Primary adsorber for phosphorane gas purification

Abstract

The utility model discloses a primary adsorber for phosphorane gas purification, which comprises an adsorber shell, a gas inlet pipe, a gas outlet pipe, a discharge pipe and an adsorption component, the adsorber shell is of a cylindrical structure, and the adsorber shell is arranged on the inner side of a support through angle iron; an upper chamber and a lower chamber are arranged on the inner side of the adsorber shell, the upper chamber and the lower chamber are communicated through a breather pipe, the top side of the upper chamber is communicated with an air inlet pipe, the air inlet pipe is communicated with an external crude phosphine input pipeline, and the bottom side of the lower chamber is communicated with an air outlet pipe and a discharge pipe; feeding holes are formed in the side edges of the upper chamber and the lower chamber, the adsorption assembly comprises an adsorption filler A and an adsorption filler B, and the adsorption filler A and the adsorption filler B are respectively filled into the upper chamber and the lower chamber from the feeding holes of the upper chamber and the lower chamber. According to the utility model, gas is adsorbed by adopting an adsorption mode of the adsorption filler A and the adsorption filler B, and compared with a single-layer adsorption filter element, the adsorption filler A and the adsorption filler B are convenient to load and unload.

Description

Technical Field

[0001] The utility model relates to the field of gas purification, in particular to a primary adsorber for purifying phosphine gas. Background Art

[0002] High-purity electronic gases are widely used in the fields of electronic information products, aerospace, high-efficiency solar cells, military industry, etc. At present, only a few countries are capable of producing high-purity electronic gases above 5.5N level. As an electronic gas, phosphine currently has the purification process including low-temperature vacuum separation, adsorption drying, distillation and catalyst (gallium-indium alloy, nickel catalyst) deep adsorption and other steps. Among them, the adsorption step is generally treated by a multi-stage adsorber. Conventional multi-stage adsorbers include primary, primary, secondary, etc., wherein the primary adsorber is used to pre-treat the gas and adsorb gas impurities. Most of the primary adsorbers in the prior art adopt single-layer adsorption, that is, the adsorption layer set in the adsorber is a single layer, and its adsorption effect is limited. Therefore, the utility model proposes a primary adsorber for phosphine gas purification, which uses the adsorption method of adsorption filler A and adsorption filler B to adsorb the gas. Compared with the single-layer adsorption filter element, the adsorption filler A and adsorption filler B are convenient for loading and unloading; at the same time, the roller brush structure provided can throw the adsorption filler on the bottom side of the chamber slope surface to the top side of the slope surface, so that the adsorption effect is more sufficient to ensure the processing quality of the adsorber. Utility Model Content

[0003] The utility model aims to provide a primary adsorber for purifying phosphine gas to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a primary adsorber for phosphine gas purification, comprising an adsorber shell, an air inlet pipe, an air outlet pipe, a discharge pipe and an adsorption component, wherein the adsorber shell is a cylindrical structure, and the adsorber shell is mounted on the inner side of a bracket by an angle iron; an upper chamber and a lower chamber are arranged on the inner side of the adsorber shell, wherein the upper chamber and the lower chamber are connected through a vent pipe, the top side of the upper chamber is connected to the air inlet pipe, the air inlet pipe is connected to an external crude phosphine input pipeline, and the bottom side of the lower chamber is connected to the air outlet pipe and the discharge pipe; feed ports are arranged on the sides of the upper chamber and the lower chamber, and the adsorption component comprises an adsorption filler A and an adsorption filler B, wherein the adsorption filler A and the adsorption filler B are respectively filled into the upper chamber and the lower chamber from the feed ports of the upper chamber and the lower chamber.

[0005] Preferably, the bottom sides of the upper chamber and the lower chamber are both provided with sloped surfaces, and the output sides of the lower ends of the upper chamber and the lower chamber are connected to the drain pipe A and the drain pipe B respectively.

[0006] Preferably, the ends of the drain pipe A and the drain pipe B are connected to the discharge pipe, and the drain pipe A and the drain pipe B are provided with an electrically controlled valve that can be opened automatically.

[0007] Preferably, a rolling brush structure is provided in the upper chamber and the lower chamber, and the rolling brush structure is located at the lower side of the slope surface of the upper chamber and the lower chamber. The rolling brush structure can throw the adsorbed filler on the bottom side of the slope surface to the top side of the slope surface.

[0008] Preferably, the roller brush structure of the upper chamber is driven by a motor, and the roller brush structures of the upper chamber and the lower chamber are linked by a belt and a pulley.

[0009] Compared with the prior art, the beneficial effects of the utility model are:

[0010] The utility model adopts the adsorption method of adsorption filler A and adsorption filler B to adsorb gas. Compared with the single-layer adsorption filter element, the adsorption filler A and adsorption filler B are convenient to load and unload. At the same time, the roller brush structure provided can throw the adsorption filler on the bottom side of the slope surface of the chamber to the top side of the slope surface, so that the adsorption effect is more sufficient to ensure the processing quality of the adsorber. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0012] Figure 2 It is a schematic diagram of the planar structure of the utility model.

