Turnover device and turnover system of substrate frame

Abstract

The utility model discloses a turnover device and a turnover system for a substrate frame. The turnover device comprises an outer frame, an inner frame and a lifting mechanism, and rollers are arranged at the bottom of the outer frame; the inner frame is located in the outer frame and used for fixing the substrate frame. The lifting mechanism is arranged on the outer frame, the inner frame is connected with the outer frame through the lifting mechanism, the lifting mechanism is used for driving the inner frame to move in the first direction, and the first direction is the height direction of the turnover device. According to the turnover device, the turnover efficiency of the substrate frame is improved.

Description

Technical Field

[0001] The present application relates to the technical field of glass finishing, and in particular to a turnover device and a turnover system for a substrate rack. Background Art

[0002] After thinning and grinding, the glass needs to be coated. For example, in the field of liquid crystal panels and thin-film solar energy, the glass needs to be vacuum coated. During the coating process, the glass needs to be fixed by a substrate rack to ensure that it does not deform and is easy to move.

[0003] How to improve the turnover efficiency of substrate racks is a problem that needs to be solved urgently. Utility Model Content

[0004] The embodiments of the present application provide a substrate rack turnover device and a substrate rack turnover system, which can improve the turnover efficiency of the substrate rack.

[0005] In the first aspect, an embodiment of the present application provides a turnover device for a substrate rack, the turnover device includes an outer frame, an inner frame and a lifting mechanism, the bottom of the outer frame is provided with rollers; the inner frame is located inside the outer frame, and the inner frame is used to fix the substrate rack; the lifting mechanism is arranged on the outer frame, and the inner frame is connected to the outer frame through the lifting mechanism, and the lifting mechanism is used to drive the inner frame to move along a first direction, and the first direction is the height direction of the turnover device.

[0006] In the above scheme, the overall movement of the turnover device can be achieved through the rollers of the outer frame, so that the substrate rack can be transported from the coating equipment to the transport vehicle. Since an inner frame is also provided inside the outer frame, the inner frame can be raised and lowered through a driving mechanism, so that the inner frame can be adjusted to a suitable height according to the coating equipment and the transport vehicle. During the turnover of the substrate rack, the substrate rack in the coating equipment can be directly pushed to the inner frame, and the substrate rack on the inner frame can also be directly pushed to the transport vehicle, without manual handling, thereby improving the turnover efficiency of the substrate rack.

[0007] In some embodiments, the lifting mechanism includes a first base, a lifting drive, a lifting guide rail and a first movable member, the first base is fixed to the outer frame; the lifting drive is fixed to the first base; the lifting guide rail extends along a first direction; the first movable member is arranged on the lifting guide rail, the lifting drive is used to drive the first movable member to move along the lifting guide rail, and the inner frame is fixed to the first movable member.

[0008] In the above solution, the first movable member is driven to move along the lifting guide rail by the lifting driving member, so that the stability of the inner frame during the lifting process can be improved.

[0009] In some embodiments, the lifting mechanism further includes a first reducer, and the first reducer is respectively connected to the lifting drive member and the lifting guide rail.

[0010] In the above scheme, the first reducer can reduce the speed and increase the output torque at the same time, and can also reduce the inertia of the load; and interlocking can be achieved through the first reducer. Even if the lifting drive is powered off, the inner frame will maintain a certain height and will not fall down, thereby improving the safety of the turnover device.

[0011] In some embodiments, there are multiple lifting mechanisms, and the inner frame is connected to the outer frame through the multiple lifting mechanisms.

[0012] In the above solution, by increasing the number of lifting mechanisms, the stability of the inner frame during the lifting process can be further improved.

[0013] In some embodiments, the inner frame includes a first frame, a second frame and a transverse movement mechanism, the first frame is connected to the outer frame through a lifting mechanism; the second frame is located inside the first frame, and the second frame is used to fix the substrate rack; the transverse movement mechanism is arranged on the first frame, and the second frame is connected to the second frame through the transverse movement mechanism, and the transverse movement mechanism is used to drive the second frame to move along the second direction, and the second direction is arranged crosswise with the first direction.

