Chip polarity calibrating device
By designing a chip polarity verification device, using a full-range fine-tuning mechanism, a rotating stage mechanism and a CCD chip polarity verification mechanism, the chip polarity verification mechanism is realized, the problem of inefficient detection in the prior art is solved, and the detection efficiency and accuracy are improved.
Patent Information
- Application Number
- CN202421068039.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-15
- Publication Date
- 2025-04-15
- Estimated Expiration
- 2034-05-15
AI Technical Summary
Existing chip detection technology is difficult to automate chip polarity detection, resulting in insufficiency of detection.
A chip polarity verification device is designed, including a comprehensive fine-tuning mechanism, a rotating stage mechanism and a CCD chip polarity verification mechanism. By rotating the stage mechanism up and down and rotating, the CCD chip polarity verification mechanism is aligned to the photographing chip to realize the automation of chip polarity detection.
It realizes the automation of chip polarity detection, improves detection efficiency, and makes chip polarity detection more efficient and accurate.
Smart Images

Figure CN222762063U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the field of chip detection devices, and in particular relates to a chip polarity verification device. Background Art
[0002] Current chips, such as Figure 1 As shown, it generally includes a chip top surface 11, two chip end surfaces 12, two chip side surfaces 13, a chip bottom surface 14, a chip center positioning hole 15 penetrating the chip top surface 11 and the chip bottom surface 14, and a plurality of chip PIN pins 16 located on the two chip side surfaces 13. The chip top surface 11 is engraved with a chip specification model 111, a chip pin number 112, and a chip pin number mark 113. The chip is an integrated component, and the passage of two or more chip PIN pins 16 has a predetermined electrical performance. The chip polarity test is to use a CCD camera to shoot the appearance of the front of the chip and determine the integrity of the chip pin number corresponding to the chip PIN pin 16 and the chip pin number mark 113 on the chip top surface 11. Utility Model Content
[0003] The utility model aims to provide a chip polarity detection device for realizing automatic detection of chip polarity.
[0004] The utility model is realized by the following technical solutions:
[0005] A chip polarity testing device comprises an omnidirectional fine-tuning mechanism, a rotating stage mechanism and a CCD chip polarity testing mechanism;
[0006] The rotating stage mechanism and the CCD chip polarity verification mechanism are fixed on the omnidirectional fine-tuning mechanism. The rotating stage mechanism is used to load and unload chips and rotate chips for detection. The CCD chip polarity verification mechanism can align and photograph the chip on the rotating stage mechanism to verify the polarity of the chip. The omnidirectional fine-tuning mechanism is fixed on an external machine platform and is used to fine-tune the XYZ positions of the rotating stage mechanism and the CCD chip polarity verification mechanism so that the rotating stage mechanism aligns with the external loading mechanism for loading chips and aligns with the external unloading mechanism for unloading chips.
[0007] Wherein, the omnidirectional fine-tuning mechanism comprises a mounting plate, a lower adjusting plate, an upper adjusting plate, a Z-adjusting camshaft, a Y-adjusting assembly, an X-adjusting assembly and a load bracket, wherein the mounting plate is fixed on an external machine platform, the lower adjusting plate is arranged on the mounting plate through the Z-adjusting camshaft and the Y-adjusting assembly, the upper adjusting plate is arranged on the lower adjusting plate through the X-adjusting assembly, and the load bracket is fixed on the upper adjusting plate; a lower adjusting plate mounting plate slot is provided under the lower adjusting plate, and the mounting plate is located in the mounting plate slot of the adjusting plate;
[0008] The Z-direction adjustment camshaft can fine-tune the lower adjustment plate to move the upper adjustment plate along the Z-axis direction; the Y-direction adjustment component can fine-tune the lower adjustment plate to move the upper adjustment plate along the Y-axis direction; the X-direction adjustment component can fine-tune the upper adjustment plate to move along the X-axis direction.
[0009] Wherein, the Z-direction adjustable camshaft comprises a camshaft driving portion, a camshaft head supporting portion, a camshaft eccentric portion and a camshaft tail supporting portion; the tail of the camshaft tail supporting portion is provided with a camshaft tail end inner tooth;
[0010] The two ends of the lower adjustment plate mounting plate groove are respectively provided with a through lower adjustment plate camshaft head through hole and a lower adjustment plate camshaft tail through hole; the mounting plate is provided with a mounting plate pressing part;
[0011] The Z-direction adjustment camshaft is inserted into the camshaft head through hole of the lower adjustment plate and passes through the mounting plate slot of the lower adjustment plate, so that the camshaft tail support portion is inserted into the camshaft tail through hole of the lower adjustment plate, and the camshaft driving portion is exposed outside the lower adjustment plate;
[0012] The camshaft head support part is sleeved in the camshaft head through hole of the lower adjustment plate, the camshaft eccentric part is located between the mounting plate pressing part and the external machine, the camshaft tail support part is sleeved in the camshaft tail through hole of the lower adjustment plate, and the internal thread screw-in bolt at the camshaft tail end is used to axially limit the Z-direction adjustment camshaft to prevent axial movement;
[0013] When the camshaft driving part is manually rotated to rotate the Z-adjustable camshaft, the camshaft eccentric part rotates around the camshaft head supporting part and the camshaft tail supporting part. The camshaft eccentric part can rotate against the external machine table, so that the camshaft head supporting part and the camshaft tail supporting part can carry the lower adjusting plate together with the upper adjusting plate to be raised and lowered in the Z direction for fine adjustment.
