Thermal resistance type heat flow sensor calibration device

Abstract

The utility model discloses a thermal resistance type heat flow sensor calibration device, which belongs to the technical field of thermal resistance type heat flow sensor calibration and comprises a shell, a main hot plate, a cold plate, a protective hot plate A and a protective hot plate B, the main hot plate, the cold plate, the protective hot plate A and the protective hot plate B are all located in the shell. The protective hot plate A is placed on the inner bottom surface of the shell; the main hot plate is positioned above the protective hot plate A; the protective hot plate B is positioned above the protective hot plate A and surrounds the periphery of the main hot plate; the cold plate is located above the main hot plate and installed on the end face of the opening end of the shell. When the main hot plate is heated, an upward heat flow field is formed between the main hot plate and the cold plate; a thermal resistance type heat flow sensor to be calibrated is placed between the main hot plate and the cold plate. The calibration device is designed by adopting a protection hot plate method, the method is an absolute method, heat flow parameters can be traced to electrical parameters, the accuracy is greatly improved, and the calibration device can be used as a thermal resistance type heat flow sensor standard device.

Description

Technical Field

[0001] The utility model belongs to the technical field of thermal resistance type heat flow sensor calibration, and in particular relates to a thermal resistance type heat flow sensor calibration device. Background Art

[0002] The heat flux sensor is a sensor used to test the heat flux density. The most widely used sensor based on the axial heat conduction principle is the thermal resistance heat flux sensor, which is usually suitable for temperatures below 200°C and heat flux densities of 20kW / m 2 The following environments. In the process of aerospace model development, for example, in the development of new aerospace materials and the thermal control system of aircraft, thermal resistance heat flux sensors are widely used. In addition, the sensor is also used to test the thermal insulation performance and heat loss of geothermal, pipelines or walls, and is widely used in energy conservation and emission reduction.

[0003] The main calibration methods for thermal resistance heat flux sensors include foil heater method, Japanese Showa calibration device, standard sample comparison method, etc. The standard patterns of the above centralized calibration methods are complicated to make, and the above calibration devices are all open structures. During calibration, the thermal resistance heat flux sensor is exposed to the outside, which makes the calibration easily affected by the external environment, and there are problems such as severe heat leakage and low calibration accuracy. Utility Model Content

[0004] In view of this, the utility model provides a thermal resistance heat flux sensor calibration device, and adopts the guarded hot plate method to design the calibration device. This method is an absolute method, which can trace the heat flux parameters to electrical parameters (that is, the heat flux density is calculated by heating power), greatly improving the accuracy, and can be used as a thermal resistance heat flux sensor standard device.

[0005] The utility model is realized by the following technical solutions:

[0006] A thermal resistance heat flux sensor calibration device, comprising: a housing, a main hot plate, a cold plate, a protective hot plate A and a protective hot plate B;

[0007] One end of the shell is open, and the main hot plate, the cold plate, the protective hot plate A and the protective hot plate B are all located inside the shell;

[0008] The protective heat plate A is placed on the inner bottom surface of the housing;

[0009] The main heat plate is located above the protective heat plate A;

[0010] The protective heat plate B is located above the protective heat plate A and surrounds the main heat plate;

[0011] The cold plate is located above the main hot plate and is installed on the end surface of the opening of the shell; when the main hot plate is heated, an upward heat flow field is formed between the main hot plate and the cold plate;

[0012] When the thermal resistance heat flux sensor is calibrated, the thermal resistance heat flux sensor to be calibrated is placed between the main hot plate and the cold plate, and the heat flux emitted by the main hot plate flows through the thermal resistance heat flux sensor to the cold plate.

[0013] Further, it also includes a temperature regulating component;

[0014] The temperature regulating component is electrically connected to the protective hot plate A, the protective hot plate B and the main hot plate respectively; the temperature regulating component is used to control the temperature of the protective hot plate A and the protective hot plate B to be consistent with the temperature of the main hot plate.