[0014] In the above scheme, the position of the second frame along the second direction can be moved by the transverse movement mechanism, so that the transverse movement mechanism can be moved according to the spacing between adjacent substrate racks on the coating equipment, and different substrate racks can be pushed to the inner frame respectively, thereby realizing the transfer of multiple substrate racks and further improving the turnover efficiency of the substrate racks.

[0015] In some embodiments, the transverse movement mechanism includes a second base, a transverse movement drive, a transverse movement guide rail and a second movable member, the second base is fixed to the first frame; the transverse movement drive is fixed to the second base; the transverse movement guide rail extends along the second direction; the second movable member is arranged on the transverse movement guide rail, the transverse movement drive is used to drive the second movable member to move along the transverse movement guide rail, and the second frame is fixed to the second movable member.

[0016] In the above solution, the second movable member is driven to move along the transverse guide rail by the transverse driving member, so that the stability of the substrate rack during the movement along the second direction can be improved.

[0017] In some embodiments, the inner frame transverse movement mechanism also includes a second reducer, and the second reducer is respectively connected to the transverse movement driving member and the transverse movement guide rail.

[0018] In the above solution, the second reducer can reduce the speed while increasing the output torque, and can also reduce the inertia of the load.

[0019] In some embodiments, a guide wheel is disposed on the second frame, a rotating shaft of the guide wheel extends along the second direction, and a groove for limiting the substrate rack is disposed on the guide wheel.

[0020] In the above scheme, the groove on the guide wheel can limit and fix the substrate rack, and the automatic transportation of the substrate rack can be achieved through the rotation of the guide wheel, which further saves manpower and improves the turnover efficiency of the substrate rack.

[0021] In some embodiments, the guide wheel is provided with a plurality of grooves spaced apart in sequence along the second direction.

[0022] In the above scheme, multiple substrate racks can be transported simultaneously through multiple grooves, further improving the turnover efficiency of the substrate racks.

[0023] In some embodiments, there are multiple guide wheels, which are arranged in sequence along a third direction, the third direction is the conveying direction of the substrate rack, and the third direction intersects with the first direction and the second direction respectively.

[0024] In the above scheme, by sequentially arranging a plurality of guide wheels spaced apart from each other along the third direction, the substrate rack can be transported more smoothly.

[0025] In some embodiments, the inner frame is further provided with a limiting plate on one side of the second frame in a direction away from the guide wheel, and limiting grooves for limiting the substrate rack are formed between adjacent limiting plates.

[0026] In the above solution, the two sides of the substrate rack are limited simultaneously by the limiting plate and the guide wheel, thereby further improving the stability of the substrate rack during the transportation process.

[0027] In a second aspect, an embodiment of the present application further provides a substrate rack turnover system, wherein an inner frame includes a substrate rack turnover device according to any of the above-mentioned embodiments.

[0028] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0030] Figure 1 A schematic diagram of the structure of a substrate rack turnover device of some embodiments of the present application;

[0031] Figure 2 This is a schematic diagram of the structure of the lifting mechanism of some embodiments of the present application;

[0032] Figure 3 This is a schematic diagram of the structure of the transverse movement mechanism of some embodiments of the present application;

[0033] Figure 4 for Figure 1 A magnified schematic diagram of part A;

[0034] Figure 5 for Figure 1 An enlarged schematic diagram of part B.

[0035] Description of reference numerals:

[0036] 1000, turnover device; 100, outer frame; 110, roller; 120, control button; 200, inner frame; 210, first frame; 220, second frame; 221, guide wheel; 222, groove; 223, limit plate; 224, limit groove; 230, transverse movement mechanism; 231, second base; 232, transverse movement driving member; 233, transverse movement guide rail; 234, second moving member; 235, second reducer; 300, lifting mechanism; 310, first base; 320, lifting driving member; 330, lifting guide rail; 340, first moving member; 350, first reducer; 2000, substrate rack; X, first direction; Y, second direction; Z, third direction. DETAILED DESCRIPTION

[0037] The following detailed description and drawings of the embodiments of the present application are used to illustrate the principles of the present application, but cannot be used to limit the scope of the present application, that is, the present application is not limited to the described embodiments.

[0038] In the description of the present application, it should be noted that, unless otherwise specified, "multiple" means more than two; the terms "upper", "lower", "left", "right", "inside", "outside", etc., indicating the orientation or positional relationship, are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. "Vertical" is not strictly vertical, but is within the allowable error range. "Parallel" is not strictly parallel, but is within the allowable error range.

