Mirror frame and semiconductor optical measurement device

Abstract

The utility model discloses a mirror frame and a semiconductor optical measuring device, and particularly relates to the technical field of mirror frames, the mirror frame comprises a frame member which is used for placing an optical lens and has a U-shaped cross section, and a limiting member which is used for limiting the optical lens is installed inside the bottom end of the frame member; a multifunctional assembly used for clamping and limiting the optical lens is arranged outside the frame piece. The multifunctional assembly comprises a transverse cavity and two vertical cavities which are communicated, the two vertical cavities are formed in the front sides of the two ends of the transverse cavity respectively, and a linkage rod is arranged in the transverse cavity. According to the utility model, the adjusting wheel is operated to drive the two threaded rods connected with the linkage rod to rotate, and then the threaded rods drive the inner movable piece and the outer movable piece to synchronously move inwards or outwards, so that the clamping piece and the positioning piece can be respectively separated from or contacted with the optical lens and the positioning groove; therefore, the effect of synchronously disassembling and assembling the optical lens and the frame piece can be realized, and the convenience of operating the frame piece and the optical lens by a worker can be effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of mirror frames, in particular to a mirror frame and a semiconductor optical measuring device. Background Art

[0002] In semiconductor processing technology, optical lenses are essential components in optical measurement. For example, reflectors are used in the focusing and bisection systems of lithography machines to achieve high-speed scanning and modulation functions of the measurement spot.

[0003] As shown in the application document with the prior art publication number CN219285477U, it includes a frame; the frame is provided with a lens groove, a mounting hole and an energy absorption groove; the lens groove is opened along a first direction, and the lens groove is used to install an optical lens; the mounting hole is opened along a first direction, and the energy absorption groove extends perpendicular to the first direction; along the first direction, the projection of the energy absorption groove and the mounting hole overlap. The optical measuring device is installed with the above-mentioned frame. With such a configuration, the energy absorption groove partially overlaps with the position of the mounting hole, and the energy absorption groove serves as a buffer structure, so that when the vicinity of the mounting hole is squeezed by the connecting member along the first direction, local elastic deformation occurs, and the stress is almost absorbed by the deformation at the energy absorption groove and is not transmitted to the optical lens. Therefore, the phenomenon of excessive changes in the surface shape of the optical lens due to local stress can be effectively improved.

[0004] However, the frame in the above technical solution is connected to the base by bolts, and the disassembly and assembly steps are cumbersome, time-consuming and labor-intensive, which will affect the disassembly and assembly efficiency of the staff. In addition, the optical lens and the frame in this technical solution are fixed when in contact, and the stability is poor, which will also affect the stability of the optical lens when being tested. Utility Model Content

[0005] In order to overcome the above-mentioned defects of the prior art, the utility model provides a lens frame and a semiconductor optical measuring device, which drives two threaded rods connected to the linkage rod to rotate by operating the adjusting wheel, and then drives the inner movable part and the outer movable part to move inward or outward synchronously by the threaded rods, thereby achieving the effect of synchronous disassembly and assembly of optical lenses and frame parts, thereby solving the problems arising in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a spectacle frame, comprising a frame member for placing an optical lens and having a U-shaped cross section, wherein a limiting member for limiting the optical lens is installed inside the bottom end of the frame member;

[0007] The frame is provided with a multifunctional component on the outside for clamping and limiting the optical lens;

[0008] The multifunctional component comprises a connected horizontal cavity and two vertical cavities, the two vertical cavities are respectively arranged at the front sides of the two ends of the horizontal cavity, a linkage rod is arranged inside the horizontal cavity, threaded rods are installed at both ends of the linkage rod, and the ends of the two threaded rods that are far away are movably connected to the inner wall of the horizontal cavity through bearings, and the outside of each threaded rod is threadedly connected to an inner movable part and an outer movable part, a deformable clamping part is installed on the side of the inner movable part close to the optical lens, and a positioning part is installed on the side of the outer movable part away from the inner movable part, and a positioning hole is opened on one side of the frame corresponding to the clamping part and the positioning part, and the positioning hole is connected to the vertical cavity;

[0009] The clamping member passes through one of the positioning holes and contacts the optical lens, and the positioning member passes through the other positioning hole and extends to the outside of the frame.

[0010] In a preferred embodiment, a through hole is opened at the top of the rear end of the frame, and an adjusting wheel sleeved on the outside of the linkage rod is installed inside the through hole, and the top end of the adjusting wheel extends to the top of the through hole.