[0014] Wherein, the Y-direction adjustment assembly includes a Y-direction adjustment screw and a Y-direction spring;
[0015] The Y-axis adjusting screw is provided with a Y-axis adjusting screw driving part, and the lower adjusting plate is provided with a through lower adjusting plate Y-axis adjusting screw countersunk hole on the lower adjusting plate mounting plate groove;
[0016] The mounting plate is provided with a Y-axis adjusting screw thread hole of the mounting plate, and the Y-axis adjusting screw passes through the Y-axis adjusting screw countersunk hole of the lower adjusting plate and is screwed into the Y-axis adjusting screw thread hole of the mounting plate;
[0017] The Y-direction spring is located in the groove of the mounting plate of the lower adjusting plate, is sleeved outside the stud of the Y-direction adjusting screw, and is compressed between the mounting plate and the lower adjusting plate; when the Y-direction adjusting screw driving unit is manually rotated to screw in the Y-direction adjusting screw, the Y-direction adjusting screw pushes forward in the Y direction to fine-tune the lower adjusting plate together with the upper adjusting plate, and further compresses the Y-direction spring; when the Y-direction adjusting screw driving unit is manually rotated to screw out the Y-direction adjusting screw, the Y-direction spring releases the compression and pushes backward in the Y direction to fine-tune the lower adjusting plate together with the upper adjusting plate.
[0018] Wherein, the X-direction adjustment assembly includes an X-direction slider, two X-direction adjustment first slide posts, an X-direction adjustment second slide post and an X-direction adjustment screw;
[0019] The X-direction adjusting screw is provided with an X-direction adjusting screw driving part and an X-direction adjusting screw clamping part;
[0020] The upper adjustment plate is provided with two upper adjustment plate X-direction adjustment first slide column sliding grooves and an upper adjustment plate X-direction adjustment second slide column sliding groove; the two upper adjustment plate X-direction adjustment first slide column sliding grooves of the upper adjustment plate are buckled on the two X-direction adjustment first slide columns; the upper adjustment plate X-direction adjustment second slide column sliding groove is buckled on the X-direction adjustment second slide column;
[0021] The lower adjustment plate is provided with a lower adjustment plate inclined slide groove, a lower adjustment plate X-direction adjustment second slide column hole and a lower adjustment plate X-direction adjustment screw slot; the X-direction slider is arranged in the lower adjustment plate inclined slide groove; the X-direction adjustment second slide column is fixed in the lower adjustment plate X-direction adjustment second slide column hole of the lower adjustment plate;
[0022] The X-direction slider is provided with two X-direction slider X-direction adjustment first slide post holes and X-direction slider X-direction adjustment screw thread holes; the two X-direction adjustment first slide posts are respectively fixed in the two X-direction slider X-direction adjustment first slide post holes of the X-direction slider; the X-direction adjustment screw is screwed into the X-direction adjustment screw thread holes of the X-direction slider of the X-direction slider; the X-direction adjustment screw clamping position of the X-direction adjustment screw is set in the X-direction adjustment screw clamping groove of the lower adjustment plate;
[0023] Manually rotating the X-axis adjusting screw driving part to screw in and out the X-axis adjusting screw can drive the X-axis slider to drive the upper adjusting plate to move along the X-axis fine adjustment. After the fine adjustment is in place, the upper adjusting plate is locked to the lower adjusting plate by bolts.
[0024] The rotating stage mechanism includes an inclined carrier, a rotating stage driving member, a rotating stage support plate, a rotating stage pad, a rotating stage support plate guide column, a rotating stage support plate guide sleeve, a rotating stage support plate spring, a rotating stage and a plurality of chip carriers;
[0025] The inclined carrier is fixed on the load bracket of the omnidirectional fine-tuning mechanism, the rotating stage driving component is fixed under the inclined carrier, the rotating stage pallet guide column is fixed on the inclined carrier, the rotating stage pallet guide sleeve is sleeved outside the rotating stage pallet guide column, the rotating stage pallet is fixed on the rotating stage pallet guide sleeve, the rotating stage pallet spring is arranged between the rotating stage pallet and the inclined carrier; the rotating stage pad is fixed to the middle part of the rotating stage pallet; the rotating stage is fixed to the output end of the rotating stage driving component; a plurality of the chip carriers are distributed on the rotating stage.
[0026] Wherein, a plurality of the chip carriers are fixed on the rotating stage in equal parts of a circle, and the rotating stage driving component can drive the rotating stage to rotate at the same equal parts of a circle each time.
