Chip testing device
By designing a chip test device with a full range of fine-tuning mechanisms, the problems of low chip testing efficiency and frequent chip lay-off in the existing technology are solved, and a high-efficiency chip testing process is achieved.
Patent Information
- Application Number
- CN202421068491.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-15
- Publication Date
- 2025-04-15
- Estimated Expiration
- 2034-05-15
AI Technical Summary
Existing chip testing devices are difficult to achieve high efficiency during the test process, especially when multiple chips are continuously tested, the test efficiency is low, and the chip needs to be frequently put down for testing, which affects the continuity and efficiency of the test.
A chip testing device was designed, including a comprehensive fine-tuning mechanism, a chip testing front bracket, a chip testing rear bracket and a chip testing mechanism. By fine-tuning the XYZ position of the all-round fine-tuning mechanism, the chip testing mechanism always aims at the chip held by the external feeding device, achieving a test process without putting it down.
It realizes high efficiency of chip testing, and can continuously test multiple chips without frequent dropping of chips, improving the continuity and efficiency of testing.
Smart Images
Figure CN222762201U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of testing equipment, and in particular relates to a chip testing device. Background Art
[0002] Figure 1 The top view of the chip appearance is shown in FIG. 1 . The chip 10 includes a chip top surface 11, two chip end surfaces 12, two chip side surfaces 13, a chip bottom surface 14, a chip center positioning hole 15 penetrating the chip top surface 11 and the chip bottom surface 14, and a plurality of chip PIN pins 16 located on the two chip side surfaces 13. The chip top surface 11 is engraved with a chip specification model 111, a chip pin number 112, and a chip pin number 113. The chip 10 is an integrated component, and the passages of two or more chip PIN pins 16 have predetermined electrical properties. The chip test is to connect two or more chip PIN pins 16 in groups, obtain the electrical performance index value of the group of chip PIN pins 16, and compare it with the electrical performance index standard value of the group of chip PIN pins 16 to determine whether its electrical performance index is qualified, and then determine whether the chip 10 is qualified according to whether the electrical performance index of all groups of chip PIN pins 16 is qualified. If the electrical performance index of all groups of chip PIN pins 16 is qualified, the chip 10 is determined to be qualified. Utility Model Content
[0003] The utility model aims to provide a chip testing device for realizing high-efficiency chip testing.
[0004] The utility model is implemented as follows: a chip testing device comprises an omnidirectional fine-tuning mechanism, a chip testing front bracket, a chip testing rear bracket and a chip testing mechanism;
[0005] The chip test front bracket and the chip test rear bracket are respectively fixed to the front end and the rear end of the omnidirectional fine-tuning mechanism, the chip test mechanism is fixed to the chip test front bracket and the chip test rear bracket, and the omnidirectional fine-tuning mechanism is fixed to the machine platform and is used to fine-tune the XYZ position of the chip test mechanism so that the chip test mechanism is aligned with the chip that is always held by the external feeding device;
[0006] The chip test front bracket includes a front bracket stand, a front bracket height adjustment member, and a front bracket top plate;
[0007] The front bracket stand is fixed on the omnidirectional fine-tuning mechanism, the front bracket height adjustment member is installed between the front bracket stand and the omnidirectional fine-tuning mechanism, the front bracket top plate is fixed on the front bracket stand, the chip test rear bracket is fixed on the omnidirectional fine-tuning mechanism, and the chip test mechanism is fixed on the front bracket top plate and the chip test rear bracket;
[0008] The front bracket height adjustment member is used to adjust the height of the front bracket top plate relative to the chip test rear bracket, and further fine-tune the height position of the chip test mechanism, and the chip test mechanism is used to test the chip.
[0009] Preferably, the chip testing mechanism comprises a chip testing jig, a chip testing jig floating assembly and a chip testing electrode assembly, wherein the chip testing jig floating assembly is fixed under the top plate of the front bracket, the chip testing jig is fixed on the chip testing jig floating assembly, and the chip testing electrode assembly is fixed on the top plate of the front bracket and on the chip testing rear bracket;
[0010] The chip testing fixture is used to support the chip;
[0011] The chip test fixture floating component is used to float and carry the chip test fixture and position the chip;
[0012] The chip testing electrode assembly is used for testing a chip.