[0011] In a preferred embodiment, the threads at both ends of the threaded rod have opposite directions, and the threads at both ends of the threaded rod are symmetrically distributed about the central axis of the threaded rod.

[0012] In a preferred embodiment, the cross-sections of the top ends of the inner movable member and the outer movable member are both rectangular, and the outer ends of the top ends of the inner movable member and the outer ends of the outer movable member are in contact with the top of the inner cavity of the vertical cavity.

[0013] The utility model also includes a semiconductor optical measuring device, including a base and a top frame installed on the top of the base, a reflector is arranged inside the top frame, a fixed shaft is installed at one end of the reflector, and the fixed shaft is movably connected to the inner wall of the top frame through a rotating shaft; an aperture is arranged on the top of the reflector, and support members are installed at both ends of the aperture, and both ends of the support member are fixed to the inner wall of the top frame through bolts; a connected embedding groove and embedding hole are opened on the top of the top frame, the frame member is arranged inside the embedding groove located at the top of the embedding hole, and a positioning groove is opened on one side of the top frame corresponding to the positioning member, and the positioning member extends to the inside of the positioning groove at one end close to the top frame.

[0014] In a preferred embodiment, a motor is provided on one side of the bottom end of the top frame, and the motor output shaft passes through the top frame and is fixed to the fixed shaft, and a mounting bracket is installed on the side of the motor away from the top frame, and the mounting bracket is fixed to the top frame at one end away from the motor.

[0015] In a preferred embodiment, a pull groove connected to the embedding groove is opened on the top of the top frame, and the pull groove is located at the rear side of the frame member.

[0016] Technical effects and advantages of the utility model:

[0017] The two threaded rods connected to the linkage rod are driven to rotate by operating the adjusting wheel, and then the inner movable parts and the outer movable parts are driven to move inward or outward synchronously by the threaded rods, so that the clamping parts and the positioning parts can be separated from or contacted with the optical lens and the positioning groove respectively, thereby achieving the effect of synchronous disassembly and assembly of the optical lens and the frame, thereby effectively improving the convenience of the staff in operating the frame and the optical lens. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 It is a top view of the top frame of the utility model;

[0020] Figure 3 This is the front view of the frame of the utility model;

[0021] Figure 4 It is a side sectional view of the frame of the utility model;

[0022] Figure 5 It is the front view of the through hole of the utility model;

[0023] Figure 6 It is a top sectional view of the frame of the present utility model.

[0024] The accompanying drawings are marked as follows: 1. optical lens; 2. frame; 3. horizontal cavity; 4. vertical cavity; 5. linkage rod; 6. threaded rod; 7. inner movable part; 8. outer movable part; 9. clamping part; 10. positioning part; 11. positioning hole; 12. through hole; 13. adjusting wheel; 14. base; 15. top frame; 16. reflector; 17. fixed shaft; 18. aperture; 19. support member; 20. embedded groove; 21. embedded hole; 22. positioning groove; 23. motor; 24. mounting bracket; 25. pull groove; 26. limit member. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] Refer to the instruction manual Figure 1-5 The utility model provides a spectacle frame, comprising a frame member 2 for placing an optical lens 1 and having a U-shaped cross section, wherein a limiting member 26 for limiting the optical lens 1 is installed inside the bottom end of the frame member 2;

[0027] The frame 2 is provided with a multifunctional component on the outside for clamping and limiting the optical lens 1;

[0028] like Figure 3-6 As shown, the multifunctional component includes a connected horizontal cavity 3 and two vertical cavities 4, and the two vertical cavities 4 are respectively arranged on the front sides of the two ends of the horizontal cavity 3. A linkage rod 5 is provided inside the horizontal cavity 3, and threaded rods 6 are installed at both ends of the linkage rod 5, and the ends of the two threaded rods 6 that are away from each other are movably connected to the inner wall of the horizontal cavity 3 through bearings, and each threaded rod 6 is threadedly connected to an inner movable part 7 and an outer movable part 8 on the outside, and a deformable clamping part 9 is installed on the side of the inner movable part 7 close to the optical lens 1, and a positioning part 10 is installed on the side of the outer movable part 8 away from the inner movable part 7, and positioning holes 11 are opened on the side of the frame 2 corresponding to the clamping part 9 and the positioning part 10, and the positioning hole 11 is connected to the vertical cavity 4; the clamping part 9 passes through one of the positioning holes 11 and contacts with the optical lens 1, and the positioning part 10 passes through the other positioning hole 11 and extends to the outside of the frame 2.

