Coating jig

Abstract

The utility model provides a coating jig, which belongs to the technical field of coating machines and coating machine accessories, and comprises a base station assembly and a carrying table assembly, the base station assembly is provided with a mounting notch, and a first adsorption hole is arranged on the table top of the base station assembly; the carrying table assembly is arranged in the mounting notch and comprises a first driving assembly and a carrying table, the first driving assembly is suitable for driving the carrying table to move in the vertical direction, a second adsorption hole is formed in the table top of the carrying table, and the first adsorption hole and the second adsorption hole are connected with vacuum equipment; the carrying table has a first coating state for coating a crystal silicon substrate and a second coating state for coating a glass substrate, and in the first coating state, the crystal silicon substrate is clamped in the mounting notch; in the second coating state, the table top of the carrying table is flush with the table top of the base table assembly, and the carrying table is suitable for supporting glass base materials of different specifications. The coating jig not only can be used for coating crystalline silicon substrates with different thicknesses, but also can be compatible with coating of glass substrates with the size smaller than that of a base station assembly, and the utilization rate of the jig is high.

Description

Technical Field

[0001] The utility model relates to the technical field of coating machines and coating machine accessories, in particular to a coating jig. Background Art

[0002] Slot extrusion coating is a precise wet coating technology. Its working principle is that the slurry is extruded and sprayed along the slit of the coating die under a certain pressure and flow rate and transferred to the substrate. Compared with other coating methods, it has many advantages, such as fast coating speed, high precision and uniform wet thickness.

[0003] In order to apply the slurry to the surface of the substrate more evenly and accurately, the substrate is usually placed on a flat marble platform or other flat surfaces with high flatness to ensure the uniformity of the coating, and finally the slurry is applied to the surface of the substrate through a die head.

[0004] At present, the coating of crystalline silicon stacks needs to be full-coated. The jig for crystalline silicon stacks is provided with a card slot for clamping the crystalline silicon stack. The size of the crystalline silicon stack card is set in the card slot to meet the full coating requirement. However, this jig is only suitable for crystalline silicon stacks of appropriate size. For glass substrates whose size does not match the card slot size, this jig cannot be used, resulting in low jig utilization. Utility Model Content

[0005] Therefore, the utility model aims to solve the defect that the crystalline silicon stacking jig in the prior art cannot coat the glass substrate, resulting in low jig utilization, thereby providing a coating jig.

[0006] In order to solve the above technical problems, the utility model provides a coating jig, comprising:

[0007] A base assembly has a mounting notch, and a first adsorption hole is arranged on the table surface of the base assembly;

[0008] A carrier assembly is arranged in the installation slot, the carrier assembly comprises a first driving assembly and a carrier, the first driving assembly is adapted to drive the carrier to move in a vertical direction, a second adsorption hole is arranged on the surface of the carrier, the first adsorption hole and the second adsorption hole are respectively used to connect a vacuum device;

[0009] The carrier has a first coating state for coating a crystalline silicon substrate and a second coating state for coating a glass substrate. In the first coating state, the crystalline silicon substrate is arranged in the mounting groove; in the second coating state, the table surface of the carrier is flush with the table surface of the base assembly, which is suitable for supporting glass substrates of different specifications.

[0010] Optionally, the base assembly comprises:

[0011] A first positioning assembly having a U-shaped notch;

[0012] The second positioning component is located at the opening end of the U-shaped notch and is movably connected to the first positioning component along the opening direction of the U-shaped notch. The first positioning component and the second positioning component enclose the installation notch.

[0013] Optionally, the first positioning component includes:

[0014] Base plate;

[0015] The first compensation plate is arranged above the bottom plate through a support column, and the U-shaped notch and the first adsorption hole are arranged on the first compensation plate.

[0016] Optionally, the second positioning component includes:

[0017] A second driving member, disposed on the bottom plate;

[0018] The second compensation plate is arranged at the output end of the second driving member, and the second driving member drives the second compensation plate to move along the opening direction of the U-shaped notch. The second compensation plate and the first compensation plate are arranged flush with each other, and the first adsorption hole is arranged on the second compensation plate.

[0019] Optionally, the first adsorption holes on the first compensation plate and the second compensation plate are evenly spaced.

[0020] Optionally, the second positioning component further includes:

[0021] A first supporting plate, arranged at an output end of the second driving member;

[0022] An adjustment plate is arranged between the second compensation plate and the first support plate. The adjustment plate and the second compensation plate are fixedly connected. The adjustment plate is connected to the first support plate through a first adjustment screw. The height of the second compensation plate can be adjusted by adjusting the first adjustment screw.