[0039] Reference to "embodiments" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in this application may be combined with other embodiments.

[0040] The directional words appearing in the following description are all directions shown in the figures, and do not limit the specific structure of this application. In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0041] After thinning and grinding, the glass needs to be coated. For example, in the field of liquid crystal panels and thin-film solar energy, the glass needs to be vacuum coated. In the coating process, to ensure that the glass does not deform and is easy to move, the glass needs to be fixed by a substrate rack. After the coating process is completed, the substrate rack needs to be transferred to a transport vehicle, generally using a turnover device for transportation. However, at present, it is generally necessary to manually move the substrate rack to the turnover device before operating it. After the turnover device arrives at the side of the transport vehicle, it is also necessary to manually move the substrate rack on the turnover device to the transport vehicle, which reduces the turnover efficiency of the substrate rack.

[0042] In order to solve the above technical problems, the present application provides a turnover device for a substrate rack, the turnover device includes an outer frame, an inner frame and a lifting mechanism, the bottom of the outer frame is provided with rollers; the inner frame is located inside the outer frame, and the inner frame is used to fix the substrate rack; the lifting mechanism is arranged on the outer frame, and the inner frame is connected to the outer frame through the lifting mechanism, and the lifting mechanism is used to drive the inner frame to move along a first direction, and the first direction is the height direction of the turnover device. In the above scheme, the overall movement of the turnover device can be realized by the rollers of the outer frame, so that the substrate rack can be transported from the coating equipment to the transport vehicle. Since the inner frame is also provided inside the outer frame, the inner frame can be lifted and lowered by the driving mechanism, so that the inner frame can be adjusted to a suitable height according to the coating equipment and the transport vehicle. During the turnover process of the substrate rack, the substrate rack in the coating equipment can be directly pushed to the inner frame, and the substrate rack on the inner frame can also be directly pushed to the transport vehicle, without manual handling, thereby improving the turnover efficiency of the substrate rack.

[0043] Figure 1 Schematic diagram of the structure of the substrate rack turnover device of some embodiments of the present application. Figure 1As shown, in the first aspect, the embodiment of the present application provides a turnover device 1000 of a substrate rack 2000, the turnover device 1000 includes an outer frame 100, an inner frame 200 and a lifting mechanism 300, the bottom of the outer frame 100 is provided with a roller 110; the inner frame 200 is located inside the outer frame 100, and the inner frame 200 is used to fix the substrate rack 2000; the lifting mechanism 300 is arranged on the outer frame 100, and the inner frame 200 is connected to the outer frame 100 through the lifting mechanism 300, and the lifting mechanism 300 is used to drive the inner frame 200 to move along a first direction X, and the first direction X is the height direction of the turnover device 1000.

[0044] The outer frame 100 and the inner frame 200 can be in the shape of a cuboid, a cube or other polygons. The size of the inner frame 200 is smaller than that of the outer frame 100 and is located inside the outer frame 100. Rollers 110 can be provided at the four corners of the bottom of the outer frame 100. The rollers 110 can be universal wheels to achieve movement in all directions. The inner frame 200 can fix the substrate rack 2000 by grooves 222, buckles, etc.

[0045] The lifting mechanism 300 may include a driving member such as a motor, a cylinder, a hydraulic cylinder, etc. A control button 120 may be provided on the outer frame 100, and the control button 120 is electrically connected or communicatively connected to the driving member. The control button 120 may have several switches, which may control the lifting mechanism 300 to open or close, and may also control the lifting mechanism 300 to drive the inner frame 200 to move upward or downward.

[0046] When the vacuum coating equipment and the inner frame 200 of the turnover device 1000 are not in height, the height of the inner frame 200 can be adjusted by the driving mechanism so that the inner frame 200 and the substrate rack 2000 of the vacuum coating are aligned and matched. When the turnover device 1000 is moved to the side of the transport vehicle outside the factory, if the height of the substrate rack 2000 of the turnover device 1000 and the trolley used by the transport vehicle to load the substrate rack 2000 do not match and cannot be aligned, the height of the inner frame 200 can also be adjusted by the driving mechanism so that the inner frame 200 and the height of the transport vehicle are aligned.