[0027] Wherein, the rotating stage support plate is provided with a plurality of rotating stage support plate suction nozzles and a corresponding plurality of rotating stage support plate negative pressure joints respectively connected with the plurality of rotating stage support plate suction nozzles;
[0028] The rotating stage pad is provided with a plurality of rotating stage pad nozzle through holes, and each rotating stage pad nozzle through hole passes through a rotating stage support plate nozzle;
[0029] The rotating platform is provided with a plurality of rotating platform air holes, and the plurality of rotating platform air holes correspond one-to-one to the plurality of rotating platform support plate suction nozzles respectively;
[0030] A chip carrier air hole is provided on the chip carrier, and the chip carrier air hole is aligned with an air hole of the rotating stage below it;
[0031] With the support of the elastic force of the rotating stage pallet spring, the multiple chip carrier air holes of the multiple chip carriers can closely cooperate with the multiple rotating stage pallet suction nozzles through the multiple rotating stage air holes of the rotating stage. By introducing or releasing negative pressure air into or out of a certain rotating stage pallet negative pressure joint, the chip placed on the chip carrier that closely cooperates with it can be adsorbed or released.
[0032] Wherein, the CCD chip polarity verification mechanism includes a CCD chip polarity verification horizontal bracket, a CCD chip polarity verification oblique bracket, a CCD chip polarity verification oblique bracket adjustment lock, a CCD chip polarity verification CCD bracket, a CCD, a CCD light source bracket and a CCD light source;
[0033] The CCD chip polarity verification transverse bracket is fixed on the load bracket of the omnidirectional fine-tuning mechanism, and the CCD chip polarity verification oblique bracket is fixed on the CCD chip polarity verification transverse bracket through the CCD chip polarity verification oblique bracket adjustment lock; the CCD chip polarity verification CCD bracket and the CCD light source bracket are respectively fixed on the two ends of the chip polarity verification oblique bracket, the CCD light source is fixed on the CCD light source bracket facing forward, and the CCD is fixed on the CCD chip polarity verification CCD bracket facing the CCD light source;
[0034] The CCD and the CCD light source are aligned with the chip on the rotating stage mechanism.
[0035] The beneficial effects of the utility model are:
[0036] The utility model has a rotating stage mechanism and a CCD chip polarity verification mechanism fixed on an omnidirectional fine-tuning mechanism; the rotating stage mechanism is used for loading and unloading chips and rotating chips for detection; the CCD chip polarity verification mechanism can align and shoot the chip on the rotating stage mechanism for verifying the polarity of the chip; the omnidirectional fine-tuning mechanism is fixed on an external machine platform and is used for fine-tuning the XYZ positions of the rotating stage mechanism and the CCD chip polarity verification mechanism so that the rotating stage mechanism is aligned with an external loading mechanism for loading chips and an external unloading mechanism for unloading chips. The utility model can load and unload chips and verify the polarity of chips at the same time, and the chip polarity verification efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS
[0037] Figure 1 This is the top view of the chip appearance;
[0038] Figure 2 This is a structural diagram of a chip polarity detection device according to an embodiment;
[0039] Figure 3 It is a top view of the structure of the all-round fine-tuning mechanism of the embodiment;
[0040] Figure 4 This is a bottom view of the structure of the all-round fine-tuning mechanism of the embodiment;
[0041] Figure 5 It is an exploded view of the all-round fine-tuning mechanism of the embodiment and a structural view of the mounting plate, the lower adjustment plate, and the Z-direction adjustment camshaft;
[0042] Figure 6 It is a structural diagram of the Y-direction adjustment component of the embodiment;
[0043] Figure 7 This is a structural diagram of the X-direction adjustment component of the embodiment;
[0044] Figure 8 is a structural diagram of a rotating stage mechanism in an embodiment;
[0045] Fig. 9 It is a structural exploded diagram of the rotating stage mechanism of the embodiment;
[0046] Fig.10 It is a structural diagram of the CCD chip polarity detection mechanism of the embodiment.
