Magnetic chuck

Abstract

The utility model belongs to the technical field of semiconductor processing equipment, and particularly relates to a magnetic chuck, which comprises a tray, a plurality of movable clamping pins and a plurality of magnetic clamping pins, wherein a circular wafer placing position is formed in the center of each movable clamping pin in the circumferential array; the bottom of each movable clamping pin penetrates through the tray, and a driven magnetic block is fixed to the bottom of each movable clamping pin. The driving magnetic blocks are arranged below the tray, and the number of the driving magnetic blocks corresponds to that of the driven magnetic blocks; wherein the driving magnetic block is suitable for driving the movable clamping pin to move by utilizing magnetic force in the process of moving to be close to the driven magnetic block so as to clamp a wafer; the driving magnetic blocks and the driven magnetic blocks are adopted, the clamping pins are driven by magnetic force to rotate, then the limiting pieces eccentrically arranged at the tops of the clamping pins in the circumferential array clamp and loosen the outer wall of the wafer, the structure is simple, maintenance is convenient, and the internal space of the device is saved through installation of the magnetic blocks.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor processing equipment, in particular to a magnetic chuck. Background Art

[0002] In the wafer production process, cleaning is a very critical link. Its purpose is to remove various pollutants such as particles, organic matter, metal ions, etc. on the wafer surface, ensure that subsequent process steps can proceed smoothly, and ultimately ensure the quality and yield of integrated circuit products.

[0003] The wafer cleaning chuck used in the cleaning operation, also called the wafer cleaning carrier or wafer cleaning fixture, is a special device used to fix and support the wafer during the semiconductor wafer cleaning process. This equipment can ensure the normal progress of the wafer cleaning operation and prevent the wafer from being displaced during the impact of water flow and the rotation of the chuck cleaning assembly.

[0004] Existing devices usually use motor drive to control the rotation and tightening of the pin. Due to the limited internal space of the cleaning device, the space occupancy rate is extremely large during the installation of the motor, which affects the internal space utilization of the device. At the same time, when the pin of the device needs to rotate and fix the wafer at multiple points, more drive motors are required, resulting in excessively high manufacturing costs of the device. If a drive motor is used, the transmission device designed inside the device has a complex drive structure, which will also cause more troubles in the subsequent maintenance process.

[0005] Therefore, a magnetic chuck is designed to solve the technical problem in the prior art that when a motor is used to drive a clamping pin to move and clamp a wafer, the motor occupies a large space. Utility Model Content

[0006] The purpose of the utility model is to provide a magnetic chuck to solve the above technical problems.

[0007] In order to solve the above technical problems, the utility model provides a magnetic chuck, comprising:

[0008] The tray has a plurality of movable latches arranged in a circular array on its upper end surface;

[0009] A circular wafer placement position is formed in the center of each circular array of movable latches;

[0010] The bottom of each movable latch passes through the tray, and a driven magnetic block is fixed to the bottom of each movable latch; and

[0011] The active magnetic blocks are arranged below the tray, and the number of the active magnetic blocks corresponds to the number of the driven magnetic blocks; wherein

[0012] The active magnetic block is suitable for utilizing magnetic force to drive the movable clamping pin to move during the process of moving close to the driven magnetic block, so as to clamp the wafer.

[0013] Furthermore, the outer wall of the movable latch is threadedly connected to the tray;

[0014] When the active magnetic block moves close to the driven magnetic block, the magnetic force is used to push the driven magnetic block and the movable latch to rotate and move upward on the tray.

[0015] Furthermore, the upper end surface of the movable latch is provided with a limit piece; and

[0016] The limiting member is located on one side of the center of the upper end surface of the movable latch;

[0017] The active magnetic block uses magnetic force to drive the movable clamping pin to rotate and move upward on the tray during the process of moving close to the driven magnetic block, thereby driving each limiting member to rotate to clamp the outer wall of the wafer.

[0018] Furthermore, a lifting seat is provided on the outside of the tray;

[0019] The active magnetic blocks are arranged in a circular array on the inner bottom surface of the lifting seat; and

[0020] Each of the active magnetic blocks is located below the corresponding driven magnetic block.

