Micro galvanometer device and electronic equipment

Abstract

The utility model relates to a micro galvanometer device and electronic equipment, the micro galvanometer device comprises a lens and a shell used for installing the lens, the lens and the shell are enclosed to form an accommodating cavity, a deflectable reflecting mirror is arranged in the accommodating cavity, and the accommodating cavity is configured to be a vacuum cavity. The shell and the lens define the containing cavity in the vacuum state, and the reflecting mirror conducts high-frequency vibration deflection in the containing cavity in the vacuum state, so that the reflecting mirror does not need to overcome air or liquid molecules to do work in the deflection process, and the driving power consumption of the reflecting mirror is low. Moreover, the working stability of the reflecting mirror is prevented from being influenced by heat generated by friction between the reflecting mirror in the accommodating cavity and air, the working stability and reliability of the micro galvanometer device are ensured, and the service life of the product is prolonged.

Description

Technical Field

[0001] The present disclosure relates to the field of optical technology, and in particular to a micro-vibration mirror device and an electronic device. Background Art

[0002] A micro-mirror is a small optical component with a wide range of applications. It changes the optical path by controlling vibration, thereby achieving functions such as light modulation, deflection and focusing.

[0003] In the related art, when the reflector of the micro-vibration mirror device vibrates at high frequency in the air, it needs to overcome the damping effect of the air to do work, which increases the driving power consumption of the reflector. In addition, the friction between the high-speed movement and the air will cause heat accumulation in the driving cantilever area of ​​the reflector, causing it to overheat and fail, abnormal vibration frequency, and even cause the cantilever to break. Another vibration environment for the reflector is a liquid environment. The motion damping of the liquid is very large, which will cause the vibration frequency of the reflector to be very low, seriously restricting the performance of the micro-vibration mirror device. Utility Model Content

[0004] The purpose of the present disclosure is to provide a micro-vibration mirror device and an electronic device to at least partially solve the problems existing in the related art.

[0005] In order to achieve the above-mentioned purpose, the present disclosure provides a micro-vibration mirror device, including a lens and a shell for installing the lens, the lens and the shell are enclosed to form a receiving cavity, a deflectable reflecting mirror is arranged in the receiving cavity, wherein the receiving cavity is configured as a vacuum cavity.

[0006] Optionally, the lens is configured so that the angle between the outgoing light and the incident light is greater than the angle between the reflected light and the incident light, wherein the incident light is the light incident on the lens, the outgoing light is the light emitted from the lens, and the reflected light is the light reflected by the reflector.

[0007] Optionally, the lens includes a first light-transmitting surface and a second light-transmitting surface, the first light-transmitting surface is used to receive the reflected light, the second light-transmitting surface is used to receive the refracted light refracted by the first light-transmitting surface, and is used to emit the outgoing light, wherein the first light-transmitting surface and the second light-transmitting surface are configured to have different curvatures.

[0008] Optionally, a curvature of the second light-transmitting surface is smaller than a curvature of the first light-transmitting surface.

[0009] Optionally, the lens is configured such that when the reflector is deflected to an angle of 45 degrees with the incident light, an angle between the outgoing light and the incident light is greater than 90 degrees.

[0010] Optionally, the lens includes an incident light-transmitting portion, which is used to receive incident light, and the incident light-transmitting portion is configured so that two opposite surfaces have the same curvature.

[0011] Optionally, the incident light-transmitting portion is aligned with the center of the reflector.

[0012] Optionally, the reflector is configured to be deflectable about a first deflection axis and a second deflection axis, wherein the first deflection axis is perpendicular to the second deflection axis.

[0013] Optionally, the micro-vibration mirror device includes a driving mechanism, and the driving mechanism is connected between the housing and the reflector to drive the reflector to deflect.

[0014] Optionally, the lens is configured as a hemispherical lens, and the thickness of the hemispherical lens is configured to gradually increase from the middle to the end of the hemispherical lens in its extension direction.

[0015] According to a second aspect of the embodiments of the present disclosure, there is provided an electronic device comprising the micro-vibration mirror device described in any one of the above embodiments.

