Quartz tube patch sintering device

Abstract

The utility model provides a quartz tube patch sintering device, which comprises a base, a first machine table, a second machine table, an adsorption mechanism and a melting mechanism, and a first chuck and a second chuck are respectively arranged on the first machine table and the second machine table. The adsorption mechanism comprises a vacuum pump, a sucker and a connecting pipe, the sucker is clamped on the second chuck, and the connecting pipe is arranged between the vacuum pump and the sucker. The melting mechanism comprises a gun rack and two arc-shaped gun barrels, the two arc-shaped gun barrels are oppositely arranged on the gun rack, and a plurality of nozzles are arranged on the arc-shaped gun barrels. In application, the first chuck on the first machine table is used for fixedly clamping a quartz tube, the second chuck on the second machine table is used for fixedly clamping a suction cup, a patch is stably adsorbed on the suction cup through cooperation of the vacuum pump, and then the quartz tube and the patch are sintered through the melting mechanism, so that the patch is precisely attached to the tail of the quartz tube; the device is convenient to operate, can effectively improve the patch production efficiency and the product quality, reduces the labor cost, and guarantees the production safety.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz product processing, in particular to a quartz tube patch sintering device. Background Art

[0002] In the photovoltaic and semiconductor industries, diffusion equipment is often used for the diffusion process of materials, and deposition equipment is used for the deposition process of materials. Quartz tubes have good high temperature resistance, thermal stability and light transmittance, and are usually used as cavity materials in diffusion equipment or deposition equipment. Quartz tubes generally include a circular tube body and an arc-shaped tube tail connected to the tail of the tube body, and the tube tail needs to have several through holes for the installation of process pipelines in the diffusion equipment or deposition equipment. Therefore, in order to ensure the structural strength and service life of the quartz tube, it is necessary to sinter the patch at the tube tail of the quartz tube so that the patch is connected and fit with the tube tail. However, the current patch sintering method requires multiple people to assist in the operation, with low production efficiency and high labor costs, and the patch is not firmly fixed, which affects production safety and the quality and efficiency of patch sintering. Utility Model Content

[0003] The purpose of the utility model is to solve the shortcomings of the prior art and to propose a quartz tube patch sintering device, which can effectively fix and position the quartz tube and the patch, improve the convenience of operation, reduce labor costs, shorten the operation time, and ensure production safety.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A quartz tube patch sintering device comprises a base, a first machine platform, a second machine platform, an adsorption mechanism and a sintering mechanism.

[0006] The first machine platform and the second machine platform are arranged on the base opposite to each other in a first direction, and a first chuck and a second chuck are respectively arranged on the first machine platform and the second machine platform.

[0007] The adsorption mechanism comprises a vacuum pump, a suction cup and a connecting pipe. The suction cup is clamped on the second chuck, and the connecting pipe is arranged between the vacuum pump and the suction cup.

[0008] The melting mechanism includes a gun rack and two arc-shaped gun barrels. The gun rack is arranged on the base and located between the first machine and the second machine. The two arc-shaped gun barrels are arranged on the gun rack opposite to each other, and the central axis of the arc-shaped gun barrel coincides with the central axis of the suction cup. A plurality of nozzles are arranged on the arc-shaped gun barrels.

[0009] Preferably, the base is provided with a first movable module arranged along the first direction, and the first machine is movably arranged on the first movable module; and / or, the base is provided with a second movable module arranged along the first direction, and the second machine is movably arranged on the second movable module.

[0010] Preferably, a first through hole is provided on the inner side of the first chuck, and the first through hole is used for the quartz tube to pass through.

[0011] Preferably, a second through hole is provided on the inner side of the second chuck, and the second through hole is used for the connecting pipe to pass through.

[0012] Preferably, the central axis of the first chuck coincides with the central axis of the second chuck.

[0013] Preferably, the suction cup is provided with an adsorption groove and an air hole which are interconnected, the adsorption groove faces the direction of the first machine, and the air hole is connected with the connecting pipe.