[0021] Furthermore, a fixing seat is provided outside the lifting seat;

[0022] The outer wall of the lifting seat is matched with the inner wall of the fixing seat.

[0023] Furthermore, a driving plate is provided on one side of the upper end surface of the lifting seat.

[0024] Furthermore, the center of the fixing seat is hollowed out;

[0025] A pure water chamber is provided in the central hollow portion of the fixing seat; and

[0026] A nozzle is arranged on the top of the pure water chamber.

[0027] Furthermore, a plurality of fixing pins are provided on the upper end surface of the tray.

[0028] The beneficial effect of the utility model is that the utility model adopts an active magnetic block and a driven magnetic block, and utilizes magnetic force to drive the pin to rotate, so that the eccentrically arranged limit piece on the top of the pin of each circular array clamps and releases the outer wall of the wafer. The structure is simple and maintenance is convenient. The installation of the magnetic block saves internal space of the device.

[0029] Other features and advantages of the utility model will be described in the following description, and partly become apparent from the description, or understood by practicing the utility model. The purpose and other advantages of the utility model are realized and obtained by the structures particularly pointed out in the description and the drawings.

[0030] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0032] Figure 1 It is a three-dimensional diagram of the utility model;

[0033] Figure 2 It is a cross-sectional structural schematic diagram of the utility model;

[0034] Figure 3 The utility model Figure 1 A schematic diagram of the enlarged structure of part A.

[0035] In the figure:

[0036] 1. Fixed seat; 2. Lifting seat; 20. Active magnetic block; 21. Driving plate; 3. Tray; 30. Movable latch; 300. Limiting piece; 31. Driven magnetic block; 4. Fixed latch; 5. Wafer; 6. Pure water chamber; 60. Nozzle. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0038] Existing devices usually use motor drive to control the rotation and tightening of the pin. Due to the limited internal space of the cleaning device, the space occupancy rate is extremely large during the installation of the motor, which affects the internal space utilization of the device. At the same time, when the pin of the device needs to rotate and fix the wafer at multiple points, more drive motors are required, resulting in excessively high manufacturing costs of the device. If a drive motor is used, the transmission device designed inside the device has a complex drive structure, which will also cause more troubles in the subsequent maintenance process.

[0039] To solve the above technical problems, in at least one embodiment, a magnetic chuck is provided, including: a tray 3, on the upper end surface of which a plurality of movable latch pins 30 are arranged in a circular array; wherein a circular wafer placement position is formed in the center of the movable latch pins 30 in each circular array; the bottom of each of the movable latch pins 30 passes through the tray 3, and a driven magnetic block 31 is fixed to the bottom of each of the movable latch pins 30; and active magnetic blocks 20, which are arranged below the tray 3, and the number of the active magnetic blocks 200 corresponds to the number of the driven magnetic blocks 31; wherein the active magnetic blocks 20 are suitable for using magnetic force to drive the movable latch pins 30 to move in the process of moving close to the driven magnetic blocks 31, so as to clamp the wafer.

[0040] By adopting an active magnetic block 20 and a driven magnetic block 31, the active latch 30 is driven to rotate by magnetic force, so that the eccentrically arranged limit piece 300 at the top of the active latch 30 of each circular array clamps and releases the outer wall of the wafer 5. The structure is simple and maintenance is convenient. The installation of the magnetic block saves the internal space of the device.

[0041] In some embodiments, the wafer 5 to be cleaned is placed on the upper end surface of each fixed pin 4 on the tray 3. The structure of each fixed pin 4 is the same as that of each movable pin 30, but the fixed pin 4 is fixed to the tray 3, and the outer wall of the movable pin 30 is engaged with the tray thread. The edge of the wafer 5 is placed on the upper end surface of the fixed pin 4, and the limit piece 300 on the fixed pin 4 is used to limit the placement position of the wafer 5 to avoid the wafer being placed too offset and affecting subsequent clamping.

