A transfer interaction device and chemical mechanical polishing system

Abstract

The present application discloses a transfer interaction device and a chemical mechanical polishing system, the transfer interaction device comprises: a bearing mechanism, the bearing mechanism has a first fixed surface; a liquid receiving plate, the liquid receiving plate is provided with a second fixed surface, the second fixed surface is provided with a perforation; a driving mechanism, the driving mechanism comprises an output shaft, one axial end of the output shaft passes through the perforation and is connected to the first fixed surface; a liquid-proof sleeve, the liquid-proof sleeve is sleeved on the output shaft, the liquid-proof sleeve is sealed and connected to the first fixed surface and the second fixed surface, the inner wall of the liquid-proof sleeve, the first fixed surface and the second fixed surface together form an inner cavity; the output shaft is provided with a connecting channel connecting the inner cavity and the atmosphere. The present application can not only prevent the output shaft and other structures below the bearing mechanism from being corroded by liquid through the liquid receiving plate, the liquid-proof sleeve, and the sealed connection between the liquid-proof sleeve and the first fixed surface and the second fixed surface, but also can keep the pressure in the inner cavity balanced with the atmospheric pressure through the connecting channel on the output shaft.

Description

Technical Field

[0001] The present application relates to the technical field of chemical mechanical polishing equipment, and in particular to a transfer interaction device and a chemical mechanical polishing system. Background Art

[0002] Chemical Mechanical Polishing (CMP) is a global surface flattening technology. Specifically, the wafer is adsorbed on the bottom of the polishing head, the polishing head presses the wafer against the polishing pad, and the surface of the wafer is flattened through the relative movement between the wafer and the polishing pad in the polishing liquid.

[0003] In the related art, a robot usually transfers wafers to a polishing head, but due to the limitation of the polishing head structure, the robot cannot directly grab the wafers sucked by the polishing head, so a transfer interaction device is required. Specifically, the polishing head places the wafer on the transfer interaction device, and the robot grabs the wafer from the transfer interaction device and transfers it away, and vice versa.

[0004] In the related art, the transfer interaction device generally includes a bearing mechanism and a driving mechanism, wherein the bearing mechanism is used to bear the wafer, and the driving mechanism includes an output shaft, one end of which is connected to the bearing mechanism, so as to drive the bearing mechanism to move up and down through the driving mechanism. However, there is a problem that polishing waste liquid and other liquids on both the wafer and the polishing head can easily splash onto the output shaft and other structures under the bearing mechanism, thereby causing the output shaft and other structures under the bearing mechanism to be easily corroded by the liquid. Utility Model Content

[0005] In view of the above-mentioned deficiencies in the related art, the present application provides a transfer interaction device and a chemical mechanical polishing system to solve the problem in the related art that liquid can easily splash onto the output shaft and other structures under the supporting mechanism.

[0006] In order to solve the above technical problems, in a first aspect, the present application provides a transfer interaction device, the transfer interaction device comprising:

[0007] A carrying mechanism, the carrying mechanism is used to carry the object to be transferred, and the carrying mechanism has a first fixing surface;

[0008] A liquid receiving tray, wherein a second fixing surface is arranged on the inner bottom wall of the liquid receiving tray, the second fixing surface is arranged opposite to the first fixing surface with a spacing, and a perforation is arranged on the second fixing surface;

[0009] A driving mechanism, the driving mechanism comprising an output shaft, one axial end of the output shaft passes through the through hole and is connected to the first fixed surface, so that the driving mechanism drives the bearing mechanism to move through the output shaft;

[0010] A liquid-proof sleeve, the liquid-proof sleeve is sleeved on the output shaft, the two ends of the liquid-proof sleeve located in the axial direction of the output shaft are respectively sealed and connected to the first fixed surface and the second fixed surface, and the inner wall of the liquid-proof sleeve, the first fixed surface and the second fixed surface jointly form an inner cavity;

[0011] The output shaft is provided with a communication channel connecting the inner cavity and the atmosphere.

[0012] In a possible implementation manner of the first aspect, the communication channel has a first air permeable port disposed on an outer wall of the output shaft and located in the inner cavity, and a plurality of the first air permeable ports are provided.

