A device for fixing adhesive film on patch ring

Abstract

The device for fixing adhesive film to a patch ring of the present invention comprises a guide rail platform; based on the midpoint of the top surface of the guide rail platform, four patch ring platforms are arranged at the same intervals in the horizontal and vertical directions; a block is provided on the side of the patch ring platform away from the midpoint of the guide rail platform, and the inner side of the block is in a "︿" shape. The patch ring is framed by four groups of patch ring platforms at the same height to ensure that the product has no risk of scratches, and can realize auxiliary functions such as 0°, 90°, 180° and 270° rotation, so as to facilitate the production line personnel to quickly apply the film. This device, in response to existing process requirements and combined with the risk points of the operating surface in the production process, produces a standard fixed adhesive film jig under the condition of meeting the process standards, which can standardize the film application efficiently and accurately, reduce or avoid the risk points in the execution process of the production line personnel, and improve the product quality. At the same time, it is convenient for one machine to be used for multiple purposes, improves the convenience of personnel operation, and has strong practicality and wide applicability.

Description

Technical Field

[0001] The invention relates to a device for fixing an adhesive film, in particular to a device for fixing an adhesive film on a patch ring, and belongs to the technical field of semiconductor packaging. Background Art

[0002] Wafer bonding ring is an industrial material used in semiconductor manufacturing process, usually used in the following three links:

[0003] Protection during the process: In the semiconductor process, the surface of the wafer needs to be protected to prevent damage during processing. Wafer bonding rings can be used as a protective layer to wrap the wafer to prevent its surface from being damaged by chemicals or mechanical scratches.

[0004] Positioning in wafer processing: The wafer bonding ring is designed with high precision and can be used for positioning in wafer processing. For example, in thin film deposition and surface treatment processes, the wafer bonding ring can help ensure that the wafer position is accurate, thereby ensuring processing quality.

[0005] Support during wafer transfer: During the semiconductor manufacturing process, wafers need to be frequently moved and transferred between different devices. Wafer mounting rings can be used as supports to prevent wafers from breaking or bending due to excessive force, thereby ensuring their integrity.

[0006] At present, the scribing stations in the domestic packaging and testing field use DAF (Die attach film) adhesive films. Some of these films have weak adhesion and cannot effectively adhere to the patch ring, which can easily cause film peeling during the scribing process, resulting in product abnormalities.

[0007] At present, more than 90% of DAF (die attach film) used in the packaging and testing industry is imported, and it is difficult to change the raw materials. Therefore, the process can only perform film fixing process operations on the patch film and patch ring.

[0008] However, executing this process requires personnel to perform the entire process manually, which results in a high risk of scratches and material drop.

[0009] Therefore, it is urgent to develop a jig for production line personnel to apply film conveniently and quickly. Summary of the invention

[0010] In order to solve the deficiencies of the prior art, the object of the present invention is to provide a convenient device for fixing an adhesive film to a patch ring.

[0011] In order to achieve the above object, the present invention adopts the following technical solution:

[0012] A device for fixing an adhesive film to a patch ring, comprising a guide rail platform;

[0013] Based on the midpoint of the top surface of the guide rail platform, four patch ring platforms are arranged at the same intervals in the horizontal and vertical directions;

[0014] The patch ring platform is provided with a stopper on a side away from the midpoint of the guide rail platform, and the inner side surface of the stopper is in a "︿" shape.

[0015] At the midpoint, a rotating shaft is provided at the bottom of the guide rail platform, and the rotating shaft is provided on the base.

[0016] Based on the midpoint, the top surface of the guide rail platform is provided with slide rails in the transverse and longitudinal directions, and the patch ring platform slides along the slide rails.

[0017] Furthermore, it also includes a sliding block matched with the slide rail; the sliding block is L-shaped, and the patch ring platform is arranged on the top of the sliding block.

[0018] Furthermore, along the length direction, the slide rail is provided with a plurality of pin holes, and the slider is equipped with a positioning pin, which is used to be inserted into the pin hole to position the slider, and the position of the slider is adjusted by positioning and adjusting each pin along the slide rail, thereby adjusting the size of the patch ring platform, including 8 inches and 12 inches.

[0019] Furthermore, a fastening screw is provided on one side of the positioning pin, and a plurality of fastening screw holes corresponding to patch ring platforms of different spacing are provided on the base. When the size of the patch ring platform is changed, the fastening screw needs to be screwed out to move the patch ring platform to the pin hole of the corresponding size, and then the fastening screw needs to be screwed into the fastening screw hole to fix it.

[0020] Furthermore, a plurality of height-adjustable support feet are provided at the bottom of the base.

[0021] The present invention is beneficial in that:

[0022] The present invention is a convenient device for fixing adhesive film on patch ring, which is a film-sticking platform fixture designed based on the requirements of film-sticking process and the high efficiency and convenience of personnel operation. The patch ring is framed by 4 groups of patch ring platforms at the same height to ensure that there is no risk of scratching the product, the patch ring will not be displaced, and auxiliary functions such as 0°, 90°, 180° and 270° rotation can be realized, which is convenient for production line personnel to quickly stick the film.

[0023] The present invention provides a convenient device for fixing adhesive film on patch rings, which responds to existing process requirements and combines the risk points of the operating surface in the production process. Under the condition of meeting the process standards, a standard adhesive film fixing jig is manufactured, which can standardize the film sticking efficiently and accurately, reduce or avoid the risk points in the execution process of the production line personnel, improve product quality, and at the same time facilitate multiple uses of one machine, improve the convenience of personnel operation, and has strong practicality and wide applicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A side view of a device for fixing an adhesive film to a patch ring.