[0016] The technical solution provided by the embodiments of the present disclosure may have the following beneficial effects:

[0017] The housing and the lens enclose a vacuum chamber, and the reflector performs high-frequency vibration deflection in the vacuum chamber, so that the reflector does not need to overcome the work of air or liquid molecules during the deflection process, so that the drive power consumption of the reflector is low. In addition, it also avoids the heat generated by the friction between the reflector and the air in the chamber, which affects the working stability of the reflector, ensures the working stability and reliability of the micro-vibration mirror device, and improves the service life of the product.

[0018] Other features and advantages of the present disclosure will be described in detail in the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are used to provide a further understanding of the present disclosure and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present disclosure but do not constitute a limitation of the present disclosure. In the accompanying drawings:

[0020] Figure 1 is an exploded view of a micro-vibration mirror device according to an exemplary embodiment of the present disclosure.

[0021] Figure 2 1 is a schematic diagram of an optical path when a reflective mirror in a micro-vibration mirror device is deflected by 30° according to an exemplary embodiment of the present disclosure.

[0022] Figure 3 yes Figure 2 A partial enlarged schematic diagram of part A in the middle.

[0023] Figure 4 1 is a schematic diagram of an optical path when a reflective mirror in a micro-vibration mirror device is deflected by 45° according to an exemplary embodiment of the present disclosure.

[0024] Figure 5 yes Figure 4 A partial enlarged schematic diagram of part B in the middle.

[0025] Figure 6 1 is a schematic diagram of an optical path when a reflective mirror in a micro-vibration mirror device is deflected by -45° according to an exemplary embodiment of the present disclosure.

[0026] Figure 7 yes Figure 6 A partial enlarged schematic diagram of part C in the middle.

[0027] Figure 8 is a schematic diagram of an optical path of a micro-vibration mirror device according to an exemplary embodiment of the present disclosure Figure 1 .

[0028] Fig. 9 is a schematic diagram of an optical path of a micro-vibration mirror device according to an exemplary embodiment of the present disclosure Figure 2 .

[0029] Fig.10 is a schematic diagram of an optical path of a micro-vibration mirror device according to an exemplary embodiment of the present disclosure Figure 3 .

[0030] Description of Reference Numerals

[0031] 100, lens; 110, accommodating cavity; 120, incident light-transmitting portion; 131, first light-transmitting surface; 132, second light-transmitting surface; 200, reflector; 300, driving mechanism; 310, first deflection axis; 330, second deflection axis; 340, magnetic driving member; 400, shell; L1, outgoing light; L2, incident light; L3, reflected light; Z1, refracted light. DETAILED DESCRIPTION

[0032] The specific implementation of the present disclosure is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described herein is only used to illustrate and explain the present disclosure, and is not used to limit the present disclosure.

[0033] In the present disclosure, unless otherwise stated, the directional words used, such as "upper" and "lower", are defined in conjunction with the corresponding drawings for the convenience of description and do not limit the direction of the micro-vibration mirror device. "Inside" and "outside" are defined according to the contours of the corresponding parts themselves. The terms used in the present disclosure, such as "first" and "second", are intended to distinguish one element from another and do not have order or importance. In addition, when the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements.

[0034] See also Figure 1 and Figure 2 A micro-vibration mirror device provided by an embodiment of the present disclosure includes a lens 100 and a shell 400 for mounting the lens 100. The lens 100 can be enclosed with the shell 400 to form a receiving chamber 110. A deflectable reflector 200 can be provided in the receiving chamber 110, wherein the receiving chamber 110 can be configured as a vacuum chamber. It can be understood that the lens 100 is an optical element through which light can be refracted, and the reflector 200 is an optical element that can reflect light. The high-frequency deflection of the lens 100 and the reflector 200 is used in conjunction to achieve light modulation and deflection. The receiving chamber 110 enclosed between the lens 100 and the shell 400 is a closed space to prevent dust from entering and affecting the reflection effect of the reflector 200 therein.

[0035] Through the above technical solution, the reflector 200 performs high-frequency vibration deflection in the accommodating chamber 110 in a vacuum state, so that the reflector 200 does not need to overcome the air or liquid molecules to do work during the deflection process, so that the driving power consumption of the reflector 200 is low. In addition, it also avoids the heat generated by the friction between the reflector 200 and the air in the accommodating chamber 110, which affects the working stability of the reflector 200, ensures the working stability and reliability of the micro-vibration mirror device, and improves the service life of the product.

