Annular scraper assembly and process waste gas treatment device

Abstract

The utility model discloses an annular scraper assembly and a process waste gas treatment device, which belong to the technical field of tail gas treatment and are used for solving the problems of unsmooth flow, dust accumulation and blockage of the process waste gas treatment device in the prior art. The annular scraper assembly is arranged in a cavity of the process waste gas treatment device and comprises a scraper and a rotating cylinder, the scraper comprises a mounting ring and a plurality of elastic scraping strips arranged on the mounting ring; a rotating shaft of the rotating cylinder is fixed to the mounting ring and used for driving the mounting ring to rotate with the diameter as the axis. One end of the elastic scraping strip is detachably connected with the mounting ring, and one end of the elastic scraping strip is in contact with the inner wall of the cavity of the process waste gas treatment device in the rotating process of the mounting ring. The device can be used for cleaning dust on the inner wall of the cavity of the process waste gas treatment device.

Description

Technical Field

[0001] The utility model belongs to the technical field of tail gas treatment, and in particular relates to an annular scraper component and a process waste gas treatment device. Background Art

[0002] In semiconductor processes, harsh processes refer to complex, harsh, dusty, and highly corrosive processes, such as the borophosphosilicate glass (BPSG) process in the chemical vapor deposition (CVD) process, the high aspect ratio (HARP) process, the silicon nitride (SiN) process, the metal etching (MetalETCH) process in the etching (ETCH) process, the atomic layer deposition (ALD) process in the diffusion (Diffusion) process, the time-sensitive network (TSN) process, etc.

[0003] In the Harsh process, a large amount of SiO2 dust and highly corrosive and harmful substances need to be treated, which can easily cause problems such as poor flow, dust accumulation and blockage in the process waste gas treatment device, and the equipment needs to be shut down for maintenance. Utility Model Content

[0004] In view of the above analysis, the utility model aims to provide an annular scraper assembly and a process waste gas treatment device to solve the problems of poor flow, dust accumulation and blockage in the process waste gas treatment device in the prior art.

[0005] The purpose of the utility model is mainly achieved through the following technical solutions.

[0006] The utility model provides an annular scraper assembly, which is arranged in the cavity of a process waste gas treatment device, and the annular scraper assembly comprises a scraper and a rotating cylinder; the scraper comprises a mounting ring and a plurality of elastic scraper strips arranged on the mounting ring; the rotating shaft of the rotating cylinder is fixed to the mounting ring and is used to drive the mounting ring to rotate; one end of the elastic scraper strip is detachably connected to the mounting ring, and the other end of the elastic scraper strip contacts the inner wall of the cavity of the process waste gas treatment device during the rotation of the mounting ring.

[0007] Furthermore, the projection of the elastic scraper strip on the inner wall of the cavity of the process waste gas treatment device along the radial direction of the mounting ring is non-linear.

[0008] Furthermore, the mounting ring includes a ring body and a wiping layer arranged on the outer wall of the ring body. During the rotation of the mounting ring, the wiping layer contacts the inner wall of the cavity of the process waste gas treatment device.

[0009] Furthermore, the distance between the outer wall of the mounting ring and the inner wall of the chamber of the process waste gas treatment device is 5 to 10 mm.

[0010] Furthermore, the rotation angle of the mounting ring is 90 to 360 degrees.

[0011] Furthermore, an outer wall of the rotating shaft is provided with an external thread, a mounting sleeve is provided on the mounting ring, an inner wall of the mounting sleeve is provided with an internal thread, and the external thread and the internal thread are threadedly connected via a coupling.

[0012] Furthermore, it also includes a pressure sensor and a scraper controller. The scraper controller is connected to the pressure sensor and the circuit of the rotating cylinder respectively. The pressure sensor is used to collect pressure data in the cavity of the process waste gas treatment device.

[0013] Furthermore, the number of the pressure sensor is one, and the pressure sensor is arranged in front of the scraper along the exhaust gas flow direction.

[0014] Furthermore, the number of pressure sensors is 2, namely a first pressure sensor and a second pressure sensor. Along the flow direction of the exhaust gas, the first pressure sensor, the scraper and the second pressure sensor are arranged in sequence.

[0015] The utility model also provides a process waste gas treatment device, comprising the annular scraper assembly.

[0016] Compared with the prior art, the utility model can achieve at least one of the following beneficial effects.