[0015] Further, the temperature adjustment component includes: a detector, a temperature controller and three temperature sensors;

[0016] The three temperature sensors are temperature sensor a, temperature sensor b and temperature sensor c; temperature sensor a is installed on the protective hot plate A, temperature sensor b is installed on the protective hot plate B, and temperature sensor c is installed on the main hot plate;

[0017] The detector is electrically connected to the temperature sensor a, the temperature sensor b and the temperature sensor c;

[0018] The temperature controller is electrically connected to the detector, and is also electrically connected to the protective hot plate A and the protective hot plate B;

[0019] The detector is used to receive temperature information from temperature sensor a, temperature sensor b and temperature sensor c, calculate the temperature difference between temperature sensor a and temperature sensor c, the temperature difference between temperature sensor b and temperature sensor c, and convert the temperature difference into a temperature difference signal to be transmitted to the temperature controller;

[0020] The temperature controller controls the temperatures of the protective hot plate A and the protective hot plate B respectively according to the temperature difference signal, so that the temperatures of the protective hot plate A and the protective hot plate B are consistent with the temperature of the main hot plate.

[0021] Further, the calibration device also includes: a heat insulation layer;

[0022] The heat insulation layer is arranged between the main heat plate and the protective heat plate A, between the protective heat plate B and the protective heat plate A, and between the main heat plate and the protective heat plate B.

[0023] Furthermore, the main heating plate includes: a heating plate, a heating wire and a heating power supply;

[0024] The area of ​​the upper end surface of the heating plate is not less than the area of ​​the end surface of the thermal resistance heat flow sensor to be calibrated;

[0025] The heating wire is arranged on the heating plate;

[0026] The heating power supply is electrically connected to the heating wire, and the output power of the heating power supply is adjustable.

[0027] Further, the cold plate includes: a water tank plate and a cover plate;

[0028] The water trough plate is processed with a cooling water channel, and the edge of the water trough plate is processed with a cooling water outlet and a cooling water inlet, and the cooling water outlet and the cooling water inlet are respectively connected to the two ends of the water trough; the cooling water enters the cooling water channel through the cooling water inlet and flows out through the cooling water outlet;

[0029] The cover plate is installed on the water tank plate and covers the cooling water tank channel.

[0030] Furthermore, the cooling water channels are evenly distributed on the water channel plate and present a rectangular spiral structure.

[0031] Furthermore, the cover plate is made of rubber.

[0032] Furthermore, when the end surface area of ​​the thermal resistance type heat flux sensor is smaller than the upper end surface area of ​​the main heat plate, a material having the same thermal conductivity and thickness as the thermal resistance type heat flux sensor is placed in the remaining portion of the main heat plate.

[0033] Furthermore, the calibration device further comprises: a lead screw;

[0034] The cold plate is mounted on a frame located above the calibration device through a lead screw, and the cold plate moves up and down through the lead screw to adjust the distance of the cold plate relative to the thermal resistance heat flux sensor.

[0035] Beneficial effects:

[0036] (1) The utility model discloses a thermal resistance type heat flux sensor calibration device, wherein the main heat plate is located above the protective heat plate A, and the protective heat plate B is located above the protective heat plate A. Meanwhile, the protective heat plate A and the protective heat plate B surround the main heat plate and can prevent the heat flux loss of the main heat plate. This method belongs to the protective heat plate method. By carrying out the calibration of the thermal resistance type heat flux sensor by the protective heat plate method, the heat flux loss can be avoided, and the heat flux source (main heat plate) can be guaranteed to generate a stable one-dimensional heat flux. The standard heat flux density can be calculated by voltage and current, and the heat flux parameter traceability system is improved, thereby improving the calibration accuracy.

[0037] (2) The utility model is a thermal resistance heat flow sensor calibration device, the detector is electrically connected to the three temperature sensors, the temperature controller is electrically connected to the detector, and is also electrically connected to the protective hot plate A and the protective hot plate B; the protective hot plate A and the protective hot plate B can trace the temperature of the main hot plate through the detector and the temperature controller, so that the temperature of the protective hot plate A and the temperature of the protective hot plate B are consistent with the temperature of the main hot plate, which can ensure the heat flow stability of the main hot plate, prevent heat flow loss, and is conducive to the main hot plate to generate a stable one-dimensional heat flow, thereby improving the calibration accuracy.