[0025] Figure 2 A top view of a device for fixing an adhesive film to a patch ring.

[0026] Figure 3 It is a schematic diagram of the structure of the fastening screw and the fastening screw hole.

[0027] The meanings of the marks in the accompanying drawings are as follows: 101, base, 102, supporting foot, 103, rotating shaft, 104, guide rail platform, 105, handle, 106, slide rail, 107, positioning pin, 108, fastening screw, 109, slider, 110, patch ring platform, 111, block, 112, fastening screw hole. DETAILED DESCRIPTION

[0028] The present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0029] A device for fixing an adhesive film on a patch ring consists of a base, a guide rail platform, a sliding component and a patch ring platform.

[0030] The base and the guide rail platform are relatively parallel. The bottom of the base is provided with a plurality of support feet with adjustable heights. A rotating shaft is provided in the middle of the top surface of the base. The top of the rotating shaft is fixedly connected to the bottom surface of the guide rail platform. Preferably, the extension line of the rotating shaft is opposite to the midpoint of the guide rail platform.

[0031] The sliding assembly consists of a slide rail, a slider and a positioning pin.

[0032] On the top surface of the guide rail platform, an XY coordinate system is established based on the midpoint, and slide rails are arranged along the X axis and the Y axis. At both ends of the X axis and the Y axis, the slide rails are respectively provided with matching sliders, preferably, the sliders are L-shaped, and the patch ring platform is horizontally placed on the top of the sliders.

[0033] A stopper is provided at the outer end of the patch ring platform, that is, the end of the side away from the midpoint of the guide rail platform, and the inner side of the stopper is in a "︿" shape facing the midpoint of the guide rail platform.

[0034] Preferably, the slide rail is provided with a plurality of pin holes, and the slider is equipped with a positioning pin, which is used to fix the slider and the patch ring platform along the X-axis and the Y-axis. A fastening screw is provided on one side of the positioning pin, and a corresponding fastening screw hole is provided on the base; when the size is changed, the fastening screw needs to be screwed out to move the patch ring platform to the pin hole of the corresponding size, and then the fastening screw needs to be screwed into the fastening screw hole.

[0035] A pair of handles are provided on both sides of the guide rail platform for easy transportation.

[0036] The base 101 is used to support the entire work surface.

[0037] The support feet 102 are used for adjusting the level of the base to prevent the platform from shaking.

[0038] The rotating shaft 103 is a connecting piece between the base and the guide rail platform, and can control the rotation of the entire upper guide rail platform to facilitate the film pasting operation in different directions by the production and selection personnel.

[0039] The guide rail platform 104 provides a base for the slide rail and provides support for the patch ring platform.

[0040] Handle 105 is the force-bearing position of the entire fixture when it is carried.

[0041] The slide rail 106 enables the patch ring platform to move horizontally.

[0042] Positioning pins 107, when the patch ring platform moves to the corresponding 8-inch / 12-inch position, the four positioning pins fix the position of the patch ring platform.

[0043] After the positioning pin is positioned by tightening screws 108, the entire patch ring is fixed in position and will not be displaced by tightening the four positioning screws.

[0044] Slider 109 is a connector between the patch ring platform and the slide rail. The purpose is to raise the height of the four patch rings so that the patch rings and the guide rail platform have a certain safety height, ensure that the product is protected from the patch ring platform and the slide rail has a safe distance, and ensure that there is no risk of scratching the product.

[0045] The patch ring platform 110 is used to prevent the patch ring and also plays a supporting role during the film application process. The area of ​​the support block needs to be strictly controlled to prevent the platform from being too wide and touching the product to cause scratches and fragments. At the same time, it cannot be too long to ensure that personnel can apply the film on both sides at the same time.

[0046] The stopper 111 is used to position the patch ring to prevent the patch ring from shaking during the process of sticking small films.

[0047] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the above embodiments do not limit the present invention in any form, and any technical solution obtained by equivalent replacement or equivalent transformation falls within the protection scope of the present invention.

Claims

1. A device for fixing an adhesive film to a patch ring, characterized in that: Including rail platform; Based on the midpoint of the top surface of the guide rail platform, four patch ring platforms are arranged at the same intervals in the horizontal and vertical directions; The patch ring platform is provided with a stopper on a side away from the midpoint of the guide rail platform, and the inner side surface of the stopper is in a "︿" shape.

2. The device according to claim 1, characterized in that At the midpoint, a rotating shaft is provided at the bottom of the guide rail platform, and the rotating shaft is provided on the base.

3. The device according to claim 1, characterized in that Based on the midpoint, the top surface of the guide rail platform is provided with slide rails in the transverse and longitudinal directions, and the patch ring platform slides along the slide rails.

4. The device according to claim 3, characterized in that It comprises a sliding block matched with the sliding rail; the sliding block is L-shaped, and the patch ring platform is arranged on the top of the sliding block.

5. The device according to claim 4, characterized in that The slide rail is provided with a plurality of pin holes along the length direction, and the slider is provided with a positioning pin, and the positioning pin is used to be inserted into the pin hole to position the slider.

6. The device according to claim 5, characterized in that The positioning pin is provided with a fastening screw on one side, and the base is provided with a plurality of fastening screw holes corresponding to patch ring platforms of different sizes.

7. The device according to claim 2, characterized in that A plurality of support feet with adjustable heights are arranged at the bottom of the base.

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