[0013] In a possible implementation of the first aspect, the plurality of first air openings form at least two first air opening groups, and the at least two first air opening groups are arranged sequentially along the axial direction of the output shaft, and the first air openings in the same first air opening group are arranged at circumferential intervals along the output shaft at the same axial position of the output shaft.

[0014] In a possible implementation of the first aspect, the connecting passage further has a second air vent disposed on an outer wall of the output shaft and located in the atmosphere, and a cross-sectional area of ​​the second air vent is equal to a sum of cross-sectional areas of the plurality of first air vents.

[0015] In a possible implementation manner of the first aspect, the liquid-proof sleeve is an accordion-type liquid-proof sleeve.

[0016] In a possible implementation of the first aspect, the driving mechanism further includes a driving member, and the output end of the driving member is transmission-connected to the output shaft via a connecting assembly; the connecting assembly includes a first connecting member connected to the output shaft, a second connecting member connected to the output end, and a floating joint connected between the first connecting member and the second connecting member;

[0017] A connecting hole is provided on the first connecting member, and the floating joint is inserted into the connecting hole and is loosely matched with the connecting hole; an annular protrusion is provided on the inner circumferential wall of the connecting hole, and an annular groove is provided on the outer circumferential wall of the floating joint, and the annular protrusion is inserted into the annular groove, so that the floating joint is connected to the first connecting member.

[0018] In a possible implementation of the first aspect, the first connecting member includes a connecting portion and a splicing portion that are spliced ​​together, the connecting portion is connected to the output shaft, both the connecting portion and the splicing portion are provided with arcuate side wall segments, and both of the two arcuate side wall segments are provided with protrusion segments, the two arcuate side wall segments are used to jointly enclose the connecting hole after the connecting portion and the splicing portion are spliced ​​together, and the two protrusion segments are used to jointly form the annular protrusion after the connecting portion and the splicing portion are spliced ​​together.

[0019] In a possible implementation manner of the first aspect, a linear bearing is fixedly installed in the through hole, and the linear bearing is sleeved on the output shaft.

[0020] In a possible implementation manner of the first aspect, one end of the linear bearing is located between the liquid receiving tray and the first connecting member, and a buffer member is provided on the output shaft and is located between the linear bearing and the first connecting member.

[0021] In a second aspect, the present application also provides a chemical mechanical polishing system, the chemical mechanical polishing system comprising:

[0022] The transfer interaction device according to any one of the first aspects;

[0023] A transfer device, wherein the transfer device is used to transfer the object to be transferred on the transfer interaction device, or the transfer device is used to transfer the object to be transferred to the transfer interaction device.

[0024] Compared with the related art, this application has at least the following beneficial effects:

[0025] When the transfer interaction device in the present application is used for the transfer of wafers, on the one hand, since the transfer interaction device includes a liquid receiving tray, the liquid receiving tray can be used to receive liquids such as polishing waste liquid on both the wafer and the polishing head, which is helpful to prevent liquids such as polishing waste liquid from falling onto other structures under the supporting mechanism, thereby preventing other structures under the supporting mechanism from being corroded by the liquid.

[0026] On the other hand, since the bearing mechanism has a first fixed surface, a second fixed surface is arranged on the inner bottom wall of the liquid receiving tray and is spaced and arranged opposite to the first fixed surface, and a through hole is provided on the second fixed surface, and one axial end of the output shaft of the driving mechanism passes through the through hole and is connected to the first fixed surface, and since the liquid-proof sleeve is sleeved on the output shaft, and the two ends of the liquid-proof sleeve located in the axial direction of the output shaft are respectively sealed and connected to the first fixed surface and the second fixed surface, not only can the liquid-proof sleeve itself be used to prevent liquid from splashing onto the output shaft, but also the sealing connection between the liquid-proof sleeve and the first fixed surface and the second fixed surface can prevent liquid from flowing into the inner cavity, thereby further preventing liquid from flowing onto the output shaft, and further preventing liquid from flowing along the output shaft to other structures below the bearing mechanism. Therefore, through the liquid-proof sleeve and the sealed connection between the liquid-proof sleeve and the first fixed surface and the second fixed surface, the output shaft and other structures below the bearing mechanism can be prevented from being corroded by liquid.