[0047] Description of reference numerals:
[0048] 10. Chip; 11. Chip top surface; 111. Engraved text pattern; 112. Chip pin number; 113. Number 1 chip pin mark; 12. Chip end surface; 13. Chip side surface; 14. Chip bottom surface; 15. Chip center positioning hole; 16. Chip PIN foot;
[0049] 400, all-round fine-tuning mechanism; 410, mounting plate; 411, mounting plate pressing shaft portion; 412, mounting plate Y-axis adjusting screw thread hole;
[0050] 420, lower adjustment plate; 421, lower adjustment plate mounting plate slot; 422, lower adjustment plate camshaft head through hole; 423, lower adjustment plate camshaft tail through hole; 424, lower adjustment plate Y-axis adjustment screw countersunk hole; 425, lower adjustment plate inclined slide groove; 426, lower adjustment plate X-axis adjustment second slide column hole; 427, lower adjustment plate X-axis adjustment screw slot;
[0051] 430, upper adjustment plate; 431, upper adjustment plate adjusts the first slide column slot in the X direction; 432, upper adjustment plate adjusts the second slide column slot in the X direction;
[0052] 440, Z-direction adjustment camshaft; 441, camshaft driving part; 442, camshaft head supporting part; 443, camshaft eccentric part; 444, camshaft tail supporting part; 4441, camshaft tail end inner teeth;
[0053] 450, Y-direction adjustment assembly; 451, Y-direction adjustment screw; 4511, Y-direction adjustment screw driving unit; 452, Y-direction spring;
[0054] 460, X-direction adjustment assembly; 461, X-direction slider; 4611, X-direction slider X-direction adjustment first slide post hole; 4612, X-direction slider X-direction adjustment screw thread hole; 462, X-direction adjustment first slide post; 463, X-direction adjustment second slide post; 464, X-direction adjustment screw; 4641, X-direction adjustment screw drive unit; 4642, X-direction adjustment screw clamping position; 470, load bracket;
[0055] 620, rotating stage mechanism; 621, inclined carrier; 622, rotating stage driving member; 623, rotating stage support plate; 6232, rotating stage support plate suction nozzle; 6233, rotating stage support plate negative pressure joint; 624, rotating stage pad; 6242, rotating stage pad plate suction nozzle through hole; 625, rotating stage support plate guide column; 626, rotating stage support plate guide sleeve; 627, rotating stage support plate spring; 628, rotating stage; 6282, rotating stage air hole; 629, chip carrier; 6292, chip carrier air hole;
[0056] 630. CCD chip polarity verification mechanism; 631. CCD chip polarity verification horizontal bracket; 632. CCD chip polarity verification oblique bracket; 633. CCD chip polarity verification oblique bracket adjustment lock; 634. CCD chip polarity verification CCD bracket; 635. CCD; 636. CCD light source bracket; 637. CCD light source. DETAILED DESCRIPTION
[0057] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.
[0058] In the description of the present utility model, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inside", "outside", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model; the terms "first", "second", and "third" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance; in addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be a communication between the two components. For ordinary technicians in this field, the specific meanings of the terms in the present utility model can be understood according to specific circumstances.
[0059] like Figure 2 As shown, a chip polarity testing device of this embodiment includes an omnidirectional fine-tuning mechanism 400, a rotating stage mechanism 620 and a CCD chip polarity testing mechanism 630;
[0060] The rotating stage mechanism 620 and the CCD chip polarity verification mechanism 630 are fixed on the omnidirectional fine-tuning mechanism 400. The rotating stage mechanism 620 is used to load and unload the chip 10 and rotate the chip 10 for detection. The CCD chip polarity verification mechanism 630 can align and shoot the chip 10 on the rotating stage mechanism 620 to verify the polarity of the chip 10. The omnidirectional fine-tuning mechanism 400 is fixed on an external machine to fine-tune the XYZ positions of the rotating stage mechanism 620 and the CCD chip polarity verification mechanism 630 so that the rotating stage mechanism aligns with the external loading mechanism to load the chip 10 and aligns with the external unloading mechanism to load the chip 10.
[0061] like Figure 3 and Figure 4 As shown, the omnidirectional fine-tuning mechanism 400 includes a mounting plate 410, a lower adjusting plate 420, an upper adjusting plate 430, a Z-adjusting cam shaft 440, a Y-adjusting assembly 450, an X-adjusting assembly 460 and a load bracket 470. The mounting plate 410 is fixed to an external machine platform, the lower adjusting plate 420 is arranged on the mounting plate 410 through the Z-adjusting cam shaft 440 and the Y-adjusting assembly 450, and the upper adjusting plate 430 is arranged on the lower adjusting plate 420 through the X-adjusting assembly 460. The load bracket 470 is fixed on the upper adjusting plate 430; a lower adjusting plate mounting plate groove 421 is provided under the lower adjusting plate 420, and the mounting plate 410 is located in the adjusting plate mounting plate groove 421; the Z-direction adjusting cam shaft 440 can fine-tune the lower adjusting plate 420 to move with the upper adjusting plate 430 along the Z-axis direction, the Y-direction adjusting assembly 450 can fine-tune the lower adjusting plate 420 to move with the upper adjusting plate 430 along the Y-axis direction, and the X-direction adjusting assembly 460 can fine-tune the upper adjusting plate 430 to move along the X-axis direction.
[0062] like Figure 5As shown, the Z-direction adjustment camshaft 440 includes a camshaft driving portion 441, a camshaft head supporting portion 442, a camshaft eccentric portion 443 and a camshaft tail supporting portion 444, and the tail of the camshaft tail supporting portion 444 is provided with a camshaft tail end inner tooth 4441; the lower adjustment plate 420 is provided with a through lower adjustment plate camshaft head through hole 422 and a lower adjustment plate camshaft tail through hole 423 at both ends of the lower adjustment plate mounting plate groove 421; the mounting plate 410 is provided with a mounting plate pressing portion 411, and the Z-direction adjustment camshaft 440 is inserted into the lower adjustment plate camshaft head through hole 422 through the lower adjustment plate The adjusting plate mounting plate groove 421 allows the camshaft tail support part 444 to be inserted into the camshaft tail through hole 423 of the lower adjusting plate, and the camshaft driving part 441 can be exposed outside the lower adjusting plate 420. The camshaft head support part 442 can be sleeved in the camshaft head through hole 422 of the lower adjusting plate. The camshaft eccentric part 443 is located between the mounting plate pressing part 411 and the external machine. The camshaft tail support part 444 can be sleeved in the camshaft tail through hole 423 of the lower adjusting plate. The inner tooth 4441 at the tail end of the camshaft can be screwed into a bolt for axially limiting the Z-axis adjustment camshaft 440 to prevent axial movement.