[0036] In one embodiment, there are two ways to configure the accommodating chamber 110 as a vacuum chamber. For example, an operator can package the micro-vibration mirror device in a vacuum environment to exhaust the air in the accommodating chamber 110, so that the accommodating chamber 110 becomes a vacuum chamber. In addition, this method can also avoid the presence of dust, thereby preventing dust from falling on the reflecting mirror 200 and affecting the performance of the micro-vibration mirror device; alternatively, a one-way valve is installed on the shell 400, and after the micro-vibration mirror device is assembled, the vacuum pumping equipment is connected to the one-way valve to suck the accommodating chamber 110 into a vacuum state.

[0037] In one embodiment, see Figure 2 , Figure 4 and Figure 6, the lens 100 may be configured such that the angle between the outgoing light L1 and the incident light L2 is greater than the angle between the reflected light L3 and the incident light L2, wherein the incident light L2 may be the light incident to the lens 100, the outgoing light L1 may be the light emitted from the lens 100, and the reflected light L3 may be the light reflected by the reflector 200. In the embodiment of the present disclosure, the method of realizing such a light path may be realized by one lens or by a combination of multiple lenses, which is not limited in the present disclosure.

[0038] Specifically, combined Figure 2 and Figure 3 When the reflector 200 is deflected 30 degrees relative to the horizontal direction, the angle α2 between the outgoing light L1 and the incident light L2 is greater than the angle α1 between the reflected light L3 and the incident light L2, thus expanding the FOV (Field of View). Figure 4 and Figure 5 When the reflector 200 is deflected 45 degrees relative to the horizontal direction, the angle α4 between the outgoing light L1 and the incident light L2 is greater than the angle α3 between the reflected light L3 and the incident light L2, and the FOV is expanded. Figure 6 and Figure 7 When the reflector 200 is deflected by -45 degrees relative to the horizontal direction, the angle α6 between the outgoing light L1 and the incident light L2 is greater than the angle α5 between the reflected light L3 and the incident light L2, and the FOV is expanded. In the embodiment of the present disclosure, this configuration can expand the FOV of the micro-vibration mirror device, so that the micro-vibration mirror device can obtain a larger scanning range.

[0039] In one embodiment, reference Figures 2 to 7 The lens 100 may include a first light-transmitting surface 131 and a second light-transmitting surface 132. The first light-transmitting surface 131 may be used to receive the reflected light L3, the second light-transmitting surface 132 may be used to receive the refracted light Z1 refracted by the first light-transmitting surface 131, and may be used to emit the outgoing light L1, wherein the first light-transmitting surface 131 may be configured with a different curvature from the second light-transmitting surface 132.

[0040] It is understandable that the first light-transmitting surface 131 may be located on the inner side of the lens 100, that is, on the side surrounding the accommodating cavity 110, and the second light-transmitting surface 132 may be located on the outer side of the lens 100, that is, on the side away from the accommodating cavity 110. Fig. 9, when the curvature of the first light-transmitting surface 131 is equal to the curvature of the second light-transmitting surface 132, for example, when the relative refractive index of the lens 100 relative to the vacuum environment in the accommodating cavity 110 and the relative refractive index of the lens 100 relative to the external air environment are both 1.7, if the reflected light L3 forms an angle of 60 degrees with its normal after reaching the first light-transmitting surface 131, in the first refraction, according to the law of refraction, sin60° / 1.7=sin30°, so the refraction angle after passing through the first light-transmitting surface 131 (the angle between the refracted light Z1 and the first light-transmitting surface 132) is The angle between the outgoing light ray L1 and the normal on the second light-transmitting surface 131 is 30 degrees. After the refracted light ray Z1 propagates in the lens 100 to the second light-transmitting surface 132, it undergoes a second refraction. The angle between the refracted light ray Z1 and the normal on the second light-transmitting surface 132 is 30 degrees. According to the law of refraction, 1.7×sin30°=sin60° is obtained. Therefore, the angle between the outgoing light ray L1 and the normal on the second light-transmitting surface 132 is 60 degrees, which is equal to the angle between the reflected light ray L3 and the normal on the first light-transmitting surface 131, and the field of view is not expanded.

