Piezoelectric-driven rotary three-dimensional micro-motion platform

Abstract

The utility model provides a rotary three-dimensional micro-motion platform driven by piezoelectricity. The platform comprises a first driving mechanism, a second driving mechanism, a third driving mechanism, a first half-bridge mechanism, a second half-bridge mechanism, a third half-bridge mechanism, a central micro-motion platform, a piezoelectric driver, a fixed end and a threaded hole. The driving mechanism generates translational motion in the Y direction; the half-bridge mechanism moves in the Y direction and the Z direction; the rotation of the central micro-motion platform around the Z axis and the vertical movement in the Z direction are realized by adjusting the number of the piezoelectric actuators and the direction of the input displacement; the utility model has the advantages of compact structure, high precision, fast response speed and the like.

Description

Technical Field

[0001] The utility model belongs to the field of micro-nano positioning technology, in particular to a piezoelectric driven rotating three-dimensional micro-motion platform. Background Art

[0002] Micro-nano positioning technology is a key basic technology in the fields of micro-nano science and technology, microelectronics engineering, aerospace, etc. At the same time, micro-nano positioning technology is also widely used in precision manufacturing, nanoelectronics, biomedicine and optics. However, the existing three-dimensional micro-motion platform has complex structure, large assembly error, slow response speed, inconvenient control and other problems. Therefore, it is necessary to design a device with small assembly error, compact structure and fast response speed to meet the urgent needs of various fields. The invention patent with publication number CN 105643604 A discloses a four-degree-of-freedom micro-motion compliant platform, which realizes complete decoupling of translation and rotation, can be driven separately, and realizes large axial changes, but the structure is too complex, the response speed is slow, it is not easy to control, and there are problems such as large assembly error.

[0003] The kinematic pairs of traditional rigid mechanisms have problems such as excessive clearance and wear, which make it impossible for the device to achieve nanometer precision. The flexible mechanism uses flexible hinges to replace the traditional kinematic pairs of the rigid mechanism, reducing the problems of excessive clearance and wear, reducing the maintenance cost of the device, and improving the precision and reliability of the device. The invention patent with publication number CN114833801 A discloses a new three-degree-of-freedom flexible parallel micro-turntable. The platform uses a flexible ball joint as a kinematic pair, combining the advantages of the flexible mechanism and the parallel mechanism, so that the parallel micro-motion platform based on the flexible hinge has the advantages of fast response speed, high precision, and easy assembly, but there are problems such as insufficient compactness and weak load-bearing capacity.

[0004] At present, there are few studies on large-range rotation micro-positioning platforms driven by piezoelectric drive. The resolution of the rotation micro-positioning platform decreases with the increase of the rotation range. Since it is difficult to ensure symmetrical input of two or more actuators, it is difficult to achieve pure rotational motion. The invention patent with publication number CN 109079767 B discloses a three-dimensional deflectable high-speed precision micro-motion platform, which uses a connection unit composed of two straight beam flexible hinges to connect the drive mechanism with the central micro-motion platform to achieve good rotational motion of the micro-positioning platform. However, for the three-dimensional rotation micro-motion platform, its movement direction is more complicated.

[0005] By summarizing the above methods, in response to the problems existing in the above devices, the present invention designs a piezoelectrically driven rotating three-dimensional micro-motion platform, which has small assembly error, compact structure, fast response speed, and can realize the rotation of the center micro-motion platform around the Z axis and the vertical movement along the Z direction; and can achieve a large rotation angle and high precision of the center micro-motion platform with a simple structure. Summary of the invention

[0006] The purpose of the utility model is to solve the above problems and to propose a piezoelectric driven rotating three-dimensional micro-motion platform, which realizes the rotation of the central micro-motion platform (6) around the Z axis and the vertical movement along the Z direction through a simple and compact structure;