[0047] In the above scheme, the overall movement of the turnover device 1000 can be achieved through the rollers 110 of the outer frame 100, so as to transport the substrate rack 2000 from the coating equipment to the transport vehicle. Since the inner frame 200 is also provided inside the outer frame 100, the inner frame 200 can be raised and lowered by the driving mechanism, so that the inner frame 200 can be adjusted to a suitable height according to the coating equipment and the transport vehicle. During the turnover of the substrate rack 2000, the substrate rack 2000 in the coating equipment can be directly pushed to the inner frame 200, and the substrate rack 2000 on the inner frame 200 can also be directly pushed to the transport vehicle, without manual handling, thereby improving the turnover efficiency of the substrate rack 2000, and can also be applied to the turnover of the substrate rack 2000 between the coating equipment and the transport vehicle at different heights.

[0048] Figure 2 Schematic diagram of the structure of the lifting mechanism of some embodiments of the present application. Figure 2 As shown, in some embodiments, the lifting mechanism 300 includes a first base 310, a lifting drive member 320, a lifting guide rail 330 and a first moving member 340, the first base 310 is fixed to the outer frame 100; the lifting drive member 320 is fixed to the first base 310; the lifting guide rail 330 extends along the first direction X; the first moving member 340 is arranged on the lifting guide rail 330, the lifting drive member 320 is used to drive the first moving member 340 to move along the lifting guide rail 330, and the inner frame 200 is fixed to the first moving member 340.

[0049] The first base 310 can be fixed on the upper end of the outer frame 100, and the lifting drive 320 can be a motor, a cylinder or a hydraulic cylinder, etc. Exemplary, the lifting guide rail 330 can be a screw rod, and the first moving member 340 can be a screw rod slider. The lifting guide rail 330 is connected with the lifting drive 320, and the lifting drive 320 drives the lifting guide rail 330 to rotate, and the first moving member 340 is connected with the lifting guide rail 330 by a thread, and the first moving member 340 moves linearly on the lifting guide rail 330. Or, the lifting guide rail 330 can be a fixed slide bar, and the first moving member 340 is connected with the lifting drive 320, and the first moving member 340 is slidably connected with the lifting guide rail 330, and the lifting drive 320 drives the first moving member 340 to move linearly.

[0050] A connecting plate may be provided on the first moving member 340 for fixing with the inner frame 200. The first moving member 340 may be fixed with the inner frame 200 by means of bolts, buckles, etc.

[0051] In the above solution, the first moving member 340 is driven to move along the lifting guide rail 330 by the lifting driving member 320, so that the stability of the inner frame 200 during the lifting process can be improved.

[0052] In some embodiments, the lifting mechanism 300 further includes a first reducer 350 , and the first reducer 350 is connected to the lifting drive member 320 and the lifting guide rail 330 , respectively.

[0053] The first speed reducer 350 and the lifting guide rail 330 can be connected via a coupling. The speed reducer is an independent component consisting of gear rotation, worm transmission, and gear-worm transmission enclosed in a rigid housing.

[0054] In the above scheme, the first reducer 350 can reduce the speed and increase the output torque at the same time, and can also reduce the inertia of the load; and interlocking can be achieved through the first reducer 350, even if the lifting drive 320 is powered off, the inner frame 200 will maintain a certain height and will not fall down, thereby improving the safety of the turnover device 1000.

[0055] In some embodiments, there are multiple lifting mechanisms 300 , and the inner frame 200 is connected to the outer frame 100 via the multiple lifting mechanisms 300 .

[0056] For example, the lifting mechanism 300 may be provided at each of the four edges of the outer frame 100, and the four sides of the inner frame 200 may be connected to the lifting mechanism 300. The lifting mechanism 300 may also be provided at the middle portion of the inner frame 200, and the driving mechanism may also be connected to the two opposite sides of the inner frame 200. For example, the lifting mechanisms 300 may be provided at each of the four edges of the outer frame 100, and two lifting structures may be provided at the middle positions of the front and rear sides of the outer frame 100, for a total of eight lifting mechanisms 300.

[0057] In the above solution, by increasing the number of lifting mechanisms 300 , the stability of the inner frame 200 during the lifting process can be further improved.

