A multi-sample low-temperature electroluminescence testing device

Abstract

The utility model provides a multi-sample low-temperature electroluminescence testing device, which relates to the technical field of light-emitting device testing. The multi-sample low-temperature electroluminescence testing device is composed of a sample cavity, a sample stage, an electrical connection device, a light collecting device, an optical fiber and a spectrometer. The lighting of the sample to be tested is controlled by the electrical connection device, and the light collecting device is adjusted to collect the optical signal of the sample to be tested. Based on this operation, not only can the electroluminescence optical path emitted by each sample to be tested be guaranteed to be the same, but multiple samples to be tested can be tested by cooling once, and the test accuracy and test speed are greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of light emitting device testing, and more specifically to a multi-sample low-temperature electroluminescence testing device. Background Art

[0002] Electroluminescence testing is one of the important means to determine the performance of semiconductor material devices, and can provide parameters such as lumens, color rendering index, color temperature, color coordinates, and voltage. Low-temperature electroluminescence testing of semiconductor materials can obtain more physical parameters of the sample. And low-temperature electroluminescence is also one of the important methods to obtain internal quantum efficiency.

[0003] To characterize the internal quantum efficiency by low-temperature electroluminescence, it is necessary to assume that at low temperature (20K), the non-radiative centers are completely frozen and the internal quantum efficiency is 100%. Conventional testing devices load a sample on the sample stage, and the system takes a long time to cool down (usually 3-4 hours). Generally, if multiple samples are to be tested, multiple cooling and waiting processes are required, and the sample chamber must be vacuumed to atmospheric pressure to replace the sample, which is extremely inefficient and wastes resources.

[0004] In order to test multiple samples at one time by cooling, most of the existing technologies place multiple samples on a sample table, then use probes to establish electrical connections, and move the probes to the next sample after testing one sample. This operation is relatively cumbersome.

[0005] Therefore, how to provide a new type of low-temperature electroluminescence testing device to improve the testing efficiency of multiple samples is a technical problem that needs to be solved urgently by those skilled in the art. Utility Model Content

[0006] In view of this, in order to solve the above problems, the utility model provides a multi-sample low-temperature electroluminescence testing device, and the technical solution is as follows:

[0007] A multi-sample low-temperature electroluminescence testing device, comprising: a device body provided with a sample cavity, a sample stage located in the sample cavity;

[0008] The sample table is used to place at least two samples to be tested;

[0009] An electrical connection device partially located on the sample stage, the sample to be tested located on the sample stage being electrically connected to the electrical connection device;

[0010] A light collecting device with adjustable posture is located above the sample chamber in a first direction, wherein the first direction is perpendicular to the plane where the sample stage is located; a light inlet is provided on the light collecting device, and the light inlet is made to face any one of the at least two samples to be tested in the first direction by adjusting the posture of the light collecting device.

[0011] Preferably, in the above-mentioned multi-sample low-temperature electroluminescence testing device, the light collecting device with adjustable posture is fixed above the sample cavity in a rotatable manner, and the rotation axis of the light collecting device is parallel to the first direction.

[0012] Preferably, in the above-mentioned multi-sample low-temperature electroluminescence testing device, a side of the sample cavity close to the light collecting device is an optical window.

[0013] Preferably, in the above-mentioned multi-sample low-temperature electroluminescence testing device, the device body has a cavity door for opening and closing the sample cavity, and when the cavity door is in a closed state, the interior of the sample cavity forms a sealed environment.

[0014] Preferably, in the above-mentioned low-temperature electroluminescence testing device for multiple samples, the low-temperature electroluminescence testing device for multiple samples further comprises: an optical fiber and a spectrometer;

[0015] One end of the optical fiber probe is located at the light inlet, and the other end is connected to the spectrometer.

[0016] Preferably, in the above-mentioned multi-sample low-temperature electroluminescence testing device, the electrical connection device includes a knob switch and a power supply interface arranged outside the sample cavity;

[0017] The knob switch is electrically connected to the power interface, the power interface is used to be electrically connected to an external power source, and the knob switch is used to put any one of the at least two samples to be tested into a power-on state.

