Special gas recovery device and system for special gas steel cylinder

Abstract

The utility model relates to a special gas recovery device and system for a special gas steel cylinder. The special gas recovery device comprises a to-be-treated unit, a nitrogen supply unit, a gas conveying unit, a recovery unit, a tail gas treatment unit, a first detection unit, a second detection unit and a control unit. The nitrogen supply unit is used for providing high-pressure nitrogen in a one-way mode to replace special gas of a special gas steel cylinder to be treated, the special gas is conveyed to the recovery unit through the to-be-treated unit, the special gas is reloaded through low-temperature cold sinking, and a nitrogen source is not polluted; the residual special gas in the special gas steel cylinder is completely sucked out by using the gas conveying unit; special gas which cannot be recycled enters the tail gas treatment unit to be treated until the special gas meets the requirements and then is discharged, so that the environment is not polluted; wherein the to-be-treated unit can be used for carrying out special gas recovery on a plurality of to-be-treated special gas steel cylinders, so that the cylinder replacement time is shortened; and the first detection unit and the second detection unit are used for monitoring and detection at the same time, the quality of the special gas is further guaranteed, and manual control and pneumatic control are combined for control, so that the conveying safety of the special gas is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of special gas recovery, and in particular to a special gas recovery device and system for special gas cylinders. Background Art

[0002] In the semiconductor manufacturing industry, special gas cylinders are indispensable and important equipment. They are used to store and supply various special gases, such as argon, nitrogen, helium, silane, etc. These gases play a vital role in the semiconductor manufacturing process, such as chemical vapor deposition, etching, cleaning and other key processes. However, with the rapid development of the semiconductor industry, the use of special gas cylinders is also increasing. Among the special gases, many gases will self-decompose at room temperature, such as diborane, etc., and their gases have an expiration date. If they are not used up within their shelf life, a layer of solid adhesive will form on the inner wall of the cylinder, which needs to be cleaned with a special detergent. The remaining gas in the bottle can be recycled and reused.

[0003] At present, there are some special gas recovery devices on the market, but they still have some shortcomings in terms of recovery efficiency, recovery quality, and ease of operation. For example, when using high-pressure nitrogen to replace special gases, there is a lack of a one-way valve at the back end, and there is a risk of dangerous special gases flowing back into the nitrogen system; the efficiency of cylinder processing is low, and only one cylinder can be processed at a time; the test system of the processing system is imperfect, and the detection efficiency is not high, which easily causes the problem of low quality and unclean processing of recovered special gases; in addition, the entire system on the market is currently set to a pneumatic valve, lacking the secondary protection of a hand valve. If the gas valve leaks, the pipeline cannot be closed manually, which poses a great safety risk.

[0004] Principle of cryogenic cold trap: Cryogenic cold trap, also known as cryogenic reaction bath or cryogenic constant temperature bath, is a cryogenic equipment used for laboratory and pilot reactions. Its main principle is to use low temperature environment to control the temperature of chemical reaction or physical process to achieve specific conditions required for the experiment. Cryogenic cold trap can replace traditional dry ice and liquid nitrogen as low temperature heat source, providing a more convenient and controllable low temperature solution. In a high vacuum environment, the application principle of cryogenic cold trap involves the process of extracting residual gas by oil diffusion pump. In this environment, there is usually a certain amount of residual gas, of which more than 80% may be water vapor, oil vapor and other high boiling point vapors. These residual gases will affect the performance of the vacuum system, so they need to be effectively removed by cryogenic cold trap. The performance advantage of cryogenic cold trap is that it has a wide temperature range (-45℃~-135℃), which can meet the low temperature requirements of different experiments. In addition, it is easy to operate and has precise temperature control, which makes it widely used in daily experiments and industrial production. By using cryogenic cold trap, the safety and efficiency of the experiment can be improved, and the dependence on traditional low temperature heat sources can also be reduced.

[0005] With regard to the problems in related technologies, such as special gases easily backflowing into the nitrogen system, the low quality of special gases, unclean handling of special gas cylinders, and inability to manually close pipelines, no effective solutions have been proposed. Utility Model Content

[0006] The purpose of the utility model is to provide a special gas recovery device and system for special gas cylinders in view of the deficiencies in the prior art, so as to solve the problems existing in the related technology that special gas is easy to backflow into the nitrogen system, the quality of special gas is not high, the special gas cylinder is not cleanly handled, and the pipeline cannot be closed manually.

[0007] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0008] The first aspect of the utility model is to provide a special gas recovery device for a special gas cylinder, comprising:

[0009] Units to be processed, each of which is connected to a plurality of special gas cylinders to be processed;

[0010] A nitrogen supply unit, the nitrogen supply unit being connected to the unit to be processed and a nitrogen source respectively, and being used to supply nitrogen to the unit to be processed to replace residual special gas in a number of the special gas cylinders to be processed;

[0011] A gas delivery unit, the gas delivery unit being in communication with the unit to be processed and being used for delivering the residual special gas outputted by the unit to be processed to the outside;

[0012] A recovery unit, the recovery unit being in communication with the gas delivery unit and being used for recovering residual special gas under the action of the gas delivery unit;

[0013] A tail gas treatment unit, the tail gas treatment unit is connected to the recovery unit and is used to treat the special gas that cannot be recovered by the recovery unit;

[0014] A first detection unit, the first detection unit is connected to the unit to be processed and is used to detect a number of special gas cylinders to be processed;

[0015] A second detection unit, the second detection unit is connected to the recovery unit and is used to detect the recovery unit.

[0016] In some embodiments, the unit to be processed includes:

[0017] The main circuit components to be processed are respectively connected with the nitrogen supply unit and the gas delivery unit for delivering nitrogen or special gas;

[0018] A plurality of branch pipeline components to be processed, wherein the plurality of branch pipeline components to be processed are respectively connected with the main pipeline components to be processed and corresponding special gas cylinders to be processed, and are used for conveying nitrogen or special gas;

[0019] A plurality of first manual control elements, which are arranged at corresponding branch pipeline elements to be processed and are used to control the opening and closing of the branch pipeline elements to be processed;

[0020] a second manual control element, which is disposed on the main line element to be processed and is used to manually control the opening and closing of the main line element to be processed;

[0021] A first pneumatic control element is provided at the main path element to be processed, and is used to control whether to open or close the main path element to be processed.

[0022] In some of the embodiments, the unit to be processed further includes:

[0023] An eighth manual control element is provided on the main circuit element to be processed and is located upstream and / or downstream of the first pneumatic control element, and is used to control the opening and closing of the main circuit element to be processed.

[0024] In some of the embodiments, the unit to be processed further includes:

[0025] A fifth pneumatic control element is provided on the main path element to be processed and is located upstream and / or downstream of the first pneumatic control element, and is used to control the opening and closing of the main path element to be processed.

