Seed crystal clamp for monocrystalline silicon production

Abstract

The utility model relates to the technical field of clamps, in particular to a seed crystal clamp for monocrystalline silicon production. The seed crystal clamp for monocrystalline silicon production comprises a supporting plate, a driving assembly is arranged on the supporting plate, and clamping assemblies for clamping seed crystals are symmetrically arranged on the driving assembly; the clamping assembly comprises a mounting plate, the mounting plate is movably arranged on one side of the supporting plate, a fixedly-connected stand column is arranged on the mounting plate, an electric push rod is arranged on the outer wall of the mounting plate, a fixedly-connected sliding plate is arranged at the end of the electric push rod, and the inner wall of the sliding plate abuts against the outer wall of the stand column and is in sliding connection with the outer wall of the stand column. And a plurality of annularly-distributed supporting sheets are arranged on the outer wall of the stand column. According to the seed crystal clamp for monocrystalline silicon production, the end face and the side face of a seed crystal can be clamped at the same time through the clamping tray and the arc-shaped clamping piece in the clamping assembly when the seed crystal clamp is used, and therefore the clamping comprehensiveness and clamping stability of the seed crystal can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of clamps, in particular to a seed crystal clamp for single crystal silicon production. Background Art

[0002] The monocrystalline silicon seed crystal is the core starting material in the monocrystalline silicon growth process. Its quality, crystal orientation and surface state directly determine the crystal integrity and electrical properties of the final monocrystalline silicon. The seed crystal fixture plays a key role in fixing the seed crystal in the monocrystalline silicon growth process, and its design directly affects the stability and quality of crystal growth.

[0003] The existing Chinese patent publication number is CN201950739U, which is a clamp for producing solar-grade monocrystalline silicon seed crystals. It can be seen from the contents recorded in its specification that the device clamps the seed crystal in a way that it is squeezed, clamped and fixed between the silicon rod support plate and the hexagon socket screw. The single clamping method at its end reduces the comprehensiveness and stability of the clamping. At the same time, the manual driving method of twisting the hexagon socket screw also reduces the control of the clamping force of the seed crystal, thereby increasing the probability of damage to the seed crystal during the clamping process.

[0004] Therefore, it is necessary to provide a new seed crystal fixture for single crystal silicon production to solve the above technical problems. Utility Model Content

[0005] In order to solve the above technical problems, the utility model provides a seed crystal clamp for single crystal silicon production.

[0006] The seed crystal clamp for single crystal silicon production provided by the utility model comprises: a support plate, a driving component is arranged on the support plate, and a clamping component for clamping the seed crystal is symmetrically arranged on the driving component;

[0007] The clamping assembly comprises a mounting plate, the mounting plate is movably arranged on one side of the supporting plate, a fixedly connected column is arranged on the mounting plate, an electric push rod is arranged on the outer wall of the mounting plate, a fixedly connected sliding plate is arranged on the end of the electric push rod, the inner wall of the sliding plate abuts against and is slidably connected to the outer wall of the column, and a plurality of annularly distributed supporting sheets are arranged on the outer wall of the column;

[0008] The clamping assembly also includes an arc-shaped clamp and a clamping tray. The arc-shaped clamps are provided in multiple numbers and correspond one to one with the supporting plates. Pressure sensors are provided on the outer walls of the arc-shaped clamps and the clamping tray. The other side of the pressure sensor installed on the arc-shaped clamp is connected to the supporting plate, and the other side of the pressure sensor installed on the clamping tray is connected to the end of the column.

[0009] Preferably, the driving assembly includes a supporting block, two of which are symmetrically distributed on the supporting plate, a rotatably connected driving rod is arranged between the two supporting blocks, and a driving motor for driving the driving rod is arranged on the side wall of the supporting block.

[0010] Preferably, threaded support plates are provided on both sides of the outer wall of the driving rod, the outer wall of the support plate is fixedly connected to the outer wall of the mounting plate, and the thread directions of the thread structures on both sides are opposite.

[0011] Preferably, two groups of symmetrically distributed sliding grooves are provided inside the support plate, sliding blocks for sliding connection are inserted inside the sliding grooves, and ends of the sliding blocks are fixedly connected to the outer wall of the support plate.

[0012] Preferably, a fixedly connected extrusion cylinder is mounted on the top of the sliding plate, a fixedly connected inclined block is disposed on the bottom end of the supporting plate, the inner wall of the extrusion cylinder is an inclined structure, and the inner wall of the extrusion cylinder abuts against and is slidably connected to the outer wall of the inclined block.

[0013] Preferably, symmetrically distributed telescopic rods are provided on the outer wall of the support plate, and the ends of the two telescopic rods are provided with a same fixedly connected adapter plate, and the outer wall of the adapter plate is fixedly connected to the outer wall of the column.

[0014] Preferably, a spring is arranged between the support plate and the adapter plate, one end of the spring is fixedly connected to the support plate, and the other end of the spring is fixedly connected to the adapter plate.