[0041] It can be seen that when the curvatures of the first light-transmitting surface 131 and the second light-transmitting surface 132 are the same, the angle of the reflected light L3 will not change after passing through the lens 100, and the field of view angle will not be affected. Therefore, in the embodiment of the present disclosure, in order to change the field of view angle, the curvatures of the first light-transmitting surface 131 and the second light-transmitting surface 132 are set to be different. For example, referring to Figure 8 When the angle between the tangent of the first light-transmitting surface 131 and the tangent of the second light-transmitting surface 132 is 10 degrees (that is, the curvatures of the first light-transmitting surface 131 and the second light-transmitting surface 132 are different), and the relative refractive indexes of the first light-transmitting surface 131 and the second light-transmitting surface 132 to the vacuum and the outside air are both 1.7, the angle between the reflected light L3 and the normal on the first light-transmitting surface 131 is 37 degrees. According to the law of refraction, sin37° / 1.7≈sin20°, so the angle between the refracted light Z1 and the normal on the first light-transmitting surface 131 is 20 degrees. When the refracted light Z1 propagates to the second light-transmitting surface 132, according to the law of refraction, 1.7×sin30°≈sin60° is obtained. Therefore, the angle between the outgoing light L1 and the normal on the second light-transmitting surface 132 is 60 degrees, which is larger than the initial light deflection, thereby expanding the field of view of the micro-vibration mirror device. The different curvatures of the first light-transmitting surface 131 and the second light-transmitting surface 132 can make the light path have the following three situations:

[0042] In the first case, please combine Figure 4 and Figure 5, the incident light L2 hits the reflector and generates reflected light L3. When the light is emitted from the vacuum to the glass lens 100, the light path will be refracted at the junction of the two media (the first light-transmitting surface 131) because the propagation speeds of light in glass and vacuum are different. In the first refraction, the refracted light Z1 will be deflected upward relative to the reflected light L3, so that the angle between the refracted light Z1 and the incident light L2 is smaller than the angle α3 between the reflected light L3 and the incident light L2, that is, after the first refraction, the angle of the light will become smaller, and the amount of reduction is a first value, such as a reduction of 6 degrees. It should be noted that the reduction or increase mentioned here refers to the reduction or increase of the angle between the corresponding light and the incident light. When the refracted light Z1 is emitted from the glass to the external environment, due to the different propagation speeds of light in the two media of glass and air, the light will be refracted at the intersection of the two media (the second light-transmitting surface 132). In the second refraction, the outgoing light L1 will be deflected downward relative to the refracted light Z1, that is, after the second refraction, the angle of the light will increase relative to the previous refraction, and the increase amount is a second value, such as an increase of 12 degrees, and the angle of the final outgoing light L1 will increase by 6 degrees. In this case, the light angle can be made to decrease first and then increase, and the second value of the increase amount is greater than the first value of the decrease amount, that is, it can be ensured that after the light is refracted twice, the angle of the final outgoing light L1 increases, so that the outgoing angle is expanded, that is, the angle α4 between the outgoing light L1 and the incident light L2 is greater than the angle α3 between the reflected light L3 and the incident light L2, thereby expanding the field of view.

[0043] In the second case, please combine Fig.10 , after the reflected light L3 reaches the first light-transmitting surface 131, the first refraction occurs. In the first refraction, the refracted light Z1 can be deflected downward relative to the reflected light L3, so that the angle between the refracted light Z1 and the incident light L2 is greater than the angle between the reflected light L3 and the incident light L2, that is, after the first refraction, the light angle will increase, and the amount of change is a third value, such as an increase of 10 degrees. After the refracted light Z1 reaches the second light-transmitting surface 132, the second refraction occurs, and the outgoing light L1 can be deflected upward relative to the refracted light Z1, that is, after the second refraction, the light angle will decrease relative to the previous refraction, and the amount of decrease is a fourth value, such as a decrease of 4 degrees, and finally the angle of the outgoing light L1 increases by 6 degrees. In this case, the light angle can be increased first and then decreased, and the third value of the increase is greater than the fourth value of the decrease, that is, it can be ensured that the angle between the outgoing light L1 and the incident light L2 is greater than the angle between the reflected light L3 and the incident light L2.

[0044] In the third case, the first refraction can be the same as the first refraction in the second case, that is, after the first refraction, the light is deflected downward and the angle becomes larger, in this case the amount of increase is the fifth value, such as 3 degrees. Of course, in the second refraction, the outgoing light L1 can be further deflected downward relative to the refracted light Z1, that is, after the second refraction, the light angle will be further increased relative to the previous refraction, and the amount of increase is the sixth value, such as 3 degrees, and finally the angle of the outgoing light L1 becomes 6 degrees. In this case, the light angle can be increased at each refraction, so that the outgoing light L1 with a larger angle is finally obtained.