[0023] Optionally, the stage assembly further includes:

[0024] The second support plate is arranged at the output end of the first driving assembly, the carrier is arranged above the second support plate, and a sealing member is arranged between the second support plate and the carrier.

[0025] Optionally, a second adjusting screw is connected between the second supporting plate and the carrier to adjust the parallelism between the carrier and the base assembly.

[0026] Optionally, the first driving component includes:

[0027] A third driving member, whose output end is connected to the carrier, and is used to drive the carrier to move in a vertical direction;

[0028] A fine-tuning driving member, whose output end is connected to the third driving member, is used to drive the third driving member and the carrier to make fine adjustments in the vertical direction.

[0029] Optionally, waste liquid tanks are arranged around the carrier, and the waste liquid tanks are discharged to the outside through a drain port at the bottom thereof.

[0030] The technical solution of the utility model has the following advantages:

[0031] 1. The coating jig provided by the utility model includes a base assembly and a carrier assembly, the base assembly has an installation slot, a first adsorption hole is arranged on the table surface of the base assembly, the carrier assembly is arranged in the installation slot, the carrier assembly includes a first driving assembly and a carrier, a second adsorption hole is arranged on the carrier, and the carrier has a first coating state and a second coating state. In the first coating state, the crystalline silicon substrate is clamped in the installation slot, and the second adsorption hole adsorbs the crystalline silicon substrate to achieve full coating of the crystalline silicon substrate. In the second coating state, the carrier moves to be flush with the base assembly, and the first adsorption hole and the second adsorption hole cooperate to achieve adsorption of glass substrates of different sizes;

[0032] A set of coating jigs can not only coat crystalline silicon substrates of different thicknesses, but also be compatible with the coating of glass substrates that are smaller than the base component. It can coat glass substrates of various sizes, and has a high jig utilization rate, which solves the problem of constantly replacing jigs during actual use, saves the number of equipment jigs, and improves product switching efficiency.

[0033] 2. The coating jig provided by the utility model comprises a base assembly including a first positioning assembly and a second positioning assembly, the first positioning assembly having a U-shaped notch, the second positioning assembly being located at the opening end of the U-shaped notch and being movably connected to the first positioning assembly along the opening direction of the U-shaped notch, the first positioning assembly and the second positioning assembly being able to enclose and clamp the crystalline silicon substrate to complete the positioning of the crystalline silicon substrate, the structure is simple, and when it needs to be placed, the second positioning assembly is moved away to facilitate the placement of the substrate and improve the efficiency of taking it.

[0034] 3. The coating jig provided by the utility model, the first positioning component includes a base plate and a first compensation plate, the first compensation plate is arranged on the base plate through a support column, the first compensation plate is provided with a U-shaped groove and a first adsorption hole, the setting of the first compensation plate compensates for the peripheral side of the crystalline silicon substrate, improves the uniformity of the slurry coating, and at the same time, through the connection of the support column, the connection strength is ensured while reducing materials and saving costs.

[0035] 4. The coating jig provided by the utility model, the second positioning component includes a second driving member and a second compensation plate, the second driving member drives the second compensation plate to move along the opening direction of the U-shaped groove, the second compensation plate and the first compensation plate are arranged flush, and the second compensation plate is provided with a first adsorption hole. The second compensation plate and the first compensation plate cooperate to jointly compensate for the peripheral side of the substrate, thereby ensuring the uniformity of the slurry coating during coating and improving the coating effect.

[0036] 5. In the coating jig provided by the utility model, the first adsorption holes on the first compensation plate and the second compensation plate are evenly spaced, so that when adsorbing a larger glass substrate, the suction force at each part is uniform, further improving the stability of the substrate.

[0037] 6. The coating jig provided by the utility model, the second positioning assembly includes a first support plate and an adjustment plate, the first support plate is arranged at the output end of the second driving member, the adjustment plate is arranged between the second compensation plate and the first support plate, the adjustment plate is connected to the first support plate through the first adjusting screw, and through the setting of the first adjusting screw, the second compensation plate and the first compensation plate can be adjusted to the same plane to achieve a height difference of micron level.

[0038] 7. The coating jig provided by the present invention, the carrier assembly also includes a second support plate, the second support plate is used to support the carrier, and a sealing member is provided between the second support plate and the carrier to prevent the drug solution from overflowing.