[0007] The piezoelectric driven rotating three-dimensional micro-motion platform comprises a driving mechanism 1 (1), a driving mechanism 2 (3), a driving mechanism 3 (7), a half-bridge mechanism 1 (2), a half-bridge mechanism 2 (4), a half-bridge mechanism 3 (8), a central micro-motion platform (6), a piezoelectric driver (106), a fixed end (9) and a threaded hole (5); the driving mechanism 1 (1), the driving mechanism 2 (3) and the driving mechanism 3 (7) are connected to the central micro-motion platform (6) at a spatial distribution of 120 degrees, the driving mechanism 1 (1), the driving mechanism 2 (3) and the driving mechanism 3 (7) are connected to each other through the fixed end (9) to form a whole, and the driving mechanism 1 (1), the driving mechanism 2 (3) and the driving mechanism 3 (7) are respectively connected to the half-bridge mechanism 1 ( 2), half-bridge mechanism 2 (4), and half-bridge mechanism 3 (8) are orthogonally connected, so that the motions generated by driving mechanism 1 (1), driving mechanism 2 (3), and driving mechanism 3 (7) are transmitted to the central micro-motion platform (6) through half-bridge mechanism 1 (2), half-bridge mechanism 2 (4), and half-bridge mechanism 3 (8) respectively, and the rotating three-dimensional micro-motion platform is connected to the external workbench through the device positioning hole (10), and is connected to the external device through the threaded hole (5). Since driving mechanism 1 (1), driving mechanism 2 (3), and driving mechanism 3 (7) have the same structure, and half-bridge mechanism 1 (2), half-bridge mechanism 2 (4), and half-bridge mechanism 3 (8) have the same structure, the driving mechanism 1 (1) and half-bridge mechanism 1 (2) are taken as examples for explanation below;

[0008] The driving mechanism (1) comprises: a bolt (101), a fixed block (102), a wedge block (103), a moving mass block (104), a straight beam type flexible hinge (105), a piezoelectric driver (106), a moving mass block (107), and a straight circular type flexible hinge (108); the moving mass block (104) is connected to the fixed block (102) via the symmetrically arranged straight beam type flexible hinge (105); the wedge block (103) is placed between the fixed block (102) and the moving mass block (104); the piezoelectric driver (106) is placed between the moving mass block (104) and the moving mass block (107); the wedge block (103) is pre-tightened by the bolt (101) to fix the piezoelectric driver (106); the moving mass block (107) is connected to the fixed end (9) via the straight circular type flexible hinge (108);

[0009] In the driving mechanism 1 (1) in the Y direction, the moving mass block 2 (107) is directly connected to the piezoelectric driver (106), and the wedge block (103) is pre-tightened by the bolt (101) to fix the piezoelectric driver (106), and the displacement generated by the piezoelectric driver (106) causes the moving mass block 2 (107) to be displaced along the Y direction;

[0010] The half-bridge mechanism 1 (2) comprises: an initial mass block 1 (201), a middle mass block 1 (203), an end mass block (205), a middle mass block 2 (204), an initial mass block 2 (202), a connection block 1 (206), and a connection block 2 (207); the initial mass block 1 (201) and the initial mass block 2 (202) are respectively connected to the middle mass block 1 (203) and the middle mass block 2 (204) through a straight beam type flexible hinge (105); the middle mass block 1 (203) and the middle mass block 2 (204) are connected to the end mass block (205) through a straight beam type flexible hinge (105); the end mass block (205) is connected to the connection block 1 (206) through a straight circular flexible hinge (108); and the connection block 1 (206) is connected to the connection block 2 (207) through a straight beam type flexible hinge (105);

[0011] In the half-bridge mechanism one (2) in the Y direction, the initial mass block one (201) and the initial mass block two (202) are connected to the moving mass block two (107) and the fixed end (9) as components, respectively, and the displacement generated by the moving mass block two (107) is transmitted laterally to the half-bridge mechanism one (2), so that the end mass block (205) generates a movement in the Y direction;

[0012] The initial mass block 1 (201) and the initial mass block 2 (202) in the half-bridge mechanism 1 (2) in the Z direction are connected to the moving mass block 2 (107) and the fixed end (9) as components, respectively, and the displacement generated by the moving mass block 2 (107) is orthogonally transmitted to the half-bridge mechanism 1 (2), so that the end mass block (205) generates a movement in the Z direction;

[0013] By adjusting the piezoelectric drivers (106) in the driving mechanism 1 (1), the driving mechanism 2 (3) and the driving mechanism 3 (7), the movement of the end mass block (205) on the YZ plane can be realized. The end mass block (205) is connected to the connecting block 1 (206) through a straight circular flexible hinge (108), and the connecting block 1 (206) is connected to the connecting block 2 (207) through a straight beam flexible hinge (105). The connecting block 2 (207) is directly connected to the central micro-motion platform (6), so that the central micro-motion platform (6) can rotate around the Z axis and move along the Z direction.

