Storage device for photoresist

Abstract

The utility model provides a photoresist storage device, particularly relates to the technical field of photoresist storage, and comprises a photoresist refrigeration storage cabinet body, when the photoresist storage device is used, a photoresist storage bottle is placed in a tubular bracket, so that the photoresist storage bottle can be prevented from being touched when the photoresist storage bottle is taken, and the photoresist storage bottle is prevented from being damaged. When the photoresist storage bottles with different sizes are stored, the tray can be replaced according to the sizes of the photoresist storage bottles, so that the tubular brackets on the replaced tray are matched with the photoresist storage bottles, and during replacement, only a pull rod and a compression spring are required to be pulled, one end of the pull rod is separated from a pin hole in a first insertion column, and the photoresist storage bottles can be replaced. A second inserting column on a new tray is aligned with a first inserting groove, a first inserting column is aligned with a second inserting groove, then the tray is inserted, the pull rod is loosened, the spring rebounds, one end of the pull rod is inserted into the pin hole, and therefore the tray is fixed.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist storage, in particular to a storage device for photoresist. Background Art

[0002] Photoresist, also known as photoresist, refers to a thin film material that resists etching whose solubility changes when exposed to ultraviolet light, electron beam, ion beam, X-ray, etc. It is a light-sensitive mixed liquid composed of three main components: photosensitive resin, sensitizer and solvent. Photoresist is usually placed in a storage bottle, which is then placed on the bracket of a photoresist refrigerated storage cabinet. When taking out the photoresist storage bottle, it may be hit and damaged. If the storage bottle is placed directly, the protection effect is poor. Utility Model Content

[0003] The utility model aims to provide a storage device for photoresist, so as to solve the problem in the background technology that when taking out the photoresist storage bottle, the photoresist storage bottle is hit, so that the photoresist storage bottle is damaged, and the protection effect is poor when the storage bottle is directly placed.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a storage device for photoresist, comprising a photoresist refrigerated storage cabinet body, the photoresist refrigerated storage cabinet body comprising a glass door, an installation mechanism is arranged on the inner side of the photoresist refrigerated storage cabinet body, the installation mechanism comprises a bracket, a first slot, a second slot, a limit slide groove, a limit plate, a pull rod, a spring, a first plug post, a pin hole, a second plug post, a tray and a tubular bracket, the inner cavity side wall of the photoresist refrigerated storage cabinet body is fixedly connected with a bracket, and the top of the bracket is provided with a first A slot, a second slot is provided on the top of the bracket, a limiting slide groove is provided on the inner side of the bracket, the inner side of the limiting slide groove is slidably connected to a limiting plate, a pull rod is fixedly connected and penetrated on one side of the limiting plate, a spring is fixedly connected on one side of the limiting plate, a first plug column is inserted on the inner side of the second slot, a pin hole is provided on one side of the first plug column, a second plug column is inserted on the inner side of the first slot, a tray is fixedly connected to the top of the second plug column, a tubular bracket is provided on the bottom of the tray, and a shielding mechanism is provided on the front side of the glass door.

[0005] Preferably, the inner wall size of the first slot is matched with the outer wall size of the second plug post, and the inner wall size of the second slot is matched with the outer wall size of the first plug post.

[0006] Preferably, the inner wall size of the limiting slide groove is matched with the outer wall size of the limiting plate, and the inner wall size of the pin hole is matched with the outer wall size of one end of the pull rod.

[0007] Preferably, three mounting mechanisms are provided.

[0008] Preferably, the shielding mechanism includes a placement box, a rotating shaft, a blocking cloth, a fixing box, a coil spring, a fixing hole and a fixing rod, the placement box is fixedly connected to the front side of the glass door, the inner side of the placement box is rotatably connected to the rotating shaft, the outer side of the rotating shaft is rolled up with a blocking cloth, one end of the placement box is fixedly connected to the fixing box, the inner side of the fixing box is provided with a coil spring, a fixing hole is opened on the outer side of one end of the blocking cloth, and a fixing rod is fixedly connected to the bottom of the front side of the glass door.

[0009] Preferably, one end of the coil spring is fixedly connected to the inner wall of the fixing box, and the other end of the coil spring is fixedly connected to the rotating shaft.

[0010] Compared with the prior art, the utility model has the following beneficial effects: when the photoresist storage device is in use, the photoresist storage bottle is placed in the tubular bracket, so that the photoresist storage bottle can be prevented from being hit when the photoresist storage bottle is taken out, so as to cause damage to the photoresist storage bottle. When storing photoresist storage bottles of different sizes, the tray can be replaced according to the size of the photoresist storage bottle, so that the tubular bracket on the replaced tray is adapted to the photoresist storage bottle. When replacing, only the pull rod needs to be pulled to compress the spring, and one end of the pull rod is separated from the pin hole on the first plug post, and the tray can be replaced. The second plug post on the new tray is aligned with the first slot, the first plug post is aligned with the second slot, and then inserted, and the pull rod is released, the spring rebounds, and one end of the pull rod is inserted into the pin hole, thereby fixing the tray, and completing the replacement of the tray. A blocking cloth is set on the front side of the glass door. By pulling out the blocking cloth and plugging the fixing hole on the blocking cloth with the fixing rod, the position of the blocking cloth is fixed, and the setting of the blocking cloth can reduce the light exposure to the photoresist storage bottle. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is a schematic diagram of the appearance structure of the utility model;

