Vacuum coating machine convenient to cool

Abstract

The utility model discloses a vacuum coating machine convenient to cool, which belongs to the technical field of vacuum coating machines and comprises a vacuum box body, a motor component is mounted above the vacuum box body, a workpiece disc component is arranged on the inner side of the vacuum box body, and the motor component is connected with the workpiece disc component through a connecting component. Two electron beam evaporation sources are installed on the inner side of the vacuum box body and located below the workpiece disc assembly, a vacuumizing assembly is installed on one side of the vacuum box body, and a cooling device is installed on the outer side of the vacuum box body and located above the vacuumizing assembly; according to the utility model, the cooling device is arranged, so that the coating machine can be used for carrying out certain cooling treatment on a coated workpiece through the matching of structures such as the fan and the air funnel when needed, thereby better meeting the working requirements under different conditions, and further improving the working capability of the coating machine.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating machines, and in particular relates to a vacuum coating machine which is easy to cool. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum degree. It includes many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and many other types.

[0003] Chinese patent application No. 201821461878.5 discloses a vacuum coating machine, wherein at least one electron beam evaporation source is arranged at the bottom of the vacuum box, and the vacuum pumping device is connected to the vacuum vent through a vacuum pipe; a workpiece opening is opened on the bottom surface of the workpiece disk, and the top of the workpiece disk is connected to a driving mechanism; the driving mechanism includes a driving motor and a rotating shaft; the bottom of the rotating shaft connected to the driving motor is detachably connected to the workpiece disk; a stabilizing cylinder is sleeved on the rotating shaft, and a limited boss is extended outward from the outer periphery of the top of the stabilizing cylinder, and the limited boss cooperates with the positioning boss at the corresponding position of the rotating shaft to achieve positioning; the stabilizing cylinder includes an inner cylinder and an outer cylinder sleeved outside the inner cylinder; the inner cylinder is provided with a plurality of annular rolling grooves; a retaining frame is arranged in the rolling groove, and a plurality of balls are arranged on the retaining frame along the circumference, and the surface of the balls protrudes from the inner surface of the inner cylinder. The utility model provides a vacuum coating machine, wherein the stabilizing cylinder is conducive to the stable rotation of the workpiece disk, and the coating effect is good.

[0004] 1. The above-mentioned disclosed patent has the problem of being inconvenient to cool the workpiece after coating, which makes it difficult to meet the working needs in different situations, thereby reducing the working capacity of the coating machine; 2. The above-mentioned disclosed patent has the problem of being unable to adjust the height of the vacuum box and other structures and being inconvenient to move, thereby reducing the practicality of the coating machine. Utility Model Content

[0005] In order to solve the problems raised in the above background technology, the utility model provides a vacuum coating machine which is easy to cool and has the characteristics of high working capacity and strong practicality.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vacuum coating machine that is easy to cool, comprising a vacuum box, a motor assembly is installed on the top of the vacuum box, a workpiece disk assembly is arranged on the inner side of the vacuum box, the motor assembly and the workpiece disk assembly are connected by a connecting assembly, two electron beam evaporation sources are installed on the inner side of the vacuum box and below the workpiece disk assembly, a vacuum pumping assembly is installed on one side of the vacuum box, a cooling device is installed on the outer side of the vacuum box and above the vacuum pumping assembly, and a lifting and moving device is installed on the outer side of the vacuum box and at the bottom of the vacuum pumping assembly.

[0007] Preferably, the cooling device includes a ventilator, a support rod, a closing assembly and a fan. Ventilators are installed on both sides of the vacuum box and above the vacuum assembly. A fan is arranged on the inner side of the ventilator. The ventilator and the fan are connected by two support rods. A closing assembly is arranged on the outer side of the two ventilators.

[0008] Preferably, the cooling device further comprises a filter, and the filter is installed on the inner side of the ventilator and at a position on the side of the fan away from the workpiece disk assembly.

[0009] Preferably, the closing component includes an electric lifting rod and a closing frame. The electric lifting rod is installed above the vacuum box and on one side of the vacuum assembly, and the closing frame is installed outside the electric lifting rod and outside the two ventilation tubes.

[0010] Preferably, the lifting and moving device includes a lifting sleeve, a screw, a support frame and a threaded hole. The lifting sleeves are installed on both sides of the vacuum box and at the bottom of the vacuum assembly. A support frame is provided on the outside of the vacuum box and at the inside of the two lifting sleeves. Multiple threaded holes are opened on both sides of the support frame, and screws are installed on the bottom of the lifting sleeve through threads.