[0063] When the camshaft driving part 441 is manually rotated to rotate the Z-axis adjustment camshaft, the camshaft eccentric part 443 rotates around the camshaft head support part 442 and the camshaft tail support part 444. The camshaft eccentric part 443 can rotate against the external machine, so that the camshaft head support part 442 and the camshaft tail support part 444 can carry the lower adjustment plate 420 together with the upper adjustment plate 430 to be raised and lowered and fine-tuned in the Z direction.
[0064] like Figure 6 As shown, the Y-axis adjustment component 450 includes a Y-axis adjustment screw 451 and a Y-axis spring 452. The Y-axis adjustment screw 451 is provided with a Y-axis adjustment screw driving part 4511. The lower adjusting plate 420 is provided with a through lower adjusting plate Y-axis adjustment screw counterbore 424 next to the lower adjusting plate camshaft head through hole 422 of the lower adjusting plate mounting plate slot 421.
[0065] The mounting plate 410 is provided with a mounting plate Y-axis adjustment screw thread hole 412, and the Y-axis adjustment screw 451 passes through the Y-axis adjustment screw counterbore 424 of the lower adjustment plate and is screwed into the mounting plate Y-axis adjustment screw thread hole 412, and the Y-axis spring 452 is located in the lower adjustment plate mounting plate groove 421, is sleeved outside the stud of the Y-axis adjustment screw 451, and is compressed between the mounting plate 410 and the lower adjustment plate 430, and when the Y-axis adjustment screw driving part 4511 is manually rotated to screw in the Y-axis adjustment screw 451, the Y-axis adjustment screw 451 pushes the fine-tuning lower adjustment plate 420 together with the upper adjustment plate 430 forward in the Y direction and further compresses the Y-axis spring 452, and when the Y-axis adjustment screw driving part 4511 is manually rotated to screw out the Y-axis adjustment screw 451, the Y-axis spring 452 releases the compression and pushes the fine-tuning lower adjustment plate 420 together with the upper adjustment plate 430 backward in the Y direction.
[0066] like Figure 7 As shown, the X-direction adjustment component includes an X-direction slider 461, two X-direction adjustment first sliders 462, an X-direction adjustment second slider 463 and an X-direction adjustment screw 464, the X-direction adjustment screw 464 is provided with an X-direction adjustment screw driving part 4641 and an X-direction adjustment screw clamping position 4642, the upper adjusting plate 430 is provided with two upper adjusting plate X-direction adjustment first slider slots 431 and an upper adjusting plate X-direction adjustment second slider slot 432, the lower adjusting plate 420 is provided with a lower adjusting plate oblique slot 425, a lower adjusting plate X-direction adjustment second slider hole 426 and a lower adjusting plate X-direction adjustment screw clamping slot 427, the X-direction slider 461 is provided with two X-direction slider X-direction adjustment first slider holes 4611 and an X-direction slider X-direction adjustment screw tooth hole 4612.
[0067] The two X-direction adjustment first slide posts 462 are respectively fixed in the two X-direction adjustment first slide post holes 4611 of the X-direction slider 461, the X-direction slider 461 is arranged in the lower adjustment plate inclined slide groove 425, the X-direction adjustment screw rod clamping position 4642 of the X-direction adjustment screw rod 464 is arranged in the X-direction adjustment screw rod clamping groove 427 of the lower adjustment plate, the X-direction adjustment screw rod 464 is screwed into the X-direction adjustment screw rod tooth hole 4612 of the X-direction slider 461, the X-direction adjustment second slide post 463 is fixed in the X-direction adjustment second slide post hole 426 of the lower adjustment plate 420, the two upper adjustment plate X-direction adjustment first slide post grooves 431 of the upper adjustment plate 430 are buckled on the two X-direction adjustment first slide posts 462, and the upper adjustment plate X-direction adjustment second slide post groove 432 is buckled on the X-direction adjustment second slide post 463;
[0068] Manually rotating the X-axis adjusting screw driving part 4641 to screw in and out the X-axis adjusting screw 464 can drive the X-axis slider 461 to drive the upper adjusting plate 430 to move along the X-axis fine adjustment. After the fine adjustment is in place, the upper adjusting plate 430 can be locked on the lower adjusting plate 420 by bolts.
[0069] like Figure 8 and Fig. 9 As shown, the rotating stage mechanism 620 includes an inclined carrier 621, a rotating stage driving member 622, a rotating stage support plate 623, a rotating stage pad 624, a rotating stage support plate guide column 625, a rotating stage support plate guide sleeve 626, a rotating stage support plate spring 627, a rotating stage 628 and a plurality of chip carriers 629.