[0013] Preferably, the chip test jig comprises a chip test jig chip bottom surface supporting surface, two chip test jig chip end surface positioning inclined surfaces, a chip test jig chip center hole positioning rod through hole and two chip test jig floating upper shaft mounting holes; the chip test jig chip bottom surface supporting surface is located between the two chip test jig chip end surface positioning inclined surfaces, the chip test jig chip center hole positioning rod through hole vertically penetrates the chip test jig from the middle of the chip test jig chip bottom surface supporting surface, and the two chip test jig floating upper shaft mounting holes are located at both ends of the chip test jig and vertically penetrate the chip test jig.
[0014] Preferably, the chip test fixture floating assembly comprises a chip test fixture bracket, a chip test fixture bracket cover, two chip test fixture floating upper shafts, two chip test fixture floating upper shaft guide sleeves, two chip test fixture floating lower shafts, two chip test fixture floating lower shaft springs, a chip center hole positioning rod, a chip center hole positioning rod floating guide sleeve and a chip center hole positioning rod floating spring, and the chip test fixture bracket is provided with three chip test fixture bracket spring holes arranged side by side;
[0015] The chip test jig bracket cover is covered on the chip test jig bracket, the chip test jig bracket together with the chip test jig bracket cover is fixed under the front bracket top plate, the chip center hole positioning rod floating guide sleeve is fixed to the middle of the chip test jig bracket cover, two chip test jig floating lower axis springs are arranged in the chip test jig bracket spring holes on both sides, the chip center hole positioning rod floating spring is arranged in the chip test jig bracket spring hole in the middle, the chip center hole positioning rod, its upper end is passed through the chip center hole positioning rod floating guide sleeve, and passes through the front bracket top plate, and can continue to pass through the chip test jig core upward The chip center hole positioning rod passes through the hole to enter the chip center positioning hole, and its lower end is inserted into the floating spring of the chip center hole positioning rod. The two floating lower shafts of the chip test fixture are respectively inserted into the two floating lower shaft springs of the chip test fixture and pass through the two ends of the chip test fixture bracket cover. The two floating upper shaft guide sleeves of the chip test fixture are respectively fixed on both sides of the middle part of the front bracket top plate to align with the two floating lower shafts of the chip test fixture. The two floating upper shafts of the chip test fixture are respectively inserted into the two floating upper shaft guide sleeves of the chip test fixture and pass through the front bracket top plate, and continue to enter the two floating upper shaft mounting holes of the chip test fixture upward to fix the chip test fixture.
[0016] Preferably, the chip test electrode assembly includes a chip test electrode circuit board and a chip test electrode. The chip test electrode circuit board is fixed on the top plate of the front bracket and on the chip test rear bracket. The chip test electrode is fixed on the chip test electrode circuit board for electrically connecting the chip on the chip test fixture for testing.
[0017] Preferably, the omnidirectional fine-tuning mechanism comprises a mounting plate, a lower adjusting plate, an upper adjusting plate, a Z-adjusting camshaft, a Y-adjusting assembly, an X-adjusting assembly and a load bracket, wherein the mounting plate is fixed on an external machine platform, the lower adjusting plate is arranged on the mounting plate via the Z-adjusting camshaft and the Y-adjusting assembly, the upper adjusting plate is arranged on the lower adjusting plate via the X-adjusting assembly, and the load bracket is fixed on the upper adjusting plate;
[0018] A lower adjusting plate mounting plate groove is provided under the lower adjusting plate, and the mounting plate is located in the adjusting plate mounting plate groove. The Z-direction adjusting cam shaft can fine-tune the lower adjusting plate to move with the upper adjusting plate along the Z-axis direction. The Y-direction adjusting component can fine-tune the lower adjusting plate to move with the upper adjusting plate along the Y-axis direction. The X-direction adjusting component can fine-tune the upper adjusting plate to move along the X-axis direction.
