Connecting assembly and plasma generating device

Abstract

The utility model discloses a connection assembly and a plasma generating device, which relate to the field of plasma processing technology. The connection assembly is used for a plasma generating device, which includes a power supply assembly and an electrode assembly. The connection assembly includes a first connection member and a second connection member; the second connection member is connected to the first connection member, and the second connection member and the first connection member are respectively provided with connection holes for detachably connecting the power supply assembly and the electrode assembly. The technical solution provided by the utility model can improve the problem of poor convenience of disassembly and assembly of electrodes in existing plasma generating devices.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma processing, in particular to a connecting component and a plasma generating device. Background Art

[0002] Plasma processing equipment is a device used to perform plasma etching and deposition on the surface of a wafer or circuit board. Among them, the plasma generating device in the plasma equipment is used to generate an electromagnetic field to plasmatize the gas output by the gas source device and generate plasma. The plasma reacts with the surface of the wafer or circuit board in the etching chamber, thereby plasma etching the wafer or circuit board in the etching chamber. Existing plasma generating devices generally include a housing, a power supply assembly and an electrode. The power supply assembly and the electrode are installed in the housing, and the power supply assembly is connected to the electrode through a cable. When the electrode is damaged due to long-term work, the entire machine needs to be dismantled to achieve the repair or replacement of the electrode, which reduces the convenience of disassembly and assembly of the electrode. Utility Model Content

[0003] The main purpose of the utility model is to provide a connection assembly and a plasma generating device, aiming to solve the problem of poor assembly and disassembly convenience of electrodes of the existing plasma generating device.

[0004] To achieve the above-mentioned purpose, the connection assembly proposed in the utility model is used for a plasma generating device, wherein the plasma generating device comprises a power supply assembly and an electrode assembly, and the connection assembly comprises:

[0005] a first connecting member;

[0006] A second connecting member, the second connecting member is connected to the first connecting member, and the second connecting member and the first connecting member are respectively provided with connecting holes for detachably connecting the power supply assembly and the electrode assembly.

[0007] In one embodiment, the first connecting member and the second connecting member are arranged in a strip shape.

[0008] In one embodiment, the first connecting member is extended along the first direction; the second connecting member includes a first connecting segment and a second connecting segment, one end of the first connecting segment is connected to the first connecting member, the other end of the first connecting segment is extended along the second direction or the third direction and then bent toward the first direction to be connected to the second connecting segment, the second connecting segment is extended along the second direction, and the second connecting segment is provided with the connecting hole; wherein the first direction, the second direction and the third direction intersect each other.

[0009] In one embodiment, the first connecting member is detachably connected to the second connecting member.

[0010] The utility model also provides a plasma generating device, the plasma generating device comprising:

[0011] A housing assembly is formed with an air inlet passage, wherein the air inlet passage has an air inlet and an air outlet;

[0012] a gas delivery module, the gas delivery module being in communication with the gas inlet;

[0013] A diffusion component, disposed in the air inlet passage, for diffusing the process gas flowing therethrough;

[0014] An ionization device, comprising a power supply assembly and an electrode assembly, wherein the diffusion assembly and the electrode assembly are arranged in the air inlet channel at intervals along the air inlet and the air outlet; the electrode assembly is used to ionize the process gas flowing through to generate plasma, the electrode assembly comprises a first electrode and a second electrode electrically connected to the power supply assembly, and the power supply assembly is used to periodically change the polarity of the power output to the first electrode and the second electrode;

[0015] As the connecting component mentioned above, the connecting component can detachably connect the power supply component and the electrode component.

[0016] In one embodiment, two connecting components are provided, and the connecting holes of the first connecting members of the two connecting components are detachably connected to the first electrode and the second electrode one by one; the power supply component has a first output terminal and a second output terminal, and the connecting holes of the second connecting members of the two connecting components are detachably connected to the first output terminal and the second output terminal of the power supply component one by one.

[0017] In one embodiment, the shell assembly has a first installation opening connected to the air inlet passage, and the electrode assembly extends out of the shell assembly through the first installation opening and is detachably connected to the first connecting member.