[0018] Preferably, in the above-mentioned multi-sample low-temperature electroluminescence testing device, the electrical connection device further comprises at least two first electrodes and one second electrode;

[0019] Wherein, the first electrode and the second electrode are two electrodes with opposite polarities;

[0020] Each of the first electrodes is used to be electrically connected to each of the samples to be tested, and the second electrodes are used to be electrically connected to each of the samples to be tested.

[0021] Preferably, in the above-mentioned multi-sample low-temperature electroluminescence testing device, at least two first electrodes are arranged in sequence in a surrounding trend with the position of the second electrode as the center.

[0022] Preferably, in the above-mentioned multi-sample low-temperature electroluminescence testing device, the sample to be tested is placed between the first electrode and the second electrode.

[0023] Preferably, in the above-mentioned multi-sample low-temperature electroluminescence testing device, the electrode type of the first electrode and the second electrode is a pressed sheet electrode or a probe electrode.

[0024] Compared with the prior art, the beneficial effects achieved by the utility model are:

[0025] The utility model provides a multi-sample low-temperature electroluminescence testing device, comprising: a device body provided with a sample cavity, a sample stage located in the sample cavity, the sample stage being used to place at least two samples to be tested; an electrical connection device partially located on the sample stage, the sample to be tested located on the sample stage being electrically connected to the electrical connection device; a light collecting device with an adjustable posture located above the sample cavity in a first direction, the first direction being perpendicular to the plane where the sample stage is located; a light inlet is provided on the light collecting device, and the light inlet is made to face any one of the at least two samples to be tested in the first direction by adjusting the posture of the light collecting device. At least two samples to be tested can be placed on the sample table, and the power-on state of at least two samples to be tested can be controlled by the electrical connection device, for example, the selected sample to be tested is in the power-on state, and the other samples to be tested are in the non-power-on state. This operation is relatively simple compared to the method of moving the probe to power on, and by adjusting the posture of the light collecting device and changing the collection position of the light inlet of the light collecting device, the test of the target sample to be tested can be achieved. In other words, only one cooling is required to sequentially achieve the measurement of at least two samples to be tested, thereby improving the test efficiency and accuracy. The multi-sample low-temperature electroluminescence test device can test multiple samples to be tested, and can ensure that the light collection position of the same sample to be tested is consistent when testing each temperature point. It has the characteristics of simple operation, high accuracy and saving test time. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0027] Figure 1 A schematic structural diagram of a multi-sample low-temperature electroluminescence testing device provided by an embodiment of the utility model;

[0028] Figure 2A schematic diagram of the partial structure of a multi-sample low-temperature electroluminescence testing device provided by an embodiment of the utility model;

[0029] Figure 3 A schematic structural diagram of another multi-sample low-temperature electroluminescence testing device provided by an embodiment of the utility model;

[0030] Figure 4 A partial structural schematic diagram of another multi-sample low-temperature electroluminescence testing device provided by an embodiment of the utility model;

[0031] Figure 5 A partial structural schematic diagram of another multi-sample low-temperature electroluminescence testing device provided by an embodiment of the utility model;

[0032] Figure 6 A partial structural schematic diagram of another multi-sample low-temperature electroluminescence testing device provided in an embodiment of the utility model. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0035] refer to Figure 1 , Figure 1 A schematic structural diagram of a multi-sample low-temperature electroluminescence testing device provided in an embodiment of the utility model. A multi-sample low-temperature electroluminescence testing device provided in an embodiment of the utility model comprises: a device body having a sample cavity 11, a sample stage 12 located in the sample cavity 11, and the sample stage 12 is used to place at least two samples to be tested.

[0036] An electrical connection device 13 is partially located on the sample stage 12 , and the sample to be tested located on the sample stage 12 is electrically connected to the electrical connection device 13 .

[0037] A light collecting device 14 with adjustable posture is located above the sample chamber 11 in a first direction, and the first direction is perpendicular to the plane where the sample stage 12 is located; a light inlet 15 is provided on the light collecting device 14, and the posture of the light collecting device 14 is adjusted so that the light inlet 15 is facing any one of the at least two samples to be tested in the first direction.