[0027] More importantly, in the process of the driving mechanism driving the bearing mechanism to move through the output shaft, since the liquid receiving plate is fixed, the spacing between the first fixed surface and the second fixed surface will change, and then the volume of the inner cavity surrounded by the inner wall of the liquid-proof sleeve, the first fixed surface and the second fixed surface will also change to a certain extent, so that in the long-term and repeated movement of the bearing mechanism, the volume of the inner cavity will change for a long time and repeatedly. In this case, if the inner cavity is not connected to the atmosphere, the internal and external pressures of the inner cavity will also be unbalanced for a long time and repeatedly, so that there is a risk of rupture of the liquid-proof sleeve. In the present application, a connecting channel connecting the inner cavity and the atmosphere is provided on the output shaft, so that the pressure in the inner cavity can be kept balanced with the atmospheric pressure through the connecting channel, that is, the internal and external pressures of the inner cavity can be kept balanced, so that in the process of the driving mechanism driving the bearing mechanism to move through the output shaft, the pressure in the inner cavity will not lose balance with the atmospheric pressure due to the change of the inner cavity volume, which is conducive to avoiding the rupture of the liquid-proof sleeve. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 A schematic diagram of a partially cutaway transfer interaction device provided in an embodiment of the present application;

[0030] Figure 2 A schematic diagram of a portion of the structure of a transfer interaction device provided in an embodiment of the present application;

[0031] Figure 3A schematic diagram of a partially cutaway connection structure provided in an embodiment of the present application;

[0032] Figure 4 A schematic diagram of a chemical mechanical polishing system provided in an embodiment of the present application.

[0033] Description of reference numerals:

[0034] 1-carrying mechanism; 11-first fixing surface;

[0035] 2-liquid receiving tray; 21-second fixing surface; 22-perforation;

[0036] 3-driving mechanism; 31-output shaft; 311-communication channel; 3111-first vent; 32-driving member; 321-output end; 33-connecting assembly; 331-first connecting member; 3311-connecting hole; 3312-annular protrusion; 3313-connecting part; 3314-joining part; 332-second connecting member; 333-floating joint; 3331-annular groove; 334-bolt;

[0037] 4-Liquid-proof cover;

[0038] 5-Inner cavity;

[0039] 6-Mounting seat;

[0040] 7-Linear bearing;

[0041] 8- buffer;

[0042] 100-Transfer interaction device. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0044] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0045] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0046] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0047] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0048] As described in the background technology of this application, in the related technology, chemical mechanical polishing (CMP) is a global surface flattening technology. Specifically, the wafer is adsorbed on the bottom of the polishing head, the polishing head presses the wafer against the polishing pad, and the surface of the wafer is flattened through the relative movement between the wafer and the polishing pad in the polishing liquid.

[0049] In the related art, a robot usually transfers wafers to a polishing head, but due to the limitation of the polishing head structure, the robot cannot directly grab the wafers sucked by the polishing head, so a transfer interaction device is required. Specifically, the polishing head places the wafer on the transfer interaction device, and the robot grabs the wafer from the transfer interaction device and transfers it away, and vice versa.

[0050] In the related art, the transfer interaction device generally includes a bearing mechanism and a driving mechanism, wherein the bearing mechanism is used to bear the wafer, and the driving mechanism includes an output shaft, one end of which is connected to the bearing mechanism, so as to drive the bearing mechanism to move up and down through the driving mechanism. However, there is a problem that polishing waste liquid and other liquids on both the wafer and the polishing head can easily splash onto the output shaft and other structures under the bearing mechanism, thereby causing the output shaft and other structures under the bearing mechanism to be easily corroded by the liquid.

[0051] Embodiment 1

[0052] In view of the above-mentioned problems, the present application provides a transfer interaction device to solve the problem in the related art that liquid can easily splash onto the output shaft and other structures under the supporting mechanism.

