PVD (Physical Vapor Deposition) dust removal device

Abstract

The utility model discloses a PVD dust removal device, relates to photovoltaic manufacturing technical field, including transport subassembly, cleaning subassembly and dust collection subassembly, cleaning subassembly includes fixed mounting on transport subassembly no. 1 support, no. 1 support is rotatingly equipped with bi-directional screw, both sides of bi-directional screw are in threaded connection with moving seat, and the moving seat is equipped with the dust collection subassembly on the both sides of bi-directional screw. A lifting base plate is arranged below the guide rods, connecting bases are fixedly installed on the two sides of the top of the lifting base plate, connecting rods are movably installed between the moving bases and the connecting bases which are arranged on the same side, and a cleaning brush is detachably installed at the bottom of the lifting base plate. According to the PVD dust removal device, the cleaning assembly is arranged, the height of the cleaning brush can be adjusted according to the specific size of the carrier plate, it is ensured that the proper contact distance between the cleaning brush and the surface of the carrier plate is kept, comprehensive and effective cleaning is achieved, the dust collection range is remarkably enlarged through the conical structure and the 60-degree inclination angle of the dust collection cover, and the dust collection efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic manufacturing, and more specifically, to a PVD dust removal device. Background Art

[0002] At present, in the photovoltaic industry, HJT systems are mostly produced by PVD (vacuum sputtering coating). With the widespread application of HJT systems, PVD technology has encountered some challenges in actual production, especially in the process chamber coating stage. In addition to the required film formed on the target product, a certain amount of film material will also be deposited on components such as the carrier and the cavity guard plate. As the number of times the carrier is used increases, the ITO (indium tin oxide) film layer on the surface of the carrier will gradually thicken and may form loose dust particles. These dust particles are very easy to fall off during the rapid exhaust and transmission vibration of the feed and discharge chambers and fall on the product, thereby causing adverse effects on the product, such as reducing product performance and affecting product appearance.

[0003] If the existing dust removal device cannot adjust the height and contact force of the cleaning brush according to the specific size of the carrier plate, it may lead to poor cleaning effect or damage to the carrier plate or cleaning components. Once the cleaning components are damaged, they need to be replaced frequently, increasing maintenance costs. In view of the above problems, the present device was invented. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, the utility model provides a PVD dust removal device to solve the problems raised in the above-mentioned background technology.

[0005] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: a PVD dust removal device, comprising a transport component, a cleaning component and a dust suction component, wherein the cleaning component is arranged at the front of the dust suction component, the cleaning component comprises a No. 1 bracket fixedly mounted on the transport component, a bidirectional screw is rotatably mounted on the No. 1 bracket, a stepper motor is fixedly mounted on the No. 1 bracket, and the output shaft of the stepper motor is connected to the bidirectional screw, a guide rod is fixedly mounted on the No. 1 bracket, a moving seat is threadedly connected on both sides of the bidirectional screw, and the guide rod passes through the moving seats on both sides, a lifting pad is arranged under the guide rod, connecting seats are fixedly mounted on both sides of the top of the lifting pad, a connecting rod is movably mounted between the moving seat and the connecting seat arranged on the same side, and a cleaning brush is detachably mounted on the bottom of the lifting pad.

[0006] Optionally, the transport assembly includes two parallel cross bars, and a plurality of rotating rollers are rotatably mounted at equal intervals between the two cross bars, wherein the cross bars and the rotating rollers are both made of stainless steel.

[0007] Optionally, a plurality of feet are fixedly installed at equal intervals on the bottom of the crossbar.

[0008] Optionally, the dust collection component includes a No. 2 bracket fixedly installed on the transport component, a hard ventilation duct is fixedly installed in the middle position of the No. 2 bracket, and a dust collection hood is connected to the end of the hard ventilation duct, wherein the No. 2 bracket and the No. 1 bracket are both made of aluminum alloy material.

[0009] Optionally, a dust concentration sensor is provided on the hard ventilation duct.