[0026] In some of the embodiments, the nitrogen supply unit comprises:

[0027] A nitrogen supply pipeline element, the nitrogen supply pipeline element is connected to the unit to be treated and the nitrogen source respectively, and is used to transport nitrogen;

[0028] a one-way control element, the one-way control element being arranged on the nitrogen supply pipeline element and being used for controlling the one-way flow of the nitrogen supply pipeline element;

[0029] A second pneumatic control element, wherein the second pneumatic control element is disposed on the nitrogen supply pipeline element and is used to control the opening and closing of the nitrogen supply pipeline element.

[0030] In some of the embodiments, the nitrogen supply unit further comprises:

[0031] A pressure monitoring element is connected to the nitrogen supply pipeline element and is used to monitor the pressure of the nitrogen output by the nitrogen supply pipeline element.

[0032] In some of the embodiments, the gas delivery unit includes:

[0033] A first gas delivery pipeline element, which is connected to the nitrogen supply unit, the unit to be treated, and the recovery unit, respectively, and is used to deliver nitrogen;

[0034] A gas delivery element, which is arranged on the first gas delivery pipeline element and is used to deliver the residual special gas output by the unit to be treated to the recovery unit;

[0035] a third manual control element, the third manual control element being arranged on the first gas delivery pipeline element, being located upstream of the gas delivery element, and being used for controlling the opening and closing of the first gas delivery pipeline element;

[0036] A fourth manual control element, wherein the fourth manual control element is disposed on the first gas delivery pipeline element, located downstream of the gas delivery element, and is used to control the opening and closing of the first gas delivery pipeline element.

[0037] In some of the embodiments, the gas delivery unit further comprises:

[0038] A second gas delivery pipeline element, the second gas delivery pipeline element is connected to the unit to be processed and the recovery unit respectively, and is used to transport the residual special gas of the unit to be processed into the recovery unit;

[0039] A sixth pneumatic control element, wherein the sixth pneumatic control element is disposed on the second gas delivery pipeline element and is used to control the opening and closing of the second gas delivery pipeline element.

[0040] In some of the embodiments, the recovery unit comprises:

[0041] A main recycling path element, the main recycling path element is connected to the gas delivery unit and is used to deliver the residual special gas;

[0042] A plurality of recovery branch pipeline elements, wherein the plurality of recovery branch pipeline elements are respectively connected to the recovery main pipeline and are used to transport the residual special gas transported by the recovery main pipeline elements;

[0043] A plurality of recovery elements, each of which is connected to a corresponding recovery branch pipeline element and is used to recover the residual special gas transported by the recovery branch pipeline element;

[0044] A plurality of fifth manual control elements, each of which is disposed on a corresponding recovery branch pipeline element and is used to control the opening and closing of the recovery branch pipeline element;

[0045] a sixth manual control element, the sixth manual control element being arranged on the main recycling path element and being used for controlling the opening and closing of the main recycling path element;

[0046] a third pneumatic control element, the third pneumatic control element being arranged on the main recycling path element and being used for controlling the opening and closing of the main recycling path element;

[0047] A low temperature processing element is connected to the plurality of recovery elements respectively to provide a low temperature constant temperature environment.

[0048] In some embodiments, the exhaust gas treatment unit includes:

[0049] An exhaust gas delivery pipeline element, the exhaust gas delivery pipeline element is connected to the gas delivery unit and the recovery unit respectively, and is used to deliver the special gas that cannot be collected;

[0050] An exhaust gas treatment element, the exhaust gas treatment element is in communication with the exhaust gas delivery pipeline element and is used to treat the special gas delivered by the exhaust gas delivery pipeline element;

[0051] a seventh manual control element, the seventh manual control being arranged on the exhaust gas delivery pipeline element and being used for controlling the opening and closing of the exhaust gas delivery pipeline element;

[0052] A fourth pneumatic control element, wherein the fourth pneumatic control element is disposed on the exhaust gas delivery pipeline element and is used to control the opening and closing of the exhaust gas delivery pipeline element.

[0053] In some embodiments, the first detection unit includes:

[0054] A first detection pipeline element, the first detection pipeline element is connected to the unit to be processed and is used to transport the special gas of the unit to be processed;

[0055] A first detection element, wherein the first detection element is connected to the first detection pipeline element and is used to detect the concentration of the characteristic gas in the first detection pipeline element.

[0056] In some embodiments, the first detection unit further includes:

[0057] A ninth manual control element, wherein the ninth manual control element is disposed on the first detection pipeline element and is used to control the opening and closing of the first detection pipeline element.

[0058] In some embodiments, the second detection unit includes:

[0059] a second detection pipeline element, the first detection pipeline element is connected to the recovery unit and is used to transport the special gas of the recovery unit;

[0060] A second detection element, the second detection element is connected to the second detection pipeline element, and is used to detect the concentration of the characteristic gas in the second detection pipeline element.

[0061] In some embodiments, the second detection unit further includes:

[0062] A tenth manual control element, the tenth manual control element is arranged on the second detection pipeline element, and is used to control the opening and closing of the second detection pipeline element.

[0063] The second aspect of the utility model is to provide a special gas recovery system for a special gas cylinder, comprising:

[0064] The special gas recovery device as described in the first aspect.

[0065] The utility model adopts the above technical solution, and compared with the prior art, has the following technical effects:

[0066] The utility model discloses a special gas recovery device and system for special gas cylinders. A nitrogen supply unit is used to provide high-pressure nitrogen to replace the special gas in the special gas cylinder to be processed, and the special gas is transported to the recovery unit through the unit to be processed, and the special gas is refilled by low-temperature cold-falling to avoid waste and pollution to the environment. The remaining special gas in the special gas cylinder is completely sucked out by the gas delivery unit, and the recovery is clean and waste-free, thereby solving the problem of unclean treatment of the special gas cylinder. The special gas that cannot be recovered enters the tail gas treatment unit and is further treated to meet the requirements before being discharged, thereby avoiding pollution to the environment. The unit to be processed can recover the special gas of multiple special gas cylinders to be processed at the same time, thereby shortening the bottle replacement time and improving the treatment and recovery efficiency. The nitrogen supply unit is used for unidirectional gas flow to avoid the backflow of special gas to pollute the nitrogen source, thereby solving the problem that the special gas is easy to backflow into the nitrogen system. The first detection unit and the second detection unit can be used for simultaneous monitoring and detection, thereby further ensuring the quality of the recovered special gas and solving the problem of low quality of the special gas. The manual control and pneumatic control are used for joint control, and the double insurance guarantees the safety of transportation and solves the problem that the pipeline cannot be closed manually. BRIEF DESCRIPTION OF THE DRAWINGS

[0067] Figure 1 is a schematic diagram of a special gas recovery device according to an embodiment of the utility model;

[0068] Figure 2 is a schematic diagram of a unit to be processed according to an embodiment of the utility model (I);

[0069] Figure 3 is a schematic diagram of a nitrogen supply unit according to an embodiment of the utility model (I);

[0070] Figure 4 is a schematic diagram of a gas delivery unit according to an embodiment of the utility model (I);

[0071] Figure 5 is a schematic diagram of a recovery unit according to an embodiment of the utility model;

[0072] Figure 6 is a schematic diagram of an exhaust gas treatment unit according to an embodiment of the utility model;

[0073] Figure 7 is a schematic diagram of a first detection unit according to an embodiment of the utility model (I);

[0074] Figure 8 is a schematic diagram of a second detection unit according to an embodiment of the utility model (I);

[0075] Fig. 9 is a schematic diagram of a unit to be processed according to an embodiment of the utility model (II);

[0076] Fig.10 is a schematic diagram of a nitrogen supply unit according to an embodiment of the utility model (II);

[0077] Fig.11 is a schematic diagram of a gas delivery unit according to an embodiment of the utility model (II);

[0078] Fig.12 is a schematic diagram of a first detection unit according to an embodiment of the utility model (II);

[0079] Fig.13 2 is a schematic diagram of a second detection unit according to an embodiment of the present utility model.