[0058] Figure 1 Schematic diagram of the structure of the substrate rack turnover device of some embodiments of the present application. Figure 1 As shown, in some embodiments, the inner frame 200 includes a first frame 210, a second frame 220 and a transverse movement mechanism 230. The first frame 210 is connected to the outer frame 100 through a lifting mechanism 300; the second frame 220 is located inside the first frame 210, and the second frame 220 is used to fix the substrate rack 2000; the transverse movement mechanism 230 is arranged on the first frame 210, and the second frame 220 is connected to the second frame 220 through the transverse movement mechanism 230, and the transverse movement mechanism 230 is used to drive the second frame 220 to move along the second direction Y, and the second direction Y is arranged to cross the first direction X.

[0059] The first frame 210 and the second frame 220 may be in the shape of a cuboid, a cube or other polygons respectively. The second frame 220 is smaller than the first frame 210 and is located inside the first frame 210 .

[0060] The traverse mechanism 230 may include a driving member such as a motor, a cylinder, a hydraulic cylinder, etc. A control button 120 may be provided on the outer frame 100, and the control button 120 is electrically connected or communicatively connected to the driving member. The control button 120 may have several switches, which may control the traverse mechanism 230 to be turned on or off, and may also control the traverse mechanism 230 to drive the second frame 220 to move left or right.

[0061] The first substrate rack 2000 in the coating equipment can be pushed into the second frame 220 of the turnover device 1000 first, and then the second frame 220 is driven to move by the transverse movement mechanism 230 to align with the position of the second substrate rack 2000, and then the second substrate rack 2000 is pushed into the second frame 220 of the turnover device 1000.

[0062] In the above scheme, the position of the second frame 220 along the second direction Y can be moved by the transverse movement mechanism 230, so that the transverse movement mechanism 230 can be moved according to the spacing between adjacent substrate racks 2000 on the coating equipment, and different substrate racks 2000 can be pushed to the inner frame 200 respectively, thereby realizing the transfer of multiple substrate racks 2000 and further improving the turnover efficiency of the substrate racks 2000.

[0063] Figure 3 Schematic diagram of the structure of the transverse movement mechanism of some embodiments of the present application. Figure 3 As shown, in some embodiments, the transverse movement mechanism 230 includes a second base 231, a transverse movement driving member 232, a transverse movement guide rail 233 and a second movable member 234, the second base 231 is fixed to the first frame 210; the transverse movement driving member 232 is fixed to the second base 231; the transverse movement guide rail 233 extends along the second direction Y; the second movable member 234 is arranged on the transverse movement guide rail 233, the transverse movement driving member 232 is used to drive the second movable member 234 to move along the transverse movement guide rail 233, and the second frame 220 is fixed to the second movable member 234.

[0064] The second base 231 can be fixed on the upper end of the first frame 210, and the traverse drive member 232 can be a motor, a cylinder or a hydraulic cylinder etc. Exemplary, the traverse guide rail 233 can be a screw rod, and the second moving member 234 can be a screw rod slider. The traverse guide rail 233 is connected with the traverse drive member 232, and the traverse drive member 232 drives the traverse guide rail 233 to rotate, and the second moving member 234 is connected with the traverse guide rail 233 by a thread, and the second moving member 234 moves linearly on the traverse guide rail 233. Or, the traverse guide rail 233 can be a fixed slide bar, and the second moving member 234 is connected with the traverse drive member 232, and the second moving member 234 is slidably connected with the traverse guide rail 233, and the traverse drive member 232 drives the second moving member 234 to move linearly.

[0065] A connecting plate may be provided on the second moving member 234 for fixing with the second frame 220. The second moving member 234 may be fixed with the second frame 220 by means of bolts, buckles, etc.

[0066] In the above solution, the second moving member 234 is driven by the transverse driving member 232 to move along the transverse guide rail 233, so that the stability of the substrate frame 2000 during the movement along the second direction Y can be improved.

[0067] In some embodiments, the transverse movement mechanism 230 of the inner frame 200 further includes a second reducer 235 , and the second reducer 235 is respectively connected to the transverse movement driving member 232 and the transverse movement guide rail 233 .

