A semiconductor equipment air tightness detection tool

Abstract

A semiconductor equipment air tightness detection tool is used to detect the air tightness of semiconductor equipment, comprising: a pressure sensor; a pressure regulating valve connected to the pressure sensor; a connecting pipe connected to the pressure sensor and the pressure regulating valve respectively; and a hand valve connected to the pressure regulating valve. The utility model can solve the problems of difficulty in finding leakage points through pressure holding tests in the current assembly process and a large amount of workload caused by repeated disassembly and assembly, and can accurately detect the air tightness of semiconductor equipment, which has great practical value.

Description

Technical Field

[0001] The utility model relates to the technical field of air tightness detection of semiconductor equipment, in particular to an air tightness detection tool for semiconductor equipment. Background Art

[0002] Currently, the issue of waste gas emissions is being strengthened in international conventions to prevent global warming and environmental pollution, and the treatment of environmentally harmful substances has also become a major issue in semiconductor and display manufacturing companies. Therefore, the demand for waste gas processors that can decompose and remove chemical pollutants generated in the manufacturing process is increasing.

[0003] In addition, with the high integration of processes and the increase in gas usage, the pollutants that need to be removed have become more diverse. It is expected that the demand for exhaust gas processors with various functions will increase in projects or integrated circuit factories that do not currently use exhaust gas processors. Therefore, it is an urgent problem to design a semiconductor equipment airtightness detection tool that can meet the airtightness detection of SCRUBBER (gas purification treatment) equipment assembly parts and pipelines and can also be used for airtightness detection of other semiconductor equipment. Utility Model Content

[0004] Based on the above-mentioned technical problems, the purpose of the utility model is to provide a semiconductor equipment airtightness detection tool for detecting the airtightness of semiconductor equipment, and to solve the problems of difficulty in finding leakage points through pressure holding tests in the current assembly process and the large amount of workload caused by repeated disassembly and assembly.

[0005] In order to achieve the above-mentioned purpose, the utility model provides a semiconductor equipment air tightness detection tool for detecting the air tightness of semiconductor equipment, comprising: a pressure sensor; a pressure regulating valve connected to the pressure sensor; a connecting pipe connected to the pressure sensor and the pressure regulating valve respectively; a hand valve connected to the pressure regulating valve; wherein the connecting pipe is connected to any one outlet of the semiconductor equipment; and the hand valve is connected to the gas filling device.

[0006] Furthermore, the pressure sensor, the pressure regulating valve and the connecting pipe are connected through a first ferrule joint; wherein the first ferrule joint is a three-port ferrule joint, one end of which is connected to one end of the pressure sensor, one end is connected to one end of the connecting pipe, and the other end is connected to one end of the pressure regulating valve.

[0007] Furthermore, the pressure regulating valve and the hand valve are connected via a second ferrule joint; wherein the second ferrule joint is a two-port ferrule joint, one end of which is connected to the other end of the pressure regulating valve that is not connected to the first ferrule joint, and the other end is connected to one end of the hand valve.

[0008] Furthermore, the other end of the connecting pipe that is not connected to the first ferrule joint is connected to any outlet of the semiconductor device.

[0009] Furthermore, the other end of the hand valve that is not connected to the second ferrule joint is connected to a gas charging device.

[0010] Furthermore, a digital pressure gauge is provided on the pressure regulating valve.

[0011] Optionally, the pressure threshold range of the pressure regulating valve is 0.09-0.15 MPa.

[0012] Furthermore, the semiconductor equipment air tightness detection tooling also includes a data line and a test electrical box; wherein, one end of the data line is connected to the pressure sensor, and the other end thereof is connected to the test electrical box, and the test electrical box provides power to the pressure sensor through the data line.

[0013] Furthermore, the test electrical box is provided with a touch screen for displaying the pressure value and test time from the pressure sensor in real time.

[0014] Optionally, the connecting pipe is a curved pipe or a vertical pipe.

[0015] To sum up, compared with the prior art, the semiconductor equipment airtightness detection tooling of the utility model can solve the problems of difficulty in finding leakage points through pressure holding tests in the current assembly process and the large workload caused by repeated disassembly and assembly, and can accurately detect the airtightness of semiconductor equipment, and has great practical value. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model. DETAILED DESCRIPTION

[0017] The following is combined with Figure 1 , the utility model is further explained by describing a preferred specific embodiment in detail.

[0018] It should be noted that the drawings are in a very simplified form and use non-precise proportions. They are only used to conveniently and clearly assist in explaining the implementation methods of the utility model, and are not used to limit the conditions for the implementation of the utility model. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed by the utility model without affecting the effects and purposes that can be achieved by the utility model.

[0019] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more related listed items.

[0020] like Figure 1 As shown, the utility model provides a semiconductor equipment air tightness detection tool for detecting the air tightness of a semiconductor device 10, comprising: a pressure sensor 3; a pressure regulating valve 8 connected to the pressure sensor 3; a connecting pipe 9 connected to the pressure sensor 3 and the pressure regulating valve 8 respectively; and a hand valve 7 connected to the pressure regulating valve 8.

[0021] Furthermore, the pressure sensor 3, the pressure regulating valve 8 and the connecting pipe 9 are connected through a first ferrule joint 4; wherein the first ferrule joint 4 is a three-port ferrule joint, one end of which is connected to one end of the pressure sensor 3, one end is connected to one end of the connecting pipe 9, and the other end is connected to one end of the pressure regulating valve 8.

[0022] Furthermore, the pressure regulating valve 8 and the hand valve 7 are connected via a second ferrule joint 6; wherein the second ferrule joint 6 is a two-port ferrule joint, one end of which is connected to the other end of the pressure regulating valve 8 that is not connected to the first ferrule joint 4, and the other end is connected to one end of the hand valve 7.