[0039] 8. The coating jig provided by the utility model has a second adjusting screw connected between the second support plate and the carrier to adjust the parallelism between the carrier and the base assembly. The second screw is set so that the parallelism between the two can reach the micron level, which is convenient for the subsequent parallelism of the substrate placed on the carrier, thereby ensuring the quality of slurry coating.

[0040] 9. The coating jig provided by the utility model, the first driving component includes a third driving member and a fine-tuning driving member. The third driving member is set to drive the substrate to move up and down, which is convenient for taking and placing products. The setting of the fine-tuning driving member can drive the top surface of the substrate to be flush with the compensation plate, so that the height difference reaches the micron level, ensuring the coating effect.

[0041] 10. The coating jig provided by the present invention has a waste liquid tank which is used to collect the liquid leaked during the coating process and discharge it to the outside through the drain port to avoid contaminating the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0043] Figure 1 This is a schematic structural diagram of an implementation method of the coating jig provided in Example 1 of the utility model;

[0044] Figure 2 for Figure 1 A schematic structural diagram of the first positioning component;

[0045] Figure 3 for Figure 2 A schematic diagram of the internal structure of the first compensation plate;

[0046] Figure 4 for Figure 1 A schematic diagram of the structure of the second positioning component;

[0047] Figure 5 for Figure 1 Schematic diagram of the structure of the mid-stage assembly;

[0048] Figure 6 for Figure 5 A schematic diagram of a top view structure;

[0049] Figure 7 for Figure 5 A schematic cross-sectional structure diagram of ;

[0050] Figure 8 for Figure 1 The schematic diagram of the structure of the coating of the crystalline silicon substrate is shown in FIG. 1 , and the dotted line frame in the figure is the coating range;

[0051] Fig. 9 for Figure 1 A schematic diagram of the structure of coating a glass substrate having a size consistent with that of a carrier;

[0052] Fig.10 for Figure 1 It is a schematic diagram of the structure of coating a glass substrate whose size is larger than that of the carrier.

[0053] Description of reference numerals:

[0054] 1. Installation notch; 2. First adsorption hole; 3. Carrier assembly; 4. Waste liquid tank; 5. Carrier; 6. Second adsorption hole; 7. First positioning assembly; 8. U-shaped notch; 9. Second positioning assembly; 10. Bottom plate; 11. First compensation plate; 12. Support column; 13. Second drive member; 14. Second compensation plate; 15. First support plate; 16. Adjustment plate; 17. Second support plate; 18. Third drive member; 19. Fine-tuning drive member. DETAILED DESCRIPTION

[0055] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0056] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0057] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0058] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0059] The difference between coating glass substrate and crystalline silicon substrate: After coating the glass substrate, if the uniformity within 10mm around the glass does not meet the standard, it needs to be removed. The glass is allowed to remove 10mm from the edge, but the crystalline silicon substrate needs to be fully coated.

[0060] The coating jig provided in this embodiment is used in the coating field, and a set of jigs can be used to coat both crystalline silicon substrates and glass substrates, with high utilization rate.

[0061] like Figures 1 to 5 Place, Figures 8 to 10 As shown, a specific implementation of the coating jig provided in this embodiment includes a base assembly and a carrier assembly 3, the base assembly has a mounting slot 1, and a first adsorption hole 2 is arranged on the table top of the base assembly; the carrier assembly 3 is arranged in the mounting slot 1, the carrier assembly 3 includes a first driving assembly and a carrier 5, the first driving assembly is suitable for driving the carrier 5 to move in the vertical direction, and a second adsorption hole 6 is arranged on the table top of the carrier 5, the first adsorption hole 2 and the second adsorption hole 6 are respectively used to connect the vacuum equipment; the carrier 5 has a first coating state for coating a crystalline silicon substrate and a second coating state for coating a glass substrate, in the first coating state, the crystalline silicon substrate is arranged in the mounting slot 1; in the second coating state, the table top of the carrier 5 is flush with the table top of the base assembly, suitable for supporting the glass substrates of different specifications.

[0062] The crystalline silicon substrate is positioned in the installation slot 1 for coating. The installation slot 1 is sealed and compensated for the periphery of the crystalline silicon substrate. The installation slot 1 is generally a square structure. The vacuum equipment is a vacuum pump. The adsorption of the substrate is achieved through the operation of the vacuum pump. The first adsorption hole 2 on the base assembly and the second adsorption hole 6 on the carrier assembly 3 are controlled separately and opened accordingly according to different adsorption requirements.