[0038] (3) The utility model is a thermal resistance heat flux sensor calibration device, wherein a heat insulation layer is arranged between the main heat plate and the protective heat plate A, between the protective heat plate B and the protective heat plate A, and between the main heat plate and the protective heat plate B; the heat insulation layer can further prevent heat flux loss, thereby improving the calibration accuracy.

[0039] (4) The utility model is a thermal resistance heat flux sensor calibration device, in which cooling water channels are evenly distributed on the water trough plate and have a rectangular spiral structure, which can improve the temperature uniformity of the cold plate and make the heat flow field between the cold plate and the main hot plate tend to a one-dimensional ideal state.

[0040] (5) The utility model is a thermal resistance type heat flux sensor calibration device, the cover plate is made of rubber material, the rubber cover plate is used to prevent condensation on the cold plate, and can prevent condensation water droplets from flowing into the gap between the thermal resistance type heat flux sensor and the cold plate, and between the thermal resistance type heat flux sensor and the main hot plate, causing uneven temperature distribution between the cold plate and the main hot plate, thereby affecting the measurement result of the thermal resistance type heat flux sensor, and also affecting the electrical performance of the thermal resistance type heat flux sensor to be measured, causing damage to the thermal resistance type heat flux sensor.

[0041] (6) The utility model provides a thermal resistance heat flux sensor calibration device. When the area of ​​the thermal resistance heat flux sensor is smaller than the upper end surface area of ​​the main heat plate, a material with the same thermal conductivity and thickness as the thermal resistance heat flux sensor is placed in the spare part of the main heat plate, so that the heat flux of the hot plate is transferred to the cold plate through the sensor in one dimension, thereby avoiding the heat flux gathering at the edge of the thermal resistance heat flux sensor to be measured, causing uneven heat flux, thereby affecting the calibration accuracy.

[0042] (7) The utility model provides a thermal resistance type heat flux sensor calibration device, which also includes a lead screw. The lead screw not only facilitates the up and down movement of the cold plate, but also can change the pressing force of the cold plate on the thermal resistance type heat flux sensor to be tested as needed, so that the thermal resistance type heat flux sensor is in good contact with the cold and hot plates, avoiding the gap between the two that affects the heat transfer. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 It is a schematic diagram of the structure of the utility model;

[0044] Figure 2 This is a layout diagram of the heating wires in the main heating plate of the utility model;

[0045] Figure 3 This is a schematic diagram of the cold plate structure of the utility model;

[0046] Among them, 1-housing, 2-main hot plate, 21-heating plate c, 22-heating wire c, 3-cold plate, 31-water trough plate, 311-water trough, 4-protective hot plate A, 5-protective hot plate B, 6-insulating layer, 7-thermal resistance heat flow sensor. DETAILED DESCRIPTION

[0047] The present invention is described in detail below with reference to the accompanying drawings and embodiments.

[0048] This embodiment provides a thermal resistance heat flow sensor calibration device, such as Figure 1 As shown, it includes: a housing 1, a main hot plate 2, a cold plate 3, a protective hot plate A4, a protective hot plate B5, a heat insulation layer 6 and a temperature adjustment component;

[0049] The housing 1 is open at one end, and the bottom surface and side wall surface of the housing 1 are made of heat-insulating materials;

[0050] The main heat plate 2, cold plate 3, protective heat plate A4, protective heat plate B5 and heat insulation layer 6 are all located inside the housing 1;

[0051] The protective heat plate A4 is placed on the inner bottom surface of the housing 1; the protective heat plate A4 comprises: a heating plate a, a heating wire a and a heating power source a; the heating wire a is installed on the heating plate a;

[0052] The heating power source a is electrically connected to the heating wire a, and the heating power source a supplies power to the heating wire a; after power is turned on, the heating wire a converts electrical energy into thermal energy; the output power of the heating power source a is adjustable;

[0053] The main heat plate 2 is located above the protective heat plate A4 and at the center of the protective heat plate A4; Figure 2 As shown, the main heat plate 2 includes: a heating plate c21, a heating wire c22 and a heating power supply c;

