Temperature calibration device for aging test fixture

Abstract

The utility model provides a temperature calibration device for an aging test fixture. The temperature calibration device comprises a standard thermodetector, a controller and a calibration base, the calibration base is used for installing an aging test fixture, the aging test fixture is provided with a heating module and a temperature detection module, a temperature sensor and a heated module are integrated in the calibration base, the temperature sensor is used for detecting the temperature of the heated module, and the temperature detection module is used for detecting the temperature of the heated module. The heated module can be heated by a heating module of the aging test fixture during calibration; the controller is in communication connection with the standard thermodetector, the standard thermodetector is in communication connection with the temperature sensor, and the standard thermodetector collects the temperature value of the heated module through the temperature sensor; the controller can calibrate the reading of the temperature detection module of the aging test clamp according to the reading of the standard thermodetector. According to the utility model, temperature control and calibration of batch aging test fixtures can be realized.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a temperature calibration device for an aging test fixture. Background Art

[0002] With the increasing application of integrated circuits in various technical fields such as civil, military, aerospace, etc., the reliability requirements for integrated circuits are also getting higher and higher. In order to ensure the reliability of integrated circuits, in addition to strengthening the consideration of product design, material selection and process quality in the early device design stage, aging testing has become a very critical means of reliability verification and evaluation. Aging testing is currently the most commonly used and most effective reliability screening test method; it refers to applying certain current, voltage, temperature and other stress conditions to the device under test for a certain period of time. Through the combined effect of electrical and thermal stress, most of the potential defects of materials and processes in the device can be more fully activated, inducing related failures in the device under test, thereby eliminating some early failures and barely qualified devices, improving the reliability of the device, and ensuring the quality of products leaving the factory.

[0003] For high-power integrated circuits, an aging test fixture with a built-in heating module and a temperature detection module is usually used to provide thermal stress to implement aging tests on the device under test. This type of aging test fixture integrates the functions of temperature measurement and temperature control. In order to ensure that the accuracy of temperature measurement and temperature control during the aging test meets the test requirements, the temperature measurement accuracy of this type of aging fixture needs to be calibrated. Currently, there is no mature technical solution for mass production in the industry. Utility Model Content

[0004] The utility model aims to provide a temperature calibration device for an aging test fixture, so as to realize the temperature calibration of batch aging test fixtures.

[0005] To achieve the above-mentioned purpose, the utility model provides a temperature calibration device for an aging test fixture, comprising a standard thermometer, a controller, and a calibration base; the calibration base is used to install the aging test fixture, the aging test fixture itself has a heating module and a temperature detection module, and a temperature sensor and a heated module are integrated inside the calibration base, the temperature sensor is used to detect the temperature of the heated module, and the heated module can be heated by the heating module of the aging test fixture during calibration; the controller is communicatively connected with the standard thermometer, the standard thermometer is communicatively connected with the temperature sensor, and the standard thermometer collects the temperature value of the heated module through the temperature sensor; the controller can calibrate the reading of the temperature detection module of the aging test fixture according to the reading of the standard thermometer.

[0006] Optionally, the controller includes a device main control and a functional module, and the functional module is integrated with the calibration base; the device main control is communicatively connected with the functional module so that the device main control can send calibration information to the functional module, so that the functional module can calibrate the reading of the temperature detection module of the aging test fixture.

[0007] Optionally, a switch control module is also included, and the switch control module is used to control the power switch in the aging test fixture temperature calibration device.

[0008] Optionally, the switch control module is configured to turn off the power switch when at least one of the following situations occurs: the temperature of the aging test fixture temperature calibration device rises to a first preset threshold value; the aging test fixture temperature calibration device leaks electricity; the internal current intensity of the aging test fixture temperature calibration device rises to a second preset threshold value.

[0009] Optionally, it also includes a human-computer interaction module, which is used to display the temperature reading of the standard thermometer and / or the temperature reading of the temperature detection module.

[0010] Optionally, the human-computer interaction module is used to receive operation instructions and / or parameters to start and / or end calibration.

[0011] Optionally, it further includes a cabinet and a chassis, the cabinet includes a plurality of slide rails arranged parallel to each other, the chassis is slidably connected to the slide rails in a one-to-one correspondence, and the calibration base is arranged in the chassis.

[0012] Optionally, the cabinet further includes a storage plate, and the storage plate is used to place the standard thermometer.

[0013] Optionally, it also includes an alarm light, which is used to emit indicator light signals of different colors according to the working status of the aging test fixture temperature calibration device.

