Single crystal furnace

Abstract

The utility model provides a single crystal furnace. The cover plate is arranged on the top of the furnace body, the water cooling screen is arranged in the furnace body, the lower end of the water inlet pipe and the lower end of the water outlet pipe are both communicated with the water cooling screen, and the heat preservation cover is arranged above the cover plate. A first through hole for the crystal bar to pass through, a second through hole for the water inlet pipe to pass through and a third through hole for the water outlet pipe to pass through are formed in the heat preservation cover. According to the single crystal furnace disclosed by the invention, the heat preservation cover arranged at the top of the single crystal furnace can effectively increase the heat preservation property of the top of the single crystal furnace and avoid the loss of the internal temperature of the single crystal furnace, so that the heat preservation property of a thermal field of the single crystal furnace can be improved, the electric energy consumption during operation of the single crystal furnace is reduced, and finally, the electric charge expenditure can be effectively reduced.

Description

Technical Field

[0001] The utility model relates to the field of single crystal silicon production equipment, in particular to a single crystal furnace. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment and grows single crystals without dislocation using the direct pulling method. Electricity is usually used for heating. Since the single crystal furnace consumes a lot of electricity during the heating process, the electricity cost in crystal pulling production is the main expenditure in the production cost structure. Reducing the electricity cost in the crystal pulling production process is the current top priority. Utility Model Content

[0003] In view of this, an embodiment of the utility model provides a single crystal furnace to reduce the electricity cost in the crystal pulling production process.

[0004] To achieve the above purpose, the present invention provides the following technical solutions:

[0005] A single crystal furnace comprises: a furnace body, a cover plate, a water cooling screen, a water inlet pipe, a water outlet pipe and a heat preservation cover;

[0006] The cover plate is arranged on the top of the furnace body;

[0007] The water cooling screen is arranged inside the furnace body;

[0008] The lower end of the water inlet pipe and the lower end of the water outlet pipe are both connected to the water cooling screen;

[0009] The heat preservation cover is arranged above the cover plate, and is provided with a first through hole for the crystal rod to pass through, a second through hole for the water inlet pipe to pass through, and a third through hole for the water outlet pipe to pass through.

[0010] Preferably, the second through hole and the third through hole are symmetrically arranged on both sides of the first through hole.

[0011] Preferably, the heat-insulating cover comprises: a furnace cover and a heat-insulating member;

[0012] The lower end of the furnace cover is connected to the furnace body;

[0013] The heat-insulating element is arranged between the furnace cover and the cover plate.

[0014] Preferably, the outer diameter of the heat-insulating component is less than or equal to the inner diameter of the furnace barrel of the furnace body.

[0015] Preferably, the surface of the thermal insulation member is coated with a curing coating.

[0016] Preferably, the thermal insulation component is assembled from a plurality of thermal insulation units.

[0017] Preferably, the thermal insulation member is made of cured felt.

[0018] Preferably, the inner wall of the heat-insulating component is provided with a first slot for the water inlet pipe to be inserted into and a second slot for the water outlet pipe to be inserted into.

[0019] The utility model provides a single crystal furnace, wherein a cover plate is arranged on the top of the furnace body, a water cooling screen is arranged in the furnace body, the lower end of the water inlet pipe and the lower end of the water outlet pipe are both connected to the water cooling screen, and a heat preservation cover is arranged above the cover plate, and a first through hole for the crystal rod to pass through, a second through hole for the water inlet pipe to pass through, and a third through hole for the water outlet pipe to pass through are provided in the heat preservation cover. Through the above-disclosed single crystal furnace, since the heat preservation cover arranged on the top of the single crystal furnace can effectively increase the heat preservation of the top of the single crystal furnace and avoid the temperature loss inside the single crystal furnace, the present application can improve the heat preservation performance of the thermal field of the single crystal furnace, thereby reducing the power consumption of the single crystal furnace during operation, and finally effectively reducing the electricity bill expenditure. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the structure of a single crystal furnace provided in an embodiment of the utility model;

[0022] Figure 2 A top view of the thermal insulation component provided in an embodiment of the utility model.

