Electromagnetic structure of micro-displacement sensor

Abstract

The utility model provides an electromagnetic structure of a micro displacement sensor, which is an electromagnetic structure for isolating a coil magnetic field used for adjusting measuring force between a scanning mechanism of a step profiler and an object to be measured, the scanning mechanism comprises a scanning piece for scanning the object to be measured and a swing rod linked with the scanning piece, and the electromagnetic structure comprises a first shell and a second shell, the first shell and the second shell are matched to form a containing cavity for containing an inductance coil generating a coil magnetic field, a magnetic part is arranged at the end, close to the inductance coil, of the swing rod, and a through hole for a wire of the inductance coil to penetrate out is formed in the side, away from the magnetic part, of the first shell. The second shell at least partially sleeves the first shell, a notch is formed in the side, close to the scanning piece, of the second shell, and the swing rod is arranged in the containing cavity in a swing mode through the notch. According to the utility model, the electromagnetic structure of the micro-displacement sensor, which is simple in structure and enables the measurement precision of the micro-displacement sensor to be improved, can be provided.

Description

Technical Field

[0001] The utility model relates to the field of intelligent manufacturing equipment industry, and in particular to an electromagnetic structure of a micro-displacement sensor. Background Art

[0002] A step profiler is a contact-type surface topography measuring instrument, commonly used to measure parameters such as surface features of micrometer and nanometer structures and film thickness. During step profiler measurement, the scanner comes into contact with the object to be measured and slides across the surface of the object to be measured. The sensor is connected to the scanner and receives the motion signal of the scanner and transmits it to the computer. The motion signal is ultimately presented as the surface topography of the object to be measured. Generally speaking, in order to maintain the measurement accuracy of the step profiler, the measurement force applied by the scanner to the object to be measured should be kept constant.

[0003] The step meter generally generates an attractive force or a repulsive force through an inductor coil, and the attractive force or the repulsive force acts on the scanning piece through a pendulum, which is finally reflected as a measuring force of the scanning piece on the object to be measured. The step meter generally changes the size of the attractive force or the repulsive force generated by the inductor coil by changing the current in the inductor coil wire, and further adjusts the size of the attractive force or the repulsive force according to the contact between the scanning piece and the object to be measured (such as whether there is contact, the size of the interaction force between the scanning piece and the object to be measured) to achieve the purpose of keeping the measuring force constant.

[0004] Generally speaking, the outside world (such as the external driving current) will affect the coil magnetic field, and the coil magnetic field will also affect other components (such as scanners, sensors, etc.), which may reduce the measurement accuracy of the step meter. In the prior art, an electromagnetic structure composed of an electromagnetic shielding shell is usually used to reduce the influence of the outside world on the coil magnetic field. However, the electromagnetic structure in the prior art is relatively complex, and at the same time, the influence of the routing method of the inductor coil's wire on the coil magnetic field is not considered, so the influence on the coil magnetic field cannot be effectively reduced. Summary of the invention

[0005] The utility model is proposed in view of the above-mentioned prior art conditions, and its purpose is to provide an electromagnetic structure of a micro-displacement sensor which has a simple structure and can improve the measurement accuracy of the micro-displacement sensor.

[0006] To this end, the utility model provides an electromagnetic structure of a micro-displacement sensor, which is an electromagnetic structure for isolating a coil magnetic field used to adjust a measuring force between a scanning mechanism of the step meter and an object to be measured, wherein the scanning mechanism includes a scanning piece for scanning the object to be measured and a swing arm linked to the scanning piece, and the electromagnetic structure includes a first shell and a second shell, wherein the first shell and the second shell cooperate to form a accommodating cavity for accommodating an inductor coil that generates the coil magnetic field, the swing arm has a magnetic component at one end close to the inductor coil, and has a through hole for the wire of the inductor coil to pass through on a side of the first shell away from the magnetic component; the second shell is at least partially fitted on the first shell, and has a notch on a side of the second shell close to the scanning piece, and the swing arm is swingably arranged in the accommodating cavity through the notch.

[0007] In the utility model, by at least partially fitting the second shell onto the first shell, the first shell and the second shell form a nearly closed space, and accommodating the inductor coil in the space, the influence of the outside world on the coil magnetic field and the influence of the coil magnetic field on components outside the electromagnetic structure can be reduced; by making the through hole for the wire to pass through away from the magnetic component so that the wire passes through from the side away from the magnetic component, the influence of the magnetic field around the wire on the coil magnetic field can be reduced, thereby improving the measurement accuracy of the micro-displacement sensor.