[0014] Optionally, a switch is also included, and the switch is used to form a local area network with the controller, the standard thermometer and the calibration base to establish a communication connection.

[0015] The aging test fixture temperature calibration device provided by the utility model has the following technical effects:

[0016] The utility model provides a temperature calibration device for an aging test fixture, comprising a standard thermometer, a controller, and a calibration base; the calibration base is used to install an aging test fixture, the aging test fixture itself has a heating module and a temperature detection module, the calibration base is internally integrated with a temperature sensor and a heated module, the temperature sensor is used to detect the temperature of the heated module, and the heated module can be heated by the heating module of the aging test fixture during calibration; the controller is connected to the standard thermometer for communication, the standard thermometer is connected to the temperature sensor for communication, and the standard thermometer collects the temperature value of the heated module through the temperature sensor; the controller can calibrate the reading of the temperature detection module of the aging test fixture according to the reading of the standard thermometer. In this way, the utility model provides a technical solution suitable for temperature calibration of batch aging test fixtures. When using the aging test fixture temperature calibration device, the reading of the standard thermometer is used as a reference to calibrate the temperature detection modules of each aging test fixture, thereby realizing the calibration of the temperature detection modules of aging test fixtures produced in large quantities. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic diagram of the structure of a temperature calibration device for an aging test fixture provided by an embodiment of the utility model;

[0018] Figure 2 A schematic diagram of the structure of a calibration base of a temperature calibration device for an aging test fixture provided by an embodiment of the utility model;

[0019] Figure 3 An overall schematic diagram of a temperature calibration device for an aging test fixture provided by another embodiment of the utility model;

[0020] The accompanying drawings are denoted as follows:

[0021] 1-standard thermometer; 2-calibration base; 3-aging test fixture; 21-heated module; 22-temperature sensor; 23-communication and power supply interface; 24-installation fixing buckle;

[0022] 4- device main control; 5- human-machine interface; 6- chassis; 7- alarm light. DETAILED DESCRIPTION

[0023] In order to make the purpose, advantages and features of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing is different, and sometimes different scales are used.

[0024] It should be understood that when an element or layer is referred to as "on...", "connected to" other elements or layers, it can be directly on other elements or layers, connected to other elements or layers, or can include intervening elements or layers. On the contrary, when an element is referred to as "directly on...", "directly connected to" other elements or layers, intervening elements or layers are not included. Although the terms first, second, third, etc. can be used to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish an element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teaching of the present invention, the first element, component, region, layer or part discussed below can be expressed as a second element, component, region, layer or part. Spatial relationship terms such as "under...", "below", "below", "above...", "above", "above", etc., can be used here for the convenience of description to describe the relationship between an element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, the spatial relationship terms are intended to include different orientations of the devices in use and operation. For example, if the device in the accompanying drawings is turned over, then, the elements or features described as "under...", "below", "below" will be oriented to be "on" other elements or features. The device can be oriented in other ways (rotated 90 degrees or other orientations) and the spatial descriptors used here are interpreted accordingly. The purpose of the terms used here is only to describe specific embodiments and is not intended to be a limitation of the utility model. When used here, the singular forms of "one", "one" and "said / the" are also intended to include plural forms, unless the context clearly indicates another way. It should also be understood that the term "include" is used to determine the inclusion of features, steps, operations, elements and / or parts, but does not exclude the inclusion or addition of one or more other features, steps, operations, elements, parts and / or groups. When used here, the term "and / or" includes any and all combinations of the relevant listed items.

[0025] The utility model aims to provide a temperature calibration device for an aging test fixture, so as to realize the temperature calibration of batch aging test fixtures.

[0026] Please refer to Figure 1 , Figure 1 This is a side cross-sectional view of a temperature calibration device for an aging test fixture provided by an embodiment of the present invention. Figure 1As shown, in order to achieve the above-mentioned purpose, the utility model provides an aging test fixture temperature calibration device, including a standard thermometer 1, a controller, and a calibration base 2; the calibration base 2 is used to install the aging test fixture 3, the aging test fixture 3 itself has a heating module and a temperature detection module, and the calibration base 2 is internally integrated with a temperature sensor 22 and a heated module 21, the temperature sensor 22 is used to detect the temperature of the heated module, and the heated module 21 can be heated by the heating module of the aging test fixture 3 during calibration; the controller is communicatively connected with the standard thermometer 1, the standard thermometer 1 is communicatively connected with the temperature sensor 22, and the standard thermometer 1 collects the temperature value of the heated module 21 through the temperature sensor 22; the controller can calibrate the reading of the temperature detection module of the aging test fixture 3 according to the reading of the standard thermometer 1 (for example, the reading of the standard thermometer 1 and the reading of the temperature detection module of the aging test fixture 3 are obtained based on the reading of the standard thermometer 1, and the reading of the temperature detection module of the aging test fixture 3 at the same time is modified based on this).