[0011] Preferably, the lifting and moving device also includes a brake wheel, and a plurality of brake wheels are installed below the support frame.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] 1. The utility model provides a cooling device so that the coating machine can cool the workpiece after coating when necessary through the cooperation of structures such as fans and ventilators, so as to better meet the working needs in different situations and improve the working capacity of the coating machine.

[0014] 2. The utility model provides a lifting and moving device so that the staff can adjust the height of the vacuum box and other structures by the cooperation of the threaded holes and the lifting sleeves when necessary, and the staff can move the position of the coating machine by the various brake wheels when necessary, thereby improving the practicality of the coating machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a three-dimensional diagram of the utility model;

[0016] Figure 2 It is a three-dimensional cutaway view of the utility model;

[0017] Figure 3 It is a three-dimensional cutaway view of the cooling device of the utility model;

[0018] Figure 4 It is a three-dimensional cutaway view of the lifting and moving device of the utility model.

[0019] In the figure: 1. Vacuum box; 2. Motor assembly; 3. Cooling device; 31. Ventilation duct; 32. Support rod; 33. Filter; 34. Closing assembly; 341. Electric lifting rod; 342. Closing frame; 35. Fan; 4. Vacuuming assembly; 5. Lifting and moving device; 51. Lifting sleeve; 52. Brake wheel; 53. Screw; 54. Support frame; 55. Threaded hole; 6. Electron beam evaporation source; 7. Workpiece disk assembly; 8. Connecting assembly. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] Example 1

[0022] See also Figure 1-4 The utility model provides the following technical solutions: a vacuum coating machine that is easy to cool, comprising a vacuum box 1, a motor assembly 2 is installed above the vacuum box 1, a workpiece disk assembly 7 is arranged on the inner side of the vacuum box 1, the motor assembly 2 and the workpiece disk assembly 7 are connected by a connecting assembly 8, two electron beam evaporation sources 6 are installed on the inner side of the vacuum box 1 and below the workpiece disk assembly 7, a vacuum assembly 4 is installed on one side of the vacuum box 1, a cooling device 3 is installed on the outer side of the vacuum box 1 and above the vacuum assembly 4, and a lifting and moving device 5 is installed on the outer side of the vacuum box 1 and at the bottom of the vacuum assembly 4.

[0023] Specifically, the cooling device 3 includes a ventilator 31, a support rod 32, a closing component 34 and a fan 35. The ventilators 31 are installed on both sides of the vacuum box 1 and above the vacuum assembly 4. The fan 35 is arranged on the inner side of the ventilator 31. The ventilator 31 and the fan 35 are connected by two support rods 32. The closing component 34 is arranged on the outer side of the two ventilators 31.

[0024] By adopting the above technical solution, the coating machine can cool down the coated workpiece to a certain extent through the cooperation of structures such as the fan 35 and the ventilator 31 when necessary, so as to better meet the working needs in different situations.

[0025] Specifically, the cooling device 3 further includes a filter 33 , and the filter 33 is installed on the inner side of the ventilating tube 31 and at a position on the side of the fan 35 away from the workpiece disk assembly 7 .

[0026] By adopting the above technical solution, the coating machine can prevent external impurities from passing through the ventilation tube 31 and entering the interior of the vacuum box 1 through the filter 33, thereby reducing the possibility of adverse effects caused by external impurities and better meeting work needs.

[0027] Specifically, the closing component 34 includes an electric lifting rod 341 and a closing frame 342. The electric lifting rod 341 is installed above the vacuum box 1 and on one side of the vacuum assembly 4. The closing frame 342 is installed outside the electric lifting rod 341 and outside the two ventilation tubes 31.

[0028] By adopting the above technical solution, the staff can close the two ventilation tubes 31 through the cooperation of the electric lifting rod 341 and the closing frame 342 when necessary, thereby ensuring that the vacuum assembly 4 can perform vacuuming work.

