Vacuum pump pipeline system capable of improving vacuum stability

Abstract

The utility model relates to the technical field of vacuum pumps, in particular to a vacuum pump pipeline system capable of improving vacuum stability. The technical problems that when a traditional vacuum pump pipeline system pumps and removes air flow, impurities in the air may cause pipeline pollution, and the air flow may flow back to influence the vacuum stability of a device are solved. According to the technical scheme, the vacuum pump pipeline system capable of improving the vacuum stability comprises a pump body, a purification assembly, a protection assembly, a measurement assembly, a storage assembly, a pressure reduction assembly and a damping assembly; compared with a traditional vacuum pump pipeline system which can cause pipeline pollution due to impurities in gas and can cause backflow of the gas flow to influence the vacuum stability of the device when the gas flow is pumped out, the device purifies the gas flow through the filtering structure, prevents the gas flow from being blown back through the isolation structure, and improves the vacuum stability of the device. And the stability of pressure fluctuation in the system is kept in an overpressure protection mode, so that the vacuum stability of the vacuum pump pipeline system is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum pumps, in particular to a vacuum pump pipeline system for improving vacuum stability. Background Art

[0002] A vacuum pump piping system refers to the overall configuration and device used to create and maintain a vacuum state in a specific environment or equipment. Such a system usually includes a vacuum pump as a core component, as well as a series of pipes, valves, connectors, sensors and other auxiliary components. However, in the use of traditional vacuum pump piping systems, traditional vacuum pump piping systems are used to extract the gas in the system to create and maintain a vacuum state. However, when the traditional vacuum pump piping system extracts the airflow, impurities in the gas may cause pipeline contamination, and the airflow may flow back, affecting the vacuum stability of the device. Utility Model Content

[0003] In order to overcome the problem that in the daily use of traditional vacuum pump pipeline systems, when the traditional vacuum pump pipeline system is extracting the airflow, impurities in the gas may cause pipeline contamination, and the airflow may flow back and affect the vacuum stability of the device.

[0004] The technical solution of the utility model is: a vacuum pump piping system for improving vacuum stability, comprising a pump body, a purification component, a protection component, a measuring component, a storage component, a decompression component and a shock-absorbing component; a purification component with a purification function is arranged above the pump body, a protection component with a protection function is arranged above the pump body, a measuring component with a measuring function is arranged on one side of the protection component, a storage component with a storage function is arranged on one side of the measuring component, a decompression component with a decompression function is arranged above the storage component, and a shock-absorbing component with a shock-absorbing function is arranged below the pump body.

[0005] Preferably, the pump body is treated with shock-absorbing protection by a shock-absorbing component, thereby treating the pipeline system with shock-absorbing protection, the extracted gas is filtered and purified by a purification component, backblowing or contamination when the system is shut down is prevented by a protection component, the measuring component is used to measure and monitor the vacuum degree in the system to facilitate stable operation of the system, the gas is stored by a storage component, and the device is pressure-maintaining and protected by a pressure reducing component.

[0006] Preferably, the purification component includes a first conduit, a filter and an activated carbon layer; the first conduit is arranged above the pump body, a filter is arranged at one end of the first conduit, and an activated carbon layer is arranged inside the filter. When in use, the filter can be connected to the equipment that needs to be vacuumed through the pipeline structure, and the connected equipment is evacuated by starting the pump body to obtain a vacuum state. The airflow drawn out of the pump body is filtered through the activated carbon layer to prevent impurities from entering the pipeline structure of the device to reduce pollution to the pipeline structure.

[0007] Preferably, the protective component includes a second conduit and a vacuum valve; a second conduit is arranged above the pump body, and a vacuum valve is arranged at one end of the second conduit. When in use, the airflow is introduced into the vacuum valve through the second conduit, and the vacuum valve can be used to isolate the vacuum pump and the vacuum chamber, and at the same time, the airflow in the system can be adjusted to prevent backblowing or contamination when the system is closed.