[0008] In addition, in the electromagnetic structure of the micro-displacement sensor involved in the utility model, optionally, the first shell includes a first main body and a first opening facing a first direction, the second shell includes a second main body and a second opening facing a second direction, the first main body is fitted on the second main body, and the first direction is opposite to the second direction. In this case, by arranging the first opening and the second opening relative to each other, when the first shell and the second shell are fitted together, the first shell closes the second opening and the second shell closes the first opening, so that the first shell and the second shell can form a nearly sealed shell after being fitted together, thereby reducing the influence of the outside world on the coil magnetic field of the inductor coil.

[0009] In addition, in the electromagnetic structure of the micro-displacement sensor involved in the present invention, optionally, the electromagnetic structure also includes a fixing part for installing the inductor coil, the first main body portion includes a first substrate arranged opposite to the first opening portion and having a fixing hole, and the fixing part cooperates with the fixing hole to install the inductor coil on the first shell.

[0010] In addition, in the electromagnetic structure of the micro-displacement sensor involved in the utility model, optionally, the first main body also includes a first extension portion formed on the first substrate and extending along the first direction, and the length of the first extension portion is not less than the length of the inductor coil along the first direction or the second direction. In this case, by making the length of the first extension portion not less than the length of the inductor coil, the inductor coil can be covered inside the first shell, thereby improving the isolation effect of the electromagnetic structure, thereby reducing the influence of the outside world on the coil magnetic field of the inductor coil.

[0011] In addition, in the electromagnetic structure of the micro-displacement sensor involved in the utility model, optionally, the second main body includes a second substrate opposite to the second opening and a second extension formed on the second substrate and extending along the second direction, the notch is arranged on the side of the second extension close to the scanning part, the notch is connected to the second opening, and the length of the notch is not less than the length of the first extension. In this case, since the swing rod is connected to the scanning part, and the swing rod needs to be installed into the accommodating cavity through the notch, by setting the notch on the side of the second extension close to the scanning part, it is easy to install the end of the swing rod with the magnetic component into the accommodating cavity, thereby reducing the difficulty of installing the electromagnetic structure. In addition, by making the length of the notch not less than the length of the first extension, the notch can have a space for the swing rod to swing at the notch, thereby increasing the scope of application of the step meter. In addition, when the notch is connected to the second opening, the difficulty of installing the electromagnetic structure can be reduced by first assembling the first shell, the inductor coil, and the swing rod, and then directly fitting the second shell on the first shell.

[0012] In addition, in the electromagnetic structure of the micro-displacement sensor involved in the utility model, optionally, the extension direction of the notch is parallel to the scanning direction of the scanning piece. In this case, since the swing direction of the swing rod is parallel to the scanning direction of the scanning piece, that is, the swing direction of the swing rod is also parallel to the extension direction of the notch, the swing rod can have enough swing space when swinging at the notch, thereby improving the application range of the step meter.

[0013] In addition, in the electromagnetic structure of the micro-displacement sensor involved in the utility model, optionally, the second shell at least partially covers the first shell, and the first shell at least partially covers the gap. In this case, by making the second shell at least partially cover the first shell, by increasing the fitting area between the outer surface of the first shell and the inner surface of the second shell, the first shell and the second shell can be more firmly fitted. In addition, by making the first shell at least partially cover the gap, the opening area formed by the fitting of the first shell and the second shell can be reduced, thereby reducing the influence of the outside world on the coil magnetic field of the inductor coil.

[0014] In addition, in the electromagnetic structure of the micro-displacement sensor involved in the utility model, optionally, the number of the perforations is two. In this case, the two ends of the wire of the inductor coil can respectively pass through or pass through the two perforations, so that the wire can better fit the inner surface of the perforation, so that the wire can close the perforation and reduce the influence of the outside world on the coil magnetic field of the inductor coil.

[0015] In addition, in the electromagnetic structure of the micro-displacement sensor involved in the utility model, optionally, the first shell and the second shell are cylindrical, and the outer diameter of the first shell matches the inner diameter of the second shell. In this case, since the inductor coil is usually also cylindrical, by making the first shell and the second shell cylindrical, it is easy to install the inductor coil in the first shell, and the first shell and the second shell can be more evenly stressed after being fitted, so that the first shell and the second shell can be fitted more firmly.