[0017] The annular scraper assembly provided by the utility model is arranged in a process waste gas treatment device. On the one hand, the mounting ring is driven to rotate with the diameter as the axis by rotating the cylinder, thereby driving a plurality of elastic scraper strips to move relative to the inner wall of the cavity of the process waste gas treatment device, scraping and patting the inner wall of the cavity, thereby cleaning the dust accumulated on the inner wall of the cavity, and avoiding the problems of poor flow, dust accumulation and blockage of the process waste gas treatment device; on the other hand, since the plurality of elastic scraper strips are independently arranged, when one of the elastic scraper strips is damaged, only the elastic scraper strip needs to be replaced, and there is no need to replace the entire annular scraper assembly, thereby simplifying the replacement process and reducing the replacement cost; on the other hand, the radial projection of the elastic scraper strip along the mounting ring is non-linear, so that during the rotation of the mounting ring, the contact area between the elastic scraper strip and the inner wall of the cavity of the process waste gas treatment device can be increased, thereby improving the cleaning efficiency and cleaning effect of the dust, and ensuring the normal and stable operation of the process waste gas treatment device.

[0018] In the present invention, the above-mentioned technical solutions can also be combined with each other to achieve more preferred combination solutions. Other features and advantages of the present invention will be described in the subsequent description, and some advantages can become obvious from the description, or can be understood by implementing the present invention. The purpose and other advantages of the present invention can be achieved and obtained through the contents particularly pointed out in the embodiments of the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are only used for the purpose of illustrating specific embodiments and are not to be considered as limiting the present invention. In the entire drawings, the same reference symbols represent the same components.

[0020] Figure 1 A schematic structural diagram of an annular scraper assembly provided in Embodiment 1 of the present utility model;

[0021] Figure 2 A top view of the annular scraper assembly provided in Embodiment 1 of the utility model;

[0022] Figure 3 A schematic diagram of the first structure of the belt body in the annular scraper assembly provided in the first embodiment of the utility model;

[0023] Figure 4 A schematic diagram of a second structure of the belt body in the annular scraper assembly provided in the first embodiment of the utility model;

[0024] Figure 5 A schematic diagram of a third structure of the belt body in the annular scraper assembly provided in the first embodiment of the utility model;

[0025] Figure 6 A schematic diagram of a fourth structure of the belt body in the annular scraper assembly provided in the first embodiment of the utility model;

[0026] Figure 7 This is a partial schematic diagram of the process waste gas treatment device provided in Example 3 of the present invention.

[0027] Reference numerals:

[0028] 1-mounting ring; 2-elastic scraper strip; 21-belt body; 211-straight strip; 212-Z-shaped strip; 213-S-shaped strip; 214-first main strip; 215-second main strip; 216-branch strip; 22-binding ring; 3-rotating cylinder; 4-wiping layer; 5-spray tower; 6-swirl blade; 7-spray head. DETAILED DESCRIPTION

[0029] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not used to limit the scope of the present invention.

[0030] Embodiment 1

[0031] This embodiment provides an annular scraper assembly, see Figure 1 to Figure 2, including a scraper and a rotating cylinder 3, wherein the scraper includes a mounting ring 1 and a plurality of elastic scraper strips 2 arranged on the mounting ring 1, the rotating shaft of the rotating cylinder 3 is fixed to the mounting ring 1, and is used to drive the mounting ring 1 to rotate with the diameter as the axis, one end of the elastic scraper strip 2 is detachably connected to the mounting ring 1, and the other end of the elastic scraper strip 2 contacts the inner wall of the cavity of the process waste gas treatment device during the rotation of the mounting ring 1, and the radial projection of the elastic scraper strip 2 along the mounting ring 1 is non-linear.

[0032] It should be noted that, with respect to the orientation of the elastic scraper strip 2 , in order to increase the scraping area, a portion of the elastic scraper strip 2 is disposed upward, and the remaining portion of the elastic scraper strip 2 is disposed downward.

[0033] The existing scraper usually includes a spiral cutter body and a rotating shaft. The spiral cutter body is arranged axially along the rotating shaft and is fixedly connected to the rotating shaft. However, once the spiral cutter body of such a scraper is damaged, the spiral cutter body or even the entire scraper needs to be replaced, resulting in a high replacement cost.