[0010] Optionally, the dust hood is a conical structure, and the angle between the dust hood and the horizontal plane is 60°.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] 1. The PVD dust removal device is provided with a cleaning assembly, which can adjust the height of the cleaning brush according to the specific size of the carrier, ensuring that the cleaning brush maintains an appropriate contact distance with the carrier surface, achieving comprehensive and effective cleaning. At the same time, by adjusting the height of the cleaning brush, it can ensure that it maintains an appropriate contact force with the carrier surface, and will not damage the carrier or bristles due to too close contact, nor will it affect the cleaning effect due to too large a contact distance;

[0013] 2. The conical structure and 60° inclination angle of the dust hood in the PVD dust removal device significantly increase the dust collection range and improve the dust collection efficiency. The connection between the hard ventilation duct and the negative pressure machine ensures that the dust can be quickly and effectively sucked into and discharged from the system, reducing secondary dust pollution. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0015] Figure 1 A schematic diagram of the overall structure of a PVD dust removal device is provided;

[0016] Figure 2 A rear view of the overall structure provided for a PVD dust removal device;

[0017] Figure 3 A side view of the overall structure of a PVD dust removal device is provided;

[0018] Figure 4 A schematic diagram of the structure of a cleaning component provided for a PVD dust removal device.

[0019] Description of reference numerals:

[0020] 1. Transport component; 101. Crossbar; 102. Rotating roller; 2. Cleaning component; 201. Bracket No. 1; 202. Bidirectional screw; 203. Guide rod; 204. Stepper motor; 205. Moving seat; 206. Lifting pad; 207. Connecting seat; 208. Connecting rod; 209. Cleaning brush; 3. Dust suction component; 301. Bracket No. 2; 302. Hard ventilation duct; 303. Dust hood; 304. Dust concentration sensor; 4. Foot pad. DETAILED DESCRIPTION

[0021] The following is a specific embodiment of the present invention. People familiar with the technology can easily understand the other advantages and functions of the present invention from the contents disclosed in this specification. Obviously, the described embodiment is a part of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] In order to enable those skilled in the art to better understand the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0023] Example:

[0024] Refer to the attached Figure 1 and Figure 3 A PVD dust removal device of this embodiment includes a transport component 1, a cleaning component 2 and a dust suction component 3, wherein the cleaning component 2 is arranged in front of the dust suction component 3, the transport component 1 transports the carrier, the cleaning component 2 cleans the dust on the surface of the carrier, and the dust suction component 3 absorbs the raised dust.

[0025] Refer to the attached Figure 1 and Figure 2 The transport component 1 includes two parallel cross bars 101, and a plurality of rotating rollers 102 are rotatably installed at equal intervals between the two cross bars 101, wherein the cross bars 101 and the rotating rollers 102 are made of stainless steel material, which ensures the durability and corrosion resistance of the device, and a plurality of feet 4 are fixedly installed at equal intervals at the bottom of the cross bars 101 to ensure stability during transportation.

[0026] Refer to the attached Figure 1 and Figure 4The cleaning component 2 includes a No. 1 bracket 201 fixedly mounted on the transport component 1. The No. 1 bracket 201 is made of aluminum alloy material to reduce the overall weight of the cleaning component 2. A bidirectional screw 202 is rotatably mounted on the No. 1 bracket 201. The bidirectional screw 202 is horizontally arranged. A stepper motor 204 is fixedly mounted on the No. 1 bracket 201, and the output shaft of the stepper motor 204 is connected to the bidirectional screw 202. When in use, the rotation of the bidirectional screw 202 can be realized by turning on the stepper motor 204. A guide rod 203 is fixedly mounted on the No. 1 bracket 201. The guide rod 203 is arranged below the bidirectional screw 202. , and is arranged horizontally, both sides of the bidirectional screw 202 are threadedly connected with a moving seat 205, and the guide rod 203 passes through the moving seats 205 on both sides, thereby realizing the limitation of the moving seats 205 on both sides, so that the moving seats 205 on both sides can move toward or away from each other during the rotation of the bidirectional screw 202, and a lifting pad 206 is arranged under the guide rod 203, and connecting seats 207 are fixedly installed on both sides of the top of the lifting pad 206, and a connecting rod 208 is movably installed between the moving seat 205 and the connecting seat 207 arranged on the same side, and a cleaning brush 209 is detachably installed at the bottom of the lifting pad 206.