[0014] The piezoelectric driven rotating three-dimensional micro-motion platform is characterized in that: when the central micro-motion platform (6) rotates around the Z axis, the piezoelectric driver (106) directly pushes the moving mass block 2 (107) to cooperate with the initial mass block 1 (201) to produce a displacement in the Y direction. When the position of the initial mass block 2 (202) remains unchanged, the end mass block (205) moves in the Y direction simultaneously with the initial mass block 1 (201). The coordinated movement of the drive mechanism 1 (1), the drive mechanism 2 (3) and the drive mechanism 3 (7) causes the central micro-motion platform (6) to rotate around the Z axis.

[0015] The piezoelectric driven rotating three-dimensional micro-motion platform is characterized in that: when the central micro-motion platform (6) moves along the Z direction, the piezoelectric driver (106) directly pushes the moving mass block 2 (107) to cooperate with the initial mass block 1 (201) to produce a displacement in the Y direction. When the position of the initial mass block 2 (202) remains unchanged, the distance between the initial mass block 1 (201) and the initial mass block 2 (202) is reduced, and the end mass block (205) moves along the Z direction through extrusion. The coordinated movement of the driving mechanism 1 (1), the driving mechanism 2 (3) and the driving mechanism 3 (7) causes the central micro-motion platform (6) to move along the Z direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the utility model

[0017] Figure 2 This is a detailed diagram of the drive mechanism of the utility model

[0018] Figure 3 This is a detailed diagram of the half-bridge mechanism of the utility model

[0019] Figure 4 This is a schematic diagram of the half-bridge mechanism of the utility model.

[0020] Description of reference numerals:

[0021] A piezoelectric driven rotating three-dimensional micro-motion platform comprises a driving mechanism 1 (1), a half-bridge mechanism 1 (2), a driving mechanism 2 (3), a half-bridge mechanism 2 (4), a threaded hole (5), a central micro-motion platform (6), a driving mechanism 3 (7), a half-bridge mechanism 3 (8), a fixed end (9), a device positioning hole (10), a bolt (101), a fixed block (102), a wedge block (103), a moving mass block 1 (104), a straight beam type flexible hinge (105), a piezoelectric driver (106), a moving mass block 2 (107), a straight circular type flexible hinge (108), an initial end mass block 1 (201), an initial end mass block 2 (202), a middle end mass block 1 (203), a middle end mass block (204), a terminal mass block (205), a connecting block 1 (206), and a connecting block 2 (207). DETAILED DESCRIPTION

[0022] The embodiments of the utility model are further described below in conjunction with the accompanying drawings.

[0023] like Figure 1 The utility model is shown as a schematic diagram of the structure; specifically comprising a driving mechanism 1 (1), a half-bridge mechanism 1 (2), a driving mechanism 2 (3), a half-bridge mechanism 2 (4), a threaded hole (5), a central micro-motion platform (6), a driving mechanism 3 (7), a half-bridge mechanism 3 (8), a fixed end (9), and a device positioning hole (10); wherein the driving mechanism 1 (1), the driving mechanism 2 (3) and the driving mechanism 3 (7) have the same structure and are spatially connected to the central micro-motion platform (2) at a 120° distribution; the driving mechanism 1 (1), the driving mechanism 2 (3) and the driving mechanism 3 (7) are mutually connected to form a whole through the fixed end (9); the displacements generated by the driving mechanism 1 (1), the driving mechanism 2 (3) and the driving mechanism 3 (7) are respectively transmitted to the central micro-motion platform (6) through the half-bridge mechanism 1 (2), the half-bridge mechanism 2 (4) and the half-bridge mechanism 3 (8); the rotating three-dimensional micro-motion platform is fixed to an external workbench through the device positioning hole (10) and is connected to an external device through the threaded hole (5).