[0080] The accompanying drawings are marked as follows:

[0081] 110, unit to be processed; 111, main pipeline component to be processed; 112, branch pipeline component to be processed; 113, first manual control component; 114, second manual control component; 115, first pneumatic control component; 116, eighth manual control component; 117, fifth pneumatic control component;

[0082] 120. Nitrogen supply unit; 121. Nitrogen supply pipeline element; 122. One-way control element; 123. Second pneumatic control element; 124. Pressure monitoring element;

[0083] 130, gas delivery unit; 131, first gas delivery pipeline component; 132, gas delivery component; 133, third manual control component; 134, fourth manual control component; 135, second gas delivery pipeline component; 136, sixth pneumatic control component;

[0084] 140, recovery unit; 141, recovery main line component; 142, recovery branch line component; 143, recovery component; 144, fifth manual control component; 145, sixth manual control component; 146, third pneumatic control component; 147, low temperature treatment component;

[0085] 150, exhaust gas treatment unit; 151, exhaust gas delivery pipeline component; 152, exhaust gas treatment component; 153, seventh manual control component; 154, fourth pneumatic control component;

[0086] 160, first detection unit; 161, first detection pipeline element; 162, first detection element; 163, ninth manual control element;

[0087] 170. Second detection unit; 171. Second detection pipeline element; 172. Second detection element; 173. Tenth manual control element. DETAILED DESCRIPTION

[0088] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application is described and illustrated below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application. Based on the embodiments provided in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0089] Obviously, the drawings described below are only some examples or embodiments of the present application. For ordinary technicians in this field, the present application can also be applied to other similar scenarios based on these drawings without creative work. In addition, it can also be understood that although the efforts made in this development process may be complicated and lengthy, for ordinary technicians in this field related to the content disclosed in this application, some changes in design, manufacturing or production based on the technical content disclosed in this application are just conventional technical means, and should not be understood as insufficient content disclosed in this application.

[0090] Reference to "embodiments" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those of ordinary skill in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0091] Unless otherwise defined, the technical terms or scientific terms involved in this application should be understood by people with ordinary skills in the technical field to which this application belongs. The words "one", "a", "a", "the" and the like involved in this application do not indicate a quantitative limitation, and may represent the singular or plural. The terms "include", "comprise", "have" and any of their variations involved in this application are intended to cover non-exclusive inclusions; for example, a process, method, system, product or device that includes a series of steps or units (units) is not limited to the listed steps or units, but may also include steps or units that are not listed, or may also include other steps or units inherent to these processes, methods, products or devices. The words "connect", "connected", "coupled" and the like involved in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The "multiple" involved in this application refers to two or more. "And / or" describes the association relationship of associated objects, indicating that there can be three relationships, for example, "A and / or B" can mean: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the objects before and after are in an "or" relationship. The terms "first", "second", "third", etc. involved in this application are only used to distinguish similar objects and do not represent a specific ordering of the objects.

[0092] Example 1

[0093] This embodiment relates to a special gas recovery device for a special gas cylinder.

[0094] An illustrative embodiment of the present utility model is as follows: Figure 1 As shown, a special gas recovery device for special gas cylinders includes a processing unit 110, a nitrogen supply unit 120, a gas delivery unit 130, a recovery unit 140, an exhaust gas treatment unit 150, a first detection unit 160 and a second detection unit 170. Among them, the unit to be processed 110 is respectively connected to several special gas cylinders to be processed; the nitrogen supply unit 120 is respectively connected to the unit to be processed 110 and the nitrogen source, and is used to supply nitrogen to the unit to be processed 110 to replace the residual special gas in several of the special gas cylinders to be processed; the gas delivery unit 130 is connected to the unit to be processed 110, and is used to output the residual special gas output by the unit to be processed 110 to the outside; the recovery unit 140 is connected to the gas delivery unit 130, and is used to recover the residual special gas under the action of the gas delivery unit 130; the tail gas treatment unit 150 is connected to the recovery unit 140, and is used to treat the special gas that cannot be recovered by the recovery unit 140; the first detection unit 160 is connected to the unit to be processed 110, and is used to detect several special gas cylinders to be processed; the second detection unit 170 is connected to the recovery unit 140, and is used to detect the recovery unit 140.

[0095] like Figure 2 As shown, the unit to be processed 110 includes a main pipeline component to be processed 111, a plurality of branch pipeline components to be processed 112, a plurality of first manual control components 113, a second manual control component 114 and a first pneumatic control component 115. The main pipeline component to be processed 111 is respectively connected to the nitrogen supply unit 120 and the gas delivery unit 130 for delivering nitrogen or special gas; a plurality of branch pipeline components to be processed 112 are respectively connected to the main pipeline component to be processed 111 and the corresponding special gas cylinder to be processed for delivering nitrogen or special gas; a plurality of first manual control components 113 are arranged on the corresponding branch pipeline components to be processed 112 for controlling the opening and closing of the branch pipeline components to be processed 112; a second manual control component 114 is arranged on the main pipeline component to be processed 111 for controlling the opening and closing of the main pipeline component to be processed 111; and a first pneumatic control component 115 is arranged on the main pipeline component to be processed 111 for controlling the opening and closing of the main pipeline component to be processed 111.

[0096] In some of the embodiments, the material of the main pipeline component 111 to be processed includes but is not limited to stainless steel.

[0097] In some of the embodiments, the main pipeline component 111 to be processed is a main pipeline to be processed.

[0098] A plurality of branch pipeline elements 112 to be processed are arranged at intervals along the axial direction of the main pipeline element 111 to be processed.

[0099] The connection between the branch pipe element 112 to be processed and the main pipe element 111 to be processed is fixed connection or detachable connection. The fixed connection includes but is not limited to integral molding and welding; the detachable connection includes but is not limited to threaded connection, socket connection, and flange connection.

[0100] The connection method between the branch pipeline element 112 to be processed and the special gas cylinder to be processed is a detachable connection; wherein the detachable connection method includes but is not limited to a threaded connection, a socket connection, and a flange connection.

[0101] The size of the branch pipe component 112 to be processed matches the size of the main pipe component 111 to be processed. Generally, the radial size (such as the outer diameter) of the branch pipe component 112 to be processed is not greater than the radial size (such as the outer diameter) of the main pipe component 111 to be processed.

