Positioning mechanism, positioning device and exposure equipment
By designing a positioning mechanism with a driving assembly, a first slider and a second slider, the complex problem of calibration and adjustment operations of the positioning mechanism in the prior art is solved, and rapid adjustment and high-precision calibration of the positioning mechanism are realized, reducing costs and improving efficiency.
Patent Information
- Application Number
- CN202420896928.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-28
- Publication Date
- 2025-04-15
- Estimated Expiration
- 2034-04-28
AI Technical Summary
In the prior art, the calibration and adjustment of the positioning mechanism are complex and have low efficiency, which is difficult to meet the accuracy requirements, and the replacement of the positioning structure leads to an increase in costs.
A positioning mechanism including a driving assembly, a first slider and a second slider is designed, and the first slider is driven to move the first slider through the driving assembly, thereby promoting the movement of the second slider, adjusting or calibrating the position of the reference part, and realizing the adjustment and calibration of the positioning function.
It realizes convenient and quick adjustment and calibration of the positioning mechanism, improves operating efficiency, reduces costs, and improves positioning accuracy.
Smart Images
Figure CN222755232U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of positioning mechanisms, and in particular to a positioning mechanism, a positioning device and an exposure device. Background Art
[0002] In the process of manufacturing and processing products, it is necessary to position the products to be processed or the structure that fixes the products to be processed to ensure that the processing can be completed smoothly or to ensure the processing accuracy.
[0003] When positioning the product, the product is positioned in the X-axis and Y-axis directions so that the product can stay stably within the processing range of the processing equipment and ensure the position accuracy of the product in the plane direction; the product is positioned in the Z-axis direction to ensure the position accuracy of the product in the height direction.
[0004] Before positioning the product, the positioning reference needs to be calibrated so that the positioning accuracy of the positioning mechanism meets the expected requirements. The current method of calibrating the positioning reference is often manual calibration by adding or subtracting shims, which is not only complicated and inefficient, but also difficult to meet the expected calibration accuracy. In some cases, the thickness or height specifications of the products to be processed are different, and the positioning reference needs to be adjusted to accommodate products of different sizes in the positioning mechanism. The current method of adjusting the positioning reference is usually to replace the positioning structure, which not only increases costs but also complicates the operation.
[0005] It can be seen that how to conveniently and quickly adjust or calibrate the positioning mechanism is a technical problem that needs to be solved urgently. Utility Model Content
[0006] The present application provides a positioning mechanism, a positioning device and an exposure device, which are intended to solve the technical problem of how to conveniently and quickly adjust or calibrate the positioning mechanism in the prior art.
[0007] The present application provides a positioning mechanism, comprising:
[0008] Drive assembly;
[0009] A first slider, the first slider being mounted on a power output end of the driving assembly;
[0010] a second slider, the second slider being slidably connected to the first slider, and the second slider being provided with a reference portion;
[0011] The driving assembly drives the first slider to move, thereby pushing the second slider to move, so as to move the reference portion.
[0012] Furthermore, at least one of the first sliding block and the second sliding block is provided with an inclined surface, and the first sliding block and the second sliding block are connected via the inclined surface.
[0013] Furthermore, the moving directions of the first slider and the second slider are perpendicular to each other, and the reference portion faces the moving direction of the second slider.
[0014] Furthermore, the reference portion is provided with a first guide surface, and the first guide surface guides the product to be processed or a structure fixing the product to be processed from a first direction.
[0015] Furthermore, the reference portion is provided with a second guide surface, and the second guide surface guides the product to be processed or the structure for fixing the product to be processed from a second direction;
[0016] The first direction intersects with the second direction.
[0017] On the other hand, the present application provides a positioning device, comprising:
[0018] Mounting parts;
[0019] The above positioning mechanism;
[0020] There is at least one positioning mechanism, and all positioning mechanisms are mounted on the mounting member.
[0021] Furthermore, a positioning device provided by the present application further includes a reference member, and the reference member is fixedly connected to the reference parts of all the positioning mechanisms;
[0022] The reference member is provided with a reference surface, and the reference surface faces a direction away from the positioning mechanism.
[0023] Furthermore, the mounting member includes a marble base, and the positioning mechanism is mounted on the marble base.
[0024] On the other hand, the present application provides an exposure device, comprising the above-mentioned positioning mechanism or the above-mentioned positioning device.
[0025] Furthermore, an exposure device provided by the present application further includes a loading assembly, wherein the loading assembly is provided with a positioning member;
[0026] After the loading assembly reaches the designated position, the reference portion abuts against the positioning member.