[0008] Preferably, the measuring component includes a third conduit and a vacuum measuring gauge; a third conduit is provided on one side of the vacuum valve, and a vacuum measuring gauge is provided on one end of the third conduit. When in use, the airflow is introduced into the vacuum measuring gauge through the third conduit, and the vacuum measuring gauge is used to measure and monitor the vacuum degree in the system to facilitate stable operation of the system.

[0009] Preferably, the storage assembly includes a fourth conduit and a storage tank; a fourth conduit is provided on one side of the vacuum measuring meter, and a storage tank is provided at one end of the fourth conduit. When in use, the airflow is input into the storage tank through the fourth conduit, and the gas can be stored and processed through the storage tank.

[0010] Preferably, the pressure reducing assembly includes a fifth conduit and a pressure reducing valve; the fifth conduit is arranged above the storage tank, and the pressure reducing valve is arranged at one end of the fifth conduit. When in use, the pressure reducing valve can maintain a certain vacuum degree in the system when the vacuum pump is turned off or fails, which helps to stabilize the pressure fluctuations.

[0011] Preferably, the shock-absorbing assembly includes a mounting plate and a rubber vibration isolator; a mounting plate is arranged under the pump body, and a rubber vibration isolator is arranged under the mounting plate, and a plurality of groups of rubber vibration isolators are arranged. When in use, the position of the pump body is installed and fixed by the mounting plate, and the rubber vibration isolator is used to reduce the impact of the vibration generated during the operation of the pump body on the surrounding pipeline structure and equipment, thereby performing shock-absorbing protection on the vacuum pump pipeline system.

[0012] Beneficial effects of the utility model:

[0013] 1. Compared with the traditional vacuum pump piping system, which is used to extract the gas in the system to create and maintain a vacuum state, the impurities in the gas may cause pipeline pollution when the traditional vacuum pump piping system extracts the airflow, and the airflow may flow back and affect the vacuum stability of the device. This device purifies the airflow through a filtering structure, prevents the airflow from backflow through an isolation structure, and maintains the stability of the pressure fluctuation inside the system through overpressure protection, thereby improving the vacuum stability of the vacuum pump piping system;

[0014] 2. Start the pump body to evacuate the connected equipment to obtain a vacuum state. Filter the airflow extracted from the pump body through the activated carbon layer to prevent impurities from entering the pipeline structure of the device to reduce the pollution of the pipeline structure. The airflow is introduced to the vacuum valve through the second conduit. The vacuum valve can be used to isolate the vacuum pump and the vacuum chamber. At the same time, the airflow in the system can be adjusted to prevent backblowing or pollution when the system is closed. The pressure reducing valve can maintain a certain vacuum degree in the system when the vacuum pump is closed or fails, which helps to stabilize the pressure fluctuation, thereby improving the vacuum stability of the vacuum pump pipeline system;

[0015] 3. The pump body is installed and fixed by means of a mounting plate, and the impact of vibrations generated during the operation of the pump body on surrounding piping structures and equipment is reduced by means of rubber vibration isolators, providing shock-absorbing protection for the vacuum pump piping system. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Shown is a first three-dimensional structural schematic diagram of a vacuum pump pipeline system for improving vacuum stability of the utility model;

[0017] Figure 2 The schematic diagram of the cross-section of the three-dimensional structure of the vacuum pump pipeline system for improving vacuum stability of the utility model is shown;

[0018] Figure 3 The second three-dimensional structure schematic diagram of the vacuum pump pipeline system for improving vacuum stability of the utility model is shown;

[0019] Figure 4 Shown is a partial three-dimensional structural schematic diagram of a vacuum pump pipeline system for improving vacuum stability of the utility model;

[0020] Explanation of the reference numerals: 1. Pump body; 2. Purification component; 201. First conduit; 202. Filter; 203. Activated carbon layer; 3. Protection component; 301. Second conduit; 302. Vacuum valve; 4. Measuring component; 401. Third conduit; 402. Vacuum measuring gauge; 5. Storage component; 501. Fourth conduit; 502. Storage tank; 6. Pressure reducing component; 601. Fifth conduit; 602. Pressure reducing valve; 7. Shock absorbing component; 701. Mounting plate; 702. Rubber vibration isolator. DETAILED DESCRIPTION