[0029] like Figure 3-5 As shown, a through hole 12 is opened at the top of the rear end of the frame 2, and an adjusting wheel 13 is installed inside the through hole 12 and is sleeved on the outside of the linkage rod 5. The top of the adjusting wheel 13 extends to the top of the through hole 12. Through the connection between the adjusting wheel 13 and the linkage rod 5, the staff can turn the adjusting wheel 13 to drive the two threaded rods 6 connected to the linkage rod 5 to rotate, thereby improving the convenience of the staff in operating the threaded rods 6.

[0030] like Figure 4 As shown, the threads at both ends of the threaded rod 6 have opposite directions, and the threads at both ends of the threaded rod 6 are symmetrically distributed about the central axis of the threaded rod 6. By setting the threads at both ends of the threaded rod 6 to be opposite, the threaded rod 6 can synchronously drive the inner movable part 7 and the outer movable part 8 to move synchronously, thereby achieving the effect of synchronously positioning the optical lens 1 and the frame 2. The top cross-section of the inner movable part 7 and the top cross-section of the outer movable part 8 are both set to be rectangular, and the top outer part of the inner movable part 7 and the top outer part of the outer movable part 8 are both in contact with the top of the inner cavity of the vertical cavity 4. By setting the inner movable part 7 and the outer movable part 8 to be rectangular, the inner wall of the vertical cavity 4 can limit the inner movable part 7 and the outer movable part 8, thereby ensuring the stability of the inner movable part 7 and the outer movable part 8 during movement.

[0031] like Figure 1 and 2As shown, the utility model also includes a semiconductor optical measuring device, including a base 14 and a top frame 15 installed on the top of the base 14, a reflector 16 is arranged inside the top frame 15, a fixed shaft 17 is installed at one end of the reflector 16, and the fixed shaft 17 is movably connected to the inner wall of the top frame 15 through a rotating shaft; an aperture 18 is arranged on the top of the reflector 16, and support members 19 are installed at both ends of the aperture 18, and both ends of the support member 19 are fixed to the inner wall of the top frame 15 by bolts; a connected embedding groove 20 and an embedding hole 21 are opened on the top of the top frame 15, the frame member 2 is arranged inside the embedding groove 20 located at the top of the embedding hole 21, and a positioning groove 22 is opened on one side of the top frame 15 corresponding to the positioning member 10, and the end of the positioning member 10 close to the top frame 15 extends to the inside of the positioning groove 22, and the refraction angle of the reflector 16 is realized by the rotation of the fixed shaft 17, and then the optical lens 1 is detected by the cooperation of the aperture 18 and the reflector 16.

[0032] like Figure 1 and 2 As shown, a motor 23 is provided on one side of the bottom end of the top frame 15, and the output shaft of the motor 23 passes through the top frame 15 and is fixed to the fixed shaft 17. A mounting bracket 24 is installed on the side of the motor 23 away from the top frame 15, and one end of the mounting bracket 24 away from the motor 23 is fixed to the top frame 15. The motor 23 is installed and fixed by the mounting bracket 24 to ensure the stability when the motor 23 drives the fixed shaft 17 to rotate.

[0033] like Figure 1 and 2 As shown, a pull groove 25 connected to the embedding groove 20 is provided on the top of the top frame 15. The pull groove 25 is located on the rear side of the frame member 2. Through the connection between the pull groove 25 and the embedding groove 20, the staff can use the pull groove 25 to take out the frame member 2, thereby improving the convenience of the staff in taking and placing the frame member 2.

[0034] First, the staff places the optical lens 1 on the top of the limiting member 26 on the frame 2, and then places the frame 2 in the embedded groove 20 on the top frame 15. After that, the staff rotates the adjusting wheel 13 to drive the two threaded rods 6 connected to the linkage rod 5 to rotate, so that each threaded rod 6 can drive the corresponding inner movable member 7 and the outer movable member 8 to move inward or outward synchronously. When the inner movable member 7 and the outer movable member 8 move outward synchronously, the deformable clamping member 9 on the inner movable member 7 squeezes and fixes the optical lens 1 to ensure the installation stability of the optical lens 1. At the same time, the positioning member 10 on the outer movable member 8 is embedded in the positioning groove 22, so that the frame 2 can be limited and fixed to prevent the frame 2 from being separated from the top frame 15, thereby effectively ensuring the stability of the optical lens 1 when being tested;

[0035] When the inner movable part 7 and the outer movable part 8 move inward synchronously, the clamping part 9 on the inner movable part 7 is separated from the optical lens 1, and the positioning part 10 on the outer movable part 8 is separated from the positioning groove 22, so that it is convenient for the staff to disassemble and replace the frame part 2 and the optical lens 1, thereby improving the convenience for the staff to disassemble and assemble the frame part 2 and the optical lens 1.