[0034] Compared with the prior art, the annular scraper assembly provided in the present embodiment is arranged in the process waste gas treatment device. On the one hand, the mounting ring 1 is driven to rotate with the diameter as the axis by rotating the cylinder 3, thereby driving a plurality of elastic scraper strips 2 to move relative to the inner wall of the cavity of the process waste gas treatment device, scraping and patting the inner wall of the cavity, so that the dust accumulated on the inner wall of the cavity can be cleaned, and the problems of poor flow, dust accumulation and blockage of the process waste gas treatment device can be avoided; on the other hand, since the plurality of elastic scraper strips 2 are independently arranged, when one of the elastic scraper strips 2 is damaged, only the elastic scraper strip 2 needs to be replaced, and there is no need to replace the entire annular scraper assembly, thereby simplifying the replacement process and reducing the replacement cost; on the other hand, the radial projection of the elastic scraper strip 2 along the mounting ring 1 is non-linear, so that during the rotation of the mounting ring 1, the contact area between the elastic scraper strip 2 and the inner wall of the cavity of the process waste gas treatment device can be increased, thereby improving the cleaning efficiency and cleaning effect of the dust, and ensuring the normal and stable operation of the process waste gas treatment device.

[0035] In order to enable the elastic scraper strip 2 to be as close as possible to the inner wall of the cavity of the process waste gas treatment device, for example, the distance between the outer wall of the mounting ring 1 and the inner wall of the cavity of the process waste gas treatment device is 5 to 10 mm, so that the elastic scraper strip 2 is close to the wall. When the mounting ring 1 rotates, the annular scraper assembly scrapes off the dust adhered to the inner wall of the cavity of the process waste gas treatment device under the action of mechanical contact.

[0036] It should be understood that although the mounting ring 1 shown in the drawings is a circular ring structure, in other embodiments, the mounting ring 1 can also be set to be elliptical, square, polygonal, etc., all without departing from the scope of the present invention, and those skilled in the art can make settings according to actual needs.

[0037] Considering that the rotation angle of the mounting ring 1 directly determines the movement amplitude of the elastic scraper 2 on the inner wall of the cavity of the process waste gas treatment device, illustratively, the rotation angle of the mounting ring 1 is 90 to 360°, for example, 90°, 180°, 270° or 360°.

[0038] In order to facilitate the detachability of the elastic scraper strip 2, the above-mentioned elastic scraper strip 2 can be an elastic cable tie, including a belt body 21 and a tie ring 22. One end of the belt body 21 is fixedly connected to the tie ring 22 and is integrally formed in actual application. The other end of the belt body 21 passes around the mounting ring 1 and then passes through the tie ring 22, so that the elastic scraper strip 2 can be detachably connected to the mounting ring 1.

[0039] Specifically, the structure of the belt body 21 can be in the following forms in order to further increase the contact area between the elastic scraper strip 2 and the inner wall of the chamber of the process waste gas treatment device:

[0040] In the first form, the belt body 21 is in an arc shape. Figure 3 .

[0041] In the second form, the belt body 21 includes a straight strip 211 and a Z-shaped strip 212, see Figure 4 One end of the straight strip 211 is fixedly connected to the tie ring 22, and the other end of the straight strip 211 is detachably connected to the Z-shaped strip 212, or the belt body 21 is integrally formed. When the other end of the straight strip 211 is detachably connected to the Z-shaped strip 212, during actual installation, the other end of the straight strip 211 passes through the tie ring 22 after passing through the installation ring 1, and then the Z-shaped strip 212 is connected to the straight strip 211.

[0042] In the third form, the belt body 21 includes a straight strip 211 and an S-shaped strip 213, see Figure 5 One end of the straight strip 211 is fixedly connected to the ring 22, and the other end of the straight strip 211 is detachably connected to the S-shaped strip 213, or the belt body 21 is integrally formed. When the other end of the straight strip 211 is detachably connected to the S-shaped strip 213, during actual installation, the other end of the straight strip 211 passes through the ring 22 after passing through the installation ring 1, and then the S-shaped strip 213 is connected to the straight strip 211.

[0043] In the fourth form, the belt body 21 includes a first main strip 214, a second main strip 215 and a plurality of branch strips 216, see Figure 6One end of the first main strip 214 is fixedly connected to the ring 22, and the other end of the first main strip 214 is detachably connected to the second main strip 215. A plurality of branch strips 216 are provided on the second main strip 215, so that the belt body 21 forms a tree branch shape, or the belt body 21 is integrally formed. When the other end of the first main strip 214 is detachably connected to the second main strip 215, during actual installation, the other end of the first main strip 214 passes through the ring 22 after passing through the installation ring 1, and then the second main strip 215 is connected to the first main strip 214.