[0045] In this implementation, see Figure 2 , Figure 4 , Figure 6 and Figure 8 The curvature of the second light-transmitting surface 132 can be smaller than the curvature of the first light-transmitting surface 131. In this way, the curvature radius of the second light-transmitting surface 132 located on the outside can be larger than the curvature radius of the first light-transmitting surface 131 located on the inside, which is convenient for the user to control the curvature radii of the inner and outer sides of the lens 100, thereby facilitating the regularization of the shape of the lens 100 and facilitating the processing and manufacturing of the lens 100.

[0046] In one embodiment, please combine Figure 4 and Figure 5 , the lens 100 can be configured as follows: when the reflector 200 is deflected to an angle of 45 degrees with the incident light L2, the angle α4 between the outgoing light L1 and the incident light L2 can be greater than 90 degrees, and the angle α3 between the reflected light L3 and the incident light L2 is equal to 90 degrees, thereby expanding the field of view of the micro-vibration mirror device, so that the micro-vibration mirror device obtains a larger scanning range, thereby expanding the user's field of view. Please combine Figure 6 and Figure 7 Similarly, when the reflector 200 is reversely deflected to an angle of 45 degrees with the incident light L2, the angle α6 between the outgoing light L1 and the incident light L2 can be greater than 90 degrees, and at this time the angle α5 between the reflected light L3 and the incident light L2 is equal to 90 degrees. After the reflector 200 completes a cycle of deflection, α4+α6>180 degrees can be obtained, and the micro-vibration mirror device can obtain a scanning range of more than 180 degrees in front of the lens 100.

[0047] In one embodiment, please combine Figure 2 , Figure 4 and Figure 6The lens 100 may include an incident light-transmitting portion 120, which may be used to receive an incident light beam L2. The incident light-transmitting portion 120 may be configured such that two opposite surfaces have the same curvature, so that light perpendicular to the incident light-transmitting portion 120 may be directly incident into the accommodating cavity 110, thereby avoiding refraction of the incident light on the incident light-transmitting portion 120 and increasing the complexity of the incident light path. By simplifying the incident light path, it is convenient for users to use the micro-vibration mirror device.

[0048] Furthermore, the incident light-transmitting portion 120 can be aligned with the center of the reflector 200 to avoid deviation between the centers of the two, which may cause part of the incident light L2 to fail to illuminate the reflector 200. This center alignment method facilitates changes in the optical path law, making the deflection law of the reflector 200 in opposite directions the same, thereby improving the convenience of operation of the micro-vibration mirror device.

[0049] In one embodiment, see Figure 1 The reflector 200 can be configured to be able to deflect around a first deflection axis 310 and a second deflection axis 330. The first deflection axis 310 can be perpendicular to the second deflection axis 330. By setting the first deflection axis 310 and the second deflection axis 330, the reflector 200 can be deflected in two dimensions, and a three-dimensional image scan in front of the micro-vibration mirror device can be obtained, which is convenient for the micro-vibration mirror device to comprehensively collect images.

[0050] In one embodiment, see Figure 1 The micro-vibration mirror device may include a driving mechanism 300, which may be connected between the housing 400 and the reflector 200 to drive the reflector 200 to deflect. By setting the driving mechanism 300, the reflector 200 may be deflected at any angle relative to the incident light L2, thereby changing the reflection angle. The driving mechanism 300 may be driven by electromagnetic drive, piezoelectric drive, or magnetic drive.

[0051] For further information, see Figure 1 , the reflector 200 can be mounted on the first deflection axis 310, and the micro-vibration mirror device can also include a connecting ring and a magnetic driving member 340. The first deflection axis 310 is in the connecting ring, and both ends of the first deflection axis 310 can be rotatably connected to the connecting ring, the connecting ring is mounted on the second deflection axis 330, and the second deflection axis 330 can drive the connection to rotate around its own axis. The magnetic driving member 340 is used to control the rotation of the first deflection axis 310 and the second deflection axis 330 respectively.