[0063] A set of coating jigs can not only coat crystalline silicon substrates of different thicknesses, but also be compatible with the coating of glass substrates that are smaller than the base component. It can coat glass substrates of various sizes, and has a high jig utilization rate, which solves the problem of constantly replacing jigs during actual use, saves the number of equipment jigs, and improves product switching efficiency.

[0064] like Figures 1 to 4 As shown, the coating jig provided in this embodiment, the base assembly includes a first positioning assembly 7 and a second positioning assembly 9, the first positioning assembly 7 has a U-shaped slot 8; the second positioning assembly 9 is located at the opening end of the U-shaped slot 8, and is movably connected to the first positioning assembly 7 along the opening direction of the U-shaped slot 8, and the first positioning assembly 7 and the second positioning assembly 9 enclose the installation slot 1.

[0065] The first positioning component 7 and the second positioning component 9 can enclose and clamp the crystalline silicon substrate to complete the positioning of the crystalline silicon substrate. The structure is simple. When it needs to be placed, the second positioning component 9 is moved away to facilitate the placement of the substrate and improve the efficiency of taking. The adjustment method is simple and convenient, so that the crystalline silicon substrate is accurately arranged, the accuracy of coating on the crystalline silicon substrate is improved, and the coating effect is improved, and the phenomenon of coating misalignment due to inaccurate positioning of the crystalline silicon substrate during the coating process is avoided. The U-shaped notch 8 and the second positioning component enclose and cover the peripheral side of the crystalline silicon substrate, seal and compensate the peripheral side of the crystalline silicon substrate, and avoid the slurry from flowing through the peripheral side of the crystalline silicon substrate to the back side of the crystalline silicon substrate when coating the crystalline silicon substrate. The coating width of the coating die head can be increased so that the slurry can completely cover the entire coating surface of the crystalline silicon substrate, thereby improving the coating effect.

[0066] like Figure 2 and Figure 3 As shown, in the coating jig provided in this embodiment, the first positioning component 7 includes a base plate 10 and a first compensation plate 11, the first compensation plate 11 is arranged above the base plate 10 through a support column 12, and the first compensation plate 11 is provided with the U-shaped groove 8 and the first adsorption hole 2.

[0067] The first compensation plate 11 is provided to compensate the peripheral side of the crystalline silicon substrate, thereby improving the uniformity of slurry coating. At the same time, through the connection of the support column 12, the connection strength is ensured while reducing materials and saving costs.

[0068] Specifically, there are multiple support columns 12 disposed at the four corners of the first compensation plate 11 , and the U-shaped slot 8 is opened in the middle of the first compensation plate 11 , so that when the installation slot 1 is enclosed to form the installation slot 1 , the installation slot 1 is located in the middle.

[0069] Among them, Figure 3 As shown, a specific implementation of the first compensation plate 11 is provided inside the first compensation plate 11 with a plurality of air channels, which are all in a connected state, and the air channels are connected to the first adsorption hole 2. When the air channels are processed, the plurality of air channels are all connected to the outside, and only one of the air channels is provided with an air pipe joint, which is connected to the vacuum equipment, and plugs are provided at the openings of the other air channels connected to the outside to avoid gas leakage and affect the adsorption effect.

[0070] In an improved implementation of the first positioning assembly 7, a plurality of lifting rings are provided on the base plate 10 to facilitate lifting, installation, use and transportation.

[0071] like Figure 4As shown, in the coating jig provided in this embodiment, the second positioning assembly 9 includes a second driving member 13 and a second compensation plate 14, and the second driving member 13 is arranged on the base plate 10; the second compensation plate 14 is arranged at the output end of the second driving member 13, and the second driving member 13 drives the second compensation plate 14 to move along the opening direction of the U-shaped groove 8, the second compensation plate 14 and the first compensation plate 11 are arranged flush, and the second compensation plate 14 is provided with the first adsorption hole 2.

[0072] The second compensation plate 14 and the first compensation plate 11 cooperate to jointly compensate the peripheral side of the substrate, ensure the uniformity of the slurry coating during coating, and improve the coating effect; the second compensation plate 14 and the first compensation plate 11 are arranged flush, and are also kept flush with the coating surface of the crystalline silicon substrate during installation, which improves the uniformity during coating and further improves the coating effect.

[0073] Specifically, this embodiment does not limit the specific structure of the second driving member 13, which can be a precision manual or automatic adjustment platform, preferably a differential head, the fixed base of the differential head is installed on the base plate 10, and the adjustment end of the differential head is connected to the second compensation plate 14. Adjustment is performed through the differential head to improve the adjustment accuracy. In addition, as an alternative implementation, the second driving member 13 can also be a cylinder, a hydraulic cylinder or a linear motor, etc.