[0021] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0022] See also Figure 1 The utility model provides an embodiment: a vacuum pump piping system for improving vacuum stability, comprising a pump body 1, a purification component 2, a protection component 3, a measuring component 4, a storage component 5, a decompression component 6 and a shock absorbing component 7; a purification component 2 with a purification function is arranged above the pump body 1, a protection component 3 with a protection function is arranged above the pump body 1, a measuring component 4 with a measuring function is arranged on one side of the protection component 3, a storage component 5 with a storage function is arranged on one side of the measuring component 4, a decompression component 6 with a decompression function is arranged above the storage component 5, and a shock absorbing component 7 with a shock absorbing function is arranged below the pump body 1.

[0023] See also Figure 2-4In this embodiment, the purification component 2 includes a first conduit 201, a filter 202 and an activated carbon layer 203; a first conduit 201 is arranged above the pump body 1, a filter 202 is arranged at one end of the first conduit 201, and an activated carbon layer 203 is arranged inside the filter 202. When in use, the filter 202 can be connected to a device that needs to be vacuumed through a pipeline structure, and the connected device is evacuated by starting the pump body 1 to obtain a vacuum state, and the airflow extracted from the pump body 1 is filtered through the activated carbon layer 203 to prevent impurities from entering the pipeline structure of the device to reduce pollution to the pipeline structure. The protection component 3 includes a second conduit 301 and a vacuum valve 302; a second conduit is arranged above the pump body 1. 301, a vacuum valve 302 is arranged at one end of the second conduit 301. When in use, the airflow is introduced into the vacuum valve 302 through the second conduit 301. The vacuum valve 302 can be used to isolate the vacuum pump and the vacuum chamber, and can also adjust the airflow in the system to prevent backblowing or contamination when the system is closed. The measuring component 4 includes a third conduit 401 and a vacuum meter 402; a third conduit 401 is arranged at one side of the vacuum valve 302, and a vacuum meter 402 is arranged at one end of the third conduit 401. When in use, the airflow is introduced into the vacuum meter 402 through the third conduit 401. The vacuum meter 402 is used to measure and monitor the vacuum degree in the system to facilitate the stable operation of the system.

[0024] The storage assembly 5 includes a fourth conduit 501 and a storage tank 502; a fourth conduit 501 is provided on one side of the vacuum measuring gauge 402, and a storage tank 502 is provided at one end of the fourth conduit 501. When in use, the gas flow is input to the storage tank 502 through the fourth conduit 501, and the gas can be stored and processed through the storage tank 502. The decompression assembly 6 includes a fifth conduit 601 and a decompression valve 602; a fifth conduit 601 is provided above the storage tank 502, and a decompression valve 602 is provided at one end of the fifth conduit 601. When in use, the decompression valve 602 can be used to reduce the pressure of the vacuum meter 402. When the pump is turned off or fails, maintaining a certain vacuum degree in the system helps to stabilize pressure fluctuations. The shock absorbing assembly 7 includes a mounting plate 701 and a rubber vibration isolator 702. A mounting plate 701 is provided below the pump body 1, and a rubber vibration isolator 702 is provided below the mounting plate 701. There are multiple groups of rubber vibration isolators 702. When in use, the position of the pump body 1 is installed and fixed by the mounting plate 701, and the rubber vibration isolator 702 is used to reduce the impact of the vibration generated during the operation of the pump body 1 on the surrounding pipeline structure and equipment, so as to provide shock absorbing protection for the vacuum pump pipeline system.

[0025] During operation, the pump body 1 is first installed and fixed by means of the mounting plate 701 , and the influence of the vibration generated during the operation of the pump body 1 on the surrounding pipeline structures and equipment is reduced by means of the rubber vibration isolator 702 .