[0102] In some of the embodiments, the material of the branch pipe element 112 to be processed includes but is not limited to stainless steel.

[0103] In some of the embodiments, the branch pipeline element 112 to be processed is a branch pipe to be processed.

[0104] The first manual control element 113 is connected to the branch pipeline element to be processed 112 in a detachable manner, wherein the detachable connection manner includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0105] The number of the first manual control elements 113 matches the number of the branch pipeline elements 112 to be processed. Generally, the number of the first manual control elements 113 is equal to the number of the branch pipeline elements 112 to be processed.

[0106] In some embodiments, the first manual control element 113 is a first manual valve, including but not limited to a diaphragm valve.

[0107] The second manual control element 114 is connected to the main pipeline element to be processed 111 in a detachable connection, wherein the detachable connection includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0108] In some embodiments, the second manual control element 114 is a second manual valve, including but not limited to a diaphragm valve.

[0109] The first pneumatic control element 115 is connected to the main pipeline element to be processed 111 in a detachable connection, wherein the detachable connection includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0110] In some embodiments, the first pneumatic control element 115 is a first pneumatic valve, including but not limited to a diaphragm valve.

[0111] like Figure 3 As shown, the nitrogen supply unit 120 includes a nitrogen supply pipeline element 121, a one-way control element 122 and a second pneumatic control element 123. The nitrogen supply pipeline element 121 is connected to the unit to be treated 110 and the nitrogen source respectively, and is used to transport nitrogen; the one-way control element 122 is arranged on the nitrogen supply pipeline element 121, and is used to control the one-way flow of the nitrogen supply pipeline element 121; the second pneumatic control element 123 is arranged on the nitrogen supply pipeline element 121, and is used to control the opening and closing of the nitrogen supply pipeline element 121.

[0112] Specifically, the nitrogen supply pipeline component 121 is connected to the main pipeline component 111 to be processed.

[0113] The nitrogen supply pipeline element 121 and the main pipeline element to be processed 111 are connected in a fixed connection or a detachable connection. The fixed connection method includes but is not limited to integral molding and welding; the detachable connection method includes but is not limited to threaded connection, socket connection, and flange connection.

[0114] The size of the nitrogen supply line component 121 matches the size of the main line component to be processed 111. Generally, the radial size (such as outer diameter) of the nitrogen supply line component 121 is not less than the radial size (such as outer diameter) of the main line component to be processed 111.

[0115] In some embodiments, the material of the nitrogen supply pipeline element 121 includes but is not limited to stainless steel.

[0116] In some of the embodiments, the nitrogen supply pipeline element 121 is a nitrogen supply pipe.

[0117] In some embodiments, the one-way control element 122 is a one-way valve.

[0118] In some embodiments, the second pneumatic control element 123 is a second pneumatic valve, including but not limited to a diaphragm valve.

[0119] like Figure 4 As shown, the gas delivery unit 130 includes a first gas delivery pipeline element 131, a gas delivery element 132, a third manual control element 133 and a fourth manual control element 134. The first gas delivery pipeline element 131 is respectively connected to the nitrogen supply unit 120, the unit to be treated 110 and the recovery unit 140; the gas delivery element 132 is arranged on the first gas delivery pipeline element 131, and is used to deliver the residual special gas output by the unit to be treated 110 to the recovery unit 140; the third manual control element 133 is arranged on the first gas delivery pipeline element 131, located upstream of the gas delivery element 132, and is used to control the opening and closing of the first gas delivery pipeline element 131; the fourth manual control element 134 is arranged on the first gas delivery pipeline element 131, located downstream of the gas delivery element 132, and is used to control the opening and closing of the first gas delivery pipeline element 131.

[0120] Specifically, the first gas delivery pipeline element 131 is in communication with the main pipeline element 111 to be processed and the nitrogen supply pipeline element 121 .

[0121] The first gas delivery pipeline element 131 is connected to the main pipeline element to be processed 111 by fixed connection or detachable connection. The fixed connection method includes but is not limited to integral molding and welding; the detachable connection method includes but is not limited to threaded connection and flange connection.

[0122] The first gas delivery pipeline element 131 and the nitrogen supply pipeline element 121 are connected in a fixed connection or a detachable connection. The fixed connection method includes but is not limited to integral molding and welding; the detachable connection method includes but is not limited to threaded connection, socket connection, and flange connection.

[0123] The size of the first gas delivery pipeline component 131 matches the size of the main pipeline component 111 to be processed. Generally, the radial size (eg, outer diameter) of the first gas delivery pipeline component 131 is not greater than the radial size (eg, outer diameter) of the main pipeline component 111 to be processed.

[0124] The size of the first gas delivery pipeline element 131 matches the size of the nitrogen supply pipeline element 121. Generally, the radial size (eg, outer diameter) of the first gas delivery pipeline element 131 is not greater than the radial size (eg, outer diameter) of the nitrogen supply pipeline element 121.

[0125] In some of the embodiments, the material of the first gas delivery pipeline element 131 includes but is not limited to stainless steel.

[0126] In some of the embodiments, the first gas delivery pipeline element 131 is a gas delivery pipe.

[0127] In some of the embodiments, the gas delivery element 132 is an air pump assembly.

[0128] The third manual control element 133 is connected to the first gas delivery pipeline element 131 in a detachable connection, wherein the detachable connection includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0129] In some embodiments, the third manual control element 133 is a third manual valve, including but not limited to a diaphragm valve.

[0130] The fourth manual control element 134 is connected to the first gas delivery pipeline element 131 in a detachable connection, wherein the detachable connection includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0131] In some embodiments, the fourth manual control element 134 is a fourth manual valve, including but not limited to a diaphragm valve.

[0132] like Figure 5As shown, the recovery unit 140 includes a recovery main line element 141 , a plurality of recovery branch line elements 142 , a plurality of recovery elements 143 , a plurality of fifth manual control elements 144 , a sixth manual control element 145 , a third pneumatic control element 146 and a cryogenic treatment element 147 . Among them, the recovery main line element is connected to the gas delivery unit 130 for delivering residual special gas; a number of recovery branch line elements are respectively connected to the recovery main line for delivering residual special gas delivered by the recovery main line element 141; a number of recovery elements 143 are respectively connected to the corresponding recovery branch line elements 142 for recovering the residual special gas delivered by the recovery branch line element 142; a number of fifth manual control elements 144 are respectively arranged on the corresponding recovery branch line elements 142 for controlling the opening and closing of the recovery branch line elements 142; a sixth manual control element 145 is arranged on the recovery main line element 141 for controlling the opening and closing of the recovery main line element 141; a third pneumatic control element 146 is arranged on the recovery main line element 141 for controlling the opening and closing of the recovery main line element 141; a low-temperature treatment element 147 is respectively connected to a number of recovery elements 143 for providing a low-temperature constant temperature environment.

[0133] Specifically, the recovery main pipeline element 141 is in communication with the first gas delivery pipeline element 131 .