[0052] In one embodiment, see Figure 1, the lens 100 can be constructed as a hemispherical lens 100, and the mirror thickness of the hemispherical lens 100 can be configured to gradually increase from the middle to the end of its extension direction, so that the curvature radius value of the inner side of the lens 100 is smaller than the curvature radius value of the outer side of the lens 100, and at the same time, the focal length value of the inner side of the lens 100 is smaller than the focal length value of the outer side of the lens 100. When the reflector 200 rotates, the light reflected by the reflector 200 of the specially designed lens 100 can be refracted twice on the inner and outer sides of the lens 100, so that the final outgoing light L1 will have an expansion of the outgoing angle. In addition, on the basis of meeting the above-mentioned light path requirements, the contours of the inner and outer sides of this hemispherical lens 100 can be composed of arcs, so that the structure is regular and easy to process and manufacture. In the embodiment of the present disclosure, the center of the inner contour and the center of the outer contour can be set to align with the center of the reflector 200, that is, the centers of the two arc contours are collinear with the center of the reflector 200, so that the light path can be controlled.

[0053] According to a second aspect of the embodiments of the present disclosure, an electronic device is provided. The electronic device may include the micro-vibration mirror device of any of the above embodiments. For example, the electronic device may be an automotive laser radar, a micro-projector, an automotive HUD (Head-up Display System) or an AR device, etc. The electronic device may have all the beneficial effects of the above micro-vibration mirror device, which will not be described in detail here.

[0054] The preferred embodiments of the present disclosure are described in detail above in conjunction with the accompanying drawings; however, the present disclosure is not limited to the specific details in the above embodiments. Within the technical concept of the present disclosure, a variety of simple modifications can be made to the technical solution of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.

[0055] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present disclosure will not further describe various possible combinations.

[0056] In addition, various embodiments of the present disclosure may be arbitrarily combined, and as long as they do not violate the concept of the present disclosure, they should also be regarded as the contents disclosed by the present disclosure.

Claims

1. A micro-vibration mirror device, characterized in that: It comprises a lens and a shell for mounting the lens, wherein the lens and the shell are enclosed to form a containing cavity, wherein a deflectable reflecting mirror is arranged in the containing cavity, wherein the containing cavity is configured as a vacuum cavity.

2. The micro-vibration mirror device according to claim 1, characterized in that: The lens is configured so that the angle between the outgoing light and the incident light is greater than the angle between the reflected light and the incident light, wherein the incident light is the light incident on the lens, the outgoing light is the light emitted from the lens, and the reflected light is the light reflected by the reflector.

3. The micro-vibration mirror device according to claim 2, characterized in that: The lens includes a first light-transmitting surface and a second light-transmitting surface, wherein the first light-transmitting surface is used to receive the reflected light, and the second light-transmitting surface is used to receive the refracted light refracted by the first light-transmitting surface and to emit the outgoing light, wherein the first light-transmitting surface and the second light-transmitting surface are configured to have different curvatures.

4. The micro-vibration mirror device according to claim 3, characterized in that: The curvature of the second light-transmitting surface is smaller than the curvature of the first light-transmitting surface.

5. The micro-vibration mirror device according to claim 2, characterized in that: The lens is configured such that when the reflector is deflected to an angle of 45 degrees with the incident light, the angle between the outgoing light and the incident light is greater than 90 degrees.

6. The micro-vibration mirror device according to claim 1, characterized in that: The lens comprises an incident light-transmitting portion, the incident light-transmitting portion is used to receive incident light, and the incident light-transmitting portion is configured so that two opposite surfaces have the same curvature.

7. The micro-vibration mirror device according to claim 6, characterized in that: The incident light-transmitting portion is aligned with the center of the reflector.

8. The micro-vibration mirror device according to claim 1, characterized in that: The reflector is configured to be deflectable about a first deflection axis and a second deflection axis, wherein the first deflection axis is perpendicular to the second deflection axis.

9. The micro-vibration mirror device according to claim 1, characterized in that: The micro-vibration mirror device comprises a driving mechanism, and the driving mechanism is connected between the housing and the reflecting mirror to drive the reflecting mirror to deflect.

10. The micro-vibration mirror device according to any one of claims 1 to 9, characterized in that: The lens is configured as a hemispherical lens, and a mirror thickness of the hemispherical lens is configured to gradually increase from the middle to the end of the hemispherical lens in the extension direction.

11. An electronic device, characterized in that: It comprises a micro-vibration mirror device according to any one of claims 1-10.

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