Target tube water tightness detection device

Abstract

The utility model belongs to the technical field of target tube water tightness detection, and particularly relates to a target tube water tightness detection device, which comprises supporting seats arranged in pairs, a liquid flow channel is arranged in each supporting seat, one end of each liquid flow channel penetrates through the bottom of the corresponding supporting seat, a supporting shaft is arranged on the side wall of each supporting seat, a cavity is arranged in each supporting shaft, and each liquid flow channel penetrates through the bottom of the corresponding supporting seat. A plurality of through holes are formed in the end part of the cavity and are communicated with the liquid flow channel through the cavity; the connecting flange is rotationally arranged on the supporting shaft, a connecting assembly is arranged on the circumferential side wall of the connecting flange so that the connecting flange can be connected with the target tube in a sealed mode, a sealing assembly is installed in an inner hole of the connecting flange, and the sealing assembly is attached to the side wall of the supporting shaft so that a rotating gap between the connecting flange and the supporting shaft can be sealed; by simulating the working scene of the target tube, whether the cooling medium leaks or not in the lasting use process of the target tube is detected, and the yield of the target tube is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of target tube water tightness detection, and in particular relates to a target tube water tightness detection device. Background Art

[0002] Magnetron sputtering is a type of physical vapor deposition. The general sputtering method can be used to prepare multiple materials such as metals, semiconductors, insulators, etc., and has the advantages of simple equipment, easy control, large coating area and strong adhesion.

[0003] In the existing magnetron sputtering, a target tube is placed outside a magnetic rod, and particles are emitted by the magnetic rod to bombard the target tube. The generated particles are deposited in a designated area. When the target tube is in use, a cooling medium needs to be filled inside the target tube. However, due to the long length of the target tube and the difficulty of processing, the end of the target tube may be out of round and cannot be well sealed with the seal.

[0004] Therefore, how to prevent the target tube from failing to seal well during use is a technical problem that urgently needs to be solved in the art. Utility Model Content

[0005] The utility model aims to provide a target tube water tightness detection device.

[0006] In order to solve the above technical problems, the utility model provides a target tube water tightness detection device, comprising: a support seat arranged in pairs, wherein a liquid flow channel is arranged therein, one end of the liquid flow channel passes through the bottom of the support seat, and a support shaft is arranged on the side wall of the support seat, a cavity is arranged inside the support shaft, and a plurality of through-holes are arranged at the end thereof, and the through-holes are connected with the liquid flow channel through the cavity; a connecting flange, which is rotatably arranged on the support shaft, and a connecting assembly is arranged on its circumferential side wall so that the connecting flange is sealed and connected to the target tube, and a sealing assembly is installed on the inner hole of the connecting flange, and the sealing assembly fits the side wall of the support shaft so that the rotation gap between the connecting flange and the support shaft is sealed.

[0007] Preferably, a connecting sleeve is provided on the end face of the connecting flange, and the connecting sleeve is connected to the supporting shaft via a bearing so that the connecting flange is rotatably arranged on the supporting shaft.

[0008] Preferably, a through cavity is provided in the support seat on one side, the through cavity passes through the bottom of the support seat, and its side wall is provided with an opening suitable for plugging in a connecting sleeve, a sealing component is provided on the side wall of the opening to seal the rotational gap between the opening and the connecting sleeve, and the support shaft extends into the through cavity and is fixed to the side wall of the through cavity.

[0009] Preferably, the sealing assembly includes a plurality of sealing rings, the cross-section of the sealing rings is "C"-shaped; the inner hole of the connecting flange and the side wall of the opening are respectively provided with mounting grooves, and the sealing rings are clamped in the mounting grooves.

[0010] Preferably, the support shaft is connected to the side wall of the through cavity by bolts, and the liquid flow channel penetrates the side wall of the through cavity and communicates with the cavity.

[0011] Preferably, a passive wheel is provided at the end of the extending end of the connecting sleeve, and the passive wheel is connected to the supporting shaft via a bearing.

[0012] Preferably, it further includes a detection table with a plurality of detection ports, a detection seat is arranged on the top of the detection port, the support seat is pressed on the top of the detection seat and is connected to the detection table by bolts, a driving motor is arranged at the bottom of the detection table, a driving wheel is arranged on the output shaft of the driving motor, and the driving wheel is connected to the driven wheel by a synchronous belt.

[0013] Preferably, a detection bracket is provided at the bottom of the detection table.