[0053] The technical solution of the present application will be further described below in conjunction with specific embodiments and drawings:

[0054] like Figure 1 As shown, the transfer interaction device 100 includes a supporting mechanism 1, a liquid receiving tray 2, a driving mechanism 3 and a liquid-proof sleeve 4, wherein the supporting mechanism 1 is used to support the object to be transferred, the supporting mechanism 1 has a first fixed surface 11, and a second fixed surface 21 is arranged on the inner bottom wall of the liquid receiving tray 2. The second fixed surface 21 is arranged opposite to the first fixed surface 11 at an interval, and a through hole 22 is arranged on the second fixed surface 21.

[0055] The driving mechanism 3 includes an output shaft 31, and one axial end of the output shaft 31 passes through the through hole 22 and is connected to the first fixed surface 11, so that the driving mechanism 3 drives the supporting mechanism 1 to move through the output shaft 31. The liquid-proof sleeve 4 is sleeved on the output shaft 31, and the two ends of the liquid-proof sleeve 4 located in the axial direction of the output shaft 31 are respectively sealed and connected to the first fixed surface 11 and the second fixed surface 21, and the inner wall of the liquid-proof sleeve 4, the first fixed surface 11 and the second fixed surface 21 together form an inner cavity 5; the output shaft 31 is provided with a connecting channel 311 connecting the inner cavity 5 and the atmosphere.

[0056] When the transfer interaction device 100 in the present application is used for the transfer of wafers, on the one hand, since the transfer interaction device 100 includes a liquid receiving tray 2, the liquid receiving tray 2 can be used to receive liquids such as polishing waste liquid on both the wafer and the polishing head, which is helpful to prevent liquids such as polishing waste liquid from falling onto other structures under the supporting mechanism 1, and further helps to prevent other structures under the supporting mechanism 1 from being corroded by the liquid.

[0057] On the other hand, since the support mechanism 1 has the first fixed surface 11, the inner bottom wall of the liquid receiving tray 2 is provided with a second fixed surface 21 spaced and arranged opposite to the first fixed surface 11, and the second fixed surface 21 is provided with a through hole 22, and one axial end of the output shaft 31 of the driving mechanism 3 passes through the through hole 22 and is connected to the first fixed surface 11, and since the liquid-proof sleeve 4 is sleeved on the output shaft 31, and the two ends of the liquid-proof sleeve 4 located in the axial direction of the output shaft 31 are respectively sealed and connected to the first fixed surface 11 and the second fixed surface 21, not only can the liquid-proof sleeve 4 itself prevent liquid from splashing onto the output shaft 31, but also the liquid-proof sleeve 4 can be sealed and connected with the first fixed surface 11 and the second fixed surface 21 to prevent liquid from flowing into the inner cavity 5, thereby further preventing liquid from flowing onto the output shaft 31, and further preventing liquid from flowing along the output shaft 31 to other structures below the support mechanism 1. Therefore, through the liquid-proof sleeve 4 and the sealed connection between the liquid-proof sleeve 4 and the first fixed surface 11 and the second fixed surface 21, the output shaft 31 and other structures below the support mechanism 1 can be prevented from being corroded by liquid.

[0058] More importantly, in the process of the driving mechanism 3 driving the supporting mechanism 1 to move through the output shaft 31, since the liquid receiving plate 2 is fixed, the distance between the first fixed surface 11 and the second fixed surface 21 will change, and then the volume of the inner cavity 5 surrounded by the inner wall of the liquid-proof sleeve 4, the first fixed surface 11 and the second fixed surface 21 will also change to a certain extent. In this way, during the long-term and repeated movement of the supporting mechanism 1, the volume of the inner cavity 5 will change repeatedly for a long time. In this case, if the inner cavity 5 is not connected to the atmosphere, there will be a long-term and repeated imbalance in the internal and external pressures of the inner cavity 5, so that there is a risk of rupture of the liquid-proof sleeve 4. In the present application, a connecting channel 311 connecting the inner cavity 5 and the atmosphere is provided on the output shaft 31. Therefore, the connecting channel 311 can keep the pressure in the inner cavity 5 and the atmospheric pressure balanced, that is, the internal and external pressures of the inner cavity 5 can be kept balanced. In this way, in the process of the driving mechanism 3 driving the supporting mechanism 1 to move through the output shaft 31, the pressure in the inner cavity 5 will not lose balance with the atmospheric pressure due to the change in the volume of the inner cavity 5, which is also beneficial to avoid the rupture of the liquid-proof sleeve 4.