[0016] In addition, in the electromagnetic structure of the micro-displacement sensor involved in the utility model, optionally, it also includes a protective member fixed around the scanning part and having a groove matching the outer contour of the scanning part. In this case, when other objects are about to collide with the scanning part, by fixing the protective member around the scanning part, the protective member can play a blocking role, thereby protecting the scanning part. In addition, when a more intense collision occurs, by matching the inner contour of the groove with the outer contour of the scanning part, the protective member can be subjected to a more uniform force, and it is not easy to cause the scanning part to be damaged by impact, thereby improving the protective effect of the protective member.

[0017] According to the utility model, an electromagnetic structure of a micro-displacement sensor with a simple structure and improved measurement accuracy of the micro-displacement sensor can be provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention will now be explained in further detail by way of example only with reference to the accompanying drawings.

[0019] Figure 1 1 is a schematic diagram showing the entirety of a step meter according to an example of the present utility model.

[0020] Figure 2 Schematic diagram showing a measuring device and a turntable involved in an example of the utility model.

[0021] Figure 3 It is a schematic diagram showing the structure of a measuring device involved in an example of the present utility model.

[0022] Figure 4 It shows Figure 3 The measuring device is shown in a cross-sectional view along the line XX.

[0023] Figure 5It is a schematic diagram showing the structure of the first shell involved in the example of the utility model.

[0024] Figure 6 Schematic diagram showing the structure of the second shell involved in the example of the utility model.

[0025] Figure 7 It is a schematic diagram showing the structure of the protective member involved in the example of the utility model. DETAILED DESCRIPTION

[0026] Hereinafter, with reference to the accompanying drawings, the preferred embodiments of the present invention will be described in detail. In the following description, the same symbols are assigned to the same components, and repeated descriptions are omitted. In addition, the accompanying drawings are only schematic diagrams, and the ratio of the dimensions of the components or the shapes of the components may be different from the actual ones.

[0027] It should be noted that the terms "including" and "having" and any variations thereof in the present invention, such as a process, method, system, product or device that includes or has a series of steps or units, are not necessarily limited to those steps or units clearly listed, but may include or have other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0028] It should be noted that, in this article, relative position and relative direction terms such as "above", "towards above", "below", "towards downward", "up and down direction", "left side", "towards the left side", "left side", "towards the left", "right side", "towards the right side", "right side", "towards the right", "left and right direction", "front", "towards the front", "back", "towards the back", "front and back direction" are used with reference to the normal operating posture and should not be considered restrictive.

[0029] The utility model relates to an electromagnetic structure of a micro displacement sensor (hereinafter referred to as the electromagnetic structure), which is an electromagnetic structure for isolating a coil magnetic field. The micro displacement sensor can be used for a step meter. The electromagnetic structure involved in the utility model can isolate the coil magnetic field and thus reduce the possibility of leakage of the coil magnetic field, thereby reducing the influence of the outside world (such as driving current) on the coil magnetic field and the influence of the coil magnetic field on other components (such as scanning parts, sensors, etc.), thereby improving the measurement accuracy of the micro displacement sensor.

[0030] In some examples, the electromagnetic structure of the micro displacement sensor involved in the utility model can also be called an electromagnetic structure, an isolation mechanism of a step gauge, a structure for isolating a coil magnetic field, etc. The electromagnetic structure involved in the utility model is described in detail below in conjunction with the accompanying drawings.

[0031] In order to better introduce the step meter involved in the utility model, this embodiment defines a spatial rectangular coordinate system based on the x-axis, the y-axis, and the z-axis. The x-axis, the y-axis, and the z-axis may be perpendicular to each other, the plane where the turntable is located may be the plane where the x-axis and the y-axis are located, the direction of the x-axis may be parallel to the extension direction of the second shell, and the direction of the z-axis may be the vertical direction.

[0032] Figure 1 1 is a schematic diagram showing the entirety of a step meter 1 according to an example of the present invention.

[0033] In this utility model, see Figure 1 The step meter 1 may include a measuring device 10 and a turntable 20. In some examples, the turntable 20 may be used to carry the object to be measured 2, and the measuring device 10 may measure the object to be measured 2. In some examples, the measuring device 10 may be located above the turntable 20. Thus, it is convenient to measure the object to be measured 2.

[0034] In some examples, the turntable 20 can move in the xy plane and can rotate around its own central axis. In some examples, the object to be measured 2 placed on the turntable 20 can move with the turntable 20. In this case, the movement and rotation of the turntable 20 can be controlled to control the movement and rotation of the object to be measured 2, so that the object to be measured 2 can be placed in a suitable measurement position.