[0014] Preferably, the suction cup is made of graphite.

[0015] Preferably, the melting mechanism further comprises a third movable module, the third movable module is arranged on the base along the first direction, and the gun rack is movably arranged on the third movable module.

[0016] Preferably, an arc-shaped fire baffle is coaxially provided on the inner side of the arc-shaped gun barrel, a mounting hole is correspondingly provided on the arc-shaped fire baffle, the nozzle is inserted into the mounting hole, and one end of the nozzle is connected to the arc-shaped gun barrel through a threaded joint, and the other end of the nozzle faces away from the arc-shaped gun barrel.

[0017] Preferably, an air inlet pipe is provided on the side of the curved gun barrel.

[0018] Compared with the prior art, the beneficial effects of the utility model are as follows: in the quartz tube patch sintering device of the utility model, the first chuck on the first machine is used to fix and clamp the quartz tube, and the second chuck on the second machine is used to fix and clamp the suction cup, and the patch is firmly adsorbed on the suction cup through the cooperation of the vacuum pump, and then the quartz tube and the patch are sintered by the sintering mechanism, so that the patch is accurately attached and connected to the tail of the quartz tube; this device is easy to operate, can effectively improve the patch production efficiency and product quality, reduce labor costs, and ensure production safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of a quartz tube patch sintering device in some embodiments of the utility model;

[0020] Figure 2It is a structural schematic diagram of the second machine and the adsorption mechanism in some embodiments of the utility model;

[0021] Figure 3 It is a cross-sectional view of the suction cup in some embodiments of the utility model;

[0022] Figure 4 It is a schematic diagram of the structure of the sintering mechanism of some embodiments of the utility model.

[0023] In the figure, 100-quartz tube, 200-patch, 10-base, 11-first movable module, 12-second movable module, 20-first machine, 21-first chuck, 211-first through hole, 30-second machine, 31-second chuck, 311-second through hole, 40-adsorption mechanism, 41-vacuum pump, 42-suction cup, 421-adsorption groove, 422-air hole, 43-connecting pipe, 50-melting mechanism, 51-gun rack, 52-arc barrel, 53-nozzle, 54-third movable module, 55-arc fire baffle, 56-threaded joint, 57-inlet pipe. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work belong to the scope of protection of the utility model. It can be understood that some technical means of the various embodiments described herein can be replaced or combined with each other without conflict.

[0025] In the description of the present invention, if there are terms such as "first", "second", etc., they are only used to distinguish the objects described, and do not have any order or technical meaning. Therefore, the objects defined as "first", "second", etc. may explicitly or implicitly include one or more of the objects. Moreover, "one" or "a" and similar words do not indicate a quantity limitation, but indicate the existence of at least one, and "multiple" means not less than two.

[0026] In the description of the utility model specification, reference to "one embodiment" or "some embodiments" etc. means that one or more embodiments of the utility model include specific features, structures or characteristics described in conjunction with the embodiment. Therefore, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. appearing in different places in the specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways.

[0027] See also Figure 1 The utility model provides a quartz tube patch sintering device, which includes a base 10, a first machine 20, a second machine 30, an adsorption mechanism 40 and a sintering mechanism 50. The first machine 20 is used to position and clamp the quartz tube 100, the second machine 30 cooperates with the adsorption mechanism 40 to position and adsorb the patch 200, and the sintering mechanism 50 is used to sinter the quartz tube 100 and the patch 200, so as to facilitate the patch 200 to be attached to the tail of the quartz tube 200.

[0028] Specifically, the first machine 20 and the second machine 30 are relatively arranged on the base 10 in the first direction X, and the first direction X corresponds to the length direction of the base. When the quartz tube 100 is clamped on the first machine 20, the central axis of the quartz tube 100 is parallel to the first direction X. A first chuck 21 is provided on the first machine 20, and a second chuck 31 is provided on the second machine 30. Preferably, the central axis of the first chuck 21 coincides with the central axis of the second chuck 31 to ensure positioning accuracy. Among them, the first chuck 21 and the second chuck 31 can respectively adopt commercially available three-jaw chuck products. The structure and working principle of the three-jaw chuck belong to the prior art and will not be repeated here. Furthermore, the first chuck 21 and the second chuck 31 can also be respectively set to be rotatable to facilitate the sintering operation of the patch.