[0059] Regarding the supporting mechanism 1 , the structural setting of the supporting mechanism 1 is relatively flexible. Specifically, it can be set according to actual needs, and the embodiment of the present application does not make any specific limitation on this.

[0060] For the communication channel 311, further, as Figure 1 As shown, the communication channel 311 has a first air permeable opening 3111 disposed on the outer wall of the output shaft 31 and located in the inner cavity 5 , and a plurality of first air permeable openings 3111 are provided.

[0061] With such arrangement, on the one hand, the gas delivery amount between the inner cavity 5 and the connecting passage 311 can be increased through the multiple first air ports 3111, which is beneficial to further ensure the balance between the pressure in the inner cavity 5 and the atmospheric pressure; on the other hand, even if the output shaft 31 has a smaller diameter, by providing multiple first air ports 3111, while ensuring that the pressure in the inner cavity 5 can be balanced with the atmospheric pressure, a single first air port 3111 can be made to have a smaller size to a certain extent, thereby facilitating the arrangement of the first air ports 3111 on the output shaft 31 with a smaller diameter.

[0062] Regarding the number of the first air openings 3111, in the embodiment of the present application, two, three or more first air openings 3111 may be provided. The number of the first air openings 3111 is flexible. Specifically, it can be set according to actual usage requirements. The embodiment of the present application does not make any specific limitation on this.

[0063] In other embodiments, when the output shaft 31 has a larger diameter, a first air vent 3111 with a larger size may be provided on the output shaft 31 to maintain the balance between the pressure in the inner cavity 5 and the atmospheric pressure. In this configuration, since there are fewer first air vents 3111 on the output shaft 31, it is convenient to process the first air vents 3111 on the output shaft 31.

[0064] Furthermore, if Figure 1 As shown, the plurality of first air openings 3111 form at least two first air opening groups, and the at least two first air opening groups are arranged in sequence along the axial direction of the output shaft 31, and the first air openings 3111 in the same first air opening group are arranged at intervals along the circumference of the output shaft 31 at the same axial position of the output shaft 31.

[0065] With such arrangement, on the one hand, at the circumferential direction of the same axial position of the output shaft 31, each first air vent 3111 in the same first air vent group is conducive to achieving uniform gas transportation between the inner cavity 5 and the connecting channel 311, and further helps to ensure the balance between the pressure in the inner cavity 5 and the atmospheric pressure; on the other hand, at least two groups of first air vent groups arranged in sequence along the axial direction of the output shaft 31 are conducive to achieving uniform gas transportation between the inner cavity 5 and the connecting channel 311 in the axial direction of the output shaft 31, and further helps to ensure the balance between the pressure in the inner cavity 5 and the atmospheric pressure.

[0066] Regarding the number of first air vents 3111 in the same first air vent group, in the embodiment of the present application, two, three or more first air vents 3111 may be provided in the same first air vent group, and the embodiment of the present application does not specifically limit this.

[0067] Regarding the number of the first ventilation opening groups, in the embodiment of the present application, the first ventilation opening groups may be provided in two groups, three groups or more, and the embodiment of the present application does not make any specific limitation on this.

[0068] Furthermore, the communication channel 311 also has a second air vent (not shown) disposed on the output shaft 31 and located in the atmosphere, and the cross-sectional area of ​​the second air vent is equal to the sum of the cross-sectional areas of the plurality of first air vents 3111 .

[0069] Such an arrangement is conducive to achieving smooth and uniform air inlet and outlet, and is conducive to reducing fluctuations and instability of air flow, thereby helping to improve the stability of the pressure in the inner cavity 5.

[0070] Regarding the cross-sectional area, it should be explained that the plane perpendicular to the central axis of the air vent is the first plane, the air vent has a cross-sectional figure on the first plane, and the cross-sectional area of ​​the air vent is the area of ​​the cross-sectional figure.

[0071] Regarding the setting position of the second air vent, in the embodiment of the present application, the second air vent can be set on the outer wall of the output shaft 31, or can be set at the bottom of the output shaft 31. The setting position of the second air vent is relatively flexible, and the embodiment of the present application does not make specific limitations on this.