[0035] In some examples, the object to be tested 2 can be placed in the central area of ​​the turntable 20. In this case, the object to be tested 2 can be located in the area where the central axis of the turntable 20 is located. When the turntable 20 moves, the position change of the turntable 20 relative to the measuring device 10 is the same as the position change of the object to be tested 2 relative to the measuring device 10, thereby facilitating the control of the movement of the object to be tested 2 and locating the position of the object to be tested 2. However, the present invention is not limited thereto. In some examples, the object to be tested 2 can be placed in any area of ​​the turntable 20.

[0036] Figure 2 1 is a schematic diagram showing a measuring device 10 and a turntable 20 according to an example of the present utility model. Figure 2 The components of the measuring device 10 are simplified.

[0037] For some examples, see Figure 2 The measuring device 10 may include a scanning mechanism 200 for scanning the object to be measured 2. In some examples, the scanning mechanism 200 may be in contact with the object to be measured 2 to scan the object to be measured 2.

[0038] Figure 3 Schematic diagram showing the structure of a measuring device 10 according to an example of the present utility model. Figure 4 It shows Figure 3 The measuring device 10 is shown in a cross-sectional view along the line XX.

[0039] As described above, the measuring device 10 may include a scanning mechanism 200. In some examples, see Figure 3 and Figure 4 , the measuring device 10 may also include an inductor coil 400 and a micro-displacement sensor 500 (hereinafter referred to as a sensor). The inductor coil 400 may generate a magnetic field and apply a force (such as an attractive force or a repulsive force) to the scanning mechanism 200 through the magnetic field to adjust the force between the probe 211 and the object to be measured 2. The sensor 500 may be connected to the scanning mechanism 200 and reflect the measurement information of the object to be measured 2 according to the movement of the scanning mechanism 200. In some examples, the measurement information may be the profile information of the object to be measured 2, such as the step height, film thickness or surface roughness of the object to be measured 2. For ease of description, the magnetic field generated by the inductor coil 400 may be referred to as a coil magnetic field.

[0040] In some examples, the scanning mechanism 200 may include a scanning member 210 (see Figure 3 ). In some examples, the object to be measured 2 can be measured by relative movement of the scanning member 210 and the object to be measured 2. For example, the relative movement of the scanning member 210 and the object to be measured 2 can be achieved by movement of the turntable 20. Thus, the scanning member 210 can scan the object to be measured 2.

[0041] For some examples, see Figure 3 , the scanning part 210 may include a measuring needle 211 and a measuring rod 212. In some examples, the measuring needle 211 may be in contact with the object to be measured 2. In some examples, the measuring needle 211 may be fixedly connected to the measuring rod 212. In some examples, the measuring rod 212 may be connected to the sensor 500. In this case, the measuring rod 212 can transmit the measurement information scanned by the measuring needle 211 to the sensor 500, so that the sensor 500 can obtain the measurement information of the object to be measured 2.

[0042] In some examples, the sensor 500 may be a differential capacitive sensor, including a blade 510, and the measuring rod 212 may be connected to the blade 510. Thus, the measurement accuracy of the sensor 500 can be improved.

[0043] In some examples, the measuring rod 212 can swing within a certain angle range along the contour of the object to be measured 2. When swinging, the measuring rod 212 can drive the blade 510 to swing to a corresponding angle. The sensor 500 converts the swinging angle into an electrical signal and feeds it back to the computer, thereby obtaining measurement information of the object to be measured 2.

[0044] In some examples, the measuring force applied by the measuring needle 211 to the object to be measured 2 can be kept constant. In this case, the measuring needle 211 can always contact the object to be measured 2 with a constant measuring force during the measurement process, which is conducive to improving the measurement accuracy of the sensor 500. As described above, the inductor 400 can apply a force to the scanning mechanism 200. In some examples, the inductor 400 can apply a force to the scanning mechanism 200 to make the above-mentioned measuring force constant.

[0045] For some examples, see Figure 3 , the scanning mechanism 200 may further include a swing rod 220. In some examples, the swing rod 220 may be connected to the measuring rod 212. In some examples, the swing rod 220 may be linked to the scanning piece 210. In some examples, the scanning piece 210 may swing within a certain angle range as the contour of the object 2 to be measured changes, and the scanning piece 210 may drive the swing rod 220 to swing a corresponding angle when swinging. In some examples, the swing rod 220 may swing within a certain angle range as the inductor 400 is regulated, and the swing rod 220 may drive the scanning piece 210 to swing a corresponding angle when swinging.

[0046] For some examples, see Figure 3 The scanning mechanism 200 may further include a rotation axis 230. In some examples, the swing arm 220 may be connected to the measuring rod 212 via the rotation axis 230. In some examples, the measuring rod 212 may swing around the rotation axis 230. In some examples, the swing arm 220 may swing around the rotation axis 230. In some examples, the rotation axis 230 may be a flexible pivot.