[0029] Reference Figure 1 or Figure 2 The adsorption mechanism 40 includes a vacuum pump 41, a suction cup 42 and a connecting pipe 43. The suction cup 42 is clamped on the second chuck 31, and the connecting pipe 43 is arranged between the vacuum pump 41 and the suction cup 42. The vacuum pump 41 can adopt a commercially available vacuum pump product, and its structure and working principle belong to the prior art and are not described here. Using the vacuum pump 41 to firmly adsorb the patch 200 on the suction cup 42 can not only save manpower, but also enhance the positioning accuracy and stability of the patch 200, thereby improving the patch sintering efficiency and sintering quality.

[0030] The melting mechanism 50 includes a gun rack 51 and two arc-shaped gun barrels 52. The gun rack 51 is arranged on the base 10, and the gun rack 51 is located between the first machine 20 and the second machine 30. The two arc-shaped gun barrels 52 are relatively arranged on the gun rack 51, and the central axis of the arc-shaped gun barrel 52 coincides with the central axis of the suction cup 42. Each arc-shaped gun barrel 52 is provided with a plurality of nozzles 53, and the plurality of nozzles 53 are arranged at intervals along the arc-shaped contour of the corresponding arc-shaped gun barrel 52. The number of nozzles 53 and the distance between adjacent nozzles 53 can be reasonably set according to actual needs. Furthermore, each arc-shaped gun barrel 52 is roughly semicircular, and the two arc-shaped gun barrels 52 are relatively arranged and assembled into an annular structure, so that the quartz tube 100 and the patch 200 can be uniformly heated in the circumferential direction to improve production efficiency.

[0031] In the application, the quartz tube 100 is fixedly clamped by the first chuck 21 on the first machine 20, and the suction cup 42 is fixedly clamped by the second chuck 31 on the second machine 30, and the patch 200 is firmly adsorbed on the suction cup 42 through the cooperation of the vacuum pump 41, and then the quartz tube 100 and the patch 200 are melted by the melting mechanism 50, and the patch is made into an arc structure that matches the tail of the quartz tube by manual or mechanical assistance, so that the patch is accurately attached to the tail of the quartz tube; this device is easy to operate, can effectively improve the patch production efficiency and product quality, reduce labor costs, and ensure production safety.

[0032] In some embodiments, a first movable module 11 is provided on the base 10 and is arranged along the first direction X, and the first machine 20 is movably arranged on the first movable module 11; and / or, a second movable module 12 is provided on the base 10 and is arranged along the first direction X, and the second machine 30 is movably arranged on the second movable module 12, that is, the first machine 20 and the second machine 30 can be moved along the first direction X respectively, or one of the first machine 20 and the second machine 30 can be moved along the first direction X, so as to realize the docking and sintering of the quartz tube 100 and the patch 200.

[0033] Reference Figure 1 In one embodiment, a first movable module 11 and a second movable module 12 are provided on the base 10 along a first direction X, the first machine 20 is movably provided on the first movable module 11, and the second machine 30 is movably provided on the second movable module 12. The first movable module 11 can drive the first machine 20 to move along the first direction X, and the second movable module 12 can drive the second machine 30 to move along the first direction X, so as to realize the butt sintering of the quartz tube 100 and the patch 200. Among them, the first movable module 11 and the second movable module 12 can respectively adopt commercially available linear guide module products, and their structures and working principles belong to the prior art and are not described here.

[0034] In some embodiments, a first through hole 211 is provided on the inner side of the first chuck 21, and the first through hole 211 is used for the quartz tube 100 to pass through. The aperture of the first through hole 211 should not be less than the outer diameter of the quartz tube 100. In application, the quartz tube 100 extends into the first through hole 211, and the tail of the quartz tube 100 faces the second machine 30, and the first chuck 21 tightens and stably clamps the quartz tube 100.