[0070] The inclined carrier 621 is fixed on the load bracket 470 of the omnidirectional fine-tuning mechanism 400, the rotating stage driving component 622 is fixed under the inclined carrier 621, the rotating stage pallet guide column 625 is fixed on the inclined carrier 621, the rotating stage pallet guide sleeve 626 is sleeved on the outside of the rotating stage pallet guide column 625, the rotating stage pallet 623 is fixed on the rotating stage pallet guide sleeve 626, the rotating stage pallet spring 627 is arranged between the rotating stage pallet 623 and the inclined carrier 621, the rotating stage pad 624 is fixed to the middle of the rotating stage pallet 623, and the rotating stage 628 is fixed to the output end of the rotating stage driving component 622.
[0071] As a preferred embodiment, a plurality of chip carriers 629 are fixed on the rotating stage 628 in equal parts of the circumference.
[0072] The rotating stage support plate 623 is provided with a corresponding plurality of rotating stage support plate suction nozzles 6232 and a corresponding plurality of rotating stage support plate negative pressure joints 6233 respectively connected with the plurality of rotating stage support plate suction nozzles 6232;
[0073] The rotating stage pad 624 is provided with a plurality of rotating stage pad nozzle through holes 6242, and each rotating stage pad nozzle through hole 6242 has a rotating stage support plate nozzle 6232 passing through it;
[0074] The rotating platform 628 is provided with a plurality of rotating platform air holes 6282, and the plurality of rotating platform air holes 6282 correspond to the plurality of rotating platform support plate suction nozzles 6232 one by one;
[0075] A chip carrier air hole 6292 is provided on the chip carrier 629, and the chip carrier air hole 6292 is aligned with the rotating stage air hole 6282 thereunder;
[0076] The rotating stage driving member 622 can drive the rotating stage 628 to rotate at an angle equally divided by the circumference; the rotating stage 628 is fixed to the output end of the rotating stage driving member 622, and the rotating stage driving member 622 can drive the rotating stage 628 to rotate at any set angle;
[0077] With the support of the elastic force of the rotating stage pallet spring 627, the rotating stage pallet 623 can enable the multiple chip carrier air holes 6292 of the multiple chip carriers 629 to closely cooperate with the multiple rotating stage pallet suction nozzles 6232 through the multiple rotating stage air holes 6282 of the rotating stage 628. By introducing or releasing negative pressure air into a certain rotating stage pallet negative pressure joint 6233, the chip 10 placed on the chip carrier 629 that closely cooperates with it can be adsorbed or released.
[0078] like Fig.10As shown, the CCD chip polarity verification mechanism 630 includes a CCD chip polarity verification horizontal bracket 631, a CCD chip polarity verification oblique bracket 632, a CCD chip polarity verification oblique bracket adjustment lock 633, a CCD chip polarity verification CCD bracket 634, a CCD 635, a CCD light source bracket 636 and a CCD light source 637.
[0079] The CCD chip polarity verification horizontal bracket 631 is fixed on the load bracket 470 of the omnidirectional fine-tuning mechanism 400, the CCD chip polarity verification oblique bracket 632 is fixed on the CCD chip polarity verification horizontal bracket 631 through the CCD chip polarity verification oblique bracket adjustment lock 633, the CCD chip polarity verification CCD bracket 634 and the CCD light source bracket 636 are respectively fixed on the rear end and front end of the chip polarity verification oblique bracket 632, the CCD light source 637 is fixed on the CCD light source bracket 636 facing forward, and the CCD 635 is fixed on the CCD chip polarity verification CCD bracket 634 facing the CCD light source 637.
[0080] CCD 635 and CCD light source 637 align the chip 10 on the chip carrier 629 on the rotating stage mechanism 620, the CCD light source 637 illuminates the chip 10, and the CCD 635 photographs the appearance of the chip top surface 11 and determines the integrity of the chip pin number 112 corresponding to the chip PIN pin 16 and the No. 1 chip pin mark 113 on the chip top surface 11.
[0081] The chip polarity verification device of the present embodiment has a rotating stage mechanism 620 and a CCD chip polarity verification mechanism 630 fixed on an omnidirectional fine-tuning mechanism 400. The rotating stage mechanism 620 has four chip carriers 629 evenly distributed on the circumference, which are used to load and unload the chip 10 and rotate the chip 10 for detection. The CCD chip polarity verification mechanism 630 can align and shoot the chip 10 on the rotating stage mechanism 620 to verify the polarity of the chip 10. The omnidirectional fine-tuning mechanism 400 is fixed on an external machine platform to fine-tune the XYZ positions of the rotating stage mechanism 620 and the CCD chip polarity verification mechanism 630 so that the rotating stage mechanism 620 is aligned with the external loading mechanism for loading the chip 10 and with the external unloading mechanism for unloading the chip 10. The chip polarity verification device can load and unload the chip 10 and verify the polarity of the chip 10 at the same time, and the chip polarity verification efficiency is high.