[0014] The beneficial effects of the utility model are:

[0015] The target tube is connected to the connecting flange through a connecting assembly, a seal is installed at the rotation gap between the connecting flange and the support shaft, and a through hole is opened on the support shaft to fill the target tube with cooling medium to simulate the working scene of the target tube. This is to detect whether the target tube will leak cooling medium during long-term use and improve the yield of the target tube.

[0016] Other features and advantages of the present invention will be set forth in the following description, and in part will become apparent from the description, or may be understood by implementing the present invention.

[0017] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a stereogram of a preferred embodiment of the detection device of the utility model;

[0020] Figure 2 It is a cross-sectional view of a preferred embodiment of the detection device of the utility model;

[0021] Figure 3 yes Figure 2 The enlarged view of point A in the middle;

[0022] Figure 4 It is a cross-sectional view of a preferred embodiment of the support base of the utility model.

[0023] In the figure:

[0024] 1. Support seat;

[0025] 11. Liquid flow channel;

[0026] 12. support shaft; 121. cavity; 122. through opening;

[0027] 13. through cavity; 131. opening; 132. mounting groove;

[0028] 2. Connecting flange;

[0029] 21. Connect components;

[0030] 22. Sealing assembly; 221. Sealing ring;

[0031] 23. Connecting sleeve; 231. Passive wheel;

[0032] 3. Test the table surface;

[0033] 31. Detection port; 32. Detection seat; 33. Driving motor; 34. Driving wheel;

[0034] 4. Check the bracket. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0036] like Figures 1 to 4As shown, at least one embodiment provides a target tube watertightness detection device, comprising: a pair of support seats 1, wherein a liquid flow channel 11 is arranged therein, one end of the liquid flow channel 11 passes through the bottom of the support seat 1, and a support shaft 12 is arranged on the side wall of the support seat 1, and a cavity 121 is arranged inside the support shaft 12, and a plurality of through holes 122 are arranged at the end thereof, and the through holes 122 are connected with the liquid flow channel 11 through the cavity 121; a connecting flange 2, which is rotatably arranged on the support shaft 12, and a connecting component 21 is arranged on the circumferential side wall thereof, so that the connecting flange 2 is sealed and connected to the target tube, and a sealing component 22 is installed in the inner hole of the connecting flange 2, and the sealing component 2 2 is fitted to the side wall of the support shaft 12 so that the rotation gap between the connecting flange 2 and the support shaft 12 is sealed; in short, the target tube is connected to the connecting flange 2 through the connecting component 21, a seal is installed at the rotation gap between the connecting flange 2 and the support shaft 12, and a through hole is opened on the support shaft 12 to fill the target tube with a cooling medium to simulate the working scene of the target tube, so as to detect whether the target tube will leak the cooling medium (including the rotation gap between the connecting flange 2 and the support shaft 12) during long-term use, thereby improving the yield of the target tube; wherein, a medium source is connected to the through end of the liquid flow channel 11 to circulate the cooling medium in the target tube, and the connecting component 21 can be a clamp.

[0037] In some embodiments, a connecting sleeve 23 is provided on the end face of the connecting flange 2, and the connecting sleeve 23 is connected to the support shaft 12 through a bearing so that the connecting flange 2 is rotatably set on the support shaft 12; in short, the connecting sleeve 23 is connected to the connecting flange 2 through bolts, and then the connecting sleeve 23 is installed on the support shaft 12 through a bearing, thereby realizing the rotation of the target tube.

[0038] In some embodiments, a through cavity 13 is opened in the support seat 1 on one side, and the through cavity 13 passes through the bottom of the support seat 1, and its side wall is opened with an opening 131 suitable for plugging in the connecting sleeve 23, and the side wall of the opening 131 is provided with a sealing assembly 22 to seal the rotational gap between the opening 131 and the connecting sleeve 23, and the support shaft 12 extends into the through cavity 13, and is fixed to the side wall of the through cavity 13; in short, by installing the support shaft 12 inside the support seat 1, the driving member (i.e., the passive wheel 231) can be installed inside the support seat 1, thereby improving the integration of the support seat 1.

[0039] In some embodiments, the sealing assembly 22 includes a plurality of sealing rings 221, and the cross-section of the sealing ring 221 is "C"-shaped; the inner hole of the connecting flange 2 and the side wall of the opening 131 are respectively provided with mounting grooves 132, and the sealing ring 221 is clamped in the mounting grooves 132; in short, a plurality of sealing rings 221 with a "C"-shaped cross-section are stacked and arranged, which can improve the sealing effect and truly simulate the working scene of the target tube.