[0047] In some examples, the inductor 400 may apply a force to the swing rod 220. In this case, the force may be transmitted to the probe 211 through the swing rod 220 and the measuring rod 212, so that the force between the probe 211 and the object to be measured 2 may be kept constant.

[0048] For some examples, see Figure 3 , the end of the swing rod 220 close to the inductor 400 may have a magnetic component 221. In this case, the inductor 400 exerts a force on the magnetic component 221, and transmits the force through the swing rod 220 and acts on the scanning piece 210, thereby controlling the measurement force exerted by the scanning piece 210 on the object to be measured 2 and keeping the measurement force constant.

[0049] In some examples, the magnetic component 221 may be disposed opposite to the inductor 400. In some examples, the magnetic component 221 may be made of a magnetic material such as iron, cobalt, or nickel.

[0050] In some examples, the magnitude of the measured force can be maintained within the error range of a constant value. In this case, when the magnitude of the measured force is maintained within the error range of the constant value, the coil magnetic field remains unchanged, and when the magnitude of the measured force exceeds the error range of the constant value, the inductor 400 changes the coil magnetic field to increase or decrease the measured force back to within the error range of the constant value, thereby improving the measurement accuracy of the sensor 500.

[0051] In some examples, the magnetic component 221 can be controlled by the inductor 400. Specifically, the inductor 400 can adjust the relative position with the magnetic component 221 by applying an attractive force or a repulsive force on the magnetic component 221. In this case, the swing rod 220 can swing around the rotation axis 230, so that the force applied by the inductor 400 can be transmitted to the scanning part 210.

[0052] For some examples, see Figure 3 , the measuring device 10 may further include an electromagnetic structure 100. In some examples, the electromagnetic structure 100 may isolate the coil magnetic field of the inductor coil 400. In this case, the influence of the outside world (such as the driving current) on the coil magnetic field and the influence of the coil magnetic field on other components (such as the scanning mechanism 200, the sensor 500, etc.) can be reduced, thereby improving the measurement accuracy of the sensor 500.

[0053] For some examples, see Figure 3 and Figure 4 , the electromagnetic structure 100 may include a first shell 110 and a second shell 120. In some examples, the first shell 110 and the second shell 120 may cooperate to form a housing cavity 300. In some examples, the housing cavity 300 may accommodate an inductor 400 that generates a coil magnetic field. In other words, the housing cavity 300 at least includes a space for accommodating the inductor 400. Thus, the magnetic field of the coil magnetic field from the outside world can be reduced.

[0054] In some examples, the second housing 120 may be at least partially fitted to the first housing 110. In this case, by installing the inductor 400 in the first housing 110 in advance and then fitting the first housing 110 and the second housing 120 together, the difficulty of installing the electromagnetic structure 100 can be reduced.

[0055] In some examples, the second housing 120 may at least partially cover the first housing 110. Specifically, the inner surface of the second housing 120 may at least partially fit with the outer surface of the first housing 110. In this case, the fitting area between the outer surface of the first housing 110 and the inner surface of the second housing 120 can be increased, so that the first housing 110 and the second housing 120 can fit more firmly.

[0056] In some examples, the first housing 110 and the second housing 120 are cylindrical. In this case, since the inductor 400 is usually also cylindrical, it is easy to install the inductor 400 in the first housing 110, and the first housing 110 and the second housing 120 can be more evenly stressed after being fitted together, so that the fitting of the first housing 110 and the second housing 120 can be more stable.

[0057] In some examples, the outer diameter of the first housing 110 matches the inner diameter of the second housing 120. For example, the outer diameter of the first housing 110 may be equal to the inner diameter of the second housing 120. Thus, the second housing 120 can be easily fitted to the first housing 110.

[0058] In some examples, the outer diameter of the first housing 110 may be slightly larger than the inner diameter of the second housing 120, that is, an interference fit is formed between the first housing 110 and the second housing 120. Thus, the tightness and stability of the second housing 120 fitting on the first housing 110 can be improved.

[0059] Figure 5 Schematic diagram showing the structure of the first shell 110 involved in the example of the present utility model. Figure 6 Schematic diagram showing the structure of the second shell 120 involved in the example of the present utility model.

[0060] For some examples, see Figure 5 , the first shell 110 may include a first main body 112 and a first opening 111. In some examples, the first opening 111 may face the first direction. In other words, the opening direction of the first opening 111 may be the first direction. In some examples, the first direction may be opposite to the positive direction of the x-axis. The first opening 111 facing the first direction means that after the first shell 110 and the second shell 120 are assembled and formed, the first opening 111 faces the first direction (see Figure 4 ).