[0038] The samples to be tested include but are not limited to samples that have undergone die bonding, gold wire bonding, and packaging processes.

[0039] Specifically, in the embodiment of the utility model, the length extension direction of the sample chamber 11 is parallel to the first direction, that is, the sample stage 12 can be located at the bottom of the sample chamber 11, and the light collecting device 14 can be located at the top outside the sample chamber 11. The surface of the sample stage 12 facing the light collecting device 14 is provided with an electrical connection device 13. After the sample to be tested is placed on the sample stage 12, the sample to be tested is electrically connected to the electrical connection device 13. Obviously, the electrical connection device 13 can control the power-on state of at least two samples to be tested, for example, the selected sample to be tested is in the power-on state, and the other samples to be tested are not in the power-on state. In the unpowered state, this operation is relatively simple compared to the method of powering on the moving probe, and by adjusting the posture of the light collecting device 14, the light inlet 15 of the light collecting device 14 changes the collection position, so as to achieve the test of the target sample to be tested, that is to say, only one cooling is required to successively achieve the measurement of at least two samples to be tested, thereby improving the test efficiency and accuracy. The multi-sample low-temperature electroluminescence testing device can test multiple samples to be tested, and can ensure that the light collection position of the same sample to be tested is consistent when testing each temperature point, and has the characteristics of simple operation, high accuracy and saving test time.

[0040] That is to say, the conventional test device is to load a sample to be tested on the sample table, and the system cooling time is relatively long (generally 3-4 hours). Generally, if multiple samples to be tested are to be tested, it is necessary to perform multiple cooling and waiting processes for heating, and the sample chamber vacuum must be raised to atmospheric pressure to replace the sample to be tested, which is extremely inefficient and wastes resources. In order to test multiple samples to be tested in one cooling, most of the existing technologies are to place multiple samples to be tested on the sample table, and then establish an electrical connection using a probe. After measuring one sample, the probe is moved to the next sample to be tested, which is relatively troublesome. Based on this, the embodiment of the utility model provides a new type of multi-sample low-temperature electroluminescent test device, which can achieve the same electroluminescent light path emitted by each sample to be tested, and multiple samples to be tested can be tested by cooling once, and the test accuracy and test speed are greatly improved.

[0041] Optionally, in another embodiment of the present invention, the light collecting device 14 with adjustable posture is fixed above the sample chamber 11 in a rotatable manner, and the rotation axis of the light collecting device 14 is parallel to the first direction.

[0042] Specifically, in the embodiment of the utility model, the light collecting device 14 with adjustable posture is fixed above the sample chamber 11 in a rotatable manner. Obviously, the light inlet 15 on the light collecting device 14 can change the collection position by rotation, and each sample to be tested is tested in turn.

[0043] Optionally, in another embodiment of the present invention, refer to Figure 2 , Figure 2 A schematic diagram of the partial structure of a multi-sample low-temperature electroluminescence testing device provided in an embodiment of the utility model, wherein a side of the sample chamber 11 close to the light collecting device 14 is an optical window 16 .

[0044] Specifically, in the embodiment of the present utility model, Figure 1 The sample stage 12 is shown located at the bottom of the sample cavity 11, and the light collecting device 14 is located at the top outside the sample cavity 11. Obviously, the light inlet 15 on the light collecting device 14 is also located at the top outside the sample cavity 11. The side of the sample cavity 11 close to the light collecting device 14 is set as an optical window 16. Under the condition that the interior of the sample cavity 11 can be guaranteed to be a closed environment, the light emitted by the sample to be tested is emitted through the optical window 16 and collected, which will not affect the light collection effect, and obviously can also improve the accuracy of the test results.

[0045] Optionally, in another embodiment of the present invention, the device body has a chamber door for opening and closing the sample chamber 11 , and when the chamber door is in a closed state, a sealed environment is formed inside the sample chamber 11 .