[0134] The connection between the main recycling pipeline element 141 and the first gas delivery pipeline element 131 is fixed connection or detachable connection. The fixed connection includes but is not limited to integral molding and welding; the detachable connection includes but is not limited to threaded connection, socket connection, and flange connection.

[0135] The size of the main recycling line element 141 matches the size of the first gas delivery line element 131. Generally, the radial size (eg, outer diameter) of the main recycling line element 141 is not greater than the radial size (eg, outer diameter) of the first gas delivery line element 131.

[0136] In some of the embodiments, the material of the main recycling line element 141 includes but is not limited to stainless steel.

[0137] In some of the embodiments, the main recovery line element 141 is a main recovery pipe.

[0138] A plurality of recovery branch pipeline elements 142 are arranged at intervals along the axial direction of the recovery main pipeline element 141 .

[0139] The connection between the recovery branch line element 142 and the recovery main line element 141 is fixed connection or detachable connection. The fixed connection includes but is not limited to integral molding and welding; the detachable connection includes but is not limited to threaded connection, socket connection, and flange connection.

[0140] The size of the recovery branch pipeline element 142 matches the size of the recovery main pipeline element 141. Generally, the radial size (such as the outer diameter) of the recovery branch pipeline element 142 is not greater than the radial size (such as the outer diameter) of the recovery main pipeline element 141.

[0141] In some of the embodiments, the material of the recovery branch pipeline element 142 includes but is not limited to stainless steel.

[0142] In some of the embodiments, the recovery branch piping element 142 is a recovery branch pipe.

[0143] The connection between the recovery element 143 and the recovery branch pipe element 142 is a detachable connection, wherein the detachable connection includes but is not limited to a threaded connection and a flange connection.

[0144] The number of the recovery elements 143 matches the number of the recovery branch pipeline elements 142. Generally, the number of the recovery elements 143 is equal to the number of the recovery branch pipeline elements 142. That is, the recovery elements 143 correspond to the recovery branch pipeline elements 142 one by one.

[0145] In some of the embodiments, the recovery element 143 is a specialty gas cylinder.

[0146] The number of the fifth manual control elements 144 matches the number of the recovery branch line elements 142. Generally, the number of the fifth manual control elements 144 is equal to the number of the recovery branch line elements 142. That is, the fifth manual control elements 144 correspond to the recovery branch line elements 142 one by one.

[0147] The fifth manual control element 144 is connected to the recovery branch pipeline element 142 in a detachable manner, wherein the detachable connection manner includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0148] In some embodiments, the fifth manual control element 144 is a fifth manual valve, including but not limited to a diaphragm valve.

[0149] The sixth manual control element 145 is connected to the main recycling line element 141 in a detachable manner, wherein the detachable connection manner includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0150] In some embodiments, the sixth manual control element 145 is a sixth manual valve, including but not limited to a diaphragm valve.

[0151] The third pneumatic control element 146 is connected to the main recycling line element 141 in a detachable manner, wherein the detachable connection manner includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0152] In some embodiments, the third pneumatic control element 146 is a third pneumatic valve, including but not limited to a diaphragm valve.

[0153] The low temperature treatment element 147 and the recovery element 143 are connected in a detachable manner, wherein the detachable connection manner includes but is not limited to a snap connection and a plug connection.

[0154] The cryogenic treatment element 147 matches the size of the recovery element 143. Generally, the radial size (eg, outer diameter, length, width) of the cryogenic treatment element 147 is greater than the radial size (eg, outer diameter, length, width) of the recovery element 143.

[0155] In some embodiments, the low temperature processing element 147 is a low temperature reaction bath or a low temperature thermostatic bath.

[0156] like Figure 6 As shown, the tail gas treatment unit 150 includes a tail gas delivery pipeline element 151, a tail gas treatment element 152, a seventh manual control element 153 and a fourth pneumatic control element 154. The tail gas delivery pipeline element 151 is respectively connected to the gas delivery unit 130 and the recovery unit 140, and is used to deliver the special gas that cannot be collected; the tail gas treatment element 152 is connected to the tail gas delivery pipeline element 151, and is used to process the special gas delivered by the tail gas delivery pipeline element 151; the seventh manual control is set on the tail gas delivery pipeline element 151, and is used to control the opening and closing of the tail gas delivery pipeline element 151; the fourth pneumatic control element 154 is set on the tail gas delivery pipeline element 151, and is used to control the opening and closing of the tail gas delivery pipeline element 151.

[0157] Specifically, the exhaust gas delivery pipeline element 151 is communicated with the first gas delivery pipeline element 131 and the recovery main pipeline element 141 respectively.

[0158] The connection between the tail gas delivery pipeline element 151 and the first gas delivery pipeline element 131 is fixed connection or detachable connection. The fixed connection includes but is not limited to integral molding and welding; the detachable connection includes but is not limited to threaded connection, socket connection, and flange connection.

[0159] The connection method between the exhaust gas delivery pipeline element 151 and the recovery main pipeline element 141 is fixed connection or detachable connection. The fixed connection method includes but is not limited to integral molding and welding; the detachable connection method includes but is not limited to threaded connection, socket connection, and flange connection.

[0160] The size of the exhaust gas delivery pipeline element 151 matches the size of the first gas delivery pipeline element 131. Generally, the radial size (eg, outer diameter) of the exhaust gas delivery pipeline element 151 is not greater than the radial size (eg, outer diameter) of the first gas delivery pipeline element 131.

[0161] The size of the exhaust gas delivery pipeline element 151 matches the size of the main recovery pipeline element 141. Generally, the radial size (such as the outer diameter) of the exhaust gas delivery pipeline element 151 is not greater than the radial size (such as the outer diameter) of the main recovery pipeline element 141.

[0162] In some of the embodiments, the material of the exhaust gas delivery pipeline element 151 includes but is not limited to stainless steel.

[0163] In some of the embodiments, the exhaust gas delivery pipeline element 151 is an exhaust gas delivery pipe.

[0164] In some of the embodiments, the tail gas treatment element 152 is a special gas treatment device.

[0165] The seventh manual control element 153 is connected to the exhaust gas delivery pipeline element 151 in a detachable connection, wherein the detachable connection includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0166] In some embodiments, the seventh manual control element 153 is a seventh manual valve, including but not limited to a diaphragm valve.

[0167] The fourth pneumatic control element 154 is connected to the exhaust gas delivery pipeline element 151 in a detachable connection, wherein the detachable connection includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0168] In some embodiments, the fourth pneumatic control element 154 is a fourth pneumatic valve, including but not limited to a diaphragm valve.

[0169] like Figure 7 As shown, the first detection unit 160 includes a first detection pipeline element 161 and a first detection element 162. The first detection pipeline element 161 is connected to the unit to be processed 110, and is used to transport the special gas of the unit to be processed 110; the first detection element 162 is connected to the first detection pipeline element 161, and is used to detect the concentration of the special gas of the first detection pipeline element 161.

[0170] Specifically, the first detection pipeline element 161 is in communication with the main pipeline element 111 to be processed, and is used to transport the characteristic gas of the main pipeline element 111 to be processed.