[0072] For the liquid-proof sleeve 4, further, as Figure 1 As shown, the liquid-proof sleeve 4 is an accordion-type liquid-proof sleeve.

[0073] Such arrangement not only enables the liquid-proof sleeve 4 to have better liquid-proof and dust-proof effects, but also enables the liquid-proof sleeve 4 to have good flexibility, and enables the liquid-proof sleeve 4 to better adapt to the change in the distance between the first fixing surface 11 and the second fixing surface 21 during the movement of the supporting mechanism 1.

[0074] For the driving mechanism 3, further, as Figure 1 and Figure 2 As shown, the driving mechanism 3 further includes a driving member 32, and the output end 321 of the driving member 32 is connected to the output shaft 31 through a connecting assembly 33; Figure 3 As shown, the connection assembly 33 includes a first connection member 331 connected to the output shaft 31 , a second connection member 332 connected to the output end 321 , and a floating joint 333 connected between the first connection member 331 and the second connection member 332 .

[0075] like Figure 3As shown, a connecting hole 3311 is provided on the first connecting member 331, and the floating joint 333 is inserted in the connecting hole 3311 and has a clearance fit with the connecting hole 3311; an annular protrusion 3312 is provided on the inner peripheral wall of the connecting hole 3311, and an annular groove 3331 is provided on the outer peripheral wall of the floating joint 333, and the annular protrusion 3312 is inserted in the annular groove 3331, so that the floating joint 333 is low-coupling connected to the first connecting member 331.

[0076] With such arrangement, on the one hand, the insertion between the annular groove 3331 and the annular protrusion 3312 not only facilitates the connection between the first connecting member 331 and the floating joint 333, but also ensures the connection strength between the first connecting member 331 and the floating joint 333; on the other hand, when the movement direction of the output end 321 is not parallel to the movement direction of the output shaft 31, the clearance between the floating joint 333 and the connecting hole 3311 can avoid the output shaft 31 and the output end 321 from getting stuck, thereby ensuring the normal movement of the output shaft 31 and the output end 321.

[0077] Regarding the driving member 32, in the embodiment of the present application, the driving member 32 is an electric slide, and the output end 321 of the driving member 32 is a slider. Setting the driving member 32 as an electric slide can ensure the driving stability of the driving member 32, which is conducive to ensuring the stability of the movement of the output shaft 31.

[0078] In other embodiments, the driving member 32 may also be a pneumatic slide or a hydraulic slide, etc. The type of the driving member 32 is relatively flexible to select, and may be selected according to actual use requirements.

[0079] Regarding the connection between the floating joint 333 and the second connecting member 332, in a preferred embodiment, as Figure 3 As shown, the floating joint 333 and the second connecting member 332 are connected by bolts 334. Specifically, the bolts 334 pass through the bolt holes on the second connecting member 332 and are threadedly connected to the floating joint 333. Such a configuration can not only ensure the connection strength between the floating joint 333 and the second connecting member 332, but also facilitate the connection and disassembly between the floating joint 333 and the second connecting member 332.

[0080] Regarding the arrangement of the driving member 32, in a preferred embodiment, as Figure 2 As shown, the driving member 32 is arranged on the mounting seat 6, and the mounting seat 6 is arranged at the bottom of the liquid receiving tray 2. Such an arrangement can make the structure of the entire transfer interaction device 100 more compact, and it is more convenient to set up and install the transfer interaction device 100.

[0081] For the first connecting member 331, further, as Figure 3As shown, the first connecting member 331 includes a connecting portion 3313 and a splicing portion 3314 which are spliced ​​together, the connecting portion 3313 is connected to the output shaft 31, and both the connecting portion 3313 and the splicing portion 3314 are provided with arcuate side wall sections, and both arcuate side wall sections are provided with protrusion sections, and the two arcuate side wall sections are used to jointly enclose a connecting hole 3311 after the connecting portion 3313 and the splicing portion 3314 are spliced ​​together, and the two protrusion sections are used to jointly form an annular protrusion 3312 after the connecting portion 3313 and the splicing portion 3314 are spliced ​​together.