[0018] In one embodiment, the plasma generating device further comprises a box body having a cavity and a second mounting port connected to the cavity, the connecting component is disposed in the cavity, and the second connecting member extends out of the box body through the second mounting port and is detachably connected to the power supply component.

[0019] In one embodiment, the power supply component includes a power supply module and a polarity conversion circuit, the polarity conversion circuit having an input end, a first output end and a second output end, the input end of the polarity conversion circuit is connected to the output end of the power supply module, the first output end of the polarity conversion circuit is electrically connected to the first electrode, and the second output end of the polarity conversion circuit is electrically connected to the second electrode, and the polarity conversion circuit is used to periodically convert the power polarity output by the power supply module to the first electrode and the second electrode.

[0020] In one embodiment, the polarity conversion circuit is an electromagnetic coupler, and the connecting component connects the electrode component and the electromagnetic coupler.

[0021] In the technical solution provided by the utility model, a connection assembly is provided, and the connection assembly is used for a plasma generating device, the plasma generating device includes a power supply assembly and an electrode assembly, the connection assembly includes a first connection member and a second connection member, the second connection member is connected to the first connection member, the second connection member and the first connection member are respectively provided with connection holes, the connection hole of one of the second connection member and the first connection member is used for detachable connection to the power supply assembly, and the connection hole of the second connection member and the other of the first connection member is used for detachable connection to the electrode assembly. When the electrode assembly is damaged during the operation of the plasma generating device, the electrode assembly can be directly removed from the second connection member or the first connection member, so that the electrode assembly and the power supply assembly can be separated, without the need to dismantle the entire plasma generating device, which greatly improves the convenience of disassembly of the electrode assembly and facilitates its maintenance or replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0023] Figure 1 A schematic structural diagram of an embodiment of a plasma generating device provided by the utility model;

[0024] Figure 2 for Figure 1 Exploded diagram.

[0025] Description of Figure Numbers:

[0026] 100. Plasma generating device; 1. Connecting assembly; 11. First connecting member; 12. Second connecting member; 121. First connecting section; 122. Second connecting section; 2. Shell assembly; 3. Gas delivery module; 4. Diffusion assembly; 5. Ionization device; 51. Power supply assembly; 52. Electrode assembly; 521. First electrode; 522. Second electrode; 6. Box; 61. Cavity; 62. Second mounting port.

[0027] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0030] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0031] Plasma equipment is a device used for plasma etching and deposition on the surface of wafers or circuit boards. Among them, the plasma generating device in the plasma equipment is used to generate an electromagnetic field to plasmatize the gas output by the gas source device and generate plasma. The plasma reacts with the surface of the wafer or circuit board in the etching chamber, thereby plasma etching the wafer or circuit board in the etching chamber. Existing plasma generating devices generally include a housing, a power supply assembly and an electrode. The power supply assembly and the electrode are installed in the housing, and the power supply assembly is connected to the electrode through a cable. When the electrode is damaged due to long-term work, the entire machine needs to be dismantled to achieve the maintenance or replacement of the electrode, which reduces the convenience of disassembly and assembly of the electrode.

[0032] In order to solve this technical problem, the utility model proposes a connection assembly, which aims to solve the problem of poor convenience in assembly and disassembly of electrodes of existing plasma generating devices.

[0033] See also Figure 1 and Figure 2 , Figure 1 It is a structural schematic diagram of an embodiment of the plasma generating device provided by the utility model. Figure 2 yes Figure 1 Exploded diagram.

[0034] In an embodiment of the utility model, the connection assembly 1 is used for a plasma generating device 100, and the plasma generating device 100 may include, but is not limited to, a power supply assembly 51 and an electrode assembly 52, and may also include a gas delivery module 3. The power supply assembly 51 may be a radio frequency power supply, and the electrode assembly 52 may be an electrode. The radio frequency power supply generates a high-frequency electromagnetic field, which is then delivered to the electrode, and energy is released from the surface of the electrode, thereby exciting the gas delivered by the gas delivery module 3 into plasma, and the plasma reacts with the surface of the wafer or circuit board in the etching chamber, thereby realizing plasma etching of the wafer or circuit board.