[0027] The beneficial effects achieved by this application are:
[0028] The present application proposes a positioning mechanism, which uses the reference part as a reference to position the product to be processed or the structure that fixes the product to be processed in the process of realizing the positioning function. When the positioning mechanism needs to be adjusted or calibrated, the first slider is driven to move by the driving assembly, and then the second slider is pushed to move by the first slider, so as to adjust or calibrate the position of the reference part. In this way, the positioning mechanism can be adjusted or calibrated conveniently and quickly. BRIEF DESCRIPTION OF THE DRAWINGS
[0029] Figure 1 It is a three-dimensional structural schematic diagram of the positioning mechanism in the embodiment of the utility model;
[0030] Figure 2 It is a schematic diagram of the exploded structure of the positioning mechanism in the embodiment of the utility model;
[0031] Figure 3 It is a schematic diagram of the exploded structure of the exposure device in the embodiment of the utility model;
[0032] Figure 4 It is a schematic diagram of the exploded structure of the exposure device provided with a reference piece in the embodiment of the utility model.
[0033] Description of main component symbols:
[0034] 100. Exposure device; 10. Loading assembly; 11. Positioning member; 20. Positioning device; 21. Mounting member; 22. Reference member; 23. Reference surface; 30. Positioning mechanism; 31. Drive assembly; 311. Motor assembly; 312. Screw member; 313. Screw nut; 32. First slider; 33. Second slider; 331. Reference portion; 332. First guide surface; 333. Second guide surface; 334. Inclined surface; 34. Mounting seat; 341. First mounting surface; 342. Second mounting surface; 35. First guide rail assembly; 36. Second guide rail assembly; 37. Third guide rail assembly. DETAILED DESCRIPTION
[0035] In order to make the purpose, technical solution and advantages of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, in which the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model. In addition, it should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model.
[0036] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "left", "right", "horizontal", "top", "bottom", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the present invention.
[0037] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0038] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0039] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0040] The disclosure below provides many different embodiments or examples for realizing different structures of the utility model. In order to simplify the disclosure of the utility model, the components and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the utility model. In addition, the utility model can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not indicate the relationship between the various embodiments and / or settings discussed in itself. In addition, the utility model provides various specific examples of processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.
[0041] See also Figure 1 to Figure 2 In some embodiments of the present application, a positioning mechanism 30 provided by the present application includes a driving assembly 31, a first slider 32 and a second slider 33. The first slider 32 is installed at the power output end of the driving assembly 31. The second slider 33 is slidably connected to the first slider 32, and the second slider 33 is provided with a reference portion 331.
[0042] The driving assembly 31 drives the first slider 32 to move, thereby pushing the second slider 33 to move, so that the reference portion 331 moves.
[0043] In the process of realizing the positioning function, the reference part 331 is used as a reference to position the product to be processed or the structure to fix the product to be processed. When the positioning mechanism 30 needs to be adjusted or calibrated, the first slider 32 is driven to move by the driving assembly 31, and then the second slider 33 is pushed to move by the first slider 32, so as to adjust or calibrate the position of the reference part 331.
[0044] In this way, the positioning mechanism 30 can be adjusted or calibrated conveniently and quickly.
[0045] In some embodiments of the present application, at least one of the first slider 32 and the second slider 33 is provided with an inclined surface 334 , and the first slider 32 and the second slider 33 are connected via the inclined surface 334 .
[0046] When the driving assembly 31 drives the first slider 32 to move, the first slider 32 pushes the second slider 33 to move through the inclined surface 334, thereby decomposing the force from the second slider 33 through the inclined surface 334, reducing the force on the first slider 32 from the second slider 33, and further reducing the power of the driving assembly 31. In addition, the first slider 32 pushes the second slider 33 to move through the inclined surface 334, so that the moving direction of the first slider 32 is different from the moving direction of the second slider 33, so that the moving distance of the first slider 32 is proportional to the moving distance of the second slider 33, so that the moving speed of the second slider 33 is less than the moving speed of the first slider 32, thereby improving the adjustment accuracy of the positioning mechanism 30.
[0047] In some embodiments of the present application, the moving directions of the first slider 32 and the second slider 33 are perpendicular to each other, and the reference portion 331 faces the moving direction of the second slider 33 .
[0048] By making the moving directions of the first slider 32 and the second slider 33 perpendicular to each other, during the horizontal movement of the first slider 32, the first slider 32 pushes the second slider 33 to move vertically, thereby adjusting the positioning reference in the Z-axis direction, thereby enabling the positioning mechanism 30 to adapt to the positioning of products to be processed with different thicknesses or heights.
[0049] In some embodiments of the present application, the cross-sections of the first slider 32 and the second slider 33 are both quasi-right triangles, and the first slider 32 and the second slider 33 are connected to each other through an inclined surface 334. The driving assembly 31 pushes the first slider 32 to move horizontally from the direction of the vertical surface of the first slider 32, and then the first slider 32 pushes the second slider 33 to move vertically through the inclined surface 334, and the reference portion 331 faces the moving direction of the second slider 33. Therefore, when the second slider 33 moves vertically, the position of the reference portion 331 in the vertical direction changes, thereby completing the adjustment or calibration of the position of the reference portion 331. In this way, the positioning mechanism 30 can be adjusted or calibrated conveniently and quickly.