[0019] The beneficial effects of the utility model are:
[0020] The chip testing device of the utility model is provided with a chip testing mechanism and an all-round fine-tuning mechanism, wherein the all-round fine-tuning mechanism can fine-tune the XYZ position of the chip testing mechanism to align the chip always held by the external feeding device, the chip testing mechanism is used for chip testing, wherein the chip testing fixture is used to support the chip, the chip testing fixture floating assembly is used to float the chip testing fixture, and the chip testing electrode assembly is used to test the chip. The chip does not need to be put down during the test, and the chip testing efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 This is the appearance of the chip;
[0022] Figure 2 is a structural diagram of a chip testing device according to an embodiment;
[0023] Figure 3 It is a structural diagram of the chip testing mechanism of the embodiment;
[0024] Figure 4 A partial structural diagram of a chip testing mechanism in an embodiment;
[0025] Figure 5 This is a structural diagram of a chip test fixture in an embodiment;
[0026] Figure 6 It is a structural diagram of a floating assembly of a chip test fixture according to an embodiment;
[0027] Figure 7 It is a structural diagram of the all-round fine-tuning mechanism of the embodiment.
[0028] Description of reference numerals:
[0029] 1. Chip testing mechanism; 10. Chip; 11. Chip top surface; 111. Engraved text pattern; 112. Chip pin number; 113. Number 1 chip pin mark; 12. Chip end surface; 13. Chip side surface; 14. Chip bottom surface; 15. Chip center positioning hole; 16. Chip PIN foot;
[0030] 110. Chip test fixture; 1101. Chip bottom support surface of chip test fixture; 1102. Chip end surface positioning inclined surface of chip test fixture; 1103. Positioning rod through hole of chip center hole of chip test fixture; 1104. Floating upper shaft mounting hole of chip test fixture;
[0031] 120. Chip test fixture floating assembly; 121. Chip test fixture bracket; 1211. Chip test fixture bracket spring hole; 122. Chip test fixture bracket cover; 123. Chip test fixture floating upper shaft; 124. Chip test fixture floating upper shaft guide sleeve; 125. Chip test fixture floating lower shaft; 126. Chip test fixture floating lower shaft spring; 127. Chip center hole positioning rod; 128. Chip center hole positioning rod floating guide sleeve; 129. Chip center hole positioning rod floating spring;
[0032] 130. Chip test electrode assembly; 131. Chip test electrode circuit board; 132. Chip test electrode;
[0033] 2. Chip test front bracket; 201. Front bracket stand; 202. Front bracket height adjustment member; 203. Front bracket top plate;
[0034] 3. Chip test post bracket;
[0035] 400, all-round fine-tuning mechanism; 410, mounting plate; 420, lower adjusting plate; 421, lower adjusting plate mounting plate slot; 430, upper adjusting plate; 440, Z-direction adjusting camshaft; 450, Y-direction adjusting assembly; 460, X-direction adjusting assembly. DETAILED DESCRIPTION
[0036] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.
[0037] In the description of the present utility model, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inside", "outside", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model; the terms "first", "second", and "third" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance; in addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be a communication between the two components. For ordinary technicians in this field, the specific meanings of the terms in the present utility model can be understood according to specific circumstances.
[0038] See also Figure 2, a chip testing device of this embodiment includes an omnidirectional fine-tuning mechanism 400, a chip testing front bracket 2, a chip testing rear bracket 3 and a chip testing mechanism 1;
[0039] The chip test front bracket 2 and the chip test rear bracket 3 are respectively fixed to the front end and the rear end of the omnidirectional fine-tuning mechanism 400, the chip test mechanism 1 is fixed to the chip test front bracket 2 and the chip test rear bracket 3, and the omnidirectional fine-tuning mechanism 400 is fixed to the machine platform (100) and is used to fine-tune the XYZ position of the chip test mechanism (1) so that the chip test mechanism 1 is aligned with the chip (10) that is always held by the external feeding device;
[0040] The chip test front bracket 2 includes a front bracket stand 201, a front bracket height adjustment member 202, and a front bracket top plate 203;
[0041] The front bracket stand 201 is fixed on the omnidirectional fine-tuning mechanism 400, the front bracket height adjustment member 202 is installed between the front bracket stand 201 and the omnidirectional fine-tuning mechanism 400, the front bracket top plate 203 is fixed on the front bracket stand 201, the chip test rear bracket 3 is fixed on the omnidirectional fine-tuning mechanism 400, and the chip test mechanism 1 is fixed on the front bracket top plate 203 and the chip test rear bracket 3;
[0042] The front bracket height adjustment member 202 is used to adjust the height of the front bracket top plate 203 relative to the chip test rear bracket 3, and further fine-tune the height position of the chip test mechanism 1, and the chip test mechanism 1 is used to test the chip 10.
