Multi-tablet taking device

Abstract

The utility model discloses a multi-material-sheet taking device which comprises a mounting seat, a plurality of material sheets and a plurality of material sheets, the multiple material taking mechanisms are evenly arranged and fixed to the mounting base at intervals in the vertical direction, the bottoms of the material taking mechanisms are output ends, the bottoms of the multiple material taking mechanisms are located on the same straight line, the tops of the adjacent material taking mechanisms are arranged in an up-down staggered mode, and the material taking mechanisms are used for sucking material pieces. According to the utility model, the number of material sheets sucked at a time can be increased, the stability and the safety when multiple material sheets are sucked at the same time are ensured, the detection capacity is improved, and the efficiency requirement is met.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor detection equipment, in particular to a multi-sheet material taking device. Background Art

[0002] In the prior art, as the semiconductor industry's demand for production capacity increases, the demand for wafer inspection is also increasing. The existing wafer picking device can only pick up one wafer at a time, which cannot meet the demand for increased production capacity. Summary of the invention

[0003] According to an embodiment of the utility model, a multi-sheet material taking device is provided, comprising:

[0004] Mounting seat;

[0005] A plurality of material taking mechanisms are evenly spaced and arranged in the vertical direction and fixed on the mounting seat, the bottom of the material taking mechanism is the output end, the bottoms of the plurality of material taking mechanisms are located in the same straight line, the tops of adjacent material taking mechanisms are arranged in an up-and-down staggered manner, and the material taking mechanism is used to absorb the material sheets.

[0006] Furthermore, the material taking mechanism comprises: a driving module, a lifting module and a material taking module;

[0007] The driving module is fixed on the mounting base, and the output end of the driving module is connected to the lifting module;

[0008] The lifting module is slidably arranged on the mounting seat, and the output end of the lifting module is connected to the material taking module;

[0009] The driving module drives the lifting module to move vertically, and the picking module picks up the material sheets.

[0010] Further, the driving module includes: a driving motor and a cam;

[0011] The driving motor is fixed on the mounting seat;

[0012] The cam is fixed to the output end of the driving motor and abuts against the lifting module;

[0013] The driving motor drives the cam to rotate, driving the lifting module to move in the vertical direction.

[0014] Furthermore, the lifting module comprises: a lifting column, a first guide rail, a slider and a buffer assembly;

[0015] The first guide rail is fixed on the mounting seat, and the slider is slidably connected to the first guide rail;

[0016] The top of the lifting column is in contact with the driving module, and the bottom of the lifting column is fixed on the slider;

[0017] The buffer component is fixed on the mounting seat and connected with the lifting column and the material taking module. The buffer component drives the lifting column to always abut against the driving module.

[0018] Furthermore, the buffer assembly comprises: a guide post, a guide seat and a spring;

[0019] The guide seat is fixed on the mounting seat and arranged between the lifting column and the material taking module, and a guide hole is arranged on the guide seat;

[0020] The guide column passes through the guide hole and is connected to the lifting column and the material taking module;

[0021] The spring is sleeved on the guide column, and two ends of the spring are respectively in contact with the guide seat and the lifting column.

[0022] Furthermore, the material taking module comprises: a suction nozzle, an air pipe joint, a suction nozzle mounting seat, a suction nozzle buffer seat and a second guide rail;

[0023] The nozzle mounting seat is fixed on the slide block;

[0024] The second guide rail is fixed on the nozzle mounting seat;

[0025] The suction nozzle buffer seat is slidably arranged on the second guide rail and is connected to the buffer assembly;

[0026] The suction nozzle and the air pipe joint are fixed on the suction nozzle buffer seat, the air pipe joint is connected with the suction nozzle, the air pipe joint is used to connect the external vacuum air pipe, and the suction nozzle sucks the material sheet.

[0027] Furthermore, the material picking module also includes: a limit block, which is arranged at the bottom of the first guide rail and the suction nozzle buffer seat, and the limit block limits the descending position of the suction nozzle buffer seat.