[0035] Since the electrode assembly 52 is inevitably damaged during the long-term operation of the plasma generating device 100, in order to repair or replace the electrode assembly 52, in the embodiment of the present utility model, please refer to Figure 1 and Figure 2, the plasma generating device 100 further includes a connecting component 1. Specifically, the connecting component 1 may include but is not limited to a first connecting member 11 and a second connecting member 12. The second connecting member 12 is connected to the first connecting member 11. The connection method between the second connecting member 12 and the first connecting member 11 is not limited herein. For example, in order to improve the connection strength between the second connecting member 12 and the first connecting member 11, the second connecting member 12 and the first connecting member 11 may be fixedly connected, such as by welding, etc.; for another example, in order to improve the convenience of disassembly between the second connecting member 12 and the first connecting member 11, the second connecting member 12 and the first connecting member 11 may be detachably connected, such as by snap-on connection, etc.

[0036] Further, the second connector 12 and the first connector 11 are respectively provided with connection holes, and the connection hole of one of the second connector 12 and the first connector 11 is used for detachably connecting the power supply assembly 51, and the connection hole of the other of the second connector 12 and the first connector 11 is used for detachably connecting the electrode assembly 52. ​​For example, the connection hole of the first connector 11 is used for detachably connecting the electrode assembly 52, and the connection hole of the second connector 12 is used for detachably connecting the power supply assembly 51. Specifically, a first screw is provided on the electrode assembly 52, and the connection hole of the first connector 11 is threadedly matched with the first screw to achieve the connection between the first connector 11 and the electrode assembly 52; or, a second screw is provided on the power supply assembly 51, and the second connector 12 is threadedly matched with the second screw to achieve the connection between the second connector 12 and the power supply assembly 51.

[0037] According to the above content, it should be emphasized that the material of the first connector 11 and the second connector 12 is a conductive material, such as copper, iron and other metal materials. In this way, when the plasma generating device 100 is running, the high-frequency power of the power supply assembly 51 can be transmitted to the electrode assembly 52 through the first connector 11 and the second connector 12, so that the surface of the electrode assembly 52 can excite the energy of the plasma; when the electrode assembly 52 is damaged due to the long-term use of the plasma generating device 100, the electrode assembly 52 can be directly removed from the second connector 12, so that the electrode assembly 52 can be separated from the first connector 11, the second connector 12 and the overall structure of the power supply assembly 51 without dismantling the entire plasma generating device 100, thereby improving the convenience of disassembly of the electrode assembly 52 and facilitating its maintenance or replacement.

[0038] In the technical solution provided by the utility model, by setting a connection component 1, the connection component 1 is used for a plasma generating device, the plasma generating device 100 includes a power supply component 51 and an electrode component 52, the connection component 1 includes a first connecting member 11 and a second connecting member 12, the second connecting member 12 is connected to the first connecting member 11, the second connecting member 12 and the first connecting member 11 are respectively provided with connecting holes, the connecting hole of one of the second connecting member 12 and the first connecting member 11 is used for detachably connecting the power supply component 51, and the connecting hole of the other of the second connecting member 12 and the first connecting member 11 is used for detachably connecting the electrode component 52. When the electrode component 52 is damaged during the operation of the plasma generating device 100, the electrode component 52 can be directly removed from the second connecting member 12 or the first connecting member 11, so that the electrode component 52 can be separated from the power supply component 51 without dismantling the entire plasma generating device 100, which greatly improves the convenience of disassembly of the electrode component 52 and facilitates its maintenance or replacement.

[0039] In order to improve the connection strength between the connection assembly 1 and the power assembly 51 and the electrode assembly 52, in the embodiment of the utility model, two first connectors 11 and two second connectors 12 are respectively provided. The two first connectors 11 are connected to the two second connectors 12 one by one, and the connection holes of the two first connectors 11 are used to detachably connect the power assembly 51 and one of the electrode assembly 52, and the connection holes of the two second connectors 12 are used to detachably connect the power assembly 51 and the other of the electrode assembly 52. ​​Through the two first connectors 11 and the two second connectors 12, the connection strength between the power assembly 51 and the electrode assembly 52 can be improved, and the structural stability of the plasma generating device 100 can be improved.