[0043] See also Figure 3 and Figure 4 The chip testing mechanism 1 includes a chip testing fixture 110, a chip testing fixture floating assembly 120 and a chip testing electrode assembly 130. The chip testing fixture floating assembly 120 is fixed under the front bracket top plate 203, the chip testing fixture 110 is fixed on the chip testing fixture floating assembly 120, and the chip testing electrode assembly 130 is fixed on the front bracket top plate 203 and the chip testing rear bracket 3;
[0044] The chip testing fixture 110 is used to support the chip 10 (the chip 10 is held by an external feeding device);
[0045] The chip test fixture floating component 120 is used for floatingly carrying the chip test fixture 110 and positioning the chip 10;
[0046] The chip testing electrode assembly 130 is used to test the chip 10 .
[0047] See also Figure 5The chip test fixture 110 includes a chip test fixture chip bottom support surface 1101, two chip test fixture chip end surface positioning inclined surfaces 1102, a chip test fixture chip center hole positioning rod through hole 1103 and two chip test fixture floating upper shaft mounting holes 1104; the chip test fixture chip bottom support surface 1101 is located between the two chip test fixture chip end surface positioning inclined surfaces 1102, the chip test fixture chip center hole positioning rod through hole 1103 vertically penetrates the chip test fixture 110 from the middle of the chip test fixture chip bottom support surface 1101, and the two chip test fixture floating upper shaft mounting holes 1104 are located at both ends of the chip test fixture 110 and vertically penetrate the chip test fixture 110.
[0048] See also Figure 6 The chip test fixture floating assembly 120 includes a chip test fixture bracket 121, a chip test fixture bracket cover 122, two chip test fixture floating upper shafts 123, two chip test fixture floating upper shaft guide sleeves 124, two chip test fixture floating lower shafts 125, two chip test fixture floating lower shaft springs 126, a chip center hole positioning rod 127, a chip center hole positioning rod floating guide sleeve 128 and a chip center hole positioning rod floating spring 129, and the chip test fixture bracket 121 is provided with three chip test fixture bracket spring holes 1211 arranged side by side;
[0049] The chip test fixture bracket cover 122 is covered on the chip test fixture bracket 121, and the chip test fixture bracket 121 is fixed under the front bracket top plate 203 together with the chip test fixture bracket cover 122. The chip center hole positioning rod floating guide sleeve 128 is fixed to the middle of the chip test fixture bracket cover 122. Two chip test fixture floating lower shaft springs 126 are arranged in the chip test fixture bracket spring holes 1211 on both sides. The chip center hole positioning rod floating spring 129 is arranged in the chip test fixture bracket spring hole 1211 in the middle. The chip center hole positioning rod 127, the upper end of which is passed through the chip center hole positioning rod floating guide sleeve 128, and passes through the front bracket top plate 203, and can continue to pass the chip test fixture chip upward. The center hole positioning rod passes through hole 1103 and enters the chip center positioning hole 15, and its lower end is inserted into the chip center hole positioning rod floating spring 129, and the two chip test fixture floating lower shafts 125 are respectively inserted into the two chip test fixture floating lower shaft springs 126 and pass through the two ends of the chip test fixture bracket cover 122, and the two chip test fixture floating upper shaft guide sleeves 124 are respectively fixed on both sides of the middle part of the front bracket top plate 203 to align the two chip test fixture floating lower shafts 125, and the two chip test fixture floating upper shafts 123 are respectively inserted into the two chip test fixture floating upper shaft guide sleeves 124 and pass through the front bracket top plate 203, and continue to enter the two chip test fixture floating upper shaft mounting holes 1104 to fix the chip test fixture 110.