[0061] For some examples, see Figure 6 , the second shell 120 may include a second main body 122 and a second opening 121. In some examples, the second opening 121 may face the second direction. In other words, the opening direction of the second opening 121 may be the second direction. In some examples, the second direction may be the same as the positive direction of the x-axis. In other words, the first direction may be opposite to the second direction. The second opening 121 facing the second direction means that after the first shell 110 and the second shell 120 are assembled and formed, the second opening 121 faces the second direction (see Figure 4 ).

[0062] For some examples, see Figure 4, the first main body 112 can be fitted on the second main body 122. In this case, by arranging the first opening 111 and the second opening 121 opposite to each other, when the first shell 110 and the second shell 120 are fitted together, the first shell 110 closes the second opening 121, and the second shell 120 closes the first opening 111, so that the first shell 110 and the second shell 120 can form a nearly sealed shell after fitting together, thereby reducing the influence of the outside world on the magnetic field of the coil.

[0063] For some examples, see Figure 4 , the electromagnetic structure 100 may further include a fixing member 130. In some examples, the fixing member 130 may be used to mount the inductor 400. In some examples, see Figure 3 The fixing member 130 can be fixed to the first main body portion 112 to install the inductor coil 400 on the first housing 110 .

[0064] For some examples, see Figure 5 The first body portion 112 may include a first substrate 1121 disposed opposite to the first opening portion 111. In some examples, the first substrate 1121 may have a fixing hole 11211 (see Figure 4 In some examples, the fixing member 130 may cooperate with the fixing hole 11211 to mount the inductor 400 on the first housing 110 . For example, the fixing member 130 may pass through the fixing hole 11211 and be mounted to the inductor 400 . In other words, the fixing member 130 may mount the inductor 400 on the first substrate 1121 through the fixing hole 11211 .

[0065] In some examples, the size of the fixing member 130 may match the size of the fixing hole 11211. For example, the outer diameter of the fixing member 130 may be equal to the inner diameter of the fixing hole 11211, or the outer diameter of the fixing member 130 may be slightly larger than the inner diameter of the fixing hole 11211.

[0066] In some examples, the fixing member 130 may be a screw. In addition, the fixing member 130 may be a non-magnetic material, thereby reducing the influence of the fixing member 130 on the magnetic field of the coil, thereby improving the measurement accuracy of the sensor 500.

[0067] In some examples, the thickness of the first substrate 1121 at the fixing hole 11211 may be greater than the thickness at other locations. In this case, after the fixing member 130 is screwed into the fixing hole 11211, the contact area and the force bearing area between the fixing member 130 and the fixing hole 11211 can be increased, so that the inductor 400 can be installed more stably.

[0068] In some examples, the first housing 110 may have a through hole 113 (see Figure 5In some examples, the through hole 113 may be located on a side away from the magnetic component 221. In some examples, the through hole 113 may be connected to the wire 410 of the induction coil 400 (see Figure 4 In this case, by passing the wire 410 from the side away from the magnetic component 221, the influence of the magnetic field around the wire 410 on the coil magnetic field can be reduced, thereby improving the measurement accuracy of the sensor 500.

[0069] For some examples, see Figure 5 , the through hole 113 may be formed on the first substrate 1121. In this case, since the first substrate 1121 is farthest from the magnetic component 221, by forming the through hole 113 on the first substrate 1121, the influence of the magnetic field around the wire 410 on the coil magnetic field can be reduced, thereby improving the measurement accuracy of the sensor 500.

[0070] In some examples, the through hole 113 may be a circular hole, so that the shape of the through hole 113 can match the shape of the wire 410, thereby improving the sealing ability of the wire 410 to the through hole 113, thereby improving the ability of the electromagnetic structure 100 to isolate the coil magnetic field.

[0071] In some examples, there may be two through-holes 113. In this case, by allowing the two ends of the wire 410 of the inductor 400 to pass through or enter the two through-holes 113 respectively, the wire 410 can better fit the inner surface of the through-hole 113, so that the wire 410 can close the through-hole 113 and reduce the influence of the outside on the coil magnetic field.

[0072] In some examples, the aperture of the through hole 113 may be equal to or slightly smaller than the diameter of the wire 410. In this case, the through hole 113 and the wire 410 can be in closer contact, so that the wire 410 can better seal the through hole 113 and reduce the influence of the outside world on the coil magnetic field.