[0074] like Figure 1 As shown, in the coating jig provided in this embodiment, the first adsorption holes 2 on the first compensation plate 11 and the second compensation plate 14 are evenly spaced, so that when adsorbing a larger glass substrate, the suction force at each part is uniform, further improving the stability of the substrate.

[0075] Specifically, with the center of the installation slot 1 as a reference, the first adsorption holes 2 are evenly distributed around the center, and more circles of the first adsorption holes 2 can be provided according to the size of a conventional glass substrate.

[0076] like Figure 4 As shown, in the coating jig provided in this embodiment, the second positioning assembly 9 further includes a first support plate 15 and an adjustment plate 16, the first support plate 15 is arranged at the output end of the second driving member 13; the adjustment plate 16 is arranged between the second compensation plate 14 and the first support plate 15, the adjustment plate 16 and the second compensation plate 14 are fixedly connected, the adjustment plate 16 is connected to the first support plate 15 through a first adjustment screw, and the height of the second compensation plate 14 is adjusted by adjusting the first adjustment screw. Specifically, the first adjustment screw is threadedly connected to the adjustment plate 16, and the second compensation plate 14 is finely adjusted in two directions by screwing the first adjustment screw in two directions, and the adjustment accuracy is high;

[0077] By setting the first adjusting screw, the second compensation plate 14 and the first compensation plate 11 can be adjusted to the same plane to achieve a height difference of micrometer level.

[0078] like Figures 5 to 7 As shown, in the coating jig provided in this embodiment, the carrier assembly 3 also includes a second support plate 17, the second support plate 17 is arranged at the output end of the first driving assembly, the carrier 5 is arranged above the second support plate 17, and a seal is arranged between the second support plate 17 and the carrier 5.

[0079] Specifically, the seal is a sealing plate to prevent the medicine from overflowing; the setting of the sealing plate is selected according to the second adsorption hole 6, and the setting of the second adsorption hole 6 on the carrier 5 is as follows: a cavity is provided at the bottom of the carrier 5, and the cavity is connected to the second adsorption hole 6 on the carrier 5, and the cavity is connected to the vacuum equipment through an air pipe structure. After the carrier 5 and the second support plate 17 are docked, the sealing plate is provided to seal the cavity to prevent liquid from entering the cavity from all sides, and also to prevent gas in the cavity from overflowing from all sides, that is, the sealing plate is a plate structure with a notch in the middle.

[0080] In the coating jig provided in this embodiment, a second adjusting screw is connected between the second support plate 17 and the carrier 5 to adjust the parallelism between the carrier 5 and the base assembly. The second screw can be set to achieve a micron-level parallelism between the two, which is convenient for the subsequent placement of the substrate on the carrier 5, thereby ensuring the quality of the slurry coating.

[0081] like Figure 6 and Figure 7 As shown, an improved implementation of the carrier 5, the carrier 5 is provided with a waste liquid tank 4 around it, and the waste liquid tank 4 is discharged to the outside through the drain port at the bottom thereof, and the waste liquid tank 4 is provided to collect the liquid leaked during the coating process and discharge it to the outside through the drain port to avoid contaminating the equipment. The position of the waste liquid tank 4 corresponds to the edge of the crystalline silicon substrate.

[0082] like Figures 5 to 7 As shown, the coating jig provided in this embodiment, the first driving component includes a third driving member 18 and a fine-tuning driving member 19, the output end of the third driving member 18 is connected to the carrier 5, and is used to drive the carrier 5 to move in the vertical direction; the output end of the fine-tuning driving member 19 is connected to the third driving member 18, and is used to drive the third driving member 18 and the carrier 5 to fine-tune in the vertical direction. The third driving member 18 drives the substrate to move up and down, which is convenient for taking and placing products, and the fine-tuning driving member 19 can drive the top surface of the substrate to be flush with the compensation plate, so that the height difference reaches the micron level, ensuring the coating effect.

[0083] Specifically, the third driving member 18 may be driven by a cylinder, or may be driven by a hydraulic cylinder or an electric cylinder; the fine-tuning driving member 19 may be a fine-motion platform or a micrometer head.