[0029] When the present embodiment is used, when the coating machine is required to perform vacuum coating on the workpiece, the vacuum box 1 is opened, the workpiece is fixed on the workpiece disk assembly 7, the motor assembly 2 is operated to drive the workpiece disk assembly 7 and the workpiece thereon to rotate through the connecting assembly 8, and then the coating material is placed on the two electron beam evaporation sources 6, the vacuum box 1 is closed, the vacuum pumping assembly 4 is operated to evacuate the vacuum box 1, and then the two electron beam evaporation sources 6 are started, and the electron beam evaporation sources 6 heat and evaporate the coating material placed above the electron beam evaporation sources 6, and the atoms or molecules of the coating material are deposited on the surface of the workpiece in a condensed manner to form a thin film, and the coating is completed. Finally, turn off the motor assembly 2 and the two electron beam evaporation sources 6, start the electric lifting rod 341 in the sealing assembly 34 in the cooling device 3, thereby driving the sealing frame 342 to rise, so that the two sealing frames 342 are no longer closed, and then start the two fans 35. Under the action of the fans 35, the outside air enters the vacuum box 1 through a ventilation tube 31 and contacts the workpiece, and then the air is discharged from the other ventilation tube 31 with the heat on the workpiece, so as to cool the workpiece, and then open the vacuum box 1, take out the workpiece, and the work is completed. The filter 33 plays a role in blocking impurities, and the support rod 32 plays a role in connection.

[0030] Example 2

[0031] The difference between this embodiment and embodiment 1 is that the lifting and moving device 5 includes a lifting sleeve 51, a screw 53, a support frame 54 and a threaded hole 55. The lifting sleeves 51 are installed on both sides of the vacuum box 1 and at the bottom of the vacuum pumping component 4. The support frame 54 is arranged on the outside of the vacuum box 1 and at the inner side of the two lifting sleeves 51. Multiple threaded holes 55 are opened on both sides of the support frame 54. The bottom of the lifting sleeve 51 is threadedly installed with a screw 53.

[0032] By adopting the above technical solution, the staff can adjust the height of the vacuum box 1 and other structures by cooperating with the threaded hole 55 and the lifting sleeve 51 and other structures when necessary, so as to better meet the working needs in different situations.

[0033] Specifically, the lifting and moving device 5 further includes a brake wheel 52 , and a plurality of brake wheels 52 are installed below the support frame 54 .

[0034] By adopting the above technical solution, the staff can move the position of the coating machine to a certain extent through each brake wheel 52 when necessary, thereby reducing the difficulty of moving the coating machine and further alleviating the labor burden of the staff.

[0035] When the present embodiment is used, when it is necessary to adjust the height of the vacuum box 1 and other structures, the staff screws the screws 53 on the two lifting sleeves 51 in the lifting and moving device 5 to disengage the screws 53 from the threaded holes 55 on the support frame 54, and then pulls the vacuum box 1 to move it and the two lifting sleeves 51 and other structures to the required height, and then reversely rotates the two screws 53 to connect them with the corresponding threaded holes 55. After the adjustment is completed, the staff can move the position of the coating machine through the brake wheels 52 when necessary.

[0036] The utility model includes a vacuum box 1, a motor assembly 2 consisting of a driving motor and a fixing frame, a vacuum assembly 4 consisting of a vacuum vent, a vacuum device and a vacuum pipe, an electron beam evaporation source 6, a workpiece disk assembly 7 consisting of a workpiece disk, a hand-held grip and a workpiece port, and a connecting assembly 8 consisting of a fixed shaft, a rotating shaft, a positioning boss, an opening, a stabilizing cylinder, a limiting boss, an inner cylinder, a rolling groove, an outer cylinder, a retaining frame, a ball and a sponge. The structure and principle of the connection assembly 8 have been disclosed in a vacuum coating machine disclosed in Chinese patent application No. 201821461878.5. The working principle of the vacuum coating machine is that the substrate to be plated is fixed on the workpiece disk through the workpiece port, and the workpiece disk is detachably fixed to the lower end of the rotating shaft; the vacuum device is connected by vacuum pumping. The air inlet evacuates the vacuum box, and the drive motor is started. The workpiece disk loaded with the substrate to be plated rotates driven by the rotating shaft. The coating material placed above the electron beam evaporation source is heated and evaporated by at least one electron beam evaporation source. The atoms or molecules of the coating material are deposited on the surface of the substrate in a condensation manner to form a thin film, which is beneficial to ensure the uniformity of the film thickness; the ball on the retaining frame makes the rotating shaft rotate relative to the outer cylinder, and the limiting boss cooperates with the positioning boss to realize the positioning of the stabilizing cylinder. The stabilizing cylinder is beneficial to ensure that the rotating shaft always rotates on the same horizontal plane, so that the workpiece disk rotates on the same horizontal plane, ensuring the uniformity of the coating of the substrate to be plated, and the coating effect is good, which is beneficial to improving the coating efficiency and quality.