[0082] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A chip polarity testing device, characterized in that: It includes an all-round fine-tuning mechanism, a rotating stage mechanism and a CCD chip polarity verification mechanism; The rotating stage mechanism and the CCD chip polarity verification mechanism are fixed on the omnidirectional fine-tuning mechanism. The rotating stage mechanism is used to load and unload chips and rotate chips for detection. The CCD chip polarity verification mechanism can align and photograph the chip on the rotating stage mechanism to verify the polarity of the chip. The omnidirectional fine-tuning mechanism is fixed on an external machine platform and is used to fine-tune the XYZ positions of the rotating stage mechanism and the CCD chip polarity verification mechanism so that the rotating stage mechanism aligns with the external loading mechanism for loading chips and aligns with the external unloading mechanism for unloading chips.
2. The chip polarity detection device according to claim 1, characterized in that: The omnidirectional fine-tuning mechanism comprises a mounting plate, a lower adjusting plate, an upper adjusting plate, a Z-adjusting camshaft, a Y-adjusting assembly, an X-adjusting assembly and a load bracket, wherein the mounting plate is fixed to an external machine platform, the lower adjusting plate is arranged on the mounting plate through the Z-adjusting camshaft and the Y-adjusting assembly, the upper adjusting plate is arranged on the lower adjusting plate through the X-adjusting assembly, and the load bracket is fixed to the upper adjusting plate; a lower adjusting plate mounting plate slot is provided under the lower adjusting plate, and the mounting plate is located in the mounting plate slot of the adjusting plate; The Z-direction adjustment camshaft can fine-tune the lower adjustment plate to move the upper adjustment plate along the Z-axis direction; the Y-direction adjustment component can fine-tune the lower adjustment plate to move the upper adjustment plate along the Y-axis direction; the X-direction adjustment component can fine-tune the upper adjustment plate to move along the X-axis direction.
3. The chip polarity detection device according to claim 2, characterized in that: The Z-direction adjustable camshaft comprises a camshaft driving portion, a camshaft head supporting portion, a camshaft eccentric portion and a camshaft tail supporting portion; the tail of the camshaft tail supporting portion is provided with a camshaft tail end inner tooth; The two ends of the lower adjustment plate mounting plate groove are respectively provided with a through lower adjustment plate camshaft head through hole and a lower adjustment plate camshaft tail through hole; the mounting plate is provided with a mounting plate pressing part; The Z-direction adjustment camshaft is inserted into the camshaft head through hole of the lower adjustment plate and passes through the mounting plate slot of the lower adjustment plate, so that the camshaft tail support portion is inserted into the camshaft tail through hole of the lower adjustment plate, and the camshaft driving portion is exposed outside the lower adjustment plate; The camshaft head support part is sleeved in the camshaft head through hole of the lower adjustment plate, the camshaft eccentric part is located between the mounting plate pressing part and the external machine, the camshaft tail support part is sleeved in the camshaft tail through hole of the lower adjustment plate, and the internal thread screw-in bolt at the camshaft tail end is used to axially limit the Z-direction adjustment camshaft to prevent axial movement; When the camshaft driving part is manually rotated to rotate the Z-adjustable camshaft, the camshaft eccentric part rotates around the camshaft head supporting part and the camshaft tail supporting part. The camshaft eccentric part can rotate against the external machine table, so that the camshaft head supporting part and the camshaft tail supporting part can carry the lower adjusting plate together with the upper adjusting plate to be raised and lowered in the Z direction for fine adjustment.
4. The chip polarity detection device according to claim 3, characterized in that: The Y-direction adjustment assembly comprises a Y-direction adjustment screw and a Y-direction spring; The Y-axis adjusting screw is provided with a Y-axis adjusting screw driving part, and the lower adjusting plate is provided with a through lower adjusting plate Y-axis adjusting screw countersunk hole on the lower adjusting plate mounting plate groove; The mounting plate is provided with a Y-axis adjusting screw thread hole of the mounting plate, and the Y-axis adjusting screw passes through the Y-axis adjusting screw countersunk hole of the lower adjusting plate and is screwed into the Y-axis adjusting screw thread hole of the mounting plate; The Y-direction spring is located in the groove of the mounting plate of the lower adjusting plate, is sleeved outside the stud of the Y-direction adjusting screw, and is compressed between the mounting plate and the lower adjusting plate; when the Y-direction adjusting screw driving unit is manually rotated to screw in the Y-direction adjusting screw, the Y-direction adjusting screw pushes forward in the Y direction to fine-tune the lower adjusting plate together with the upper adjusting plate, and further compresses the Y-direction spring; when the Y-direction adjusting screw driving unit is manually rotated to screw out the Y-direction adjusting screw, the Y-direction spring releases the compression and pushes backward in the Y direction to fine-tune the lower adjusting plate together with the upper adjusting plate.