[0023] Among them, there are a furnace body 1, a cover plate 2, a water cooling screen 3, a water inlet pipe 4, a water outlet pipe 5, a heat preservation cover 6, a furnace cover 61, a heat preservation part 62, a first slot 621, and a second slot 622. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] The utility model embodiment provides a single crystal furnace, see Figure 1 and Figure 2 , Figure 1 Schematic diagram of the structure of a single crystal furnace, the single crystal furnace comprises: a furnace body 1, a cover plate 2, a water cooling screen 3, a water inlet pipe 4, a water outlet pipe 5 and a heat preservation cover 6;

[0026] The cover plate 2 is arranged on the top of the furnace body 1;

[0027] The water cooling screen 3 is arranged in the furnace body 1;

[0028] The lower end of the water inlet pipe 4 and the lower end of the water outlet pipe 5 are both connected to the water cooling screen 3;

[0029] The heat preservation cover 6 is arranged above the cover plate 2 , and is provided with a first through hole for the crystal rod to pass through, a second through hole for the water inlet pipe 4 to pass through, and a third through hole for the water outlet pipe 5 to pass through.

[0030] It should be noted that the heat-insulating cover 6 is provided with a second through hole for the water inlet pipe 4 to pass through and a third through hole for the water outlet pipe 5 to pass through, so as to avoid interference between the water inlet pipe 4 and the water outlet pipe 5 .

[0031] In the embodiment of the utility model, the cover plate 2 is arranged on the top of the furnace body 1, and the water cooling screen 3 is arranged inside the furnace body 1, and the lower ends of the water inlet pipe 4 and the water outlet pipe 5 are both connected to the water cooling screen 3, and the heat preservation cover 6 is arranged above the cover plate 2, and a first through hole for the crystal rod to pass through, a second through hole for the water inlet pipe 4 to pass through, and a third through hole for the water outlet pipe 5 to pass through are opened in the heat preservation cover 6. Through the above-disclosed single crystal furnace, since the heat preservation cover 6 arranged on the top of the single crystal furnace can effectively increase the heat preservation of the top of the single crystal furnace and avoid the temperature loss inside the single crystal furnace, the present application can improve the heat preservation performance of the thermal field of the single crystal furnace, thereby reducing the power consumption of the single crystal furnace during operation, and finally effectively reducing the electricity bill.

[0032] Specifically, the second through hole and the third through hole are symmetrically arranged on both sides of the first through hole.

[0033] It should be noted that the second through hole and the third through hole can be symmetrically arranged on both sides of the first through hole, or can be arranged according to the original positions of the water inlet pipe 4 and the water outlet pipe 5. Those skilled in the art can make a choice according to needs.

[0034] Specifically, the heat preservation cover 6 includes: a furnace cover 61 and a heat preservation member 62;

[0035] The lower end of the furnace cover 61 is connected to the furnace body 1;

[0036] The heat-insulating member 62 is disposed between the furnace cover 61 and the cover plate 2 .

[0037] It should be noted that the lower end of the furnace cover 61 is connected to the furnace body 1, and the insulation member 62 is disposed between the furnace cover 61 and the cover plate 2, which can effectively improve the overall rigidity of the insulation cover 6, thereby preventing the insulation member 62 from being damaged due to impact.

[0038] Preferably, the furnace cover 61 is made of metal material.

[0039] It should be noted that the furnace cover 61 can be made of metal material or other high temperature resistant materials, and those skilled in the art can make the selection according to the requirements.

[0040] Furthermore, the outer diameter of the heat insulating member 62 is smaller than or equal to the inner diameter of the furnace tube of the furnace body 1 .

[0041] It should be noted that the outer diameter of the insulation member 62 is set to be less than or equal to the inner diameter of the furnace tube of the furnace body 1, so that the overall appearance of the single crystal furnace formed by the cooperation of the furnace cover 61 and the furnace body 1 is more beautiful (that is, the appearance is not obviously abrupt).