[0040] Based on the above embodiments, there are many forms of implementing the first connecting member 11 and the second connecting member 12. In the embodiments of the utility model, the first connecting member 11 and the second connecting member 12 are arranged in a strip shape, which has a simple structure and can improve the convenience of production.

[0041] In one embodiment of the present invention, please refer to Figure 2The first connecting member 11 is extended along the first direction. The second connecting member 12 includes a first connecting segment 121 and a second connecting segment 122. One end of the first connecting segment 121 is connected to the first connecting member 11. The other end of the first connecting segment 121 extends along the second direction or the third direction and then bends toward the first direction to connect to the second connecting segment 122. The second connecting segment 122 is extended along the second direction. The second connecting segment 122 is provided with a connecting hole for detachably connecting the power supply assembly 51 or the electrode assembly 52. Specifically, when there is one first connecting member 11 and one second connecting member 12 respectively, the first connecting member 11 is extended along the first direction, one end of the first connecting segment 121 of the second connecting member 12 is connected to the first connecting member 11, the other end of the first connecting segment 121 is extended along the second direction and then bent toward the first direction to be connected to the second connecting segment 122, and the second connecting segment 122 is extended along the second direction; or, when there are two first connecting members 11 and two second connecting members 12 respectively, the two first connecting members 11 are extended along the first direction, one end of the first connecting segments 121 of the two second connecting members 12 are connected one-to-one to the two first connecting members 11, the other end of one of the first connecting segments 121 can be extended along the second direction and then bent toward the first direction to be connected to the corresponding second connecting segment 122, the other end of the other first connecting segment 121 can be extended along the third direction and then bent toward the first direction to be connected to the corresponding second connecting segment 122, and the two second connecting segments 122 are extended along the second direction respectively. With such configuration, the connection component 1 is curved as a whole, which can improve its structural strength, thereby improving the connection strength between the power component 51 and the electrode component 52 .

[0042] The utility model also provides a plasma generating device 100, see Figure 2 The plasma generating device 100 includes a housing assembly 2, a gas delivery module 3, a diffusion assembly 4, an ionization device 5 and a connection assembly 1. The specific structure of the connection assembly 1 refers to the above embodiment. Since the plasma generating device 100 adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be repeated here one by one.

[0043] In the embodiments of the present invention, refer to Figure 2The housing assembly 2 is formed with an air inlet channel and an air inlet and an air outlet connected to the air inlet channel. The gas delivery module 3 is connected to the air inlet for inputting process gas into the air inlet channel. The diffusion assembly 4 is installed in the air inlet channel for diffusing the process gas delivered to the gas channel by the gas delivery module 3. The ionization device 5 includes a power supply assembly 51 and an electrode assembly 52. ​​The electrode assembly 52 and the diffusion assembly 4 are arranged in the air inlet channel at intervals along the air inlet and the air outlet. The electrode assembly 52 is used to ionize the process gas flowing through to generate plasma. The electrode assembly 52 includes a first electrode 521 and a second electrode 522. The first electrode 521 and the second electrode 522 are electrically connected to the power supply assembly 51 respectively. The power supply assembly 51 is used to periodically change the polarity of the power output to the first electrode 521 and the second electrode 522. One end of the connection assembly 1 is detachably connected to the power supply assembly 51, and the other end of the connection assembly 1 is detachably connected to the electrode assembly 52.

[0044] For ease of understanding, the working principle of the plasma generating device 100 of this embodiment is described below, specifically as follows: the gas delivery module 3 inputs process gas into the inlet channel through the air inlet, and the process gas is diffused by the diffusion component 4 and then delivered to the first electrode 521 and the second electrode 522 respectively. At this time, the power supply component 51 outputs a high-frequency electromagnetic field to the first electrode 521 and the second electrode 522 respectively through the connecting component 1, so that the first electrode 521 and the second electrode 522 ionize the process gas flowing through to generate plasma. Since the power polarity of the first electrode 521 and the second electrode 522 is periodically changed, the diffusion direction of the plasma in the etching chamber can be changed from unidirectional to bidirectional, which effectively improves the etching efficiency and etching effect.