[0082] With such arrangement, when connecting the first connecting member 331 and the floating joint 333, the connecting portion 3313 and the splicing portion 3314 can be disassembled first, so that the annular groove 3331 on the floating joint 333 is inserted into the raised section on the connecting portion 3313, and then the connecting portion 3313 and the splicing portion 3314 are spliced, so that the annular groove 3331 on the floating joint 333 is inserted into the raised section on the splicing portion 3314; with such arrangement, the first connecting member 331 is arranged as the connecting portion 3313 and the splicing portion 3314, which facilitates the connection between the first connecting member 331 and the floating joint 333.

[0083] Regarding the connection method between the connecting part 3313 and the splicing part 3314, in the embodiment of the present application, the connecting part 3313 and the splicing part 3314 can be connected by screw connection, clamping, etc. The connection method between the connecting part 3313 and the splicing part 3314 is relatively flexible, and the embodiment of the present application does not make any specific limitation on this.

[0084] like Figure 1 and Figure 2 As shown, a linear bearing 7 is fixedly installed in the through hole 22 , and the linear bearing 7 is sleeved on the output shaft 31 .

[0085] Such a configuration enables the output shaft 31 and the through hole 22 to be guided and matched through the linear bearing 7. In this way, when the output shaft 31 moves relative to the liquid receiving tray 2, not only can the guiding effect on the output shaft 31 be guaranteed, but also the wear of the output shaft 31 and the through hole 22 can be avoided, which is beneficial to prolonging the service life of the output shaft 31 and the liquid receiving tray 2.

[0086] Furthermore, if Figure 1 and Figure 2 As shown, one end of the linear bearing 7 is located between the liquid receiving tray 2 and the first connecting member 331 , and a buffer member 8 located between the linear bearing 7 and the first connecting member 331 is provided on the output shaft 31 .

[0087] With such arrangement, the buffer member 8 can avoid collision between the linear bearing 7 and the first connecting member 331 , thereby avoiding damage to the linear bearing 7 and the first connecting member 331 , which is beneficial to extending the service life of the linear bearing 7 and the first connecting member 331 .

[0088] Regarding the material of the buffer component 8, in the embodiment of the present application, the material of the buffer component 8 can be rubber, foam, plastic, etc. The material selection of the buffer component 8 is relatively flexible, and specifically, it can be selected according to actual usage requirements.

[0089] Embodiment 2

[0090] The present application also provides a chemical mechanical polishing system, such as Figure 4 As shown, the chemical mechanical polishing system includes a transfer interaction device 100 and a transfer device (not shown in the figure), wherein the transfer device is used to transfer the object to be transferred on the transfer interaction device 100, or the transfer device is used to transfer the object to be transferred to the transfer interaction device 100. The transfer interaction device 100 has the same structure as any of the transfer interaction devices 100 in the above embodiments, and can bring the same or similar beneficial effects. For details, please refer to the description in the above embodiments, and this embodiment will not be repeated here.

[0091] As for the transfer device, in the embodiment of the present application, the transfer device can be a six-axis manipulator, a cylindrical coordinate manipulator or a horizontal multi-joint manipulator, etc. The type of the transfer device can be selected flexibly, and can be selected according to actual usage requirements.

[0092] In the present application, on the one hand, the liquid receiving tray 2 can be used to receive polishing waste liquid and other liquids on both the wafer and the polishing head, which is helpful to prevent polishing waste liquid and other liquids from falling onto other structures under the supporting mechanism 1, thereby preventing other structures under the supporting mechanism 1 from being corroded by the liquid.

[0093] On the other hand, not only can the liquid-proof sleeve 4 itself prevent the liquid from splashing onto the output shaft 31, but the sealing connection between the liquid-proof sleeve 4 and the first fixed surface 11 and the second fixed surface 21 can also prevent the liquid from flowing into the inner cavity 5, thereby further preventing the liquid from flowing onto the output shaft 31, and further preventing the liquid from flowing along the output shaft 31 to other structures below the supporting mechanism 1. Therefore, the liquid-proof sleeve 4 and the sealing connection between the liquid-proof sleeve 4 and the first fixed surface 11 and the second fixed surface 21 can prevent the output shaft 31 and other structures below the supporting mechanism 1 from being corroded by the liquid.