[0028] The multi-sheet material taking device according to the embodiment of the utility model can increase the number of sheets sucked in a single time, ensure the stability and safety when sucking multiple sheets at the same time, improve the detection capacity, and meet the efficiency requirements.

[0029] It is to be understood that both the foregoing general description and the following detailed description are exemplary, and are intended to provide further explanation of the technology as claimed. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a structural schematic diagram of a multi-sheet material taking device according to an embodiment of the utility model;

[0031] Figure 2 It is a schematic diagram of a material taking mechanism of a multi-sheet material taking device according to an embodiment of the utility model. DETAILED DESCRIPTION

[0032] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings to further illustrate the present invention.

[0033] First, combine Figure 1~2 A multi-sheet material taking device according to an embodiment of the utility model is described, which is used to take multiple sheets at one time and has a wide range of application scenarios.

[0034] like Figure 1~2 As shown, the multi-sheet material picking device of the embodiment of the utility model comprises: a mounting seat 1 and a plurality of material picking mechanisms; the plurality of material picking mechanisms are evenly spaced and arranged and fixed on the mounting seat 1 in the vertical direction, so that the entire device is orderly distributed in the vertical space, occupies less horizontal space, is more compact, and is conducive to a reasonable layout in a limited production space. The bottom of the material picking mechanism is the output end, and the bottoms of the plurality of material picking mechanisms are located in the same straight line, which ensures the consistency of the material picking position, thereby improving the stability and accuracy of the multi-sheet material picking process. The tops of adjacent material picking mechanisms are staggered up and down, and the staggered arrangement saves more space. The material picking mechanism is used to absorb the sheets, and a plurality of material picking mechanisms can work at the same time to absorb a plurality of sheets at one time, which significantly improves the material picking efficiency and is suitable for mass production environments.

[0035] Specifically, Figure 1~2 As shown, in this embodiment, the material picking mechanism includes: a driving module 2, a lifting module 3 and a material picking module 4; the driving module 2 is fixed on the mounting base 1, and the output end of the driving module 2 is connected to the lifting module 3; the lifting module 3 is slidably arranged on the mounting base 1, and the output end of the lifting module 3 is connected to the material picking module 4; the driving module 2 drives the lifting module 3 to move in the vertical direction, thereby driving the material picking module 4 to rise and fall, so as to realize the material picking module 4 to absorb and place the material sheet. Through the control of the driving module 2, the automatic lifting of the material picking module 4 can be realized, which reduces the need for manual operation, simplifies the operation process, and reduces the labor intensity.

[0036] Specifically, Figure 1~2 As shown, in this embodiment, the driving module 2 includes: a driving motor 21 and a cam 22; the driving motor 21 is fixed on the mounting base 1; the cam 22 is fixed at the output end of the driving motor 21 and abuts against the lifting module 3; the driving motor 21 drives the cam 22 to rotate, driving the lifting module 3 to move in the vertical direction. The combination of the driving motor 21 and the cam 22 can realize the precise control of the lifting module 3. By adjusting the speed and rotation angle of the motor, the vertical movement of the lifting module 3 can be accurately controlled, and the accuracy of the material collection is improved; the cam 22 mechanism can convert the rotational motion of the motor into a smooth linear motion, reducing the vibration and impact during the lifting process, and ensuring that the material collection module 4 is more stable and reliable when sucking the material sheet; the design is compact, the space occupied is small, the structure is simple, and the cost is low.