[0035] In some embodiments, the inner side of the second chuck 31 is provided with a second through hole 311, and the second through hole 311 is used for the connection tube 43 to pass through. In application, the suction cup 42 is clamped in the second chuck 31, and the connection tube 43 is passed through the second through hole 311, and the suction cup 42 is connected with the vacuum pump 41, and the vacuum pump 41 is started to firmly adsorb the patch 200 on the suction cup 42.

[0036] Furthermore, the suction cup 42 is provided with a suction groove 421 and an air hole 422 which are interconnected. The suction groove 421 faces the first machine 20, and the air hole 422 is connected to the connecting pipe 43. The structures of the suction groove 421 and the air hole 422 can be reasonably set according to actual conditions. For example, the suction groove 421 can be set as a circular or annular groove. Figures 1 to 3 In one embodiment, the adsorption groove 421 is configured as an annular groove, the adsorption groove 421 is connected to the air hole 422, and the air hole 422 is connected to the vacuum pump 41 through the connecting pipe 43. In application, the patch 200 is attached to the adsorption groove 421, and the vacuum pump 41 evacuates the adsorption groove 421, so that the patch 200 is stably fixed on the suction cup 42.

[0037] In some embodiments, the suction cup 42 is made of graphite, which has high heat resistance and is not easily burned during sintering of the patch, thereby ensuring the service life of the suction cup 42.

[0038] Reference Figure 1 In some embodiments, the sintering mechanism 50 further includes a third movable module 54, which is disposed on the base 10 along the first direction X, and the gun rack 51 is movably disposed on the third movable module 54. The third movable module 54 can adopt a commercially available linear guide module product, and its structure and working principle belong to the prior art and are not described here. The third movable module 54 can drive the gun rack 51 to reciprocate along the first direction X to uniformly heat the tail of the quartz tube 100 or the patch 200, thereby improving the patch sintering efficiency and quality.

[0039] Reference Figure 4 In other embodiments, an arc-shaped fire baffle 55 is coaxially provided on the inner side of the arc-shaped gun barrel 52, and a mounting hole is correspondingly provided on the arc-shaped fire baffle 55. The nozzle 53 is inserted into the mounting hole, and one end of the nozzle 53 is connected to the arc-shaped gun barrel 52 through a threaded joint 56, and the other end of the nozzle 53 faces away from the arc-shaped gun barrel 52. Further, an air intake pipe 57 is provided on the side of the arc-shaped gun barrel 52. In application, the air intake pipe 57 can be connected to a combustible gas pipeline. After the combustible gas enters the arc-shaped gun barrel 52, it is divided into multiple nozzles 53 respectively. After the combustible gas is ignited at the nozzle 53, the multiple nozzles 53 can spray flames to achieve heating. The arc-shaped fire baffle 55 can not only effectively fix the nozzle 53, but also prevent the flame from damaging the arc-shaped gun barrel 52, thereby ensuring production safety.

[0040] In one embodiment, the sintering mechanism 50 adopts hydrogen-oxygen welding technology, that is, a mixed gas of hydrogen and oxygen is introduced into the arc-shaped gun barrel 52 , and the flame of the burning mixed gas is used as a heat source to realize the sintering of the quartz tube 100 and the patch 200 .

