermometer 5 is arranged on the second regulating mechanism 2 of the regulating device.

[0086] In some embodiments, the temperature measuring window of the infrared thermometer 5 is located at the intersection of the first axis L1 and the second axis L2. In this way, when the first adjustment mechanism 1 and the second adjustment mechanism 2 drive the infrared thermometer 5 around the first axis L1 and the second axis L2 respectively, the temperature measuring window always rotates around the intersection of the first axis L1 and the second axis L2 without translation.

[0087] As another technical solution, this embodiment further provides a semiconductor process equipment, which includes the infrared temperature measuring device as described above.

[0088] Specifically, Fig.11 As shown, the semiconductor process equipment also includes a reaction chamber 6 for performing a semiconductor process at a relatively high temperature. A crucible for carrying reactants is provided inside the reaction chamber 6. A temperature measuring channel 7 is provided inside the reaction chamber 6, and the temperature measuring channel 7 extends from below the crucible to the bottom surface of the outer wall of the reaction chamber 6. The above-mentioned infrared temperature measuring device is fixed to the bottom of the reaction chamber 6, and the temperature measuring window of the infrared thermometer 5 faces the opening of the temperature measuring channel 7 to detect the temperature of the crucible inside the reaction chamber 6.

[0089] As described above, the adjustment device and the infrared temperature measuring device provided in this embodiment can respectively make the infrared temperature measurement move around the first axis and around the second axis by setting the first adjustment mechanism and the second adjustment mechanism, and the temperature measuring light emitted by the infrared thermometer passes through the intersection of the first axis and the second axis, so that in the process of adjusting the emission angle of the infrared thermometer, the infrared thermometer and the temperature measuring light emitted by it will only rotate around the focus without being offset.

[0090] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. An adjusting device for an infrared thermometer, used to fix the infrared thermometer at the entrance of a temperature measuring channel; characterized in that: including a first adjustment mechanism and a second adjustment mechanism; The second adjustment mechanism is arranged on the first adjustment mechanism, and the second adjustment mechanism is used for installing the infrared thermometer; The first adjustment mechanism is used to move the second adjustment mechanism around a first axis to adjust the emission angle of the infrared thermometer in a direction around the first axis; the second adjustment mechanism is used to move the infrared thermometer around a second axis to adjust the emission angle of the infrared thermometer in a direction around the second axis; The first axis is perpendicular to and intersects the second axis, and the second adjustment mechanism is configured such that, after being assembled with the infrared thermometer, the temperature measuring light emitted by the infrared thermometer passes through the intersection of the first axis and the second axis.

2. The adjusting device according to claim 1, characterized in that: The first adjustment mechanism comprises: a first fixing member; The swinging member is swingably arranged on the first fixing member, the swinging axis of the swinging member is the first axis, and the second adjusting mechanism is installed on the swinging member.

3. The adjusting device according to claim 2, characterized in that: The first fixing member is provided with a first guide portion, the swinging member is provided with a second guide portion matching the first guide portion, the first guide portion and the second guide portion are slidably matched in a direction around the first axis, and the first guide portion and the second guide portion are limitedly matched in a direction along the first axis.

4. The adjusting device according to claim 3, characterized in that: The first guide portion is a guide rail or a guide groove, and the second guide portion is a guide groove or a guide rail; the guide rail and the guide groove both extend along a specified arc, and the center of the circle where the specified arc lies is located on the first axis.

5. The adjusting device according to claim 2, characterized in that: The first adjustment mechanism also includes: The first limiting member is arranged parallel to the first axis and movably penetrates the swinging member; the first limiting member is configured to be movable to the first fixing member to abut against the surface of the first fixing member.

6. The adjusting device according to claim 1, characterized in that: The second adjustment mechanism comprises: a second fixing member, fixedly connected to the first adjusting mechanism; The first turntable is rotatably disposed on the second fixing member, and the rotation axis of the first turntable is the second axis; the infrared thermometer is installed on the first turntable, and the temperature measuring light path emitted by the infrared thermometer passes through the intersection of the first axis and the second axis.

7. The adjusting device according to claim 6, characterized in that: The second adjustment mechanism also includes: A second rotating disk is arranged on the first rotating disk, and the rotation axis of the second rotating disk is the second axis; A second position-limiting member is disposed on the first rotating disk, and the second position-limiting member has a first position and a second position; In the first position, the second rotating disk cooperates with the first rotating disk in the circumferential upper limit position through the second limiting member, so that the first rotating disk and the second rotating disk rotate synchronously; In the second position, the second limiting member is disengaged from the first rotating disk, and the second rotating disk is rotatable relative to the first rotating disk.

8. The adjusting device according to claim 6, characterized in that: The adjusting device also includes: A first mounting plate, arranged perpendicular to the second axis; the first mounting plate is used to be mounted on the first turntable; The second mounting plate is arranged perpendicularly to the first mounting plate and is fixedly connected thereto; the second mounting plate is used to mount the infrared thermometer so that the temperature measuring light emitted by the infrared thermometer is perpendicular to the second mounting plate.

9. The adjusting device according to claim 1, characterized in that: The adjusting device also includes: a third adjustment mechanism, connected to the first adjustment mechanism, and used to adjust the position of the infrared thermometer along the first axis direction; The fourth adjusting mechanism is connected to the third adjusting mechanism and is used to adjust the position of the infrared thermometer in a direction perpendicular to the second axis.

10. The adjustment device according to claim 9, characterized in that The surface of the third adjustment mechanism is provided with at least one first strip-shaped hole arranged along the first axis; the first strip-shaped hole and the first adjustment mechanism are fixed by bolts and nuts, and the bolts can translate relative to the first strip-shaped hole along the first axis; The surface of the fourth adjustment mechanism is provided with at least one second strip hole arranged along the second axis; the second strip hole and the third adjustment mechanism are fixed by bolts and nuts, and the bolts can translate relative to the second strip hole along the second axis.

11. An infrared temperature measuring device, characterized in that: It comprises an adjusting device as described in any one of claims 1 to 10 and an infrared thermometer; the infrared thermometer is arranged on the second adjusting mechanism of the adjusting device, and the temperature measuring window of the infrared thermometer is located at the intersection of the first axis and the second axis.

12. A semiconductor process equipment, characterized in that: It comprises the infrared temperature measuring device as claimed in claim 11.

Images