[0013] In the figure: 1. adsorber shell; 101. upper chamber; 102. lower chamber; 103. ventilation pipe; 104. exhaust pipe A; 105. exhaust pipe B; 2. air inlet pipe; 3. air outlet pipe; 4. discharge pipe; 5. adsorption filler A; 6. adsorption filler B; 7. roller brush structure. DETAILED DESCRIPTION

[0014] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0015] In the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0016] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0017] See also Figure 1-2 The utility model provides a technical solution: a primary adsorber for purifying phosphine gas, comprising an adsorber shell 1, an air inlet pipe 2, an air outlet pipe 3, a discharge pipe 4 and an adsorption component, wherein the adsorber shell 1 is a cylindrical structure, and the adsorber shell 1 is mounted on the inner side of a bracket through an angle iron; an upper chamber 101 and a lower chamber 102 are arranged on the inner side of the adsorber shell 1, wherein the upper chamber 101 and the lower chamber 102 are connected through a vent pipe 103, the top side of the upper chamber 101 is connected to the air inlet pipe 2, the air inlet pipe 2 is connected to an external crude phosphine input pipeline, and the bottom side of the lower chamber 102 is connected to the air outlet pipe 3 and the discharge pipe 4; the sides of the upper chamber 101 and the lower chamber 102 are both provided with feed ports, and the adsorption component comprises an adsorption filler A5 and an adsorption filler B6, wherein the adsorption filler A5 and the adsorption filler B6 are respectively filled into the upper chamber 101 and the lower chamber 102 through the feed ports of the upper chamber 101 and the lower chamber 102.

[0018] In this embodiment, the adsorption filler A5 and the adsorption filler B6 are physical adsorbents or gas adsorption resins.

[0019] In this embodiment, the bottom sides of the upper chamber 101 and the lower chamber 102 are both provided with slope surfaces, and the output sides of the lower ends of the upper chamber 101 and the lower chamber 102 are connected to the drain pipe A 104 and the drain pipe B 105 respectively.

[0020] In this embodiment, the ends of the pipes A104 and B105 are connected to the discharge pipe 4, and the pipes A104 and B105 are provided with electric control valves that can be opened automatically. When changing materials, the corresponding electric control valves can be opened to realize automatic material change. After the material change is completed, the electric control valves are closed and new fillers are filled in from the feed inlet.

[0021] In this embodiment, a roller brush structure 7 is provided in the upper chamber 101 and the lower chamber 102. The roller brush structure 7 is located at the lower side of the slope surface of the upper chamber 101 and the lower chamber 102. The roller brush structure 7 can throw the adsorbed filler on the bottom side of the slope surface to the top side of the slope surface.

[0022] In this embodiment, the roller brush structure of the upper chamber 101 is driven by a motor, and the roller brush structures 7 of the upper chamber 101 and the lower chamber 102 are linked by a belt and a pulley.

[0023] In this embodiment, the roller brush structure 7 can also rotate to throw the adsorption filler on the top side of the slope surface to the bottom side of the slope surface when the adsorption filler A5 and the adsorption filler B6 are replaced (unloaded), thereby increasing the speed of material replacement (unloading).

[0024] In this embodiment, the adsorber uses adsorption fillers A5 and B6 to adsorb gas. Compared with a single-layer adsorption filter element, the adsorption fillers A5 and B6 are convenient for loading and unloading. At the same time, the roller brush structure 7 can throw the adsorption filler on the bottom side of the slope surface of the chamber to the top side of the slope surface, making the adsorption effect more sufficient to ensure the processing quality of the adsorber.

[0025] It is worth noting that the entire device is controlled by a main control button. Since the device matched with the control button is a common device and belongs to the existing mature technology, its electrical connection relationship and specific circuit structure will not be described in detail here.

[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A primary adsorber for phosphine gas purification, characterized in that: The invention comprises an adsorber shell (1), an air inlet pipe (2), an air outlet pipe (3), a discharge pipe (4) and an adsorption assembly, wherein the adsorber shell (1) is a cylindrical structure, and the adsorber shell (1) is mounted on the inner side of a bracket by means of angle irons; an upper chamber (101) and a lower chamber (102) are arranged on the inner side of the adsorber shell (1), wherein the upper chamber (101) and the lower chamber (102) are connected to each other by means of a ventilation pipe (103), and the top side of the upper chamber (101) is connected to the air inlet pipe (2), and the air inlet pipe (3) is connected to the upper chamber (101). The pipe (2) is connected to an external crude phosphine input pipeline, and the bottom side of the lower chamber (102) is connected to an outlet pipe (3) and a discharge pipe (4); the sides of the upper chamber (101) and the lower chamber (102) are both provided with feed ports, and the adsorption component comprises an adsorption filler A (5) and an adsorption filler B (6), wherein the adsorption filler A (5) and the adsorption filler B (6) are respectively filled into the upper chamber (101) and the lower chamber (102) through the feed ports of the upper chamber (101) and the lower chamber (102).

2. The primary adsorber for purifying phosphine gas according to claim 1, characterized in that: The bottom sides of the upper chamber (101) and the lower chamber (102) are both provided with sloped surfaces, and the output sides of the lower ends of the upper chamber (101) and the lower chamber (102) are respectively connected to a discharge pipe A (104) and a discharge pipe B (105).

3. The primary adsorber for purifying phosphine gas according to claim 2, characterized in that: The ends of the row pipe A (104) and the row pipe B (105) are connected to the discharge pipe (4), and the row pipe A (104) and the row pipe B (105) are provided with electric control valves that can be opened automatically.

4. The primary adsorber for purifying phosphine gas according to claim 1, characterized in that: A rolling brush structure (7) is provided in the upper chamber (101) and the lower chamber (102). The rolling brush structure (7) is located at the lower side of the slope surface of the upper chamber (101) and the lower chamber (102). The rolling brush structure (7) can throw the adsorbed filler on the bottom side of the slope surface to the top side of the slope surface.

5. The primary adsorber for purifying phosphine gas according to claim 4, characterized in that: The roller brush structure of the upper chamber (101) is driven by a motor, and the roller brush structures (7) of the upper chamber (101) and the lower chamber (102) are linked by a belt and a pulley.

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