[0024] like Figure 2The driving mechanism of the utility model is shown in detail; it specifically includes a bolt (101), a fixed block (102), a wedge block (103), a moving mass block 1 (104), a straight beam type flexible hinge (105), a piezoelectric driver (106), a moving mass block 2 (107), and a straight circular type flexible hinge (108); the moving mass block 1 (104) is connected to the fixed block (102) through a symmetrically arranged straight beam type flexible hinge (105), the wedge block (103) is placed between the fixed block (102) and the moving mass block 1 (104), the piezoelectric driver (106) is placed between the moving mass block 1 (104) and the moving mass block 2 (107), the wedge block (103) is pre-tightened by the bolt (101) to fix the piezoelectric driver (106), and the moving mass block 2 (107) is connected to the straight circular type flexible hinge (108). Figure 1 The fixed end (9) is connected; the displacement generated by the piezoelectric driver (106) directly causes the moving mass block 2 (107) to generate a displacement along the Y-axis direction.

[0025] like Figure 3 The figure shows a detailed view of the half-bridge mechanism of the utility model; specifically, it includes an initial mass block 1 (201), an initial mass block 2 (202), a middle mass block 1 (203), a middle mass block 2 (204), an end mass block (205), a connecting block 1 (206), and a connecting block 2 (207); the initial mass block 1 (201) and the initial mass block 2 (202) are connected by Figure 2 The straight beam type flexible hinge (105) is connected to the middle end mass block 1 (203) and the middle end mass block 2 (204) respectively, and the middle end mass block 1 (203) and the middle end mass block 2 (204) are connected to each other by Figure 2 The straight beam type flexible hinge (105) is connected to the end mass block (205), and the end mass block (205) is connected to the end mass block (205) by Figure 2 The straight round flexible hinge (108) is connected to the connecting block 1 (206), and the connecting block 1 (206) is connected to the connecting block 1 (206) by Figure 2 The straight beam type flexible hinge (105) is connected to the second connection block (207); the first end mass block (201) and the second end mass block (202) are respectively connected to the first end mass block (201) and the second end mass block (202). Figure 2 Motion mass block 2 (107) and Figure 1 The fixed end (9) is connected, Figure 2 The displacement generated by the moving mass block 2 (107) is transmitted to the initial mass block 1 (201), so that the initial mass block 1 (201) is constantly approaching the initial mass block 2 (202). When the position of the initial mass block 2 (202) remains unchanged, the terminal mass block (205) moves along the Y direction simultaneously with the initial mass block 1 (201), and the terminal mass block (205) moves along the Z direction through extrusion; and the three piezoelectric actuators are driven at the same time to make the three terminal mass blocks move in the positive Y direction and the positive Z direction simultaneously, so that Figure 1 The central micro-motion platform (6) undergoes synchronous rotation and vertical motion; the three end masses are connected by two cross-connected Figure 2 Straight beam type flexible hinge (105) and Figure 2 The straight circular flexible hinge (108) is connected to Figure 1 The central micro-motion platform (6) reduces Figure 1 The connection block 2 (207) and the center micro-motion platform (6) are caused when they rise along the Z direction and rotate around the Z axis. Figure 1 The stress at the connection of the central micro-motion platform (6) is concentrated.

[0026] like Figure 4 The figure shows a schematic diagram of the half-bridge mechanism of the utility model; Figure 3 The initial mass block 1 (201), the initial mass block 2 (202), the middle mass block 1 (203), the middle mass block 2 (204), the end mass block (205) and Figure 2 The straight beam type flexible hinge (105) is simplified into a schematic diagram to clearly show the connection mode and motion relationship between the components. When a force in the positive direction of the Y axis is input, Figure 3 The end mass block (205) outputs a force in the positive direction of the Y axis and the positive direction of the Z axis.