[0041] In the above-mentioned quartz tube patch sintering device, the quartz tube 100 is first inserted into the first through hole 211, and the tail of the quartz tube 100 is directed toward the second machine 30, and the first chuck 21 is tightened and stably clamped to the quartz tube 100; the second chuck 31 is used to clamp the suction cup 42, and the vacuum pump 41 is turned on to place the patch 200 at the adsorption groove 421 of the suction cup 42, so that the patch 200 is firmly adsorbed on the suction cup 42; then, the first moving module 11 drives the quartz tube 100 to move. 0 approaches the patch 200, or the second moving module 12 drives the patch 200 to approach the quartz tube 100; then, the melting mechanism 50 works, and the multiple nozzles 53 spray flames inward to melt the tail of the quartz tube 100 and the patch 200; then, the patch 200 is made into an arc structure that matches the tail of the quartz tube 100 by manual or mechanical assistance, so that the patch 200 can be accurately attached to the tail of the quartz tube 100. Further, during the melting of the quartz tube, the first chuck 21 can be used to drive the quartz tube 100 to rotate, and the third moving module 54 can be used to drive the gun rack 51 to reciprocate in the first direction X, so that the tail of the quartz tube 100 can be evenly heated; during the melting of the patch, the arc gun barrel 52 corresponds to the patch 200, and the second chuck 31 can be used to drive the suction cup 42 and the patch 200 to rotate, so that the patch 200 can be evenly heated.

[0042] The quartz tube patch sintering device of the utility model is easy to operate, can effectively improve patch production efficiency and product quality, reduce labor costs, and ensure production safety.

[0043] The present invention has been described by the above-mentioned relevant embodiments, however, the above-mentioned embodiments are only examples for implementing the present invention. It must be pointed out that the disclosed embodiments do not limit the scope of the present invention. On the contrary, any changes and modifications made without departing from the spirit and scope of the present invention are within the scope of patent protection of the present invention.

Claims

1. A quartz tube patch sintering device, characterized in that: It includes a base, a first machine platform, a second machine platform, an adsorption mechanism and a sintering mechanism; The first machine platform and the second machine platform are arranged on the base in a first direction opposite to each other, and a first chuck and a second chuck are respectively arranged on the first machine platform and the second machine platform; The adsorption mechanism comprises a vacuum pump, a suction cup and a connecting pipe, wherein the suction cup is clamped on the second chuck, and the connecting pipe is arranged between the vacuum pump and the suction cup; The melting mechanism includes a gun rack and two arc-shaped gun barrels. The gun rack is arranged on the base and located between the first machine and the second machine. The two arc-shaped gun barrels are arranged on the gun rack opposite to each other, and the central axis of the arc-shaped gun barrel coincides with the central axis of the suction cup. A plurality of nozzles are arranged on the arc-shaped gun barrels.

2. The quartz tube patch sintering device according to claim 1, characterized in that: The base is provided with a first movable module arranged along the first direction, and the first machine is movably arranged on the first movable module; and / or, the base is provided with a second movable module arranged along the first direction, and the second machine is movably arranged on the second movable module.

3. The quartz tube patch sintering device according to claim 1, characterized in that: A first through hole is provided on the inner side of the first chuck, and the first through hole is used for the quartz tube to pass through.

4. The quartz tube patch sintering device according to claim 1, characterized in that: A second through hole is provided on the inner side of the second chuck, and the second through hole is used for the connecting pipe to pass through.

5. The quartz tube patch sintering device according to claim 1, characterized in that: The central axis of the first chuck coincides with the central axis of the second chuck.

6. The quartz tube patch sintering device according to claim 1, characterized in that: The suction cup is provided with an adsorption groove and an air hole which are interconnected, the adsorption groove faces the direction of the first machine, and the air hole is connected with the connecting pipe.

7. The quartz tube patch sintering device according to claim 1, characterized in that: The suction cup is made of graphite.

8. The quartz tube patch sintering device according to claim 1, characterized in that: The melting mechanism further comprises a third movable module, the third movable module is arranged on the base along the first direction, and the gun rack is movably arranged on the third movable module.

9. The quartz tube patch sintering device according to claim 1, characterized in that: An arc-shaped fire baffle is coaxially provided on the inner side of the arc-shaped gun barrel, and a mounting hole is correspondingly provided on the arc-shaped fire baffle. The nozzle is inserted into the mounting hole, and one end of the nozzle is connected to the arc-shaped gun barrel through a threaded joint, and the other end of the nozzle faces away from the arc-shaped gun barrel.

10. The quartz tube patch sintering device according to claim 1, characterized in that: An air inlet pipe is arranged on the side of the arc-shaped gun barrel.

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