[0054] The heating plate c21 is a rectangular plate, and the upper end surface of the heating plate c21 is processed with uniformly arranged heating wire placement grooves; the area of ​​the upper end surface of the heating plate c21 is not less than the area of ​​the end surface of the thermal resistance heat flow sensor 7 to be calibrated; in this embodiment, the heating plate c21 is made of a metal material with a high thermal conductivity, and the material is preferably copper;

[0055] The heating wire c22 is installed in the heating wire placement groove of the heating plate c21; the layout of the heating wire c22 is as follows Figure 2As shown; since the heating wire c22 is evenly distributed on the surface of the hot plate, the main hot plate 2 can generate a uniform heat flow field;

[0056] The heating power source c is electrically connected to the heating wire c22, and the heating power source c supplies power to the heating wire c22; after power is turned on, the heating wire c22 converts electrical energy into thermal energy; the output power of the heating power source c is adjustable;

[0057] The protective heat plate B5 is located above the protective heat plate A4 and surrounds the main heat plate 2; the protective heat plate B5 includes: a heating plate b, a heating wire b and a heating power supply b;

[0058] The thickness of the heating plate b is consistent with the thickness of the main heating plate 2;

[0059] The heating wire b is installed on the heating plate b;

[0060] The heating power source b is electrically connected to the heating wire b, and the heating power source b supplies power to the heating wire b; after power is turned on, the heating wire b converts electrical energy into thermal energy; the output power of the heating power source b is adjustable;

[0061] A heat insulation layer 6 is provided between the main heat plate 2 and the protective heat plate A4, between the protective heat plate B5 and the protective heat plate A4, and between the main heat plate 2 and the protective heat plate B5; the heat insulation layer 6 is formed by filling with heat insulation material; the heat insulation layer 6 is used to prevent heat exchange between the main heat plate 2 and the protective heat plate A4, and between the main heat plate 2 and the protective heat plate B5;

[0062] The temperature adjustment component includes: a detector, a temperature controller and three temperature sensors;

[0063] The three temperature sensors are temperature sensor a, temperature sensor b and temperature sensor c; temperature sensor a is installed on heating plate a to measure the temperature of protective hot plate A4; temperature sensor b is installed on heating plate b to measure the temperature of protective hot plate B5; temperature sensor c is installed on heating plate c to measure the temperature of main hot plate 2;

[0064] The detector is electrically connected to the temperature sensor a, the temperature sensor b and the temperature sensor c; the temperature information of the temperature sensor a, the temperature sensor b and the temperature sensor c is transmitted to the detector, and the detector calculates the temperature difference between the temperature sensor a and the temperature sensor c (i.e. the temperature difference between the protective hot plate A4 and the main hot plate 2), the temperature difference between the temperature sensor b and the temperature sensor c (i.e. the temperature difference between the protective hot plate B5 and the main hot plate 2), and converts the temperature difference into a temperature difference signal; the method of receiving the temperature information, calculating the temperature difference and converting the temperature difference into a temperature difference signal by the detector is all prior art and is not within the protection scope of the present utility model;

[0065] The temperature controller is electrically connected to the detector, and is electrically connected to the heating power supply a and the heating power supply b; the temperature difference signal of the detector is transmitted to the temperature controller, and the temperature controller controls the output power of the heating power supply a of the protective hot plate A4 and the heating power supply b of the protective hot plate B5 respectively according to the information in the temperature difference signal, thereby adjusting the temperature of the protective hot plate A4 and the protective hot plate B5, so that the temperature between the protective hot plate A4 and the main hot plate 2, and the temperature between the protective hot plate B5 and the main hot plate 2 are consistent, thereby limiting the lateral heat flow from the main hot plate 2 to the protective hot plate B5, and at the same time limiting the vertical heat flow from the main hot plate 2 to the protective hot plate A4; through the temperature controller and the detector, it can be ensured that the temperature difference between the protective hot plate A4 and the main hot plate 2, and the protective hot plate B5 and the main hot plate 2 is less than 0.1°C; the method in which the temperature controller controls the temperature of the protective hot plate A and the protective hot plate B respectively according to the information in the temperature difference signal to be consistent with the temperature of the main hot plate is all prior art and is not within the protection scope of the present utility model;