[0046] Specifically, in the embodiment of the utility model, a door for opening and closing the sample chamber 11 is provided on the device body, which can more conveniently maintain the components inside the sample chamber 11 and facilitate the placement or replacement of the sample to be tested, and when the door is in a closed state, a sealed environment can be formed inside the sample chamber 11.

[0047] Optionally, in another embodiment of the present invention, refer to Figure 3 , Figure 3 This is a schematic structural diagram of another multi-sample low-temperature electroluminescence testing device provided in an embodiment of the utility model. The multi-sample low-temperature electroluminescence testing device provided in an embodiment of the utility model also includes: an optical fiber 18 and a spectrometer 19.

[0048] One end of the probe 17 of the optical fiber 18 is located at the light inlet 15 , and the other end is connected to the spectrometer 19 .

[0049] Specifically, in the embodiment of the utility model, the optical fiber 18 provides an optical transmission path for the light emitted by the sample to be tested, and the optical signal is processed and analyzed after being received by the spectrometer 19, so as to realize the test of the sample to be tested.

[0050] Optionally, in another embodiment of the present invention, refer to Figure 4 , Figure 4 A partial structural diagram of another multi-sample low-temperature electroluminescence testing device provided by the present utility model, referring to Figure 5 , Figure 5 A partial structural diagram of another multi-sample low-temperature electroluminescence testing device provided by the present utility model, referring to Figure 6 , Figure 6 A partial structural diagram of another multi-sample low-temperature electroluminescence testing device provided in an embodiment of the utility model, wherein the electrical connection device 13 includes at least two first electrodes 20 and one second electrode 21; wherein the first electrode 20 and the second electrode 21 are two electrodes with opposite polarities. The electrical connection device 13 also includes a knob switch 22 and a power interface 23 disposed outside the sample chamber 11; the knob switch 22 is electrically connected to the power interface 23, and the power interface 23 is used to electrically connect to an external power supply, and the knob switch 22 is used to make any one of the at least two samples to be tested in a power-on state, that is, the knob switch 22 is electrically connected to the first electrode 20, the second electrode 21 and the power interface 23, respectively.

[0051] The first electrodes 20 are used to be electrically connected to the samples to be tested, and the second electrodes 21 are used to be electrically connected to the samples to be tested. In an exemplary embodiment, the first electrode of each sample to be tested is electrically connected to an independent first electrode 20, and the second electrodes of all samples to be tested are electrically connected to the second electrode 21.

[0052] Specifically, in the embodiment of the utility model, the sample stage 12 has a diameter ranging from 3 cm to 15 cm. Two to 20 first electrodes 20 and one second electrode 21 can be arranged on the sample stage 12. The first electrode 20 and the second electrode 21 are two electrodes with opposite polarities. For example, the first electrode 20 is positively charged, and the second electrode 21 is negatively charged. Figure 4 and Figure 5 As shown, based on the design of the number of the first electrode 20 and the second electrode 21, at least two first electrodes 20 can be arranged in sequence in a surrounding trend with the second electrode 21 as the center, and then the sample to be tested is placed between the first electrode 20 and the second electrode 21, as shown in FIG. Figure 5As shown, the label BB represents the placement area of ​​the sample to be tested. Obviously, in the case of placing multiple samples to be tested, this design can also more reasonably realize the electrical connection of multiple samples to be tested, which can effectively save the number of second electrodes 21 and obviously can also achieve the purpose of reducing costs.

[0053] Exemplarily, the electrode types of the first electrode 20 and the second electrode 21 are other types of electrodes such as pressed-sheet electrodes or probe electrodes, which are not limited in the embodiments of the present utility model.

[0054] like Figure 6 As shown, when the power interface 23 is electrically connected to the external power supply, a sample to be tested is selected by rotating the knob switch 22 and powered on for testing. After the first sample is tested, the light inlet 15 of the light collecting device 14 is rotated to directly above the next sample to be tested, and the knob switch 22 is rotated to select this sample to be tested and powered on for testing.