[0036] Finally: The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A mirror frame, characterized in that: It comprises a frame member (2) for placing an optical lens (1) and having a U-shaped cross section, wherein a limiting member (26) for limiting the position of the optical lens (1) is installed inside the bottom end of the frame member (2); The frame (2) is provided with a multifunctional component on the outside for clamping and limiting the position of the optical lens (1); The multifunctional component comprises a connected transverse cavity (3) and two vertical cavities (4), the two vertical cavities (4) being respectively arranged at the front sides of both ends of the transverse cavity (3), a linkage rod (5) being arranged inside the transverse cavity (3), both ends of the linkage rod (5) being installed with threaded rods (6), and the ends of the two threaded rods (6) being away from each other are movably connected to the inner wall of the transverse cavity (3) through bearings, the outer side of each threaded rod (6) being threadedly connected with an inner movable part (7) and an outer movable part (8), a deformable clamping part (9) being installed on the side of the inner movable part (7) close to the optical lens (1), a positioning part (10) being installed on the side of the outer movable part (8) away from the inner movable part (7), and a positioning hole (11) being opened on the side of the frame part (2) corresponding to the clamping part (9) and the positioning part (10), and the positioning hole (11) is connected to the vertical cavity (4); The clamping member (9) passes through one of the positioning holes (11) and contacts the optical lens (1), and the positioning member (10) passes through the other positioning hole (11) and extends to the outside of the frame member (2).

2. A mirror frame according to claim 1, characterized in that: A through hole (12) is provided at the top of the rear end of the frame member (2), and an adjusting wheel (13) sleeved on the outside of the linkage rod (5) is installed inside the through hole (12), and the top end of the adjusting wheel (13) extends to the top of the through hole (12).

3. A mirror frame according to claim 1, characterized in that: The threads at both ends of the threaded rod (6) have opposite thread directions, and the threads at both ends of the threaded rod (6) are symmetrically distributed about the central axis of the threaded rod (6).

4. A mirror frame according to claim 1, characterized in that: The cross-sections of the top ends of the inner movable part (7) and the outer movable part (8) are both rectangular, and the outer ends of the top ends of the inner movable part (7) and the outer ends of the top ends of the outer movable part (8) are in contact with the top of the inner cavity of the vertical cavity (4).

5. A semiconductor optical measuring device for measuring the mirror frame according to any one of claims 1 to 4, characterized in that: It comprises a base (14) and a top frame (15) mounted on the top of the base (14); a reflector (16) is arranged inside the top frame (15); a fixed shaft (17) is mounted on one end of the reflector (16); and the fixed shaft (17) is movably connected to the inner wall of the top frame (15) via a rotating shaft; The top of the reflector (16) is provided with a diaphragm (18), and both ends of the diaphragm (18) are installed with support members (19), and both ends of the support member (19) are fixed to the inner wall of the top frame (15) by bolts; The top of the top frame (15) is provided with a connected embedding groove (20) and an embedding hole (21); the frame member (2) is arranged inside the embedding groove (20) located at the top of the embedding hole (21); and a positioning groove (22) is provided on one side of the top frame (15) corresponding to the positioning member (10); and one end of the positioning member (10) close to the top frame (15) extends into the positioning groove (22).

6. A semiconductor optical measuring device according to claim 5, characterized in that: A motor (23) is provided on one side of the bottom end of the top frame (15), and an output shaft of the motor (23) passes through the top frame (15) and is fixed to a fixed shaft (17); a mounting bracket (24) is installed on a side of the motor (23) away from the top frame (15); and an end of the mounting bracket (24) away from the motor (23) is fixed to the top frame (15).

7. A semiconductor optical measuring device according to claim 5, characterized in that: The top of the top frame (15) is provided with a pull groove (25) which is connected to the embedding groove (20), and the pull groove (25) is located at the rear side of the frame member (2).

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