[0068] The second speed reducer 235 and the lifting guide rail 330 can be connected via a coupling. The speed reducer is an independent component consisting of gear rotation, worm transmission, and gear-worm transmission enclosed in a rigid housing.

[0069] In the above solution, the second reducer 235 can reduce the speed and increase the output torque at the same time, and can also reduce the inertia of the load.

[0070] Figure 4 for Figure 1 A magnified schematic diagram of part A. Figure 4 As shown, in some embodiments, a guide wheel 221 is disposed on the second frame 220 , the rotation axis of the guide wheel 221 extends along the second direction Y, and a groove 222 for limiting the substrate rack 2000 is disposed on the guide wheel 221 .

[0071] The substrate rack 2000 in the coating device only needs to be gently pushed into the groove 222 of the guide wheel 221 of the second frame 220, and the guide wheel 221 can rotate to transport the substrate rack 2000 to the inside of the second frame 220. When the turnover device 1000 reaches the side of the transport vehicle, the substrate rack 2000 in the turnover device 1000 can also be transported to the transport vehicle by rotating the guide wheel 221.

[0072] In the above solution, the groove 222 on the guide wheel 221 can limit and fix the substrate rack 2000. The rotation of the guide wheel 221 can realize the automatic transportation of the substrate rack 2000, which further saves manpower and improves the turnover efficiency of the substrate rack 2000.

[0073] In some embodiments, the guide wheel 221 is provided with a plurality of grooves 222 which are sequentially spaced apart along the second direction Y.

[0074] A guide wheel 221 may also be provided in the coating equipment. When the substrate rack 2000 in the coating equipment is transferred to the turnover device 1000, the guide wheel 221 of the first substrate rack 2000 of the coating equipment may be aligned with the guide wheel 221 in the turnover device 1000, and the first substrate rack 2000 in the coating equipment may be pushed into the second frame 220 of the turnover device 1000, and then the second frame 220 may be driven to move by the transverse movement mechanism 230, so that another guide wheel 221 of the turnover device 1000 is aligned with the guide wheel 221 of the second substrate rack 2000 of the coating equipment, and then the second substrate rack 2000 is pushed into the second frame 220 of the turnover device 1000.

[0075] In the above solution, multiple substrate racks 2000 can be transported simultaneously through the multiple grooves 222 , further improving the turnover efficiency of the substrate racks 2000 .

[0076] In some embodiments, there are multiple guide wheels 221, which are arranged in sequence along the third direction Z. The third direction Z is the conveying direction of the substrate rack 2000, and the third direction Z intersects with the first direction X and the second direction Y respectively.

[0077] The first direction X may be perpendicular to the second direction Y and the third direction Z respectively. The first direction X is the height direction of the turnover device 1000 , the second direction Y may be the left-right direction, and the third direction Z is the front-back direction.

[0078] In the above solution, by sequentially arranging a plurality of spaced guide wheels 221 along the third direction Z, the substrate rack 2000 can be transported more smoothly.

[0079] Figure 5 for Figure 1 A magnified schematic diagram of part B. Figure 5 As shown, in some embodiments, the inner frame 200 is further provided with a limiting plate 223 on one side of the second frame 220 away from the guide wheel 221 , and limiting grooves 224 for limiting the substrate rack 2000 are formed between adjacent limiting plates 223 .

[0080] The guide wheel 221 is located at the bottom of the second frame 220, and the limiting plate 223 is located at the top of the second frame 220. The groove 222 of the guide wheel 221 is used to limit the bottom of the substrate rack 2000, and the limiting groove 224 is used to limit the top of the substrate rack 2000.

[0081] In the above solution, the limiting plate 223 and the guide wheel 221 simultaneously limit the two sides of the substrate rack 2000, thereby further improving the stability of the substrate rack 2000 during the transportation process.

[0082] In a second aspect, an embodiment of the present application further provides a turnover system for a substrate rack 2000 , wherein the inner frame 200 includes a turnover device 1000 for a substrate rack 2000 according to any of the above-mentioned embodiments.