[0045] In order to improve the connection strength between the power supply assembly 51 and the electrode assembly 52, in the embodiment of the present utility model, refer to Figure 2 , the number of connecting components 1 is two, and the connecting holes of the first connecting members 11 of the two connecting components 1 are detachably connected to the first electrode 521 and the second electrode 522 one by one. For example, the first electrode 521 and the second electrode 522 are respectively provided with third screws, and the two third screws are threadedly matched with the connecting holes of the two first connecting members 11 one by one to achieve the connection between the two first connecting members 11 and the first electrode 521 and the second electrode 522. The power supply component 51 has a first output terminal and a second output terminal, and the connecting holes of the second connecting members 12 of the two connecting components 1 are detachably connected to the first output terminal and the second output terminal of the power supply component 51 one by one. For example, the first output terminal and the second output terminal of the power supply component 51 are respectively provided with fourth screws, and the two fourth screws are threadedly matched with the connecting holes of the two second connecting members 12 one by one to achieve the connection between the two second connecting members 12 and the power supply component 51.

[0046] Based on the above embodiments, in the embodiments of the present utility model, refer to Figure 2 The housing assembly 2 has a first mounting opening communicating with the air inlet passage, and the electrode assembly 52 is disposed in the air inlet passage and extends out of the housing assembly 2 through the first mounting opening to be detachably connected to the first connector 11. Through the above arrangement, not only can the connection between the electrode assembly 52 and the power supply assembly 51 be achieved, but also the influence of external environmental factors on the electrode assembly 52 can be reduced, thereby extending the service life of the electrode assembly 52.

[0047] In one embodiment of the present invention, refer to Figure 2 , the plasma generating device 100 further includes a box 6. The box 6 is used to install the connecting component 1, and plays a role of sealing and installing the connecting component 1 to reduce the influence of external environmental factors on it. At the same time, the connecting component 1 is wrapped by the box 6, which can improve the appearance of the plasma generating device 100 and facilitate the transportation and use of the plasma generating device 100. Specifically, the box 6 has a cavity 61 and a second installation port 62 connected to the cavity 61. The connecting component 1 is arranged in the cavity 61, and the second connecting member 12 of the connecting component 1 extends out of the box 6 through the second installation port 62 and is detachably connected to the power supply component 51. When the electrode assembly 52 is damaged, the first connecting member 11 can be separated from the electrode assembly 52, and the second connecting member 12 can also be separated from the power supply component 51, that is, the connecting component 1 and the electrode assembly 52 are separated from the power supply component 51 as a whole, so as to realize the disassembly, repair or replacement of the electrode assembly 52.

[0048] There are many forms of implementation of the power supply assembly 51. In the embodiment of the present utility model, refer to Figure 2 The power supply assembly 51 includes a power supply module and a polarity conversion circuit. The power supply module may be a radio frequency power supply, and the polarity conversion circuit may be a switch element, a relay or an electromagnetic coupler. The high frequency power output by the power supply module flows to the first electrode 521 and the second electrode 522 of the electrode assembly 52 through the polarity conversion circuit. Specifically, the polarity conversion circuit has an input end, a first output end and a second output end. The input end of the polarity conversion circuit is connected to the output end of the power supply module, the first output end of the polarity conversion circuit is electrically connected to the first electrode 521, and the second output end of the polarity conversion circuit is electrically connected to the second electrode 522. It should be noted that the polarity conversion circuit includes a control circuit and a switch gating circuit. The control circuit controls the switch gating circuit to select different output ends, so that power with different polarities is applied to the first electrode 521 and the second electrode 522, or the power periodicity of the electromagnetic coupler itself is used to make the polarity of the power applied to the first electrode 521 and the second electrode 522 change periodically, so that the diffusion direction of the plasma in the etching chamber changes from unidirectional to bidirectional, effectively avoiding over-etching or under-etching of the circuit board in the etching chamber.