[0055] From the above description, it can be known that a multi-sample low-temperature electroluminescence testing device provided by an embodiment of the utility model is composed of a sample cavity 11, a sample table 12, an electrical connection device 13, a light collecting device 14, an optical fiber 18 and a spectrometer 19. The lighting of the sample to be tested is controlled by the electrical connection device 13, and the light collecting device 14 is adjusted to collect the optical signal of the sample to be tested. Based on this operation, not only can it be ensured that the electroluminescence optical path emitted by each sample to be tested is the same, but multiple samples to be tested can be tested by cooling once, and the test accuracy and test speed are greatly improved. A multi-sample low-temperature electroluminescence testing device provided by an embodiment of the utility model has the characteristics of simple operation, high accuracy and saving test time.

[0056] The principle of the multi-sample low-temperature electroluminescence testing device provided by the embodiment of the utility model is further explained below in the form of several specific embodiments.

[0057] In the first embodiment, the sample stage 12 can be loaded with four samples to be tested. When testing the samples, the following steps are performed:

[0058] 1) Use a standard optical electroluminescence test system.

[0059] 2) Open the door of the sample chamber 11 and load four samples to be tested on the sample placement area BB on the sample stage 12 .

[0060] 3) Close the door of the sample chamber 11 and evacuate the chamber to a required vacuum level.

[0061] 4) Rotate the light inlet 15 of the light collecting device 14 to align with a sample to be tested.

[0062] 5) Place one end of the probe 17 of the optical fiber 18 at the light inlet 15 of the light collecting device 14 , and connect the other end to the spectrometer 19 .

[0063] 6) After the power interface 23 of the electrical connection device 13 is electrically connected to the external power supply, the sample chamber 11 is cooled to 300K. After reaching the test temperature, it takes a while (for example, five minutes) for the interior of the sample chamber 11 to reach a stable state.

[0064] 7) Use the knob switch 22 of the electrical connection device 13 to select the sample to be tested that is aligned with the light inlet 15 and power it on for testing. After the first sample is tested, before the next sample to be tested is lit up, turn the light inlet 15 of the light collecting device 14 to the top of the next sample to be tested and power it on for testing.

[0065] 8) Repeat step 7) four times until all samples to be tested are tested.

[0066] In the second embodiment, the sample stage can be loaded with ten samples to be tested. When testing the samples, the following steps are followed:

[0067] 1) Use a standard optical electroluminescence test system.

[0068] 2) Open the door of the sample chamber 11 and load ten samples to be tested on the sample placement area BB on the sample stage 12 .

[0069] 3) Close the door of the sample chamber 11 and evacuate the chamber to a required vacuum level.

[0070] 4) Rotate the light inlet 15 of the light collecting device 14 to align with a sample to be tested.

[0071] 5) Place one end of the probe 17 of the optical fiber 18 at the light inlet 15 of the light collecting device 14 , and connect the other end to the spectrometer 19 .

[0072] 6) After the power interface 23 of the electrical connection device 13 is electrically connected to the external power supply, the sample chamber 11 is cooled to 200K. After reaching the test temperature, it takes a while (for example, five minutes) for the interior of the sample chamber 11 to reach a stable state.

[0073] 7) Use the knob switch 22 of the electrical connection device 13 to select the sample to be tested that is aligned with the light inlet 15 and power it on for testing. After the first sample is tested, before the next sample to be tested is lit up, turn the light inlet 15 of the light collecting device 14 to the top of the next sample to be tested and power it on for testing.

[0074] 8) Repeat step 7) ten times until all samples to be tested are tested.

[0075] In the third embodiment, the sample stage 12 can be loaded with fifteen samples to be tested. When testing the samples, the following steps are followed:

[0076] 1) Use a standard optical electroluminescence test system.

[0077] 2) Open the door of the sample chamber 11 and load fifteen samples to be tested on the sample placement area BB on the sample stage 12 .

[0078] 3) Close the door of the sample chamber 11 and evacuate the chamber to a required vacuum level.

[0079] 4) Rotate the light inlet 15 of the light collecting device 14 to align with a sample to be tested.

[0080] 5) Place one end of the probe 17 of the optical fiber 18 at the light inlet 15 of the light collecting device 14 , and connect the other end to the spectrometer 19 .