[0066] The cold plate 3 is located above the main hot plate 2 and the protective hot plate, and is installed on the open end surface of the housing 1; Figure 3 As shown, the cold plate 3 includes: a water trough plate 31 and a cover plate; a cooling water trough 311 is processed on the water trough plate 31, and a cooling water outlet and a cooling water inlet are processed on the edge of the water trough plate 31, and the cooling water outlet and the cooling water inlet are respectively connected to the two ends of the cooling water trough 311; cooling water enters the cooling water trough 311 through the cooling water inlet and flows out through the cooling water outlet; in this embodiment, the water trough plate 31 is a labyrinth water trough plate, that is, the cooling water trough 311 on the water trough plate 31 is evenly distributed on the water trough plate 31 in a rectangular spiral shape; the labyrinth water trough plate can improve the temperature uniformity of the cold plate Uniformity, so that the heat flow field between the cold plate 3 and the main hot plate 2 tends to a one-dimensional ideal state; the cover plate is installed on the upper end surface of the water tank plate to cover the cooling water channel 311; in this embodiment, the cover plate is preferably made of rubber material, which is used to prevent condensation on the cold plate 3 and prevent condensed water droplets from flowing into the gap between the thermal resistance heat flow sensor 7 and the cold plate 3, and the thermal resistance heat flow sensor 7 and the main hot plate 2, causing uneven temperature distribution of the cold plate 3 and the main hot plate 2, thereby affecting the measurement result of the thermal resistance heat flow sensor 7 to be measured, and at the same time affecting the electrical performance of the thermal resistance heat flow sensor 7, causing damage to the thermal resistance heat flow sensor 7;

[0067] Three temperature sensors other than the above three temperature sensors are installed at the upper end surface, cooling water inlet and cooling water outlet of the cold plate 3 respectively; the temperature of the cooling water in the cold plate 3 can be accurately confirmed by the temperature sensors, thereby ensuring that the temperature of the cooling water is constant;

[0068] During calibration, the calibrated thermal resistance type heat flux sensor 7 is placed between the main hot plate 2 and the cold plate 3, the upper end surface of the calibrated thermal resistance type heat flux sensor 7 contacts the lower end surface of the cold plate 3, and the lower end surface of the calibrated thermal resistance type heat flux sensor 7 contacts only the upper end surface of the main hot plate 2; the temperature of the protective hot plate A4 and the protective hot plate B5 is consistent with the temperature of the main hot plate 2;

[0069] By measuring the voltage and heating current of the main heat plate 2, the standard heat flux density can be calculated by the following formula:

[0070]

[0071] Where: q—heat flux density (W / m 2 );

[0072] P—main hot plate heating power (W);

[0073] A—main heat plate end surface area (m 2 )

[0074] U—main heating plate heating voltage (V);

[0075] I—Main hot plate heating current (A).

[0076] The standard heat flux density obtained by the above calculation is used to calibrate the heat flux density of the thermal resistance type heat flux sensor to be calibrated, thereby achieving the calibration of the thermal resistance type heat flux sensor.

[0077] Working principle:

[0078] The calibration device in this embodiment calibrates and calibrates the heat flux density of the thermal resistance heat flux sensor by using the standard heat flux density;

[0079] The calibration device can provide accurate standard heat flux density;