[0044] It should be noted that the rotating shaft of the rotating cylinder 3 and the mounting ring 1 are threadedly connected. By way of example, the outer wall of the rotating shaft is provided with an external thread, the mounting ring 1 is provided with a mounting sleeve, the inner wall of the mounting sleeve is provided with an internal thread, and the external thread and the internal thread are threadedly connected via a coupling.

[0045] Taking into account that the mounting ring 1 also has relative movement with respect to the inner wall of the cavity, the structure of the mounting ring 1, specifically, includes a ring body and a wiping layer 4 (for example, a sponge layer, a steel wire layer, etc.) arranged on the outer wall of the ring body. During the rotation of the mounting ring 1, the wiping layer 4 contacts with the inner wall of the cavity of the process waste gas treatment device.

[0046] Embodiment 2

[0047] This embodiment provides an annular scraper assembly, whose structure is basically the same as the annular scraper assembly provided in the first embodiment, except that:

[0048] In order to automatically open the annular scraper assembly according to the actual dust accumulation situation of the process waste gas treatment device to clean the dust on the inner wall of the cavity, the above-mentioned annular scraper assembly also includes a pressure sensor and a scraper controller. The scraper controller is respectively connected to the pressure sensor and the circuit of the rotating cylinder 3. The pressure sensor is used to collect pressure data in the cavity of the process waste gas treatment device.

[0049] Exemplarily, the number of pressure sensors is 1. The pressure sensor is arranged in front of the scraper along the exhaust gas flow direction. The pressure sensor collects the pressure data in the cavity in real time and transmits it to the scraper controller. The scraper controller determines whether the pressure data is lower than the pressure threshold. If it is greater than the pressure threshold, it means that the cavity is blocked. The scraper controller controls the rotating cylinder 3 to rotate, and the elastic scraper cleans the dust on the inner wall of the cavity.

[0050] Alternatively, the number of pressure sensors is 2, namely the first pressure sensor and the second pressure sensor. Along the exhaust gas flow direction, the first pressure sensor, the scraper and the second pressure sensor are arranged in sequence. The first pressure sensor collects the front pressure data in the cavity in real time and transmits it to the scraper controller. The second pressure sensor collects the rear pressure data in the cavity in real time and transmits it to the scraper controller. The scraper controller calculates the difference between the front pressure data and the rear pressure data. If the difference exceeds the threshold, it means that the cavity is blocked. The scraper controller controls the rotating cylinder 3 to rotate, and the elastic scraper cleans the dust on the inner wall of the cavity.

[0051] In practical applications, the scraper can be opened at a fixed time to clean the inner wall of the cavity. For example, the frequency of opening the rotating cylinder 3 is 0.25 to 6 hours, and each time it is rotated 1 to 5 times. Specifically, if the cavity is seriously blocked, the frequency of opening the rotating cylinder 3 is 0.25 to 3 hours, and if the cavity is slightly blocked, the frequency of opening the rotating cylinder 3 is 3 to 6 hours.

[0052] The rotating cylinder 3 can also be set to be normally open during the operation of the process waste gas treatment device.

[0053] It should be noted that the software methods involved in the pressure sensor, scraping controller, etc. in the annular scraper assembly provided by the utility model are all common methods in the prior art. It is only necessary to connect each device with corresponding functions through the connection relationship given in the embodiment of the utility model to obtain the technical solution of the utility model, which does not involve any software improvement. As for the connection method between the devices with corresponding functions, it can be realized by those skilled in the art using the existing technology and will not be described in detail here.

[0054] Embodiment 3

[0055] This embodiment provides a process waste gas treatment device, see Figure 7 , including the annular scraper assembly provided in Example 1 or Example 2.

[0056] Compared with the prior art, the beneficial effects of the process waste gas treatment device provided in this embodiment are basically the same as the beneficial effects of the annular scraper assembly provided in Embodiment 1 or Embodiment 2, and are not described in detail here.