[0073] For some examples, see Figure 5 , the first body portion 112 may further include a first extension portion 1122. In some examples, see Figure 4 , the first extension portion 1122 can be formed on the first substrate 1121 and extend along the first direction.

[0074] In some examples, along the first direction or the second direction, the length of the first extension portion 1122 may be not less than the length of the inductor 400. In this case, by making the length of the first extension portion 1122 not less than the length of the inductor 400, the inductor 400 can be covered inside the first housing 110, thereby improving the isolation effect of the electromagnetic structure 100, thereby reducing the influence of the outside world on the coil magnetic field.

[0075] As described above, the electromagnetic structure 100 may include a second housing 120. In some examples, the second housing 120 may also have a notch 123 (see Figure 6 Specifically, a side of the second housing 120 close to the scanning element 210 may have a notch 123 .

[0076] In some examples, the swing rod 220 can be swingably disposed in the accommodating cavity 300 through the notch 123. In this case, the swing rod 220 can swing in the notch 123 and the accommodating cavity 300. In other words, the notch 123 and the accommodating cavity 300 have space for the swing rod 220 to swing.

[0077] For some examples, see Figure 6 , the second main body 122 of the second housing 120 may include a second substrate 1221 and a second extension portion 1222. In some examples, the second substrate 1221 may be disposed opposite to the second opening 121. Figure 4 The second extension portion 1222 may be formed on the second substrate 1221 and extend along the second direction. In some examples, the second extension portion 1222 may at least partially cover the first extension portion 1122, thereby making the first housing 110 and the second housing 120 fit more firmly.

[0078] In some examples, the notch 123 may be disposed on a side of the second extension portion 1222 close to the scanning element 210. In this case, it is convenient to dispose the end of the swing rod 220 with the magnetic component 221 in the accommodating cavity 300, thereby reducing the difficulty of installing the electromagnetic structure 100. In other examples, the notch 123 may be disposed on the second substrate 1221.

[0079] In some examples, the shape of the notch 123 can be a long strip. In this case, during the rotation of the scanning part around the rotation axis 230, since the swing trajectory of the swing rod 220 is similar to a long strip, by making the shape of the notch 123 a long strip, the swing rod 220 can swing at the notch 123 without hindrance, thereby increasing the application range of the step meter 1 and facilitating the processing of the shape of the notch 123.

[0080] In some examples, the extending direction of the notch 123 is the same as the extending direction of the second extension portion 1222. In some examples, the extending direction of the notch 123 may be parallel to the scanning direction D1 of the scanning member 210 (see Figure 2). In some examples, the scanning direction D1 may be parallel to the direction of the x-axis. In this case, since the swing direction of the swing rod 220 is parallel to the scanning direction D1 of the scanning member 210, that is, the swing direction of the swing rod 220 is parallel to the extension direction of the notch 123, the swing rod 220 can have enough swing space when swinging at the notch 123, thereby improving the application range of the step meter 1.

[0081] In some examples, the first housing 110 may at least partially cover the notch 123. Specifically, in some examples, after the first housing 110 and the second housing 120 are fitted together, the first extension 1122 may at least partially cover the notch 123. In this case, the opening area formed after the first housing 110 and the second housing 120 are fitted together can be reduced, thereby reducing the influence of the outside world on the magnetic field of the coil.

[0082] In some examples, the notch 123 may be connected to the second opening 121. Specifically, one end of the notch 123 close to the first substrate 1121 may be connected to the second opening 121. In this case, by first assembling the first housing 110, the inductor 400, and the swing rod 220, and then directly fitting the second housing 120 to the first housing 110, the difficulty of installing the electromagnetic structure 100 can be reduced.

[0083] In some examples, the length of the notch 123 may be not less than the length of the first extension portion 1122. In this case, the notch 123 can have a space for the swing rod 220 to swing at the notch 123, thereby increasing the applicable range of the step meter 1.

[0084] Figure 7 Schematic diagram showing the structure of the protective member 140 involved in the example of the present utility model.

[0085] In some examples, the electromagnetic structure 100 may further include a protective member 140 (see Figure 7 In some examples, the protective member 140 can protect the scanned member 210 .

[0086] In some examples, the protective member 140 may be fixed around the scanning member 210. In some examples, there may be a preset distance between the protective member 140 and the scanning member 210. In this case, when other objects are about to collide with the scanning member 210, the protective member 140 can play a blocking role, thereby protecting the scanning member 210.