[0042] Preferably, the outer diameter of the heat-insulating member 62 is 10 mm smaller than the inner diameter of the furnace barrel of the furnace body 1 .

[0043] Specifically, the surface of the heat-insulating member 62 is coated with a curing coating.

[0044] It should be noted that by applying a fixed coating on the surface of the thermal insulation member 62 , cracking or falling off of the thermal insulation member 62 can be avoided, thereby preventing the thermal insulation member 62 material from falling off and affecting the quality of the silicon rods.

[0045] Preferably, the fixing coating is a composite resin.

[0046] Specifically, the thermal insulation component 62 is assembled from a plurality of thermal insulation units.

[0047] It should be noted that configuring the thermal insulation component 62 to be assembled from a plurality of thermal insulation units not only facilitates installation by workers, but also reduces the difficulty of manufacturing the thermal insulation component 62 .

[0048] Specifically, the heat-insulating member 62 is made of cured felt.

[0049] It should be noted that the thermal insulation component 62 is made of cured felt, and may also be made of other materials with poor thermal conductivity and high temperature resistance, and those skilled in the art may choose the material according to their needs.

[0050] Furthermore, the inner wall of the heat-insulating member 62 is provided with a first slot 621 for the water inlet pipe 4 to be inserted into and a second slot 622 for the water outlet pipe 5 to be inserted into.

[0051] It should be noted that by providing a first slot 621 for the water inlet pipe 4 to be inserted into the inner wall of the thermal insulation component 62 and a second slot 622 for the water outlet pipe 5 to be inserted into the inner wall of the thermal insulation component 62, the assembly efficiency of the thermal insulation component 62 and the water inlet pipe 4 and the water outlet pipe 5 can be further improved.

[0052] Preferably, a top solid felt is provided on the upper part of the furnace body 1, and the inner diameter of the heat-insulating member 62 is greater than or equal to the inner diameter of the top solid felt.

[0053] It should be noted that the inner diameter of the heat-insulating member 62 is greater than or equal to the inner diameter of the top solid felt, so as to avoid the inner diameter of the heat-insulating member 62 affecting the passage of the crystal rod.

[0054] Preferably, the inner diameter of the heat-insulating member 62 is 10 mm greater than the inner diameter of the top solid felt.

[0055] Preferably, the width of the first slot 621 and the width of the second slot 622 are both greater than the outer diameter of the water inlet pipe 4 or the water outlet pipe 5, so as to avoid interference between the water inlet pipe 4 and the water outlet pipe 5 and the heat preservation component 62 during use.

[0056] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A single crystal furnace, characterized in that: include: Furnace body, cover plate, water cooling screen, water inlet pipe, water outlet pipe and insulation cover; The cover plate is arranged on the top of the furnace body; The water cooling screen is arranged in the furnace body; The lower end of the water inlet pipe and the lower end of the water outlet pipe are both connected to the water cooling screen; The heat preservation cover is arranged above the cover plate, and is provided with a first through hole for the crystal rod to pass through, a second through hole for the water inlet pipe to pass through, and a third through hole for the water outlet pipe to pass through; The second through hole and the third through hole are symmetrically arranged on both sides of the first through hole; The insulation cover comprises: a furnace cover and an insulation member; The lower end of the furnace cover is connected to the furnace body; The heat-insulating component is arranged between the furnace cover and the cover plate.

2. The single crystal furnace according to claim 1, characterized in that: The outer diameter of the heat-insulating member is smaller than or equal to the inner diameter of the furnace barrel of the furnace body.

3. The single crystal furnace according to claim 1, characterized in that: The surface of the heat-insulating component is coated with a curing coating.

4. The single crystal furnace according to claim 1, characterized in that: The heat-insulating component is assembled from a plurality of heat-insulating units.

5. The single crystal furnace according to claim 1, characterized in that: The heat-insulating component is made of cured felt material.

6. The single crystal furnace according to claim 1, characterized in that: The inner wall of the heat-insulating component is provided with a first slot for the water inlet pipe to be inserted into and a second slot for the water outlet pipe to be inserted into.

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