[0171] The first detection pipeline element 161 is connected to the main pipeline element 111 to be processed by fixed connection or detachable connection. The fixed connection includes but is not limited to integral molding and welding; the detachable connection includes but is not limited to threaded connection, socket connection, and flange connection.

[0172] The size of the first detection line element 161 matches the size of the main line element 111 to be processed. Generally, the radial size (eg, outer diameter) of the first detection line element 161 is not greater than the radial size (eg, outer diameter) of the main line element 111 to be processed.

[0173] In some of the embodiments, the material of the first detection pipeline element 161 includes but is not limited to stainless steel.

[0174] In some of the embodiments, the first detection pipeline element 161 is a first detection pipe.

[0175] In some of the embodiments, the first detection element 162 is a first concentration detector.

[0176] like Figure 8 As shown, the second detection unit 170 includes a second detection pipeline element 171 and a second detection element 172. The first detection pipeline element 161 is connected to the recovery unit 140 for conveying the special gas of the recovery unit 140; the second detection element 172 is connected to the second detection pipeline element 171 for detecting the concentration of the special gas of the second detection pipeline element 171.

[0177] Specifically, the second detection pipeline element 171 is in communication with the recovery main pipeline element 141 , and is used to transport the special gas of the recovery main pipeline element 141 .

[0178] The second detection pipeline element 171 and the recovery main pipeline element 141 are connected in a fixed connection or a detachable connection. The fixed connection method includes but is not limited to integral molding and welding; the detachable connection method includes but is not limited to threaded connection, socket connection, and flange connection.

[0179] The size of the second detection line element 171 matches the size of the recovery line element 141. Generally, the radial size (eg, outer diameter) of the second detection line element 171 is not greater than the radial size (eg, outer diameter) of the recovery line element 141.

[0180] In some of the embodiments, the material of the second detection pipeline element 171 includes but is not limited to stainless steel.

[0181] In some of the embodiments, the second detection pipeline element 171 is a second detection pipe.

[0182] In some of the embodiments, the second detection element 172 is a second concentration detector.

[0183] The method of using the utility model is as follows:

[0184] (I) Installation and connectivity

[0185] When recovering special gases, first connect the branch pipeline element 112 to be processed to the special gas cylinder to be processed, open the first manual control element 113, the second manual control element 114, the first pneumatic control element 115, the one-way control element 122, the second pneumatic control element 123, the third manual control element 133, the fourth manual control element 134, the fifth manual control element 144, the third pneumatic control element 146, the low-temperature treatment element 147, the first detection element 162 and the second detection element 172.

[0186] (II) Nitrogen replacement of special gases and recovery of special gases

[0187] The nitrogen source delivers high-pressure nitrogen to the nitrogen supply pipeline element 121, which replaces the residual special gas in the special gas cylinder to be processed through the main pipeline element 111 to be processed and the branch pipeline element 112 to be processed. The residual special gas enters the recovery main pipeline element 141 and the recovery branch pipeline element 142 through the main pipeline element 111 to be processed, the branch pipeline element 112 to be processed and the first gas delivery pipeline element 131, and finally enters the recovery element 143 surrounded by the low-temperature treatment element 147 to be recovered; when the high-pressure nitrogen is replaced to a certain extent, the marginal effect will decrease. At this time, the gas delivery element 132 is opened, and the strong suction of the gas delivery element 132 is used to replace the remaining special gas in the special gas cylinder to be processed; during the recovery process, whether the gas in the special gas cylinder is to be recovered can be controlled by a combination of manual control or automatic control.

[0188] (III) Tail gas treatment

[0189] Open the seventh manual control element 153 and the fourth pneumatic control element 154, and the special gas that cannot be recovered by the recovery element 143 enters the exhaust gas treatment element 152 through the exhaust gas delivery pipeline element 151 for treatment, and is discharged after meeting the requirements.

[0190] The technical effects of the utility model are as follows:

[0191] The nitrogen supply unit is used to provide high-pressure nitrogen to replace the special gas in the special gas cylinder to be processed, and the special gas is transported to the recovery unit through the unit to be processed, and the special gas is refilled by low-temperature cold-falling to avoid waste and pollution to the environment, and the remaining special gas in the special gas cylinder is completely sucked out by the gas delivery unit, and the recovery is clean and waste-free, thus solving the problem of unclean treatment of special gas cylinders; the special gas that cannot be recovered enters the tail gas treatment unit and is further processed to meet the requirements before being discharged, thus not polluting the environment; the unit to be processed is capable of recovering special gas from multiple special gas cylinders to be processed at the same time, thus shortening the bottle replacement time and improving the treatment and recovery efficiency; the nitrogen supply unit performs unidirectional gas flow to avoid backflow of special gas to pollute the nitrogen source, thus solving the problem of easy backflow of special gas into the nitrogen system; the first detection unit and the second detection unit can be used for simultaneous monitoring and detection, thus further ensuring the quality of the recovered special gas and solving the problem of low quality of the special gas; manual control and pneumatic control are used in combination to solve the problem of manual control failure when the pneumatic control fails.

[0192] Example 2

[0193] This embodiment is a variation of Embodiment 1.

[0194] like Fig. 9 As shown, the processing unit 110 further includes an eighth manual control element 116. The eighth manual control element 116 is disposed on the processing main circuit element 111 and is located upstream and / or downstream of the first pneumatic control element 115, and is used to control the opening and closing of the processing main circuit element 111.

[0195] The eighth manual control element 116 is connected to the main pipeline element to be processed 111 in a detachable connection, wherein the detachable connection includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0196] In some embodiments, the eighth manual control element 116 is an eighth manual valve, including but not limited to a diaphragm valve.

[0197] Furthermore, the processing unit 110 further includes a fifth pneumatic control element 117. The fifth pneumatic control element 117 is disposed on the processing main circuit element 111 and is located upstream and / or downstream of the first pneumatic control element 115, and is used to control the opening and closing of the processing main circuit element 111.

[0198] The fifth pneumatic control element 117 is connected to the main pipeline element to be processed 111 in a detachable connection, wherein the detachable connection includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0199] In some embodiments, the fifth pneumatic control element 117 is a fifth pneumatic valve, including but not limited to a diaphragm valve.

[0200] The method of using this embodiment is as follows:

[0201] The eighth manual control element 116 is normally open, and the fifth pneumatic control element 117 is opened or closed according to the usage;

[0202] When the fifth pneumatic control element 117 is turned on, the special gas is delivered to the first gas delivery pipeline element 131;

[0203] When the fifth pneumatic control element 117 is closed, the special gas is not delivered to the first gas delivery pipeline element 131;

[0204] In the case that the fifth pneumatic control element 117 fails and cannot be closed, the eighth manual control element 116 can be used to close the main circuit element 111 to be processed, thereby avoiding the inability to control whether the special gas is output.