[0050] The chip test electrode assembly 130 includes a chip test electrode circuit board 131 and a chip test electrode 132. The chip test electrode circuit board 131 is fixed on the front bracket top plate 203 and the chip test rear bracket 3. The chip test electrode 132 is fixed on the chip test electrode circuit board 131 and is used to electrically connect the chip 10 on the chip test fixture 110 for testing.
[0051] See also Figure 7 The omnidirectional fine-tuning mechanism 400 includes a mounting plate 410, a lower adjusting plate 420, an upper adjusting plate 430, a Z-adjusting cam shaft 440, a Y-adjusting assembly 450, an X-adjusting assembly 460 and a load bracket 470. The mounting plate 410 is fixed on an external machine platform, the lower adjusting plate 420 is arranged on the mounting plate 410 through the Z-adjusting cam shaft 440 and the Y-adjusting assembly 450, the upper adjusting plate 430 is arranged on the lower adjusting plate 420 through the X-adjusting assembly 460, and the load bracket 470 is fixed on the upper adjusting plate 430;
[0052] A lower adjusting plate mounting plate groove 421 is provided under the lower adjusting plate 420, and the mounting plate 410 is located in the adjusting plate mounting plate groove 421; the Z-direction adjusting camshaft 440 can fine-tune the lower adjusting plate 420 to move with the upper adjusting plate 430 along the Z-axis direction, and the Y-direction adjusting component can fine-tune the lower adjusting plate 420 to move with the upper adjusting plate 430 along the Y-axis direction; the X-direction adjusting component can fine-tune the upper adjusting plate 430 to move along the X-axis direction.
[0053] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A chip testing device, characterized in that: It comprises an all-round fine-tuning mechanism (400), a chip testing front bracket (2), a chip testing rear bracket (3) and a chip testing mechanism (1); The chip test front bracket (2) and the chip test rear bracket (3) are respectively fixed to the front end and the rear end of the omnidirectional fine-tuning mechanism (400); the chip test mechanism (1) is fixed to the chip test front bracket (2) and the chip test rear bracket (3); the omnidirectional fine-tuning mechanism (400) is fixed to the machine platform (100) and is used to fine-tune the XYZ position of the chip test mechanism (1) so that the chip test mechanism (1) is aligned with the chip (10) that is always held by the external feeding device; The chip testing front support (2) comprises a front support stand (201), a front support height adjustment member (202), and a front support top plate (203); The front support stand (201) is fixed on the omnidirectional fine-tuning mechanism (400), the front support height adjustment member (202) is installed between the front support stand (201) and the omnidirectional fine-tuning mechanism (400), the front support top plate (203) is fixed on the front support stand (201), the chip test rear support (3) is fixed on the omnidirectional fine-tuning mechanism (400), and the chip test mechanism (1) is fixed on the front support top plate (203) and the chip test rear support (3); The front support height adjustment member (202) is used to adjust the height of the front support top plate (203) relative to the chip test rear support (3), and further fine-tune the height position of the chip test mechanism (1), wherein the chip test mechanism (1) is used to test the chip (10).
2. The chip testing device according to claim 1, characterized in that: The chip testing mechanism (1) comprises a chip testing jig (110), a chip testing jig floating assembly (120) and a chip testing electrode assembly (130); the chip testing jig floating assembly (120) is fixed under the front bracket top plate (203), the chip testing jig (110) is fixed on the chip testing jig floating assembly (120), and the chip testing electrode assembly (130) is fixed on the front bracket top plate (203) and the chip testing rear bracket (3); The chip testing fixture (110) is used to support the chip (10); The chip test fixture floating component (120) is used to float and carry the chip test fixture (110) and position the chip (10); The chip testing electrode assembly (130) is used for testing a chip (10).
3. The chip testing device according to claim 2, characterized in that: The chip test fixture (110) comprises a chip test fixture chip bottom surface supporting surface (1101), two chip test fixture chip end surface positioning inclined surfaces (1102), a chip test fixture chip center hole positioning rod through hole (1103) and two chip test fixture floating upper shaft mounting holes (1104); the chip test fixture chip bottom surface supporting surface (1101) is located between the two chip test fixture chip end surface positioning inclined surfaces (1102), the chip test fixture chip center hole positioning rod through hole (1103) vertically penetrates the chip test fixture (110) from the middle of the chip test fixture chip bottom surface supporting surface (1101), and the two chip test fixture floating upper shaft mounting holes (1104) are located at two ends of the chip test fixture (110) and vertically penetrate the chip test fixture (110).