[0050] In some embodiments of the present application, the first slider 32 and the second slider 33 may be connected via a first guide rail assembly 35 .
[0051] During the relative sliding of the first slider 32 and the second slider 33 , the first guide rail assembly 35 guides the second slider 33 and reduces the friction resistance encountered by the second slider 33 during the movement, so that the second slider 33 moves more smoothly.
[0052] In some embodiments of the present application, a positioning mechanism 30 provided by the present application further includes a mounting seat 34, the mounting seat 34 is provided with a first mounting surface 341 and a second mounting surface 342, the first mounting surface 341 and the second mounting surface 342 are perpendicular to each other. The first slider 32 is slidably mounted on the first mounting surface 341, and the second slider 33 is slidably mounted on the second mounting surface 342.
[0053] When the driving assembly 31 drives the first slider 32 to move, the first slider 32 moves in a direction perpendicular to the normal of the first mounting surface 341, and then the first slider 32 pushes the second slider 33 to move in a direction perpendicular to the normal of the second mounting surface 342 through the inclined surface 334. Then, the first slider 32 and the second slider 33 are guided respectively by the first mounting surface 341 and the second mounting surface 342 of the mounting seat 34, thereby improving the reliability of the movement of the second slider 33.
[0054] In some embodiments of the present application, the first slider 32 is mounted on the first mounting surface 341 through the second guide rail assembly 36 , and the second slider 33 is mounted on the second mounting surface 342 through the third guide rail assembly 37 .
[0055] During the sliding process of the first slider 32 , the second guide rail assembly 36 provides guidance and reduces the friction resistance encountered by the first slider 32 during the movement, so that the movement of the first slider 32 is smoother.
[0056] During the sliding process of the second slider 33, the third guide rail assembly 37 provides guidance and reduces the friction resistance of the second slider 33 during the movement, so that the second slider 33 moves more smoothly. During the process of the first slider 32 pushing the second slider 33 to move through the inclined surface 334, the third guide rail assembly 37 balances the force on the second slider 33 in the moving direction of the first slider 32, so that the second slider 33 moves in a direction perpendicular to the moving direction of the first slider 32 under the guidance of the third guide rail assembly 37.
[0057] In some embodiments of the present application, the reference portion 331 is provided with a first guide surface 332 , and the first guide surface 332 guides the product to be processed or the structure for fixing the product to be processed from a first direction.
[0058] In the process of positioning the product to be processed or the structure to fix the product to be processed by the positioning mechanism 30, the product to be processed or the structure to fix the product to be processed is guided and positioned by the first guide surface 332, thereby improving the position accuracy of the product to be processed or the structure to fix the product to be processed in the first direction.
[0059] In some embodiments of the present application, the reference portion 331 is provided with a second guide surface 333, and the second guide surface 333 guides the product to be processed or the structure for fixing the product to be processed from the second direction. The first direction intersects the second direction.
[0060] When the positioning mechanism 30 positions the product to be processed or the structure to fix the product to be processed, the second guide surface 333 is used to guide and position the product to be processed or the structure to fix the product to be processed, thereby improving the position accuracy of the product to be processed or the structure to fix the product to be processed in the second direction.
[0061] The first direction intersects with the second direction. Therefore, by improving the position accuracy of the product to be processed or the structure to fix the product to be processed in the first direction and the second direction, and positioning the product to be processed or the structure to fix the product to be processed in the third direction through the reference surface 23 of the reference part 331, the product to be processed or the structure to fix the product to be processed is positioned within the spatial range through the positioning mechanism 30, thereby improving the position accuracy of the product to be processed or the structure to fix the product to be processed within the spatial range.
[0062] The first direction may be the X-axis direction, the second direction may be the Y-axis direction, and the third direction may be the Z-axis direction.
[0063] In some embodiments of the present application, the drive assembly 31 includes a motor assembly 311, a screw member 312 and a screw nut 313. The screw member 312 is installed at the power output end of the motor assembly 311, the screw nut 313 is fixedly connected to the first slider 32, and the screw nut 313 is adapted to the screw member 312. During the operation of the motor assembly 311, the screw member 312 is driven to rotate, thereby driving the screw nut 313 to move, and then driving the first slider 32 to move through the screw nut 313.
[0064] On the other hand, see Figures 1 to 3 The present application provides a positioning device 20 , including: a mounting member 21 and a positioning mechanism 30 . The number of the positioning mechanism 30 is at least one, and all positioning mechanisms 30 are mounted on the mounting member 21 .