[0027] The bidirectional screw 202 is driven to rotate by the stepper motor 204, thereby driving the moving seats 205 on both sides to move along the guide rod 203, and the lifting pad 206 is moved up and down by the connecting rod 208 to adjust the distance between the cleaning brush 209 and the carrier. Since different carriers may have slight size differences, the height-adjustable cleaning brush 209 can accurately adjust the height of the brush head according to the specific size of the carrier through the up and down movement of the lifting pad 206 to ensure that the brush head maintains an appropriate contact distance with the carrier surface, thereby achieving effective cleaning of the surfaces of carriers of different sizes. At the same time, appropriate contact distance is the key to ensuring the cleaning effect. If the cleaning brush 209 is in too close contact with the carrier surface, it may cause excessive wear of the bristles or damage to the carrier surface; if the contact distance is too large, it may not be able to effectively remove dust. Therefore, the height-adjustable design allows the operator to adjust the height of the cleaning brush 209 according to actual needs to obtain the best cleaning effect.

[0028] Refer to the attached Figure 1 and Figure 2The dust collection component 3 includes a No. 2 bracket 301 fixedly installed on the transport component 1. The No. 2 bracket 301 is made of aluminum alloy material, which reduces the overall weight of the dust collection component 3. A hard ventilation duct 302 is fixedly installed in the middle position of the No. 2 bracket 301. The end of the hard ventilation duct 302 is connected to a dust hood 303, and the dust hood 303 is a conical structure. The angle between the dust hood 303 and the horizontal plane is 60°, which is conducive to increasing the dust collection range and improving the dust collection efficiency. The other end of the hard ventilation duct 302 is connected to an external negative pressure machine. The dust generated during the cleaning process is collected through the dust hood 303, and the negative pressure generated by the negative pressure machine is used to suck the dust into the hard ventilation duct 302, and then discharged to the outside. A dust concentration sensor 304 is set on the hard ventilation duct 302 to monitor the dust concentration in real time, provide feedback for the cleaning process, and facilitate timely adjustment of the cleaning strategy.

[0029] Finally: The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A PVD dust removal device, comprising a transport component (1), a cleaning component (2) and a dust collection component (3), wherein the cleaning component (2) is arranged in front of the dust collection component (3), and is characterized in that: The cleaning component (2) comprises a No. 1 bracket (201) fixedly mounted on the transport component (1); a bidirectional screw (202) is rotatably mounted on the No. 1 bracket (201); a stepper motor (204) is fixedly mounted on the No. 1 bracket (201), and an output shaft of the stepper motor (204) is connected to the bidirectional screw (202); a guide rod (203) is fixedly mounted on the No. 1 bracket (201); movable seats (205) are threadedly connected to both sides of the bidirectional screw (202), and the guide rod (203) passes through the movable seats (205) on both sides; a lifting pad (206) is arranged below the guide rod (203); connecting seats (207) are fixedly mounted on both sides of the top of the lifting pad (206); a connecting rod (208) is movably mounted between the movable seat (205) and the connecting seat (207) arranged on the same side; and a cleaning brush (209) is detachably mounted on the bottom of the lifting pad (206).

2. A PVD dust removal device according to claim 1, characterized in that: The transport assembly (1) comprises two cross bars (101) arranged in parallel, and a plurality of rotating rollers (102) are rotatably mounted between the two cross bars (101) at equal intervals, wherein the cross bars (101) and the rotating rollers (102) are both made of stainless steel.

3. A PVD dust removal device according to claim 2, characterized in that: A plurality of feet (4) are fixedly mounted at equal intervals on the bottom of the crossbar (101).

4. A PVD dust removal device according to claim 1, characterized in that: The dust collection component (3) comprises a second bracket (301) fixedly mounted on the transport component (1), a hard ventilation duct (302) being fixedly mounted in the middle of the second bracket (301), and a dust collection hood (303) being connected to the end of the hard ventilation duct (302), wherein the second bracket (301) and the first bracket (201) are both made of aluminum alloy material.

5. A PVD dust removal device according to claim 4, characterized in that: The hard ventilation duct (302) is provided with a dust concentration sensor (304).

6. A PVD dust removal device according to claim 4, characterized in that: The dust hood (303) is a conical structure, and the angle between the dust hood (303) and the horizontal plane is 60°.

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