4. The chip testing device according to claim 3, characterized in that: The chip test fixture floating assembly (120) comprises a chip test fixture bracket (121), a chip test fixture bracket cover (122), two chip test fixture floating upper shafts (123), two chip test fixture floating upper shaft guide sleeves (124), two chip test fixture floating lower shafts (125), two chip test fixture floating lower shaft springs (126), a chip center hole positioning rod (127), a chip center hole positioning rod floating guide sleeve (128) and a chip center hole positioning rod floating spring (129), and the chip test fixture bracket (121) is provided with three chip test fixture bracket spring holes (1211) arranged side by side; The chip test jig support cover (122) is covered on the chip test jig support (121), and the chip test jig support (121) is fixed under the front support top plate (203) together with the chip test jig support cover (122). The chip center hole positioning rod floating guide sleeve (128) is fixed to the middle of the chip test jig support cover (122). Two chip test jig floating lower shaft springs (126) are arranged in the chip test jig support spring holes (1211) on both sides. The chip center hole positioning rod floating spring (129) is arranged in the chip test jig support spring hole (1211) in the middle. The chip center hole positioning rod (127), the upper end of which is passed through the chip center hole positioning rod floating guide sleeve (128), passes through the front support top plate (203), and can continue to pass through the chip test jig core upward. The chip center hole positioning rod passes through the hole (1103) and enters the chip center positioning hole (15), and its lower end is inserted into the floating spring (129) of the chip center hole positioning rod. The two floating lower shafts (125) of the chip test fixture are respectively inserted into the two floating lower shaft springs (126) of the chip test fixture and pass through the two ends of the chip test fixture bracket cover (122). The two floating upper shaft guide sleeves (124) of the chip test fixture are respectively fixed on both sides of the middle part of the front bracket top plate (203) to align with the two floating lower shafts (125) of the chip test fixture. The two floating upper shafts (123) of the chip test fixture are respectively inserted into the two floating upper shaft guide sleeves (124) of the chip test fixture and pass through the front bracket top plate (203), and continue to enter the two floating upper shaft mounting holes (1104) of the chip test fixture upward to fix the chip test fixture (110).
5. The chip testing device according to claim 2, characterized in that: The chip test electrode assembly (130) comprises a chip test electrode circuit board (131) and a chip test electrode (132); the chip test electrode circuit board (131) is fixed on the front bracket top plate (203) and the chip test rear bracket (3); the chip test electrode (132) is fixed on the chip test electrode circuit board (131) and is used to electrically connect the chip (10) on the chip test fixture (110) for testing.
6. The chip testing device according to any one of claims 1 to 5, characterized in that: The omnidirectional fine-tuning mechanism (400) comprises a mounting plate (410), a lower adjusting plate (420), an upper adjusting plate (430), a Z-direction adjusting camshaft (440), a Y-direction adjusting assembly (450), an X-direction adjusting assembly (460) and a load bracket (470); the mounting plate (410) is fixed on an external machine platform; the lower adjusting plate (420) is arranged on the mounting plate (410) via the Z-direction adjusting camshaft (440) and the Y-direction adjusting assembly (450); the upper adjusting plate (430) is arranged on the lower adjusting plate (420) via the X-direction adjusting assembly (460); and the load bracket (470) is fixed on the upper adjusting plate (430); A lower adjusting plate mounting plate groove (421) is provided under the lower adjusting plate (420), and the mounting plate (410) is located in the adjusting plate mounting plate groove (421); the Z-direction adjusting camshaft (440) can fine-tune the lower adjusting plate (420) to move along the Z-axis direction with the upper adjusting plate (430); the Y-direction adjusting component (450) can fine-tune the lower adjusting plate (420) to move along the Y-axis direction with the upper adjusting plate (430); and the X-direction adjusting component (460) can fine-tune the upper adjusting plate (430) to move along the X-axis direction.