[0065] The positioning device 20 positions the product to be processed or the structure that fixes the product to be processed through the positioning mechanism 30, and all the positioning mechanisms 30 are installed on the same mounting part 21, thereby improving the stability of the relative position between the positioning mechanisms 30, thereby improving the reliability and stability of the positioning function of the positioning device 20.
[0066] See also Figure 1 to Figure 2 and Figure 4 In some embodiments of the present application, a positioning device 20 provided by the present application further includes a reference member 22, which is fixedly connected to the reference parts 331 of all positioning mechanisms 30. The reference member 22 is provided with a reference surface 23, which faces away from the positioning mechanism 30.
[0067] The reference part 22 is positioned by the positioning mechanism 30, thereby ensuring that the position accuracy of the reference part 22 meets the expected requirements. The product to be processed or the structure that fixes the product to be processed is then positioned by the reference part 22, thereby ensuring the consistency of the positioning reference, avoiding the difference in positioning accuracy of the positioning mechanisms 30 at different positions in the positioning device 20 affecting the positioning accuracy of the positioning device 20, thereby improving the positioning accuracy of the positioning device 20.
[0068] In some embodiments of the present application, the reference member 22 can be integrally formed with the reference portion 331 , so that all second sliders 33 form a whole through the reference member 22 , eliminating the installation error between the reference member 22 and the second slider 33 , and improving the positioning accuracy of the positioning device 20 .
[0069] In some embodiments of the present application, the mounting member 21 includes a marble base, and the positioning mechanism 30 is mounted on the marble base.
[0070] Since the processing accuracy of the marble base is relatively high, therefore, installing the positioning mechanism 30 on the marble base can effectively improve the position accuracy of the positioning mechanism 30 , thereby improving the positioning accuracy of the positioning mechanism 30 .
[0071] On the other hand, see Figures 1 to 3 The present application provides an exposure device 100 , comprising the above-mentioned positioning mechanism 30 or the above-mentioned positioning device 20 .
[0072] In some embodiments of the present application, an exposure device 100 provided by the present application further includes a loading assembly 10, and the loading assembly 10 is provided with a positioning member 11. After the loading assembly 10 reaches the designated position, the reference portion 331 abuts against the positioning member 11.
[0073] When the loading assembly 10 reaches the designated position, the reference portion 331 abuts against the positioning member 11 of the loading assembly 10 , thereby positioning the loading assembly 10 , thereby ensuring the position accuracy of the loading assembly 10 .
[0074] In the description of this specification, the description with reference to the terms "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiments or examples are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0075] In addition, the above description is only a preferred embodiment of the utility model, and is not intended to limit the utility model. Any modifications, equivalent replacements and improvements made within the spirit and principle of the utility model shall be included in the protection scope of the utility model. Therefore, the protection scope of the utility model shall be based on the protection scope of the claims.
Claims
1. A positioning mechanism, characterized in that: include: Drive assembly; A first slider, the first slider being mounted on a power output end of the driving assembly; a second slider, the second slider being slidably connected to the first slider, and the second slider being provided with a reference portion; The driving assembly drives the first slider to move, thereby pushing the second slider to move, so as to move the reference portion.
2. The positioning mechanism according to claim 1, characterized in that: At least one of the first sliding block and the second sliding block is provided with an inclined surface, and the first sliding block and the second sliding block are connected via the inclined surface.
3. The positioning mechanism according to claim 1, characterized in that: The moving directions of the first slider and the second slider are perpendicular to each other, and the reference portion faces the moving direction of the second slider.
4. The positioning mechanism according to claim 1, characterized in that: The reference portion is provided with a first guide surface, and the first guide surface guides the product to be processed or a structure for fixing the product to be processed from a first direction.
5. The positioning mechanism according to claim 4, characterized in that: The reference portion is provided with a second guide surface, and the second guide surface guides the product to be processed or the structure for fixing the product to be processed from a second direction; The first direction intersects with the second direction.
6. A positioning device, characterized in that: include: Mounting parts; The positioning mechanism according to any one of claims 1 to 5; There is at least one positioning mechanism, and all positioning mechanisms are mounted on the mounting member.
7. The positioning device according to claim 6, characterized in that: It also includes a reference member, which is fixedly connected to the reference parts of all the positioning mechanisms; The reference member is provided with a reference surface, and the reference surface faces a direction away from the positioning mechanism.
8. The positioning device according to claim 6, characterized in that: The mounting member comprises a marble base, and the positioning mechanism is mounted on the marble base.
9. An exposure device, characterized in that: The invention comprises the positioning mechanism described in any one of claims 1 to 5.
10. The exposure device according to claim 9, characterized in that Also included is a loading assembly, wherein the loading assembly is provided with a positioning member; After the loading assembly reaches the designated position, the reference portion abuts against the positioning member.