Claims

1. A piezoelectric driven rotating three-dimensional micro-motion platform, characterized in that: The platform includes a driving mechanism 1, a driving mechanism 2, a driving mechanism 3, a half-bridge mechanism 1, a half-bridge mechanism 2, a half-bridge mechanism 3, a central micro-motion platform, a piezoelectric driver, a fixed end and a threaded hole; the driving mechanism 1, the driving mechanism 2 and the driving mechanism 3 are connected to the central micro-motion platform at a spatial distribution of 120°, the driving mechanism 1, the driving mechanism 2 and the driving mechanism 3 are connected to each other through the fixed end to form a whole, the driving mechanism 1, the driving mechanism 2 and the driving mechanism 3 are respectively orthogonally connected to the half-bridge mechanism 1, the half-bridge mechanism 2 and the half-bridge mechanism 3, so that the motion generated by the driving mechanism 1, the driving mechanism 2 and the driving mechanism 3 is respectively transmitted to the central micro-motion platform through the half-bridge mechanism 1, the half-bridge mechanism 2 and the half-bridge mechanism 3, the rotating three-dimensional micro-motion platform is connected to the external workbench through the device positioning hole, and is connected to the external device through the threaded hole, the driving mechanism 1, the driving mechanism 2 and the driving mechanism 3 have the same structure, and the half-bridge mechanism 1, the bridge mechanism 2 and the half-bridge mechanism 3 have the same structure; The driving mechanism 1 includes: bolts, fixed blocks, wedges, moving mass block 1, straight beam type flexible hinges, piezoelectric drivers, moving mass block 2, and straight circular type flexible hinges; the moving mass block 1 is connected to the fixed block through symmetrically arranged straight beam type flexible hinges, the wedges are placed between the fixed block and the moving mass block 1, the piezoelectric driver is placed between the moving mass block 1 and the moving mass block 2, the wedges are pre-tightened by bolts to fix the piezoelectric driver, and the moving mass block 2 is connected to the fixed end through the straight circular type flexible hinge; In the driving mechanism 1 described in the Y direction, the moving mass block 2 is directly connected to the piezoelectric driver, and the wedge block is pre-tightened by bolts to fix the piezoelectric driver. The displacement generated by the piezoelectric driver causes the moving mass block 2 to be displaced along the Y direction. The half-bridge mechanism 1 comprises: an initial mass block 1, a middle mass block 1, a terminal mass block, a middle mass block 2, an initial mass block 2, a connecting block 1, and a connecting block 2; the initial mass block 1 and the initial mass block 2 are respectively connected to the middle mass block 1 and the middle mass block 2 through a straight beam type flexible hinge, the middle mass block 1 and the middle mass block 2 are connected to the terminal mass block through a straight beam type flexible hinge, the terminal mass block is connected to the connecting block 1 through a straight circular type flexible hinge, and the connecting block 1 is connected to the connecting block 2 through a straight beam type flexible hinge; In the half-bridge mechanism 1 described in the Y direction, the initial mass block 1 and the initial mass block 2 are connected to the moving mass block 2 and the fixed end as components, and the displacement generated by the moving mass block 2 is transmitted laterally to the half-bridge mechanism 1, so that the end mass block generates Y-direction movement; In the half-bridge mechanism 1 described in the Z direction, the initial mass block 1 and the initial mass block 2 are connected to the moving mass block 2 and the fixed end as components, respectively, and the displacement generated by the moving mass block 2 is orthogonally transmitted to the half-bridge mechanism 1, so that the end mass block generates Z-direction movement; By adjusting the piezoelectric drivers in drive mechanism 1, drive mechanism 2, and drive mechanism 3, the movement of the end mass block in the YZ plane can be realized. The end mass block is connected to connecting block 1 through a straight circular flexible hinge, and connecting block 1 is connected to connecting block 2 through a straight beam flexible hinge. Connecting block 2 is directly connected to the central micro-motion platform to realize the rotation of the central micro-motion platform around the Z axis and the movement along the Z direction.

2. The piezoelectric driven rotating three-dimensional micro-motion platform according to claim 1, characterized in that: The piezoelectric driver directly pushes the moving mass block 2 to cooperate with the initial mass block 1 to produce Y-direction displacement. When the position of the initial mass block 2 remains unchanged, the end mass block moves in the Y direction simultaneously with the initial mass block 1. The coordinated movement of the driving mechanism 1, the driving mechanism 2 and the driving mechanism 3 causes the central micro-motion platform to rotate around the Z-axis.

3. The piezoelectric driven rotating three-dimensional micro-motion platform according to claim 1, characterized in that: The piezoelectric driver directly pushes the moving mass block 2 to cooperate with the initial mass block 1 to produce displacement in the Y direction. When the position of the initial mass block 2 remains unchanged, the distance between the initial mass block 1 and the initial mass block 2 is reduced. Through extrusion, the end mass block moves along the Z direction. The coordinated movement of the driving mechanism 1, the driving mechanism 2 and the driving mechanism 3 causes the central micro-motion platform to move along the Z direction.

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