[0080] The heat flux generated after the main hot plate 2 is heated will be easily affected by the temperature gradient and will cause heat flux loss, thus causing uncertainty in the standard heat flux density. To this end, the calibration device is provided with a protective hot plate A5 and a protective hot plate B6 at the bottom and around the main hot plate 2, respectively, and a temperature controller is provided. As the temperature of the main hot plate 2 continues to rise, a temperature difference is generated between the protective hot plate A5 and the main hot plate, and between the protective hot plate B6 and the main hot plate 2. The temperature controller adjusts the temperature of the protective hot plate A5 and the protective hot plate B6 according to the temperature difference, so that the temperature of the protective hot plate A5 and the protective hot plate B6 rises together. Finally, the temperature of the main hot plate 2 and the protective hot plate A5, and the temperature of the main hot plate 2 and the protective hot plate B6 are equal and do not change with time. Enter a stable state; since the temperatures of the protective hot plate A5 and the protective hot plate B6 are equal to the temperature of the main hot plate 2, there is no heat flow loss caused by the temperature gradient, and the heating power of the main hot plate 2 can be fully applied to the thermal resistance heat flow sensor 7, that is, the heat emitted by the main hot plate 2 flows evenly and vertically through the calibrated thermal resistance heat flow sensor 7 to the cold plate 3, and a stable one-dimensional heat flow field can be established between the cold plate 3 and the main hot plate 2; the device traces the heat flow parameters (heat flux density) to the electrical parameters (voltage and current), effectively improving the accuracy level of the calibration, thereby improving the calibration accuracy; an insulation layer 6 is provided between the main hot plate 2 and the protective hot plate A5, and between the main hot plate 2 and the protective hot plate B6 to prevent heat loss, which can further improve the accuracy.

[0081] Embodiment 2:

[0082] This embodiment provides a thermal resistance heat flow sensor calibration device, which is based on the calibration device in Example 1; the calibration device is placed in a vacuum chamber for use; it can effectively reduce the heat loss caused by air convection, and at the same time reduce the impact of the external environment on the calibration results, thereby improving the accuracy of the calibration structure.

[0083] Embodiment 3:

[0084] The present embodiment provides a thermal resistance heat flux sensor calibration device, which is based on the calibration device in Embodiment 1; when the area of ​​the thermal resistance heat flux sensor 7 to be calibrated is smaller than the upper end surface area of ​​the main heat plate 2, a material with the same thermal conductivity and thickness as the thermal resistance heat flux sensor 7 is placed in the spare part of the main heat plate 2 to meet the calibration requirements of sensors with different external structures; when the area of ​​the thermal resistance heat flux sensor 7 is smaller than the area of ​​the main heat plate 2, the heat flux of the main heat plate 2 flows into the cold plate 3 through the thermal resistance heat flux sensor 7, thereby causing the heat flux to gather at the edge of the sensor 7, resulting in uneven heat flux distribution. By setting a material with the same thermal conductivity and thickness as the thermal resistance heat flux sensor 7, the heat flux of the hot plate is transmitted to the cold plate through the sensor in one dimension, thereby avoiding the influence of uneven heat flux distribution on the measurement accuracy.

[0085] Embodiment 4:

[0086] This embodiment provides a thermal resistance type heat flux sensor calibration device based on the embodiment 1, and the calibration device also includes: a screw; the cold plate 3 is installed on the frame above the calibration device through the screw, and the cold plate 3 moves up and down through the screw to adjust the distance of the cold plate 3 relative to the thermal resistance type heat flux sensor 7; by adjusting the distance of the supercooling plate 3 relative to the thermal resistance type heat flux sensor 7, the pressing force of the cold plate 3 on the thermal resistance type heat flux sensor 7 can be changed, so that the thermal resistance type heat flux sensor 7 and the cold and hot plates 3 are in good contact, avoiding the gap between the two to affect the heat transfer.

[0087] In summary, the above are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A thermal resistance heat flow sensor calibration device, characterized in that: include: Housing (1), main hot plate (2), cold plate (3), protective hot plate A (4) and protective hot plate B (5); One end of the shell (1) is open, and the main hot plate (2), the cold plate (3), the protective hot plate A (4) and the protective hot plate B (5) are all located inside the shell (1); The protective heat plate A (4) is placed on the inner bottom surface of the outer shell (1); The main heat plate (2) is located above the protective heat plate A (4); The protective heat plate B (5) is located above the protective heat plate A (4) and surrounds the main heat plate (2); The cold plate (3) is located above the main hot plate (2) and is mounted on the end surface of the opening of the housing (1); when the main hot plate (2) is heated, an upward heat flow field is formed between the main hot plate (2) and the cold plate (3); When calibrating the thermal resistance type heat flux sensor (7), the thermal resistance type heat flux sensor (7) to be calibrated is placed between the main hot plate (2) and the cold plate (3), and the heat flux emitted by the main hot plate (2) passes through the thermal resistance type heat flux sensor (7) and flows toward the cold plate (3).