[0037] The working principle and use process of the utility model are as follows: when it is necessary to use the coating machine to perform vacuum coating on the workpiece, open the vacuum box 1, fix the workpiece on the workpiece disk assembly 7, operate the motor assembly 2 to drive the workpiece disk assembly 7 and the workpiece thereon to rotate through the connecting assembly 8, and then place the coating material on the two electron beam evaporation sources 6, close the vacuum box 1, operate the vacuum pumping assembly 4 to evacuate the vacuum box 1, and then start the two electron beam evaporation sources 6, the electron beam evaporation source 6 heats and evaporates the coating material placed above the electron beam evaporation source 6, and the atoms or molecules of the coating material are condensed and deposited on the surface of the workpiece to form a thin film. After the coating is completed, close the motor assembly 2 and the two electron beam evaporation sources 6, and start the electric lifting rod 341 in the sealing assembly 34 in the cooling device 3, thereby driving the sealing frame 342 to rise, so that the two sealing frames 342 are no longer sealed. Close, and then start the two fans 35. Under the action of the fans 35, the outside air enters the vacuum box 1 through a ventilation tube 31 and contacts the workpiece, and then the air is discharged from the other ventilation tube 31 with the heat on the workpiece, so as to cool the workpiece, and then open the vacuum box 1, take out the workpiece, and the work is completed. The filter 33 plays a role in blocking impurities, and the support rod 32 plays a role in connection; when it is necessary to adjust the height of the vacuum box 1 and other structures, the staff screws 53 on the two lifting sleeves 51 in the lifting and moving device 5 to disengage them from the threaded holes 55 on the support frame 54, and then pull the vacuum box 1 to move it and the two lifting sleeves 51 and other structures to the required height, and then rotate the two screws 53 in the opposite direction to connect them with the corresponding threaded holes 55. The adjustment is completed. When necessary, the staff can move the position of the coating machine through the brake wheels 52.

[0038] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum coating machine for easy cooling, comprising a vacuum box, characterized in that: A motor assembly is installed above the vacuum box, a workpiece disk assembly is arranged on the inner side of the vacuum box, the motor assembly and the workpiece disk assembly are connected via a connecting assembly, two electron beam evaporation sources are installed on the inner side of the vacuum box and below the workpiece disk assembly, a vacuum pumping assembly is installed on one side of the vacuum box, a cooling device is installed on the outer side of the vacuum box and above the vacuum pumping assembly, and a lifting and moving device is installed on the outer side of the vacuum box and at the bottom of the vacuum pumping assembly.

2. The vacuum coating machine for easy cooling according to claim 1, characterized in that: The cooling device includes a ventilator, a support rod, a closing component and a fan. Ventilators are installed on both sides of the vacuum box and above the vacuum assembly. A fan is arranged on the inner side of the ventilator. The ventilator and the fan are connected by two support rods. A closing component is arranged on the outer side of the two ventilators.

3. The vacuum coating machine for easy cooling according to claim 2, characterized in that: The cooling device also includes a filter screen, which is installed on the inner side of the ventilator and at a position on the side of the fan away from the workpiece disk assembly.

4. The vacuum coating machine for easy cooling according to claim 2, characterized in that: The sealing component includes an electric lifting rod and a sealing frame. The electric lifting rod is installed above the vacuum box and at one side of the vacuum pumping component. The sealing frame is installed outside the electric lifting rod and outside the two ventilation tubes.

5. The vacuum coating machine for easy cooling according to claim 1, characterized in that: The lifting and moving device includes a lifting sleeve, a screw, a support frame and a threaded hole. The lifting sleeves are installed on both sides of the vacuum box and at the bottom of the vacuum pumping component. A support frame is arranged on the outside of the vacuum box and at the inside of the two lifting sleeves. Multiple threaded holes are opened on both sides of the support frame, and screws are installed on the bottom of the lifting sleeve through threads.

6. The vacuum coating machine for easy cooling according to claim 5, characterized in that: The lifting and moving device also includes a brake wheel, and a plurality of brake wheels are installed below the support frame.

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