[0012] Figure 2 This is a schematic diagram of the installation mechanism structure of the utility model;

[0013] Figure 3 This is a schematic diagram of the structure in which the rotating shaft and the coil spring cooperate with each other in the utility model;

[0014] Figure 4 This is a schematic diagram of the structure in which the fixing hole and the fixing rod cooperate with each other in the utility model.

[0015] In the figure: 1. photoresist cold storage cabinet body; 2. glass door; 3. mounting mechanism; 301. bracket; 302. first slot; 303. second slot; 304. limiting slide; 305. limiting plate; 306. pull rod; 307. spring; 308. first plug post; 309. pin hole; 310. second plug post; 311. tray; 312. tubular bracket; 4. shielding mechanism; 401. placement box; 402. rotating shaft; 403. blocking cloth; 404. fixing box; 405. coil spring; 406. fixing hole; 407. fixing rod. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0017] It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the conditions under which this application can be implemented. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed in this application without affecting the effects and purposes that can be achieved by this application.

[0018] Example

[0019] See also Figure 1-4The utility model discloses a storage device for photoresist, comprising a photoresist refrigerated storage cabinet body 1, the photoresist refrigerated storage cabinet body 1 comprising a glass door 2, a mounting mechanism 3 is arranged on the inner side of the photoresist refrigerated storage cabinet body 1, the mounting mechanism 3 comprises a bracket 301, a first slot 302, a second slot 303, a limiting slide 304, a limiting plate 305, a pull rod 306, a spring 307, a first plug post 308, a pin hole 309, a second plug post 310, a tray 311 and a tubular bracket 312, the inner cavity side wall of the photoresist refrigerated storage cabinet body 1 The bracket 301 is fixedly connected, a first slot 302 is provided on the top of the bracket 301, a second slot 303 is provided on the top of the bracket 301, a limiting slide groove 304 is provided on the inner side of the bracket 301, a limiting plate 305 is slidably connected to the inner side of the limiting slide groove 304, a pull rod 306 is fixedly connected to one side of the limiting plate 305, a spring 307 is fixedly connected to one side of the limiting plate 305, a first plug 308 is plugged into the inner side of the second slot 303, a pin hole 309 is provided on one side of the first plug 308, and a first slot 302 is provided on the inner side of the first slot 302. A second plug post 310 is inserted, and a tray 311 is fixedly connected to the top of the second plug post 310. A tubular bracket 312 is arranged at the bottom of the tray 311. A shielding mechanism 4 is arranged at the front side of the glass door 2. When in use, the photoresist storage bottle is placed in the tubular bracket 312, so that the photoresist storage bottle is prevented from being hit when taking the photoresist storage bottle, so as to cause the photoresist storage bottle to be damaged. When storing photoresist storage bottles of different sizes, the tray 311 can be replaced according to the size of the photoresist storage bottle, so that the tray 311 can be replaced after replacement. The tubular bracket 312 on the tray is adapted to the photoresist storage bottle. When replacing, just pull the pull rod 306 to compress the spring 307, and disengage one end of the pull rod 306 from the pin hole 309 on the first pin 308, then the tray 311 can be replaced, align the second pin 310 on the new tray 311 with the first slot 302, align the first pin 308 with the second slot 303, and then insert it, and release the pull rod 306, the spring 307 rebounds, and one end of the pull rod 306 is inserted into the pin hole 309, thereby fixing the tray 311 and completing the replacement of the tray 311.

[0020] Furthermore, the inner wall size of the first slot 302 matches the outer wall size of the second plug post 310 , and the inner wall size of the second slot 303 matches the outer wall size of the first plug post 308 .

[0021] Furthermore, the inner wall size of the limiting slide groove 304 matches the outer wall size of the limiting plate 305 , and the inner wall size of the pin hole 309 matches the outer wall size of one end of the pull rod 306 .

[0022] Furthermore, three mounting mechanisms 3 are provided.

[0023] To facilitate light blocking, the shielding mechanism 4 includes a placement box 401, a rotating shaft 402, a blocking cloth 403, a fixing box 404, a coil spring 405, a fixing hole 406 and a fixing rod 407. The placement box 401 is fixedly connected to the front side of the glass door 2, the inner side of the placement box 401 is rotatably connected to the rotating shaft 402, the outer side of the rotating shaft 402 is rolled up with the blocking cloth 403, one end of the placement box 401 is fixedly connected to the fixing box 404, the inner side of the fixing box 404 is provided with a coil spring 405, a fixing hole 406 is opened on the outer side of one end of the blocking cloth 403, a fixing rod 407 is fixedly connected to the bottom of the front side of the glass door 2, and the blocking cloth 403 is arranged on the front side of the glass door 2. By pulling out the blocking cloth 403, the fixing hole 406 on the blocking cloth 403 is plugged into the fixing rod 407, so as to fix the position of the blocking cloth 403. The setting of the blocking cloth 403 can reduce the light exposure to the photoresist storage bottle.