[0083] According to some embodiments of the present application, the present application provides a turnover device 1000 of a substrate rack 2000, the inner frame 200 includes an outer frame 100, an inner frame 200 and a lifting mechanism 300, and a roller 110 is arranged at the bottom of the outer frame 100; the inner frame 200 is located inside the outer frame 100, and the inner frame 200 is used to fix the substrate rack 2000; the lifting mechanism 300 is arranged on the outer frame 100, and the inner frame 200 is connected to the outer frame 100 through the lifting mechanism 300, and the lifting mechanism 300 is used to drive the inner frame 200 to move along a first direction X, and the first direction X is the height direction of the turnover device 1000. The lifting mechanism 300 includes a first base 310, a lifting drive member 320, a lifting guide rail 330 and a first moving member 340. The first base 310 is fixed to the outer frame 100; the lifting drive member 320 is fixed to the first base 310; the lifting guide rail 330 extends along the first direction X; the first moving member 340 is arranged on the lifting guide rail 330, the lifting drive member 320 is used to drive the first moving member 340 to move along the lifting guide rail 330, and the inner frame 200 is fixed to the first moving member 340.

[0084] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should all be included in the scope of the claims and specification of the present application. In particular, as long as there is no structural conflict, the various technical features mentioned in the various embodiments can be combined in any way. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

Claims

1. A substrate rack turnover device, characterized in that: include: An outer frame, wherein a roller is disposed at the bottom of the outer frame; An inner frame, located inside the outer frame, and used for fixing the substrate rack; A lifting mechanism is arranged on the outer frame, and the inner frame is connected to the outer frame through the lifting mechanism. The lifting mechanism is used to drive the inner frame to move along a first direction, and the first direction is the height direction of the turnover device.

2. The substrate rack turnover device according to claim 1, characterized in that: The lifting mechanism comprises: A first base, fixed to the outer frame; A lifting drive member, fixed to the first base; A lifting guide rail extending along the first direction; The first moving member is arranged on the lifting guide rail, the lifting driving member is used to drive the first moving member to move along the lifting guide rail, and the inner frame is fixed to the first moving member.

3. The substrate rack turnover device according to claim 2, characterized in that: The lifting mechanism further includes a first reducer, and the first reducer is connected to the lifting drive member and the lifting guide rail respectively.

4. The substrate rack turnover device according to claim 1, characterized in that: The number of the lifting mechanisms is multiple, and the inner frame is connected to the outer frame through the multiple lifting mechanisms.

5. The substrate rack turnover device according to any one of claims 1 to 4, characterized in that: The inner frame includes: A first frame connected to the outer frame via the lifting mechanism; A second frame is located inside the first frame, and the second frame is used to fix the substrate rack; The transverse movement mechanism is arranged on the first frame, and the second frame is connected to the second frame through the transverse movement mechanism. The transverse movement mechanism is used to drive the second frame to move along a second direction, and the second direction is arranged to cross the first direction.

6. The substrate rack turnover device according to claim 5, characterized in that: The traverse mechanism comprises: A second base, fixed to the first frame; A transverse driving member, fixed to the second base; a transverse guide rail extending along the second direction; The second movable member is arranged on the transverse guide rail, the transverse driving member is used to drive the second movable member to move along the transverse guide rail, and the second frame is fixed to the second movable member.

7. The substrate rack turnover device according to claim 6, characterized in that: The transverse movement mechanism also includes a second reducer, which is respectively connected to the transverse movement driving member and the transverse movement guide rail.

8. The substrate rack turnover device according to claim 5, characterized in that: The second frame is provided with a guide wheel, the rotation axis of the guide wheel extends along the second direction, and the guide wheel is provided with a groove for limiting the substrate rack.

9. The substrate rack turnover device according to claim 8, characterized in that: The guide wheel is provided with a plurality of grooves which are sequentially spaced apart along the second direction.

10. The substrate rack turnover device according to claim 8, characterized in that: There are multiple guide wheels, which are sequentially spaced apart along a third direction, the third direction is a conveying direction of the substrate rack, and the third direction intersects with the first direction and the second direction respectively.

11. The substrate rack turnover device according to claim 8, characterized in that: A limiting plate is further arranged on one side of the second frame in a direction away from the guide wheel, and limiting grooves for limiting the substrate rack are formed between adjacent limiting plates.

12. A substrate rack turnover system, characterized in that: A turnover device comprising a substrate rack according to any one of claims 1-11.

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