[0094] More importantly, the connecting channel 311 can keep the pressure in the inner cavity 5 and the atmospheric pressure balanced. In this way, when the driving mechanism 3 drives the supporting mechanism 1 to move through the output shaft 31, the pressure in the inner cavity 5 will not lose balance with the atmospheric pressure due to the change in the volume of the inner cavity 5, which is beneficial to avoid the rupture of the liquid-proof sleeve 4.

[0095] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A transfer interaction device, characterized in that: include: A carrying mechanism, the carrying mechanism is used to carry the object to be transferred, and the carrying mechanism has a first fixing surface; A liquid receiving tray, wherein a second fixing surface is arranged on the inner bottom wall of the liquid receiving tray, the second fixing surface is arranged opposite to the first fixing surface with a spacing, and a perforation is arranged on the second fixing surface; A driving mechanism, the driving mechanism comprising an output shaft, one axial end of the output shaft passes through the through hole and is connected to the first fixed surface, so that the driving mechanism drives the bearing mechanism to move through the output shaft; A liquid-proof sleeve, the liquid-proof sleeve is sleeved on the output shaft, the two ends of the liquid-proof sleeve located in the axial direction of the output shaft are respectively sealed and connected to the first fixed surface and the second fixed surface, and the inner wall of the liquid-proof sleeve, the first fixed surface and the second fixed surface jointly form an inner cavity; The output shaft is provided with a communication channel connecting the inner cavity and the atmosphere.

2. The transfer interaction device according to claim 1, characterized in that: The communication passage has a first air permeable opening which is arranged on the outer wall of the output shaft and located in the inner cavity, and a plurality of the first air permeable openings are provided.

3. The transfer interaction device according to claim 2, characterized in that: The plurality of first air vents form at least two first air vent groups, and the at least two first air vent groups are arranged in sequence along the axial direction of the output shaft, and the first air vents in the same first air vent group are arranged at intervals along the circumference of the output shaft at the same axial position of the output shaft.

4. The transfer interaction device according to claim 2 or 3, characterized in that: The communication passage further has a second air vent disposed on the output shaft and located in the atmosphere, and the cross-sectional area of ​​the second air vent is equal to the sum of the cross-sectional areas of the plurality of first air vents.

5. The transfer interaction device according to any one of claims 1 to 3, characterized in that: The liquid-proof sleeve is an accordion-type liquid-proof sleeve.

6. The transfer interaction device according to any one of claims 1 to 3, characterized in that: The driving mechanism further includes a driving member, and the output end of the driving member is connected to the output shaft through a connecting assembly; the connecting assembly includes a first connecting member connected to the output shaft, a second connecting member connected to the output end, and a floating joint connected between the first connecting member and the second connecting member; A connecting hole is provided on the first connecting member, and the floating joint is inserted into the connecting hole and is loosely matched with the connecting hole; an annular protrusion is provided on the inner circumferential wall of the connecting hole, and an annular groove is provided on the outer circumferential wall of the floating joint, and the annular protrusion is inserted into the annular groove, so that the floating joint is connected to the first connecting member.

7. The transfer interaction device according to claim 6, characterized in that: The first connecting member includes a connecting portion and a splicing portion that are spliced ​​together, the connecting portion is connected to the output shaft, and both the connecting portion and the splicing portion are provided with arcuate side wall sections, and both of the two arcuate side wall sections are provided with protrusion sections, and the two arcuate side wall sections are used to jointly enclose the connecting hole after the connecting portion and the splicing portion are spliced ​​together, and the two protrusion sections are used to jointly form the annular protrusion after the connecting portion and the splicing portion are spliced ​​together.

8. The transfer interaction device according to claim 6, characterized in that: A linear bearing is fixedly installed in the through hole, and the linear bearing is sleeved on the output shaft.

9. The transfer interaction device according to claim 8, characterized in that: One end of the linear bearing is located between the liquid receiving tray and the first connecting member, and a buffer member located between the linear bearing and the first connecting member is arranged on the output shaft.

10. A chemical mechanical polishing system, characterized in that: include: The transfer interaction device according to any one of claims 1 to 9; A transfer device, wherein the transfer device is used to transfer the object to be transferred on the transfer interaction device, or the transfer device is used to transfer the object to be transferred to the transfer interaction device.

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