[0040] In some embodiments, the support shaft 12 is connected to the side wall of the through cavity 13 by bolts, and the liquid flow channel 11 passes through the side wall of the through cavity 13 and is connected to the cavity 121; in short, the liquid flow channel 11 is connected to the cavity 121 to complete the circulation of the cooling medium.

[0041] In some embodiments, a passive wheel 231 is provided at the end of the extending end of the connecting sleeve 23, and the passive wheel 231 is connected to the support shaft 12 through a bearing; in short, the passive wheel 231 is arranged in the through-hole 13, and a driving device can be arranged below the through-hole 13 and connected to the passive wheel 231 to realize the rotation of the target tube.

[0042] In some embodiments, a detection table 3 is also included, on which a plurality of detection ports 31 are opened, a detection seat 32 is arranged on the top of the detection port 31, the support seat 1 is pressed on the top of the detection seat 32, and is connected to the detection table 3 by bolts, and a driving motor 33 is arranged at the bottom of the detection table 3, a driving wheel 34 is arranged on the output shaft of the driving motor 33, and the driving wheel 34 is connected to the passive wheel 231 by a synchronous belt; in short, the output shaft of the driving motor 33 is provided with a driving wheel 34, and the driving wheel 34 is connected to the passive wheel 231 by a synchronous belt, so as to complete the automatic rotation of the target tube.

[0043] In some embodiments, a detection bracket 4 is disposed at the bottom of the detection table 3; in short, the detection bracket 4 can complete the installation of the detection table 3, and the structure is simple and reliable.

[0044] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0046] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A target tube water tightness detection device, characterized in that: include: The support seats are arranged in pairs, wherein a liquid flow channel is arranged therein, one end of the liquid flow channel penetrates the bottom of the support seat, a support shaft is arranged on the side wall of the support seat, a cavity is arranged inside the support shaft, and a plurality of through holes are arranged at the end thereof, and the through holes are connected with the liquid flow channel through the cavity; a connecting flange, which is rotatably arranged on the supporting shaft, and a connecting assembly is arranged on the circumferential side wall thereof, so that the connecting flange is sealedly connected to the target tube, and A sealing component is installed in the inner hole of the connecting flange, and the sealing component fits the side wall of the supporting shaft to seal the rotation gap between the connecting flange and the supporting shaft.

2. The target tube water tightness detection device according to claim 1, characterized in that: The end surface of the connecting flange is provided with a connecting sleeve, and the connecting sleeve is connected to the supporting shaft through a bearing, so that the connecting flange is rotatably arranged on the supporting shaft.

3. The target tube water tightness detection device according to claim 2, characterized in that: A through cavity is provided in the support seat on one side, the through cavity passes through the bottom of the support seat, and an opening suitable for plugging in the connecting sleeve is provided on the side wall thereof, and a sealing component is provided on the side wall of the opening to seal the rotation gap between the opening and the connecting sleeve, and The support shaft extends into the through cavity and is fixed to the side wall of the through cavity.

4. The target tube water tightness detection device according to claim 3, characterized in that: The sealing assembly includes a plurality of sealing rings, and the cross section of the sealing rings is "C" shaped; The inner hole of the connecting flange and the side wall of the opening are respectively provided with mounting grooves, and the sealing ring is clamped in the mounting grooves.

5. The target tube water tightness detection device according to claim 4, characterized in that: The support shaft is connected to the side wall of the through cavity by bolts, and the liquid flow channel penetrates the side wall of the through cavity and communicates with the cavity.

6. The target tube water tightness detection device according to claim 5, characterized in that: A passive wheel is arranged at the end of the extending end of the connecting sleeve, and the passive wheel is connected to the supporting shaft through a bearing.

7. The target tube water tightness detection device according to claim 6, characterized in that: It also includes a detection table, which is provided with a plurality of detection ports, a detection seat is provided at the top of the detection port, the support seat is pressed on the top of the detection seat and connected to the detection table by bolts, a driving motor is provided at the bottom of the detection table, and a driving wheel is provided on the output shaft of the driving motor, and The driving wheel and the driven wheel are connected via a synchronous belt.

8. The target tube water tightness detection device according to claim 7, characterized in that: A detection bracket is arranged at the bottom of the detection table.

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