[0026] After the shock absorption protection treatment is completed, the connected equipment is evacuated by starting the pump body 1 to obtain a vacuum state, and the airflow extracted by the pump body 1 is filtered through the activated carbon layer 203 to prevent impurities from entering the pipeline structure of the device to reduce pollution to the pipeline structure;

[0027] After the filtration process is completed, the airflow is introduced into the vacuum valve 302 through the second conduit 301. The vacuum valve 302 can be used to isolate the vacuum pump and the vacuum chamber, and at the same time, the airflow in the system can be adjusted to prevent backblowing or contamination when the system is closed. The pressure reducing valve 602 can maintain a certain vacuum degree in the system when the vacuum pump is closed or fails.

[0028] Through the above steps, the shock absorbing component 7 is used to perform shock absorbing protection on the pump body 1, thereby performing shock absorbing protection on the pipeline system, the purification component 2 is used to filter and purify the extracted gas, the protection component 3 is used to prevent backblowing or contamination when the system is shut down, the measuring component 4 is used to measure and monitor the vacuum degree in the system to facilitate the stable operation of the system, the storage component 5 is used to store the gas, and the pressure reducing component 6 is used to perform pressure maintaining protection on the device.

[0029] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of those skilled in the art without departing from the purpose of the present invention.

Claims

1. A vacuum pump piping system for improving vacuum stability, comprising a pump body (1); characterized in that: The pump further comprises a purification component (2), a protection component (3), a measuring component (4), a storage component (5), a decompression component (6) and a shock absorbing component (7); a purification component (2) having a purification function is arranged above the pump body (1); a protection component (3) having a protection function is arranged above the pump body (1); a measuring component (4) having a measurement function is arranged on one side of the protection component (3); a storage component (5) having a storage function is arranged on one side of the measuring component (4); a decompression component (6) having a decompression function is arranged above the storage component (5); and a shock absorbing component (7) having a shock absorbing function is arranged below the pump body (1).

2. A vacuum pump piping system for improving vacuum stability according to claim 1, characterized in that: The purification component (2) comprises a first conduit (201), a filter (202) and an activated carbon layer (203); the first conduit (201) is arranged above the pump body (1), the filter (202) is arranged at one end of the first conduit (201), and the activated carbon layer (203) is arranged inside the filter (202).

3. A vacuum pump piping system for improving vacuum stability according to claim 1, characterized in that: The protection component (3) comprises a second conduit (301) and a vacuum valve (302); the second conduit (301) is arranged above the pump body (1), and the vacuum valve (302) is arranged at one end of the second conduit (301).

4. A vacuum pump piping system for improving vacuum stability according to claim 3, characterized in that: The measuring assembly (4) comprises a third conduit (401) and a vacuum degree measuring gauge (402); the third conduit (401) is arranged on one side of the vacuum valve (302), and the vacuum degree measuring gauge (402) is arranged on one end of the third conduit (401).

5. A vacuum pump piping system for improving vacuum stability according to claim 4, characterized in that: The storage assembly (5) comprises a fourth conduit (501) and a storage tank (502); the fourth conduit (501) is arranged on one side of the vacuum measuring meter (402), and the storage tank (502) is arranged on one end of the fourth conduit (501).

6. A vacuum pump piping system for improving vacuum stability according to claim 5, characterized in that: The pressure reducing assembly (6) comprises a fifth conduit (601) and a pressure reducing valve (602); the fifth conduit (601) is arranged above the storage tank (502), and the pressure reducing valve (602) is arranged at one end of the fifth conduit (601).

7. A vacuum pump piping system for improving vacuum stability according to claim 1, characterized in that: The shock absorbing assembly (7) comprises a mounting plate (701) and a rubber vibration isolator (702); the mounting plate (701) is arranged below the pump body (1), the rubber vibration isolator (702) is arranged below the mounting plate (701), and a plurality of groups of rubber vibration isolators (702) are arranged.

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