2. A thermal resistance heat flow sensor calibration device as claimed in claim 1, characterized in that: Also included is a temperature regulation component; The temperature regulating component is electrically connected to the protective hot plate A (4), the protective hot plate B (5) and the main hot plate (2) respectively; the temperature regulating component is used to control the temperature of the protective hot plate A (4) and the protective hot plate B (5) to be consistent with the temperature of the main hot plate (2).

3. A thermal resistance heat flow sensor calibration device as claimed in claim 2, characterized in that: The temperature adjustment component includes: a detector, a temperature controller and three temperature sensors; The three temperature sensors are temperature sensor a, temperature sensor b and temperature sensor c; temperature sensor a is mounted on the protective hot plate A (4), temperature sensor b is mounted on the protective hot plate B (5), and temperature sensor c is mounted on the main hot plate (2); The detector is electrically connected to the temperature sensor a, the temperature sensor b and the temperature sensor c; The temperature controller is electrically connected to the detector, and is also electrically connected to the protective hot plate A (4) and the protective hot plate B (5); The detector is used to receive temperature information from temperature sensor a, temperature sensor b and temperature sensor c, calculate the temperature difference between temperature sensor a and temperature sensor c, the temperature difference between temperature sensor b and temperature sensor c, and convert the temperature difference into a temperature difference signal to be transmitted to the temperature controller; The temperature controller controls the temperatures of the protective hot plate A (4) and the protective hot plate B (5) respectively according to the temperature difference signal, so that the temperatures of the protective hot plate A (4) and the protective hot plate B (5) are kept consistent with the temperature of the main hot plate (2).

4. A thermal resistance heat flow sensor calibration device as claimed in claim 1, characterized in that: The calibration device further comprises: a heat insulation layer (6); The heat insulation layer (6) is arranged between the main heat plate (2) and the protective heat plate A (4), between the protective heat plate B (5) and the protective heat plate A (4), and between the main heat plate (2) and the protective heat plate B (5).

5. A thermal resistance heat flow sensor calibration device as claimed in claim 1, characterized in that: The main heating plate (2) comprises: a heating plate, a heating wire and a heating power supply; The area of ​​the upper end surface of the heating plate is not less than the area of ​​the end surface of the thermal resistance heat flow sensor (7) to be calibrated; The heating wire is arranged on the heating plate; The heating power supply is electrically connected to the heating wire, and the output power of the heating power supply is adjustable.

6. A thermal resistance heat flow sensor calibration device as claimed in claim 1, characterized in that: The cold plate (3) comprises: a water tank plate (31) and a cover plate; The water trough plate is processed with a cooling water channel (311), and the edge of the water trough plate (31) is processed with a cooling water outlet and a cooling water inlet, and the cooling water outlet and the cooling water inlet are respectively connected to the two ends of the water trough; the cooling water enters the cooling water channel (311) through the cooling water inlet and flows out through the cooling water outlet; The cover plate is installed on the water channel plate (31) and covers the cooling water channel (311).

7. A thermal resistance heat flow sensor calibration device as claimed in claim 6, characterized in that: The cooling water channels (311) are evenly distributed on the water channel plate (31) and are in a rectangular spiral structure.

8. A thermal resistance type heat flow sensor calibration device as claimed in claim 6 or 7, characterized in that: The cover plate is made of rubber.

9. A thermal resistance heat flow sensor calibration device as claimed in claim 5, characterized in that: When the end surface area of ​​the thermal resistance type heat flux sensor (7) is smaller than the upper end surface area of ​​the main heat plate (2), a material having the same thermal conductivity and the same thickness as the thermal resistance type heat flux sensor (7) is placed in the remaining portion of the main heat plate (2).

10. A thermal resistance heat flow sensor calibration device as claimed in claim 1, characterized in that: The calibration device further comprises: a lead screw; The cold plate (3) is mounted on a frame located above the calibration device via a lead screw, and the cold plate (3) moves up and down via the lead screw to adjust the distance of the cold plate (3) relative to the thermal resistance heat flow sensor (7).

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