[0049] In the embodiments of the present invention, refer to Figure 2 , specifically, an electromagnetic coupler is used as a polarity conversion circuit. Optionally, the electromagnetic coupler is a transformer, a mutual inductor or a rotary transformer. By connecting a power module that outputs an alternating current signal to the primary coil of the electromagnetic coupler, and then connecting the two ends of the secondary coil of the electromagnetic coupler to the first electrode 521 and the second electrode 522 respectively, so as to utilize the characteristic that the electromagnetic coupler itself will periodically change its polarity to control the polarity of the power input to the first electrode 521 and the second electrode 522. The electromagnetic coupler only needs to use one power supply to achieve the conversion of the power polarity, and the electromagnetic coupler has strong reliability and stability, and can better control the first electrode 521 and the second electrode 522 to intermittently emit power of opposite polarity, so that the etching effect is better.

[0050] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A connection assembly, characterized in that: Used in a plasma generating device, the plasma generating device comprises a power supply assembly and an electrode assembly, the connecting assembly comprises: a first connecting member; A second connecting member, the second connecting member is connected to the first connecting member, and the second connecting member and the first connecting member are respectively provided with connecting holes for detachably connecting the power supply assembly and the electrode assembly.

2. The connection assembly according to claim 1, characterized in that The first connecting member and the second connecting member are arranged in a strip shape.

3. The connection assembly according to claim 1, characterized in that The first connecting member is extended along the first direction; the second connecting member includes a first connecting section and a second connecting section, one end of the first connecting section is connected to the first connecting member, the other end of the first connecting section is extended along the second direction or the third direction and then bent toward the first direction to be connected to the second connecting section, the second connecting section is extended along the second direction, and the second connecting section is provided with the connecting hole; wherein the first direction, the second direction and the third direction intersect each other.

4. The connection assembly according to claim 1, characterized in that The first connecting member is detachably connected to the second connecting member.

5. A plasma generating device, characterized in that: The plasma generating device comprises: A housing assembly is formed with an air inlet passage, wherein the air inlet passage has an air inlet and an air outlet; a gas delivery module, the gas delivery module being in communication with the gas inlet; A diffusion component, disposed in the air inlet passage, for diffusing the process gas flowing therethrough; An ionization device, comprising a power supply assembly and an electrode assembly, wherein the diffusion assembly and the electrode assembly are arranged in the air inlet channel at intervals along the air inlet and the air outlet; the electrode assembly is used to ionize the process gas flowing through to generate plasma, the electrode assembly comprises a first electrode and a second electrode electrically connected to the power supply assembly, and the power supply assembly is used to periodically change the polarity of the power output to the first electrode and the second electrode; The connecting assembly according to any one of claims 1 to 4, wherein the connecting assembly is detachably connected to the power supply assembly and the electrode assembly.

6. The plasma generating device according to claim 5, characterized in that: The connecting components are provided with two, and the connecting holes of the first connecting parts of the two connecting components are detachably connected to the first electrode and the second electrode one by one; the power supply component has a first output terminal and a second output terminal, and the connecting holes of the second connecting parts of the two connecting components are detachably connected to the first output terminal and the second output terminal of the power supply component one by one.

7. The plasma generating device according to claim 5, characterized in that: The shell assembly has a first installation opening connected to the air inlet passage, and the electrode assembly extends out of the shell assembly through the first installation opening and is detachably connected to the first connecting member.

8. The plasma generating device according to claim 5, characterized in that: The plasma generating device further comprises a box body having a cavity and a second mounting opening connected to the cavity, the connecting component is arranged in the cavity, and the second connecting member extends out of the box body through the second mounting opening and is detachably connected to the power supply component.

9. The plasma generating device according to claim 5, characterized in that: The power supply component includes a power supply module and a polarity conversion circuit, the polarity conversion circuit has an input end, a first output end and a second output end, the input end of the polarity conversion circuit is connected to the output end of the power supply module, the first output end of the polarity conversion circuit is electrically connected to the first electrode, and the second output end of the polarity conversion circuit is electrically connected to the second electrode, and the polarity conversion circuit is used to periodically convert the power polarity output by the power supply module to the first electrode and the second electrode.

10. The plasma generating device according to claim 9, characterized in that: The polarity conversion circuit is an electromagnetic coupler, and the connecting component connects the electrode component and the electromagnetic coupler.

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