[0084] The coating process of the coating jig provided in this embodiment is as follows:

[0085] like Figure 8 As shown, the crystalline silicon substrate is coated: the crystalline silicon substrate is placed on the carrier 5, the second compensation plate 14 is driven by the second driving member 13 to fit the crystalline silicon substrate front and back and position it, the second adsorption holes 6 work to adsorb and fix the crystalline silicon substrate, and then the crystalline silicon substrate is coated, wherein the provision of the fine-tuning driving member 19 facilitates the positioning and coating of crystalline silicon substrates of different thicknesses, so that the top surface of the crystalline silicon substrate and the top surface of the compensation plate are in the same plane.

[0086] like Fig. 9 and Fig.10 As shown, the glass substrate is coated: the fine-tuning drive 19 is adjusted to make the carrier 5 and the compensation plate flush, and the glass substrate is placed on the table. According to the specifications of the glass substrate, the first adsorption hole 2 and the second adsorption hole 6 cooperate or only the second adsorption hole 6 is used to adsorb and fix the glass substrate, and then the glass substrate is coated.

[0087] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the present utility model.

Claims

1. A coating jig, characterized in that: include: A base assembly having a mounting notch (1), wherein a first adsorption hole (2) is arranged on a table surface of the base assembly; A carrier assembly (3) is arranged in the installation slot (1), the carrier assembly (3) comprises a first driving assembly and a carrier (5), the first driving assembly is suitable for driving the carrier (5) to move in a vertical direction, a second adsorption hole (6) is arranged on the surface of the carrier (5), and the first adsorption hole (2) and the second adsorption hole (6) are respectively used for connecting a vacuum device; The carrier (5) has a first coating state for coating a crystalline silicon substrate and a second coating state for coating a glass substrate. In the first coating state, the crystalline silicon substrate is arranged in the mounting groove (1); in the second coating state, the table surface of the carrier (5) is flush with the table surface of the base assembly, and is suitable for supporting glass substrates of different specifications.

2. The coating jig according to claim 1, characterized in that: The base assembly comprises: A first positioning assembly (7) having a U-shaped notch (8); The second positioning component (9) is located at the opening end of the U-shaped slot (8) and is movably connected to the first positioning component (7) along the opening direction of the U-shaped slot (8). The first positioning component (7) and the second positioning component (9) enclose the installation slot (1).

3. The coating jig according to claim 2, characterized in that: The first positioning component (7) comprises: Bottom plate (10); The first compensation plate (11) is arranged above the bottom plate (10) via a support column (12), and the first compensation plate (11) is provided with the U-shaped notch (8) and the first adsorption hole (2).

4. The coating jig according to claim 3, characterized in that: The second positioning component (9) comprises: A second driving member (13) is arranged on the bottom plate (10); A second compensation plate (14) is arranged at the output end of the second driving member (13), the second driving member (13) drives the second compensation plate (14) to move along the opening direction of the U-shaped notch (8), the second compensation plate (14) and the first compensation plate (11) are arranged flush with each other, and the second compensation plate (14) is provided with the first adsorption hole (2).

5. The coating jig according to claim 4, characterized in that: The first adsorption holes (2) on the first compensation plate (11) and the second compensation plate (14) are evenly spaced.

6. The coating jig according to claim 4, characterized in that: The second positioning component (9) also includes: A first supporting plate (15) is arranged at an output end of the second driving member (13); An adjustment plate (16) is arranged between the second compensation plate (14) and the first support plate (15); the adjustment plate (16) and the second compensation plate (14) are fixedly connected; the adjustment plate (16) is connected to the first support plate (15) via a first adjustment screw; and the height of the second compensation plate (14) is adjusted by adjusting the first adjustment screw.

7. The coating jig according to claim 1, characterized in that: The platform assembly (3) further comprises: A second support plate (17) is arranged at the output end of the first driving assembly, the carrier (5) is arranged above the second support plate (17), and a sealing member is arranged between the second support plate (17) and the carrier (5).

8. The coating jig according to claim 7, characterized in that: A second adjusting screw is connected between the second supporting plate (17) and the carrier (5) to adjust the parallelism between the carrier (5) and the base assembly.

9. The coating jig according to any one of claims 1 to 8, characterized in that: The first driving assembly comprises: A third driving member (18), the output end of which is connected to the carrier (5) and is used to drive the carrier (5) to move in a vertical direction; A fine-tuning driving member (19), the output end of which is connected to the third driving member (18), and is used to drive the third driving member (18) and the carrier (5) to perform fine-tuning in the vertical direction.

10. The coating jig according to any one of claims 1 to 8, characterized in that: A waste liquid tank (4) is arranged around the carrier (5), and the waste liquid tank (4) discharges liquid to the outside through a liquid discharge port at the bottom thereof.

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