[0057] Exemplarily, the process waste gas treatment device further includes a spray tower 5, a swirl sheet 6 and a spray head 7. The annular scraper assembly, the swirl sheet 6 and the spray head 7 are all arranged in the spray tower 5. Along the flow direction of the exhaust gas, the swirl sheet 6, the spray head 7 and the annular scraper assembly are arranged in sequence. This is because dust accumulation is likely to occur behind the spray head 7. The rotating cylinder 3 rotates and then drives the mounting ring 1 to rotate. Under the action of mechanical contact, the mounting ring 1 can scrape off the dust on the inner wall of the spray tower 5. The mounting ring 1 will also drive the elastic scraper strip 2 to rotate and beat the inner wall of the spray tower 5 to scrape off the dust adhered to the inner wall. The dust can fall from the gap between the blades of the swirl sheet 6, or fall downward with the flushing of the spray water, thereby ensuring smooth airflow in the spray tower 5 and ensuring the normal and stable operation of the process waste gas treatment device.

[0058] Specifically, a through hole is provided on the side wall of the spray tower 5 , and the rotating shaft of the rotating cylinder 3 passes through the through hole from the outside to the inside and is connected to the mounting ring 1 .

[0059] It should be understood that the embodiment shown in the accompanying drawings shows that the mounting ring 1 is adapted to the cylindrical shape of the spray tower 5 and is set as a circular ring structure. In other embodiments, the mounting ring 1 can also be adapted to other shapes of the spray tower 5 and can also be not adapted to the shape of the spray tower 5 and set to other shapes. If the mounting ring 1 is configured to be adapted to the structure of the spray tower 5, the mounting ring 1 can mechanically contact the inner wall of the spray tower 5 during the rotation process to scrape off the dust adhering to the inner wall of the spray tower 5. If the mounting ring 1 is not adapted to the structure of the spray tower 5, the mounting ring 1 does not mechanically contact the inner wall of the spray tower 5 during the rotation process, or only partially contacts the inner wall of the spray tower 5. At this time, the elastic scraper 2 mainly beats the inner wall of the spray tower 5 to remove the dust adhering to the inner wall of the spray tower 5.

[0060] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed in the present invention should be included in the protection scope of the present invention.

Claims

1. An annular scraper assembly, characterized in that: Arranged in the cavity of the process waste gas treatment device, the annular scraper assembly comprises a scraper and a rotating cylinder; The scraper comprises a mounting ring and a plurality of elastic scraping strips arranged on the mounting ring; The rotating shaft of the rotating cylinder is fixed to the mounting ring and is used to drive the mounting ring to rotate; one end of the elastic scraper is detachably connected to the mounting ring, and the other end of the elastic scraper contacts the inner wall of the cavity of the process waste gas treatment device during the rotation of the mounting ring.

2. The annular scraper assembly according to claim 1, characterized in that: The projection of the elastic scraper strip on the inner wall of the cavity of the process waste gas treatment device along the radial direction of the mounting ring is non-linear.

3. The annular scraper assembly according to claim 1, characterized in that: The mounting ring comprises a ring body and a wiping layer arranged on the outer wall of the ring body. During the rotation of the mounting ring, the wiping layer contacts the inner wall of the cavity of the process waste gas treatment device.

4. The annular scraper assembly according to claim 1, characterized in that: The distance between the outer wall of the mounting ring and the inner wall of the chamber of the process waste gas treatment device is 5 to 10 mm.

5. The annular scraper assembly according to claim 1, characterized in that: The rotation angle of the mounting ring is 90° to 360°.

6. The annular scraper assembly according to claim 1, characterized in that: The outer wall of the rotating shaft is provided with an external thread, the mounting ring is provided with a mounting sleeve, the inner wall of the mounting sleeve is provided with an internal thread, and the external thread and the internal thread are threadedly connected via a coupling.

7. The annular scraper assembly according to claim 1, characterized in that: It also includes a pressure sensor and a scraper controller, wherein the scraper controller is respectively connected to the pressure sensor and the circuit of the rotating cylinder, and the pressure sensor is used to collect pressure data in the cavity of the process waste gas treatment device.

8. The annular scraper assembly according to claim 7, characterized in that: The number of the pressure sensor is one, and the pressure sensor is arranged in front of the scraper along the flow direction of the exhaust gas.

9. The annular scraper assembly according to claim 7, characterized in that: The number of the pressure sensors is two, namely a first pressure sensor and a second pressure sensor. Along the flow direction of the exhaust gas, the first pressure sensor, the scraper and the second pressure sensor are arranged in sequence.

10. A process waste gas treatment device, characterized in that: The invention comprises an annular scraper assembly as claimed in any one of claims 1 to 9.

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