[0024] Furthermore, one end of the coil spring 405 is fixedly connected to the inner wall of the fixing box 404 , and the other end of the coil spring 405 is fixedly connected to the rotating shaft 402 .

[0025] Working principle: When in use, place the photoresist storage bottle in the tubular bracket 312, so as to prevent the photoresist storage bottle from being hit when taking it out, so as to cause damage to the photoresist storage bottle. When storing photoresist storage bottles of different sizes, the tray 311 can be replaced according to the size of the photoresist storage bottle, so that the tubular bracket 312 on the replaced tray 311 is adapted to the photoresist storage bottle. When replacing, just pull the pull rod 306 to compress the spring 307, and one end of the pull rod 306 is disengaged from the pin hole 309 on the first plug post 308, so that the tray 311 can be replaced, and the first plug post 308 on the new tray 311 can be replaced. The second pin 310 is aligned with the first slot 302, the first pin 308 is aligned with the second slot 303, and then inserted, and the pull rod 306 is released, the spring 307 rebounds, and one end of the pull rod 306 is inserted into the pin hole 309, thereby fixing the tray 311, and completing the replacement of the tray 311. A blocking cloth 403 is set on the front side of the glass door 2. By pulling out the blocking cloth 403, the fixing hole 406 on the blocking cloth 403 is plugged into the fixing rod 407, so as to fix the position of the blocking cloth 403. The setting of the blocking cloth 403 can reduce the light exposure to the photoresist storage bottle. The model of the photoresist refrigerated storage cabinet body 1 is: FYL-YS-150L.

[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the implementation rules without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A storage device for photoresist, comprising a photoresist refrigerated storage cabinet body (1), wherein the photoresist refrigerated storage cabinet body (1) comprises a glass door (2), characterized in that: The inner side of the photoresist cold storage cabinet body (1) is provided with a mounting mechanism (3), and the mounting mechanism (3) includes a bracket (301), a first slot (302), a second slot (303), a limiting slide groove (304), a limiting plate (305), a pull rod (306), a spring (307), a first plug post (308), a pin hole (309), a second plug post (310), a tray (311) and a tubular bracket (312). The inner cavity side wall of the photoresist cold storage cabinet body (1) is fixedly connected with the bracket (301), the top of the bracket (301) is provided with a first slot (302), the top of the bracket (301) is provided with a second slot (303), and the inner side of the bracket (301) is provided with a A limiting slide groove (304) is provided, the inner side of the limiting slide groove (304) is slidably connected to a limiting plate (305), one side of the limiting plate (305) is fixedly connected with a pull rod (306), one side of the limiting plate (305) is fixedly connected with a spring (307), the inner side of the second slot (303) is plugged with a first plug column (308), one side of the first plug column (308) is provided with a pin hole (309), the inner side of the first slot (302) is plugged with a second plug column (310), the top of the second plug column (310) is fixedly connected to a tray (311), the bottom of the tray (311) is provided with a tubular bracket (312), and the front side of the glass door (2) is provided with a shielding mechanism (4).

2. A photoresist storage device according to claim 1, characterized in that: The inner wall size of the first slot (302) matches the outer wall size of the second plug post (310), and the inner wall size of the second slot (303) matches the outer wall size of the first plug post (308).

3. A photoresist storage device according to claim 1, characterized in that: The inner wall size of the limiting sliding groove (304) is matched with the outer wall size of the limiting plate (305), and the inner wall size of the pin hole (309) is matched with the outer wall size of one end of the pull rod (306).

4. A photoresist storage device according to claim 3, characterized in that: The installation mechanisms (3) are provided in three numbers.

5. A photoresist storage device according to claim 1, characterized in that: The shielding mechanism (4) comprises a placement box (401), a rotating shaft (402), a blocking cloth (403), a fixing box (404), a coil spring (405), a fixing hole (406) and a fixing rod (407); the placement box (401) is fixedly connected to the front side of the glass door (2); the inner side of the placement box (401) is rotatably connected to the rotation shaft (402); the outer side of the rotation shaft (402) is rolled up with the blocking cloth (403); one end of the placement box (401) is fixedly connected to the fixing box (404); the inner side of the fixing box (404) is provided with a coil spring (405); the outer side of one end of the blocking cloth (403) is provided with a fixing hole (406); and the fixing rod (407) is fixedly connected to the bottom of the front side of the glass door (2).

6. A photoresist storage device according to claim 5, characterized in that: One end of the coil spring (405) is fixedly connected to the inner wall of the fixing box (404), and the other end of the coil spring (405) is fixedly connected to the rotating shaft (402).

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