[0205] The technical effects of this embodiment are as follows:

[0206] By setting the eighth manual control element and the fifth pneumatic control element, it is possible to manually control or automatically determine whether the special gas of the main pipeline element to be processed is output, thereby providing double insurance and making the special gas output safer.

[0207] Example 3

[0208] This embodiment is a variation of Embodiments 1 and 2.

[0209] like Fig.10 As shown, the nitrogen supply unit 120 further includes a pressure monitoring element 124. The pressure monitoring element 124 is in communication with the nitrogen supply pipeline element 121, and is used to monitor the pressure of the nitrogen output by the nitrogen supply pipeline element 121.

[0210] In some of the embodiments, the pressure monitoring element 124 is a pressure monitor.

[0211] The technical effects of this embodiment are as follows:

[0212] By setting up a pressure monitoring element, the pressure of the nitrogen supply pipeline element can be monitored in real time. When the nitrogen pressure of the nitrogen supply pipeline element is too low or too high, it can be adjusted in time to ensure the efficiency of dilution and replacement of the special gas in the special gas cylinder to be processed.

[0213] Example 4

[0214] This embodiment is a variation of Embodiments 1 to 3.

[0215] like Fig.11As shown, the gas delivery unit 130 further includes a second gas delivery pipeline element 135 and a sixth pneumatic control element 136. The second gas delivery pipeline element 135 is respectively connected to the processing unit 110 and the recovery unit 140, and is used to deliver the residual special gas of the processing unit 110 into the recovery unit 140; the sixth pneumatic control element 136 is arranged on the second gas delivery pipeline element 135, and is used to control the opening and closing of the second gas delivery pipeline element 135.

[0216] Specifically, the second gas delivery pipeline element 135 is respectively connected to the main pipeline element to be processed 111 and the recovery main pipeline element 141 , and is used to deliver the special gas of the main pipeline element to be processed 111 to the recovery main pipeline element 141 .

[0217] The second gas delivery pipeline element 135 is connected to the main pipeline element to be processed 111 by fixed connection or detachable connection. The fixed connection includes but is not limited to integral molding and welding; the detachable connection includes but is not limited to threaded connection, socket connection, and flange connection.

[0218] The second gas delivery pipeline element 135 and the recovery main pipeline element 141 are connected in a fixed connection or a detachable connection. The fixed connection method includes but is not limited to integral molding and welding; the detachable connection method includes but is not limited to threaded connection, socket connection, and flange connection.

[0219] The size of the second gas delivery pipeline element 135 matches the size of the main pipeline element 111 to be processed. Generally, the radial size (eg, outer diameter) of the second gas delivery pipeline element 135 is not greater than the radial size (eg, outer diameter) of the main pipeline element 111 to be processed.

[0220] The size of the second gas delivery pipeline element 135 matches the size of the recovery main pipeline element 141. Generally, the radial size (eg, outer diameter) of the second gas delivery pipeline element 135 is not less than the radial size (eg, outer diameter) of the recovery main pipeline element 141.

[0221] In some embodiments, the material of the second gas delivery pipeline element 135 includes but is not limited to stainless steel.

[0222] In some of the embodiments, the second gas delivery pipeline component 135 is a second gas delivery pipe.

[0223] The method of using this embodiment is as follows:

[0224] When recovering special gases, the sixth pneumatic control element 136 is opened, and the residual special gases directly enter the recovery main pipeline element 141 through the second gas delivery pipeline element 135 and are recovered. When using the gas delivery element 132 to recover special gases, the sixth pneumatic control element 136 is closed.

[0225] The technical effects of this embodiment are as follows:

[0226] By setting up a second gas delivery pipeline element, the efficiency of transporting the residual special gas from the unit to be treated to the recovery unit can be improved and energy can be saved. The sixth pneumatic control element can be used to control whether the second gas delivery pipeline element transports the special gas, thereby improving safety and controllability.

[0227] Example 5

[0228] This embodiment is a variation of Embodiments 1 to 4.

[0229] like Fig.12 As shown, the first detection unit 160 further includes a ninth manual control element 163. The ninth manual control element 163 is disposed on the first detection pipeline element 161, and is used to control the opening and closing of the first detection pipeline element 161.

[0230] The ninth manual control element 163 is connected to the first detection pipeline element 161 in a detachable connection, wherein the detachable connection includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0231] In some of the embodiments, the ninth manual control element 163 is a ninth manual valve, including but not limited to a diaphragm valve.

[0232] like Fig.13 As shown, the second detection unit 170 further includes a tenth manual control element 173. The tenth manual control element 173 is disposed on the second detection pipeline element 171, and is used to control the opening and closing of the second detection pipeline element 171.

[0233] The tenth manual control element 173 is connected to the second detection pipeline element 171 in a detachable connection, wherein the detachable connection includes but is not limited to a threaded connection, a flange connection, and a clamp connection.

[0234] In some embodiments, the tenth manual control element 173 is a tenth manual valve, including but not limited to a diaphragm valve.

[0235] The method of using this embodiment is as follows:

[0236] 1) When it is necessary to detect the special gas of the first detection pipeline element 161, the ninth manual control element 163 is opened for detection; when it is not necessary to detect, the ninth manual control element 163 is closed.

[0237] 2) When it is necessary to detect the special gas of the second detection pipeline element 171, open the tenth manual control element 173 for detection; when it is not necessary to detect, close the tenth manual control element 173.

[0238] The technical effects of this embodiment are as follows:

[0239] By setting the ninth manual control element and the tenth manual control element, it is possible to manually control whether to detect the special gas of the processing unit and the recovery unit, thereby increasing flexibility and controllability.

[0240] Example 6

[0241] The present embodiment relates to a special gas recovery system for special gas cylinders.

[0242] A special gas recovery system for special gas cylinders, comprising a special gas recovery device as described in any one of Examples 1 to 5.

[0243] Furthermore, the special gas recovery system also includes a cleaning device. The cleaning device is connected to a plurality of special gas cylinders to be processed in a detachable manner. The detachable connection manner includes but is not limited to threaded connection, plug-in connection, and clamping connection.

[0244] In some embodiments, the cleaning device includes a cleaning agent supply unit, a cleaning agent delivery unit and a driving unit. The cleaning agent supply unit is used to supply cleaning agent; the cleaning agent delivery unit is connected to the cleaning agent supply unit and is used to deliver the cleaning agent to a number of special gas cylinders to be processed; and the driving unit is connected to the cleaning agent supply unit and is used to drive the cleaning agent to be input into the number of special gas cylinders to be processed.

[0245] The method of using the utility model is as follows:

[0246] After the residual special gas in the special gas cylinder to be processed is recovered by the special gas recovery device, the cleaning agent of the cleaning agent supply unit is driven by the driving unit to enter the special gas cylinder to be processed through the cleaning agent delivery unit, and then the special gas cylinder to be processed is cleaned.

[0247] The above description is only a preferred embodiment of the present invention, and does not limit the implementation mode and protection scope of the present invention. For those skilled in the art, it should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.