[0037] Further, if Figure 1~2 As shown, in this embodiment, the lifting module 3 includes: a lifting column 31, a first guide rail 32, a slider 33 and a buffer assembly; the first guide rail 32 is fixed on the mounting seat 1, and the slider 33 is slidably connected to the first guide rail 32; the top of the lifting column 31 is in contact with the driving module 2, and the bottom of the lifting column 31 is fixed on the slider 33; the buffer assembly is fixed on the mounting seat 1, and is connected to the lifting column 31 and the material taking module 4, and the buffer assembly drives the lifting column 31 to always be in contact with the driving module 2. Through the sliding connection between the first guide rail 32 and the slider 33, the movement trajectory of the lifting column 31 can be ensured to be stable and smooth, and the error caused by friction and offset can be reduced, and the movement direction of the lifting column 31 can also be limited; the buffer assembly can effectively absorb and buffer the impact force generated during the lifting process, reduce the impact of vibration and the material taking process, avoid damage to the sheet, and is flexible and durable.

[0038] Further, if Figure 1~2 As shown, in this embodiment, the buffer assembly includes: a guide column 34, a guide seat 35 and a spring; the guide seat 35 is fixed on the mounting seat 1 and is arranged between the lifting column 31 and the material taking module 4, and a guide hole is provided on the guide seat 35; the guide column 34 passes through the guide hole to connect with the lifting column 31 and the material taking module 4; the spring is sleeved on the guide column 34, and the two ends of the spring are respectively in contact with the guide seat 35 and the lifting column 31. The elastic force of the spring ensures that the lifting column 31 is always in contact with the cam 22, and at the same time, the flexible contact between the material taking module 4 and the material sheet is achieved during material taking, so as to avoid damaging the material sheet. The design of the guide column 34 and the guide hole ensures the stability of the spring telescopic movement and will not deviate.

[0039] Further, if Figure 1~2 As shown, in this embodiment, the material picking module 4 includes: a suction nozzle 41, an air pipe joint 42, a suction nozzle mounting seat 43, a suction nozzle buffer seat 44 and a second guide rail 45; the suction nozzle mounting seat 43 is fixed on the slider 33; the second guide rail 45 is fixed on the suction nozzle mounting seat 43; the suction nozzle buffer seat 44 is slidably arranged on the second guide rail 45 and connected to the buffer assembly, the suction nozzle buffer seat 44 is connected to the buffer assembly, and can effectively absorb and buffer the impact force and vibration that may be generated during the material picking process, and protect the suction nozzle 41 and the material piece; the suction nozzle 41 and the air pipe joint 42 are fixed on the suction nozzle buffer seat 44, the air pipe joint 42 is connected to the suction nozzle 41, and the air pipe joint 42 is used to connect the external vacuum air pipe, and the suction nozzle 41 sucks the material piece. The second guide rail 45 is used to guide and limit the movement of the suction nozzle 41, so as to further improve the accuracy.

[0040] Further, if Figure 1~2As shown, in the present embodiment, the material picking module 4 further includes: a limit block 46, the limit block 46 is arranged at the bottom of the first guide rail 32 and the suction nozzle buffer seat 44, the limit block 46 limits the descending position of the suction nozzle buffer seat 44, ensures that the output ends of several material picking mechanisms are located in the same straight line, and ensures that the suction nozzle 41 can stop at a precise and consistent position each time the material is picked up, thereby improving the accuracy and consistency of the material picking position, and can provide stable mechanical support when the suction nozzle buffer seat 44 reaches the predetermined position, reduce the vibration and shaking of the suction nozzle 41, and improve the stability of the material picking process.

[0041] In the initial state, the suction nozzle 41 is in the material picking position, and the suction nozzle buffer seat 44 is abutted against the limit block 46 by the action of gravity and the spring compression force. At the same time, the lifting column 31 is always abutted against the cam 22 by the action of the spring compression force. The external air pipe connected to the air pipe joint 42 is vacuumed, so that the suction nozzle 41 adsorbs the material sheet. When the suction nozzle 41 contacts the material sheet, it will be subjected to pressure. At this time, the suction nozzle buffer seat 44 will move slightly upward to compress the spring to achieve a buffering effect and avoid damage to the material sheet. After the material picking is completed, the driving motor 21 drives the cam 22 to rotate. The eccentric rotation of the cam 22 will drive the lifting column 31 abutting against the cam 22 to rise and fall. At the same time, the first guide rail 32 will guide and limit the movement of the lifting column 31. After the lifting column 31 rises to the material discharging position, the suction nozzle 41 releases the material sheet for unloading. After unloading is completed, the driving motor 21 drives the cam 22 to move eccentrically again, so that the lifting column 31 descends to the material picking position.