[0087] In some examples, the protective member 140 may have a groove 141. In some examples, the groove 141 may match the outer contour of the scanning member 210. Specifically, the inner contour of the groove 141 matches the outer contour of the scanning member 210. In this case, when a violent collision occurs, the protective member 140 can be subjected to a more uniform force, and it is not easy to cause the scanning member 210 to be damaged by the impact, thereby improving the protective effect of the protective member 140.

[0088] In some examples, the inner contour size of the groove 141 may be larger than the outer contour size of the scanning piece 210. Specifically, the groove 141 may completely accommodate the scanning piece 210. Thus, the range of the protective piece 140 surrounding the scanning piece 210 can be increased, thereby improving the protective effect of the protective piece 140.

[0089] In the present invention, the second housing 120 is at least partially fitted on the first housing 110, so that the first housing 110 and the second housing 120 form a nearly closed space, and the inductor 400 is contained in the space, so that the coil magnetic field generated by the inductor 400 is isolated from the outside world, and the through hole 113 for the wire 410 to pass through is away from the magnetic component 221 so that the wire 410 passes through from the side away from the magnetic component 221, and the protective member 140 is arranged around the scanning mechanism 200, so as to reduce the risk of the object to be measured 2 or other objects colliding with the scanning mechanism 200. Therefore, the electromagnetic structure 100 can reduce the influence of the magnetic field around the outside world and the wire 410 on the coil magnetic field, as well as the influence of the collision accident on the scanning mechanism 200, and improve the measurement accuracy of the sensor 500.

[0090] Although the utility model is specifically described above in conjunction with the accompanying drawings and examples, it is to be understood that the above description does not limit the utility model in any form. Those skilled in the art can modify and change the utility model as needed without departing from the essential spirit and scope of the utility model, and these modifications and changes all fall within the scope of the utility model.

Claims

1. An electromagnetic structure of a micro displacement sensor is an electromagnetic structure for isolating a coil magnetic field used to adjust the measuring force between a scanning mechanism of a step gauge and an object to be measured, characterized in that: The scanning mechanism includes a scanning piece for scanning the object to be tested and a swing arm linked to the scanning piece. The electromagnetic structure includes a first shell and a second shell. The first shell and the second shell cooperate to form a accommodating cavity for accommodating an inductor coil that generates the coil magnetic field. The swing arm has a magnetic component at one end close to the inductor coil, and has a through hole for the wire of the inductor coil to pass through on the side of the first shell away from the magnetic component; the second shell is at least partially fitted on the first shell, and has a notch on the side of the second shell close to the scanning piece, and the swing arm is swingably arranged in the accommodating cavity through the notch.

2. The electromagnetic structure of the micro-displacement sensor according to claim 1, characterized in that: The first shell includes a first main body and a first opening facing a first direction, the second shell includes a second main body and a second opening facing a second direction, the first main body is sleeved on the second main body, and the first direction is opposite to the second direction.

3. The electromagnetic structure of the micro-displacement sensor according to claim 2, characterized in that: The electromagnetic structure also includes a fixing member for mounting the inductor coil. The first main body portion includes a first substrate arranged opposite to the first opening portion and having a fixing hole. The fixing member cooperates with the fixing hole to mount the inductor coil on the first shell.

4. The electromagnetic structure of the micro-displacement sensor according to claim 3, characterized in that: The first main body also includes a first extending portion formed on the first substrate and extending along the first direction. Along the first direction or the second direction, the length of the first extending portion is not less than the length of the inductor coil.

5. The electromagnetic structure of the micro-displacement sensor according to claim 4, characterized in that: The second main body portion includes a second substrate opposite to the second opening portion and a second extension portion formed on the second substrate and extending along the second direction. The notch is arranged on a side of the second extension portion close to the scanning piece. The notch is connected to the second opening portion, and the length of the notch is not less than the length of the first extension portion.

6. The electromagnetic structure of the micro-displacement sensor according to claim 1 or 5, characterized in that: The extending direction of the notch is parallel to the scanning direction of the scanning piece.

7. The electromagnetic structure of the micro-displacement sensor according to claim 1, characterized in that: The second shell at least partially covers the first shell, and the first shell at least partially covers the gap.

8. The electromagnetic structure of the micro-displacement sensor according to claim 1, characterized in that: The number of the perforations is two.

9. The electromagnetic structure of the micro-displacement sensor according to claim 1, characterized in that: The first shell and the second shell are cylindrical, and the outer diameter of the first shell matches the inner diameter of the second shell.

10. The electromagnetic structure of the micro-displacement sensor according to claim 1, characterized in that: It also includes a protective piece which is fixed around the scanning piece and has a groove matching the outer contour of the scanning piece.

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