[0027] With such an arrangement, the utility model provides a technical solution for the temperature control and calibration of batch aging test fixtures, and the standard thermometer 1 should be a thermometer that corresponds to the industry specification and can display accurate and standardized readings. When using the aging test fixture temperature calibration device, the standard thermometer 1 is used as a standardized standard part, and the reading of the standard thermometer 1 is used as a reference to calibrate the temperature detection modules of each aging test fixture 3, thereby realizing integrated temperature control and calibration of batch aging test fixtures. It should be understood that one standard thermometer 3 can correspond to one aging test fixture 3, and can also correspond to and display multiple temperatures obtained from the aging test fixture 3 at the same time.

[0028] For details, please refer to Figure 2 , Figure 2 This is a schematic diagram of the structure of the calibration base 2 of the aging test fixture temperature calibration device provided by an embodiment of the utility model. Figure 2 As shown, the calibration base 2 may include:

[0029] The communication and power supply interface 23 between the calibration base 2 and the aging test fixture 3 is used to provide power to the heating module and the temperature detection module inside the aging test fixture 3, and to communicate with the calibration base 2 to obtain calibration instructions;

[0030] The heated module 21, after the aging test fixture 3 is installed, contacts the part, and the heating module of the aging test fixture 3 heats the module during the calibration process;

[0031] The temperature sensor 22 may be integrated and installed inside the heated module 21 to collect the temperature of the heated module 21;

[0032] The fixing buckle 24 is installed to fix the aging test fixture 3 .

[0033] It should be understood that Figure 2 It is just a schematic diagram corresponding to the installation of a single aging test fixture 3 on the calibration base 2. The calibration base 2 can be provided with multiple Figure 2 The structure shown is used to achieve batch calibration.

[0034] Specifically, the controller includes a device main control 4 and a functional module, and the functional module is integrated with the calibration base 2; the device main control 4 is communicatively connected with the functional module so that the device main control 4 can send calibration information to the functional module so that the functional module can calibrate the reading of the temperature detection module of the aging test fixture 3.

[0035] Furthermore, it also includes a switch control module, which is used to control the power switch in the aging test fixture temperature calibration device. In an exemplary embodiment, the switch control module is configured to turn off the power switch when at least one of the following situations occurs: the temperature of the aging test fixture temperature calibration device rises to a first preset threshold; the aging test fixture temperature calibration device leaks electricity; the internal current intensity of the aging test fixture temperature calibration device rises to a second preset threshold.

[0036] It should also be noted that the controller and the switch control module can be based on the logic judgment function module existing in the prior art and can be directly installed on the aging test fixture temperature calibration device provided by the utility model. This is a structural feature in itself and does not involve methodological improvements.

[0037] Please refer to Figure 3 , Figure 3 This is an overall schematic diagram of a temperature calibration device for an aging test fixture provided by another embodiment of the present invention. Figure 2 As shown, further, it also includes a human-computer interaction module 5, which is used to display the temperature reading of the standard thermometer and / or the temperature reading of the temperature detection module. It should be understood that in order to facilitate the reference and comparison calibration at any time, the display 5 can be configured to simultaneously display the reading of the temperature detection module of any one of the aging test fixtures 3 and the temperature data of the standard thermometer 1 corresponding to the aging test fixture 3. Further, the human-computer interaction module 5 can also be used to receive operation instructions and / or parameters to start and / or end calibration.

[0038] Please continue to refer to Figure 3, further, it also includes a cabinet and a chassis 6, the cabinet includes a plurality of slide rails (not shown) arranged in parallel with each other, the chassis 6 is slidably connected with the slide rails in a one-to-one correspondence, and the calibration base 2 is arranged in the chassis 6. The utility model can realize that a plurality of the chassis 6 can be stacked and used at the same time, forming a Figure 2 The aging test calibration system shown in the figure can realize large-scale aging test and temperature calibration. Figure 2 As shown, the cabinet may also include a storage plate, which is used to place the standard thermometer 1. The standard thermometer 1 can be centrally installed on the upper part of multiple functional chassis 6, or each chassis 6 can be provided with a corresponding standard thermometer 1 to achieve integrated management. The interface of the standard thermometer 1 can also be reserved to achieve inspection and calibration at any time. In an exemplary embodiment, the overall structure adopts a 42U standard network server cabinet. The equipment is mainly composed of 5 functional chassis 6, two standard thermometers 1, a switch, an alarm light 7 and a device main control 6. The switch is used to form a local area network with the controller, the standard thermometer 1 and the calibration base 2 to establish a communication connection. The alarm light 7 is used to emit indicator light signals of different colors according to the working status of the aging test fixture temperature calibration device. The equipment can realize parallel calibration or measurement of up to 40 fixtures at a time. A set of guide rail grooves are installed on the left and right sides of the functional chassis 6 for installation with the cabinet.