[0042] In some embodiments, a driving plate 21 is fixed on one side of the upper end surface of the lifting seat 2, and a pneumatic mechanism is set on the lower end surface of the driving plate 21 to control the rise and fall of the driving plate 21. The pneumatic mechanism can adopt a cylinder in the prior art, and the output end of the cylinder is connected to the lower end surface of the driving plate 21 to control the up and down movement of the driving plate 21.

[0043] In some embodiments, after the wafer 5 is placed, the pneumatic mechanism described above is started to control the driving plate 21 and the lifting seat 2 to move upward. At this time, the lifting seat 2 slides upward on the inner wall of the fixed seat 1, driving the active magnetic blocks 20 in the circular array on the bottom surface of the lifting seat 2 to move up and close to the driven magnetic blocks 31 fixed at the bottom of each active latch 30. The driven magnetic blocks 31 are pushed upward by the magnetic repulsion force, thereby driving the active latch 30 to rotate and move upward in the tray 3. During the rotation, the active latch 30 drives the limit piece 300 set on its upper end face to rotate until the limit piece 300 rotates to fit the outer wall of the wafer 5, and the limit pieces 300 on the active latch 30 in the circular array fit the outer wall of the wafer 5 one by one, thereby clamping the wafer 5.

[0044] In some embodiments, the center of the fixing seat 1 is hollowed out, and a pure water chamber 6 is set at the central hollowed-out portion, and the tray 3 is placed above the pure water chamber 6 , and the pure water in the pure water chamber 6 is sprayed out through the nozzle 60 to clean the wafer 5 .

[0045] To summarize, by adopting the active magnetic block 20 and the driven magnetic block 31, the magnetic force is used to drive the movable pin 30 to rotate, so that the eccentrically arranged limit piece 300 at the top of the movable pin 30 of each circular array clamps and releases the outer wall of the wafer 5. The structure is simple and maintenance is convenient. The installation of the magnetic block saves the internal space of the device.

[0046] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0048] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A magnetic chuck, characterized in that: include: A tray, the upper end surface of which is provided with a plurality of movable latches in a circumferential array; in A circular wafer placement position is formed in the center of each circular array of movable latches; The bottom of each movable latch passes through the tray, and a driven magnetic block is fixed to the bottom of each movable latch; as well as Active magnetic blocks are arranged below the tray, and the number of the active magnetic blocks corresponds to the number of the driven magnetic blocks; in The active magnetic block is suitable for utilizing magnetic force to drive the movable clamping pin to move during the process of moving close to the driven magnetic block, so as to clamp the wafer in the wafer placement position.

2. The magnetic chuck according to claim 1, characterized in that: The outer wall of the movable latch is threadedly connected to the tray; When the active magnetic block moves close to the driven magnetic block, the magnetic force is used to push the driven magnetic block and the movable latch to rotate and move upward on the tray.

3. The magnetic chuck according to claim 2, characterized in that: The upper end surface of each movable latch is provided with a limiting member; and The limiting member is located on one side of the center of the upper end surface of the movable latch; in The active magnetic block uses magnetic force to drive the movable clamping pin to rotate and move upward on the tray during the process of moving close to the driven magnetic block, thereby driving each limiting member to rotate to clamp the outer wall of the wafer.

4. The magnetic chuck according to claim 3, characterized in that: The outside of the tray is provided with a lifting seat; The active magnetic blocks are arranged in a circular array on the inner bottom surface of the lifting seat; and Each of the active magnetic blocks is located below the corresponding driven magnetic block.

5. The magnetic chuck according to claim 4, characterized in that: A fixing seat is arranged outside the lifting seat; The outer wall of the lifting seat is matched with the inner wall of the fixing seat.

6. The magnetic chuck according to claim 5, characterized in that: A driving plate is arranged on one side of the upper end surface of the lifting seat.

7. The magnetic chuck according to claim 6, characterized in that: The center of the fixing seat is hollowed out; A pure water chamber is provided in the central hollow portion of the fixing seat; and A nozzle is arranged on the top of the pure water chamber.

8. The magnetic chuck according to claim 7, characterized in that: The upper end surface of the tray is provided with a plurality of fixing pins.

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