Claims

1. A special gas recovery device for a special gas cylinder, characterized in that: include: Units to be processed, each of which is connected to a plurality of special gas cylinders to be processed; A nitrogen supply unit, the nitrogen supply unit being connected to the unit to be processed and a nitrogen source respectively, and being used to supply nitrogen to the unit to be processed to replace residual special gas in a number of the special gas cylinders to be processed; A gas delivery unit, the gas delivery unit being in communication with the unit to be processed and being used for delivering the residual special gas outputted by the unit to be processed to the outside; A recovery unit, the recovery unit being in communication with the gas delivery unit and being used for recovering residual special gas under the action of the gas delivery unit; A tail gas treatment unit, the tail gas treatment unit is connected to the recovery unit and is used to treat the special gas that cannot be recovered by the recovery unit; A first detection unit, the first detection unit is connected to the unit to be processed and is used to detect a number of special gas cylinders to be processed; A second detection unit, the second detection unit is connected to the recovery unit and is used to detect the recovery unit.

2. The special gas recovery device according to claim 1, characterized in that: The unit to be processed comprises: The main circuit components to be processed are respectively connected with the nitrogen supply unit and the gas delivery unit for delivering nitrogen or special gas; A plurality of branch pipeline components to be processed, wherein the plurality of branch pipeline components to be processed are respectively connected with the main pipeline components to be processed and corresponding special gas cylinders to be processed, and are used for conveying nitrogen or special gas; A plurality of first manual control elements, which are arranged at corresponding branch pipeline elements to be processed and are used to control the opening and closing of the branch pipeline elements to be processed; a second manual control element, which is disposed on the main path element to be processed and is used to control the opening and closing of the main path element to be processed; a first pneumatic control element, which is disposed on the main path element to be processed and is used to control the opening and closing of the main path element to be processed; and / or The nitrogen supply unit comprises: A nitrogen supply pipeline element, the nitrogen supply pipeline element is connected to the unit to be treated and the nitrogen source respectively, and is used to transport nitrogen; a one-way control element, the one-way control element being arranged on the nitrogen supply pipeline element and being used for controlling the one-way flow of the nitrogen supply pipeline element; A second pneumatic control element, wherein the second pneumatic control element is disposed on the nitrogen supply pipeline element and is used to control the opening and closing of the nitrogen supply pipeline element.

3. The special gas recovery device according to claim 2, characterized in that: The unit to be processed also includes: an eighth manual control element, which is disposed on the main circuit element to be processed and is located upstream and / or downstream of the first pneumatic control element, and is used to control the opening and closing of the main circuit element to be processed; and / or The unit to be processed also includes: a fifth pneumatic control element, which is disposed on the main path element to be processed and is located upstream and / or downstream of the first pneumatic control element, and is used to control the opening and closing of the main path element to be processed; and / or The nitrogen supply unit also includes: A pressure monitoring element is connected to the nitrogen supply pipeline element and is used to monitor the pressure of the nitrogen output by the nitrogen supply pipeline element.

4. The special gas recovery device according to claim 1, characterized in that: The gas delivery unit comprises: a first gas delivery pipeline element, wherein the first gas delivery pipeline element is respectively connected to the nitrogen supply unit, the unit to be treated, and the recovery unit; A gas delivery element, which is arranged on the first gas delivery pipeline element and is used to deliver the residual special gas output by the unit to be treated to the recovery unit; a third manual control element, the third manual control element being arranged on the first gas delivery pipeline element, being located upstream of the gas delivery element, and being used for controlling the opening and closing of the first gas delivery pipeline element; A fourth manual control element, wherein the fourth manual control element is disposed on the first gas delivery pipeline element, located downstream of the gas delivery element, and is used to control the opening and closing of the first gas delivery pipeline element.

5. The special gas recovery device according to claim 4, characterized in that: The gas delivery unit also includes: A second gas delivery pipeline element, the second gas delivery pipeline element is connected to the unit to be processed and the recovery unit respectively, and is used to transport the residual special gas of the unit to be processed into the recovery unit; A sixth pneumatic control element, wherein the sixth pneumatic control element is disposed on the second gas delivery pipeline element and is used to control the opening and closing of the second gas delivery pipeline element.

6. The special gas recovery device according to claim 1, characterized in that: The recovery unit comprises: A recovery main line element, the recovery main line element is connected to the gas delivery unit and is used to deliver the residual special gas; A plurality of recovery branch pipeline elements, wherein the plurality of recovery branch pipeline elements are respectively connected to the recovery main pipeline and are used to transport the residual special gas transported by the recovery main pipeline elements; A plurality of recovery elements, each of which is connected to a corresponding recovery branch pipeline element and is used to recover the residual special gas transported by the recovery branch pipeline element; A plurality of fifth manual control elements, each of which is disposed on a corresponding recovery branch pipeline element and is used to control the opening and closing of the recovery branch pipeline element; a sixth manual control element, the sixth manual control element being arranged on the main recycling path element and being used for controlling the opening and closing of the main recycling path element; a third pneumatic control element, the third pneumatic control element being disposed on the main recycling path element and being used to control the opening and closing of the main recycling path element; A low temperature treatment element is connected to the plurality of recovery elements respectively to provide a low temperature constant temperature environment.

7. The special gas recovery device according to claim 1, characterized in that: The tail gas treatment unit comprises: An exhaust gas delivery pipeline element, the exhaust gas delivery pipeline element is connected to the gas delivery unit and the recovery unit respectively, and is used to deliver the special gas that cannot be collected; An exhaust gas treatment element, the exhaust gas treatment element is in communication with the exhaust gas delivery pipeline element and is used to treat the special gas delivered by the exhaust gas delivery pipeline element; a seventh manual control element, the seventh manual control being arranged on the exhaust gas delivery pipeline element and being used for controlling the opening and closing of the exhaust gas delivery pipeline element; A fourth pneumatic control element, wherein the fourth pneumatic control element is disposed on the exhaust gas delivery pipeline element and is used to control the opening and closing of the exhaust gas delivery pipeline element.

8. The special gas recovery device according to claim 1, characterized in that: The first detection unit comprises: A first detection pipeline element, the first detection pipeline element is connected to the unit to be processed and is used to transport the special gas of the unit to be processed; a first detection element, the first detection element being in communication with the first detection pipeline element and being used for detecting the concentration of the characteristic gas in the first detection pipeline element; and / or The second detection unit comprises: a second detection pipeline element, the first detection pipeline element is connected to the recovery unit and is used to transport the special gas of the recovery unit; A second detection element, the second detection element is connected to the second detection pipeline element, and is used to detect the concentration of the characteristic gas in the second detection pipeline element.

9. The special gas recovery device according to claim 8, characterized in that: The first detection unit also includes: a ninth manual control element, the ninth manual control element being disposed on the first detection circuit element and being used to control the opening and closing of the first detection circuit element; and / or The second detection unit also includes: A tenth manual control element, the tenth manual control element is arranged on the second detection pipeline element, and is used to control the opening and closing of the second detection pipeline element.

10. A special gas recovery system for special gas cylinders, characterized in that: include: A special gas recovery device as described in any one of claims 1 to 9.

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