[0081] 6) After the power interface 23 of the electrical connection device 13 is electrically connected to the external power supply, the sample chamber 11 is cooled to 4K. After reaching the test temperature, it waits for a period of time (for example, five minutes) to allow the interior of the sample chamber 11 to reach a stable state.

[0082] 7) Use the knob switch 22 of the electrical connection device 13 to select the sample to be tested that is aligned with the light inlet 15 and power it on for testing. After the first sample is tested, before the next sample to be tested is lit up, turn the light inlet 15 of the light collecting device 14 to the top of the next sample to be tested and power it on for testing.

[0083] 8) Repeat step 7) fifteen times until all samples to be tested are tested.

[0084] The above is a detailed introduction to a multi-sample low-temperature electroluminescence testing device provided by the utility model. This article uses specific examples to illustrate the principles and implementation methods of the utility model. The description of the above embodiments is only used to help understand the method of the utility model and its core idea; at the same time, for general technicians in this field, according to the idea of ​​the utility model, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the utility model.

[0085] It should be noted that each embodiment in this specification is described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part description.

[0086] It should also be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device that includes a series of elements is inherent to the elements, or also includes elements inherent to these processes, methods, articles or devices. In the absence of further restrictions, the elements defined by the sentence "including a..." do not exclude the presence of other identical elements in the process, method, article or device that includes the elements.

[0087] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A multi-sample low-temperature electroluminescence testing device, characterized in that: The multi-sample low-temperature electroluminescence testing device comprises: a device body provided with a sample cavity, a sample stage located in the sample cavity, and the sample stage is used to place at least two samples to be tested; An electrical connection device partially located on the sample stage, the sample to be tested located on the sample stage being electrically connected to the electrical connection device; A light collecting device with adjustable posture is located above the sample chamber in a first direction, wherein the first direction is perpendicular to the plane where the sample stage is located; a light inlet is provided on the light collecting device, and the light inlet is made to face any one of the at least two samples to be tested in the first direction by adjusting the posture of the light collecting device.

2. The multi-sample low-temperature electroluminescence testing device according to claim 1, characterized in that: A light collecting device with adjustable posture is fixed above the sample chamber in a rotatable manner, and the rotation axis of the light collecting device is parallel to the first direction.

3. The multi-sample low-temperature electroluminescence testing device according to claim 1, characterized in that: A side of the sample chamber close to the light collecting device is an optical window.

4. The multi-sample low-temperature electroluminescence testing device according to claim 1, characterized in that: The device body has a cavity door for opening and closing the sample cavity. When the cavity door is in a closed state, a sealed environment is formed inside the sample cavity.

5. The multi-sample low-temperature electroluminescence testing device according to claim 1, characterized in that: The multi-sample low-temperature electroluminescence testing device further comprises: an optical fiber and a spectrometer; One end of the optical fiber probe is located at the light inlet, and the other end is connected to the spectrometer.

6. The multi-sample low-temperature electroluminescence testing device according to claim 1, characterized in that: The electrical connection device includes a knob switch and a power interface arranged outside the sample chamber; The knob switch is electrically connected to the power interface, the power interface is used to be electrically connected to an external power source, and the knob switch is used to put any one of the at least two samples to be tested into a power-on state.

7. The multi-sample low-temperature electroluminescence testing device according to claim 1, characterized in that: The electrical connection device also includes at least two first electrodes and one second electrode; The first electrode and the second electrode are two electrodes with opposite polarities; each of the first electrodes is used to be electrically connected to each of the samples to be tested, and the second electrode is used to be electrically connected to each of the samples to be tested.

8. The multi-sample low-temperature electroluminescence testing device according to claim 7, characterized in that: At least two first electrodes are arranged in sequence in a surrounding trend with the second electrode as the center.

9. The multi-sample low-temperature electroluminescence testing device according to claim 8, characterized in that: The sample to be tested is placed between the first electrode and the second electrode.

10. The multi-sample low-temperature electroluminescence testing device according to claim 7, characterized in that: The first electrode and the second electrode are of sheet-type electrodes or probe-type electrodes.

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