[0042] Above, refer to Figure 1~2 The utility model is described as being able to increase the number of sheets sucked in a single time according to an embodiment of the utility model, ensure stability and safety when sucking multiple sheets at the same time, improve detection capacity, and meet efficiency requirements.

[0043] It should be noted that, in this specification, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprises..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0044] Although the content of the utility model has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the utility model. After reading the above content, various modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the protection scope of the utility model should be limited by the attached claims.

Claims

1. A multi-sheet material taking device, characterized in that: Include: Mounting seat; A plurality of material picking mechanisms are arranged evenly at intervals in the vertical direction and fixed on the mounting seat, the bottom of the material picking mechanism is an output end, the bottoms of the plurality of material picking mechanisms are located in the same straight line, the tops of adjacent material picking mechanisms are arranged in an up-and-down staggered manner, and the material picking mechanisms are used to suck material sheets.

2. The multi-sheet material taking device according to claim 1, characterized in that: The material taking mechanism comprises: a driving module, a lifting module and a material taking module; The driving module is fixed on the mounting seat, and the output end of the driving module is connected to the lifting module; The lifting module is slidably arranged on the mounting seat, and the output end of the lifting module is connected to the material taking module; The driving module drives the lifting module to move in a vertical direction, and the picking module sucks the material sheet.

3. The multi-sheet material taking device as claimed in claim 2, characterized in that: The driving module comprises: a driving motor and a cam; The driving motor is fixed on the mounting seat; The cam is fixed to the output end of the driving motor and abuts against the lifting module; The driving motor drives the cam to rotate, thereby driving the lifting module to move in a vertical direction.

4. The multi-sheet material taking device according to claim 2, characterized in that: The lifting module comprises: a lifting column, a first guide rail, a sliding block and a buffer assembly; The first guide rail is fixed on the mounting seat, and the slider is slidably connected to the first guide rail; The top of the lifting column is in contact with the driving module, and the bottom of the lifting column is fixed on the sliding block; The buffer component is fixed on the mounting seat and connected to the lifting column and the material taking module. The buffer component drives the lifting column to always abut against the driving module.

5. The multi-sheet material taking device according to claim 4, characterized in that: The buffer assembly comprises: a guide column, a guide seat and a spring; The guide seat is fixed on the mounting seat and is arranged between the lifting column and the material taking module, and a guide hole is provided on the guide seat; The guide column passes through the guide hole and is connected to the lifting column and the material taking module; The spring is sleeved on the guide column, and two ends of the spring are respectively in contact with the guide seat and the lifting column.

6. The multi-sheet material taking device according to claim 4, characterized in that: The material taking module comprises: a suction nozzle, an air pipe joint, a suction nozzle mounting seat, a suction nozzle buffer seat and a second guide rail; The nozzle mounting seat is fixed on the slider; The second guide rail is fixed on the nozzle mounting seat; The nozzle buffer seat is slidably disposed on the second guide rail and is connected to the buffer assembly; The suction nozzle and the air pipe joint are fixed on the suction nozzle buffer seat, the air pipe joint is connected to the suction nozzle, the air pipe joint is used to connect to an external vacuum air pipe, and the suction nozzle sucks the sheet.

7. The multi-sheet material taking device according to claim 6, characterized in that: The material picking module further comprises: a limit block, which is arranged at the bottom of the first guide rail and the nozzle buffer seat, and the limit block limits the descending position of the nozzle buffer seat.

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