[0039] It should also be noted that, although the present invention has been disclosed as a preferred embodiment, the above embodiment is not intended to limit the present invention. For any technician familiar with the art, without departing from the scope of the technical solution of the present invention, the above disclosed technical content can be used to make many possible changes and modifications to the technical solution of the present invention, or modified into equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the scope of protection of the technical solution of the present invention.

[0040] It should also be understood that, unless otherwise specified or indicated, the terms "first", "second", "third", etc. in the specification are merely used to distinguish between the various components, elements, steps, etc. in the specification, and are not used to indicate the logical relationship or sequential relationship between the various components, elements, steps, etc.

[0041] It should also be recognized that the terms described herein are only used to describe specific embodiments and are not used to limit the scope of the utility model. It must be noted that the singular forms "one" and "a kind" used herein and in the appended claims include plural references unless the context clearly indicates the opposite meaning. For example, a reference to "a step" or "a device" means a reference to one or more steps or devices, and may include secondary steps and secondary devices. All conjunctions used should be understood in the broadest sense. And, the word "or" should be understood to have the definition of a logical "or", not a logical "exclusive or" definition, unless the context clearly indicates the opposite meaning. In addition, the implementation of the embodiments of the utility model may include performing the selected tasks manually, automatically, or in combination.

Claims

1. A temperature calibration device for an aging test fixture, characterized in that: Includes standard thermometer, controller, calibration base; The calibration base is used to install the aging test fixture, the aging test fixture itself has a heating module and a temperature detection module, the calibration base is internally integrated with a temperature sensor and a heated module, the temperature sensor is used to detect the temperature of the heated module, and the heated module can be heated by the heating module of the aging test fixture during calibration; The controller is connected to the standard thermometer for communication, the standard thermometer is connected to the temperature sensor for communication, and the standard thermometer collects the temperature value of the heated module through the temperature sensor; The controller can calibrate the reading of the temperature detection module of the aging test fixture according to the reading of the standard thermometer.

2. The aging test fixture temperature calibration device according to claim 1, characterized in that: The controller includes a device main control and a functional module, and the functional module is integrated with the calibration base; The device main control is in communication connection with the functional module, so that the device main control can send calibration information to the functional module, so that the functional module can calibrate the reading of the temperature detection module of the aging test fixture.

3. The aging test fixture temperature calibration device according to claim 1, characterized in that: It also includes a switch control module, which is used to control the power switch in the aging test fixture temperature calibration device.

4. The aging test fixture temperature calibration device according to claim 3, characterized in that: The switch control module is configured to turn off the power switch when at least one of the following conditions occurs: The temperature of the aging test fixture temperature calibration device rises to a first preset threshold value; The temperature calibration device of the aging test fixture is leaking; The current intensity inside the aging test fixture temperature calibration device rises to a second preset threshold value.

5. The aging test fixture temperature calibration device according to claim 1, characterized in that: It also includes a human-computer interaction module, which is used to display the temperature reading of the standard thermometer and / or the temperature reading of the temperature detection module.

6. The aging test fixture temperature calibration device according to claim 5, characterized in that: The human-computer interaction module is used to receive operation instructions and / or parameters to start and / or end calibration.

7. The aging test fixture temperature calibration device according to claim 1, characterized in that: It also includes a cabinet and a chassis. The cabinet includes a plurality of slide rails arranged parallel to each other. The chassis is slidably connected to the slide rails in a one-to-one correspondence. The calibration base is arranged in the chassis.

8. The aging test fixture temperature calibration device according to claim 7, characterized in that: The cabinet also includes a storage plate, and the storage plate is used to place the standard thermometer.

9. The aging test fixture temperature calibration device according to claim 1, characterized in that: It also includes an alarm light, which is used to emit indicator light signals of different colors according to the working state of the aging test fixture temperature calibration device.

10. The aging test fixture temperature calibration device according to claim 1, characterized in that: It also includes a switch, which is used to form a local area network with the controller, the standard temperature measuring instrument and the calibration base to establish a communication connection.

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