[0023] Correspondingly, the other end of the connecting pipe 9 that is not connected to the first ferrule joint 4 is connected to any outlet of the semiconductor device 10 .

[0024] Correspondingly, the other end of the hand valve 7 that is not connected to the second ferrule joint 6 is connected to a gas filling device (not shown in the figure), and the gas filling device is used to fill gas into the semiconductor device airtightness detection tooling to detect the airtightness of the semiconductor device 10.

[0025] Specifically, the pressure regulating valve 8 is provided with a digital pressure gauge 5, and the pressure regulating valve 8 and the digital pressure gauge 5 are an integrated device for displaying the real-time pressure value of the currently charged gas.

[0026] Optionally, the pressure regulating valve 8 can adjust the pressure threshold. In a preferred embodiment of the present invention, the pressure threshold is set in the range of 0.09 to 0.15 MPa, preferably 0.1 MPa. The larger the pressure threshold, the greater the instantaneous gas pressure will be, causing the air tightness detection of the equipment to fail. Therefore, the pressure threshold needs to be reduced.

[0027] Furthermore, the semiconductor equipment air tightness detection tooling also includes a data line 2 and a test electrical box 1, one end of the data line 2 is connected to the pressure sensor 3, and the other end thereof is connected to the test electrical box 1; wherein the test electrical box 1 provides power to the pressure sensor 3 through the data line 2.

[0028] Specifically, the test electrical box 1 is provided with a touch screen, which can display the pressure value (unit: mmH2O) and the test time transmitted by the pressure sensor 3 in real time.

[0029] Optionally, the connecting pipe 9 can be adjusted according to actual needs, and can be a curved pipe or a vertical pipe.

[0030] Optionally, in a preferred embodiment of the present utility model, the connecting pipe 9 is made of stainless steel, which has good corrosion resistance to achieve the purpose of increasing service life.

[0031] In a preferred embodiment of the utility model, taking the semiconductor device 10 as a TANK water tank as an example, the detection steps are as follows: assemble the semiconductor device airtightness detection tooling, and close the outlet of the TANK water tank except the outlet connected to the connecting pipe 9; adjust the pressure threshold of the pressure regulating valve 8 to 0.1Mpa, open the hand valve 7, and fill N2 from the other end of the hand valve 7 that is not connected to the second ferrule joint 6 until the digital pressure gauge 5 displays a pressure of 4Kpa, then close the hand valve and record the pressure value displayed by the pressure sensor 3 on the touch screen; if the pressure value displayed on the touch screen of the test electrical box 1 decreases by less than 2mmH20 after 30 minutes, the airtightness of the TANK water tank is qualified, otherwise it is necessary to check the leakage point and re-test.

[0032] In summary, the utility model is a semiconductor equipment airtightness detection tool, which can solve the problem of difficulty in finding leakage points through pressure holding test in the current assembly process and the large workload caused by repeated disassembly and assembly, and can also detect the airtightness of each assembled component, and has great practical value.

[0033] Although the content of the utility model has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the utility model. After reading the above content, a variety of modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the protection scope of the utility model should be defined by the attached claims.

Claims

1. A semiconductor device airtightness detection tool, used to detect the airtightness of semiconductor devices, characterized in that: Include: Pressure sensor; A pressure regulating valve connected to the pressure sensor; A connecting pipe, connected to the pressure sensor and the pressure regulating valve respectively; A hand valve, one end of which is connected to the pressure regulating valve; Wherein, the connecting pipe is connected to any outlet of the semiconductor device; The other end of the hand valve is connected to the gas filling device.

2. The semiconductor equipment airtightness detection tool as claimed in claim 1, characterized in that: The pressure sensor, the pressure regulating valve and the connecting pipe are connected via a first ferrule joint; Wherein, the first ferrule joint is a three-port ferrule joint, one end of which is connected to one end of the pressure sensor, one end is connected to one end of the connecting pipe, and the other end is connected to one end of the pressure regulating valve.

3. The semiconductor device airtightness detection tool as claimed in claim 2, characterized in that: The pressure regulating valve and the hand valve are connected via a second ferrule joint; Wherein, the second ferrule joint is a two-port ferrule joint, one end of which is connected to the other end of the pressure regulating valve that is not connected to the first ferrule joint, and the other end is connected to one end of the hand valve.

4. The semiconductor equipment airtightness detection tool as claimed in claim 2, characterized in that: The other end of the connecting pipe which is not connected to the first ferrule joint is connected to any outlet of the semiconductor device.

5. The semiconductor device airtightness detection tool as claimed in claim 3, characterized in that: The other end of the hand valve that is not connected to the second ferrule joint is connected to a gas filling device.

6. The semiconductor device airtightness detection tool as claimed in claim 1, characterized in that: The pressure regulating valve is provided with a digital pressure gauge.

7. The semiconductor device airtightness detection tool as claimed in claim 6, characterized in that: The pressure threshold range of the pressure regulating valve is 0.09-0.15Mpa.

8. The semiconductor device airtightness detection tool as claimed in claim 1, characterized in that: The semiconductor equipment air tightness detection tooling also includes a data line and a test electric box; One end of the data line is connected to the pressure sensor, and the other end of the data line is connected to the test electric box, and the test electric box provides power to the pressure sensor through the data line.

9. The semiconductor device airtightness detection tool as claimed in claim 8, characterized in that: The test electric box is provided with a touch screen for displaying the pressure value and test time from the pressure sensor in real time.

10. The semiconductor device airtightness detection tool as claimed in claim 4, characterized in that: The connecting pipe is a curved pipe or a vertical pipe.

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