5. The chip polarity testing device according to claim 2, characterized in that: The X-direction adjustment assembly includes an X-direction slider, two X-direction adjustment first slide posts, an X-direction adjustment second slide post and an X-direction adjustment screw; The X-direction adjusting screw is provided with an X-direction adjusting screw driving part and an X-direction adjusting screw clamping part; The upper adjustment plate is provided with two upper adjustment plate X-direction adjustment first slide column sliding grooves and an upper adjustment plate X-direction adjustment second slide column sliding groove; the two upper adjustment plate X-direction adjustment first slide column sliding grooves of the upper adjustment plate are buckled on the two X-direction adjustment first slide columns; the upper adjustment plate X-direction adjustment second slide column sliding groove is buckled on the X-direction adjustment second slide column; The lower adjustment plate is provided with a lower adjustment plate inclined slide groove, a lower adjustment plate X-direction adjustment second slide column hole and a lower adjustment plate X-direction adjustment screw slot; the X-direction slider is arranged in the lower adjustment plate inclined slide groove; the X-direction adjustment second slide column is fixed in the lower adjustment plate X-direction adjustment second slide column hole of the lower adjustment plate; The X-direction slider is provided with two X-direction slider X-direction adjustment first slide post holes and X-direction slider X-direction adjustment screw thread holes; the two X-direction adjustment first slide posts are respectively fixed in the two X-direction slider X-direction adjustment first slide post holes of the X-direction slider; the X-direction adjustment screw is screwed into the X-direction adjustment screw thread holes of the X-direction slider of the X-direction slider; the X-direction adjustment screw clamping position of the X-direction adjustment screw is set in the X-direction adjustment screw clamping groove of the lower adjustment plate; Manually rotating the X-axis adjusting screw driving part to screw in and out the X-axis adjusting screw can drive the X-axis slider to drive the upper adjusting plate to move along the X-axis fine adjustment. After the fine adjustment is in place, the upper adjusting plate is locked to the lower adjusting plate by bolts.
6. The chip polarity testing device according to claim 2, characterized in that: The rotating stage mechanism includes an inclined carrier, a rotating stage driving member, a rotating stage support plate, a rotating stage pad, a rotating stage support plate guide column, a rotating stage support plate guide sleeve, a rotating stage support plate spring, a rotating stage and a plurality of chip carriers; The inclined carrier is fixed on the load bracket of the omnidirectional fine-tuning mechanism, the rotating stage driving component is fixed under the inclined carrier, the rotating stage pallet guide column is fixed on the inclined carrier, the rotating stage pallet guide sleeve is sleeved outside the rotating stage pallet guide column, the rotating stage pallet is fixed on the rotating stage pallet guide sleeve, the rotating stage pallet spring is arranged between the rotating stage pallet and the inclined carrier; the rotating stage pad is fixed to the middle part of the rotating stage pallet; the rotating stage is fixed to the output end of the rotating stage driving component; a plurality of the chip carriers are distributed on the rotating stage.
7. The chip polarity testing device according to claim 6, characterized in that: The plurality of chip carriers are fixed on the rotating stage in equal parts of a circle, and the rotating stage driving component can drive the rotating stage to rotate at the same equal parts of a circle each time.
8. The chip polarity testing device according to claim 6, characterized in that: The rotating stage support plate is provided with a plurality of rotating stage support plate suction nozzles and a corresponding plurality of rotating stage support plate negative pressure joints respectively connected with the plurality of rotating stage support plate suction nozzles; The rotating stage pad is provided with a plurality of rotating stage pad nozzle through holes, and each rotating stage pad nozzle through hole passes through a rotating stage support plate nozzle; The rotating platform is provided with a plurality of rotating platform air holes, and the plurality of rotating platform air holes correspond one-to-one to the plurality of rotating platform support plate suction nozzles respectively; A chip carrier air hole is provided on the chip carrier, and the chip carrier air hole is aligned with an air hole of the rotating stage below it; With the support of the elastic force of the rotating stage pallet spring, the multiple chip carrier air holes of the multiple chip carriers can closely cooperate with the multiple rotating stage pallet suction nozzles through the multiple rotating stage air holes of the rotating stage. By introducing or releasing negative pressure air into or out of a certain rotating stage pallet negative pressure joint, the chip placed on the chip carrier that closely cooperates with it can be adsorbed or released.
9. The chip polarity testing device according to claim 2, characterized in that: The CCD chip polarity verification mechanism comprises a CCD chip polarity verification transverse bracket, a CCD chip polarity verification oblique bracket, a CCD chip polarity verification oblique bracket adjustment lock, a CCD chip polarity verification CCD bracket, a CCD, a CCD light source bracket and a CCD light source; The CCD chip polarity verification transverse bracket is fixed on the load bracket of the omnidirectional fine-tuning mechanism, and the CCD chip polarity verification oblique bracket is fixed on the CCD chip polarity verification transverse bracket through the CCD chip polarity verification oblique bracket adjustment lock; the CCD chip polarity verification CCD bracket and the CCD light source bracket are respectively fixed on the two ends of the chip polarity verification oblique bracket, the CCD light source is fixed on the CCD light source bracket facing forward, and the CCD is fixed on the CCD chip polarity verification CCD bracket facing the CCD light source; The CCD and the CCD light source are aligned with the chip on the rotating stage mechanism.