[0015] Compared with the related art, the seed crystal fixture for single crystal silicon production provided by the utility model has the following beneficial effects:

[0016] 1. The utility model can simultaneously clamp the end face and side face of the seed crystal through the clamping tray and the arc-shaped clamping piece in the clamping assembly, thereby improving the comprehensiveness of the support and the clamping stability of the seed crystal.

[0017] 2. The utility model sets pressure sensors on the arc-shaped clamping piece and the clamping tray, and drives the clamping tray and the arc-shaped clamping piece through electric control. When in use, the terminal controller will detect the value of the pressure sensor in real time. When the value of the pressure sensor reaches the set value, the driving of the arc-shaped clamping piece and the clamping tray can be stopped, so as to accurately control the clamping force of the seed crystal. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic structural diagram of a preferred embodiment of a seed crystal fixture for single crystal silicon production is provided for the utility model;

[0019] Figure 2 for Figure 1A schematic diagram of a partial cross-sectional structure of the clamping assembly shown;

[0020] Figure 3 for Figure 2 A schematic diagram of a partial cross-sectional structure of the mounting plate and its components shown;

[0021] Figure 4 for Figure 2 A schematic diagram of the structure of the arc-shaped clip and its components shown;

[0022] Figure 5 for Figure 2 A schematic diagram of the structure of the support sheet and its components shown;

[0023] Figure 6 for Figure 1 A schematic diagram of the structure of the drive assembly shown;

[0024] Figure 7 for Figure 1 Schematic diagram of the structure of the support plate shown.

[0025] Numbers in the figure: 1. Support plate; 11. Slide groove; 2. Drive assembly; 21. Support block; 211. Drive motor; 22. Drive rod; 23. Support plate; 231. Slider; 3. Clamping assembly; 31. Mounting plate; 311. Column; 312. Sliding plate; 313. Electric push rod; 314. Extrusion cylinder; 32. Support plate; 321. Bevel block; 322. Telescopic rod; 323. Spring; 324. Adapter plate; 33. Arc-shaped clamp; 34. Clamping tray; 35. Pressure sensor. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0027] The specific implementation of the present utility model is described in detail below in conjunction with specific embodiments.

[0028] See also Figures 1 to 7 The embodiment of the utility model provides a seed crystal clamp for single crystal silicon production, and the seed crystal clamp for single crystal silicon production includes: a support plate 1.

[0029] In the embodiments of the present invention, please refer to Figures 1 to 7, a driving assembly 2 is provided on the support plate 1, and a clamping assembly 3 for clamping the seed crystal is symmetrically provided on the driving assembly 2; the clamping assembly 3 includes a mounting plate 31, the mounting plate 31 is movably arranged on one side of the support plate 1, a fixedly connected column 311 is provided on the mounting plate 31, an electric push rod 313 is provided on the outer wall of the mounting plate 31, and a fixedly connected sliding plate 312 is provided on the end of the electric push rod 313, the inner wall of the sliding plate 312 is abutted against and slidably connected to the outer wall of the column 311, and a plurality of annularly distributed supporting sheets 32 are provided on the outer wall of the column 311; the clamping assembly 3 also includes an arc-shaped clamping sheet 33 and a clamping tray 34, the arc-shaped clamping sheet 33 is provided with a plurality of and corresponds to the supporting sheet 32 ​​one by one, and pressure sensors 35 are provided on the outer walls of the arc-shaped clamping sheet 33 and the clamping tray 34, the other side of the pressure sensor 35 installed on the arc-shaped clamping sheet 33 is connected to the supporting sheet 32, and the other side of the pressure sensor 35 installed on the clamping tray 34 is connected to the end of the column 311.

[0030] It should be noted that: through the clamping tray 34 and the arc-shaped clamping piece 33 in the clamping component 3, when in use, when the driving component 2 works to drive the clamping component 3 to move, the internal clamping tray 34 can be abutted against the end of the seed crystal, and through the operation of the electric push rod 313, the working electric push rod 313 will drive the external support plate 32 and its arc-shaped clamping piece 33 to move, so that the arc-shaped clamping piece 33 can be abutted against the outer wall of the seed crystal, and then the end face and side face of the seed crystal can be clamped at the same time, thereby improving the comprehensiveness of the support and clamping stability of the seed crystal by the device, and by arranging a pressure sensor 35 on the arc-shaped clamping piece 33 and the clamping tray 34, when in use, the terminal controller will detect the value of the pressure sensor 35 in real time, and when the value of the pressure sensor 35 reaches the set value, the driving of the arc-shaped clamping piece 33 and the clamping tray 34 can be stopped, so that the clamping force of the seed crystal can be accurately controlled.

[0031] In the embodiments of the present invention, please refer to Figures 1 to 7 The driving assembly 2 includes a supporting block 21, two supporting blocks 21 are provided and symmetrically distributed on the supporting plate 1, a driving rod 22 connected in rotation is arranged between the two supporting blocks 21, and a driving motor 211 for driving the driving rod 22 is arranged on the side wall of the supporting block 21, threaded supporting plates 23 are arranged on both sides of the outer wall of the driving rod 22, the outer wall of the supporting plate 23 is fixedly connected to the outer wall of the mounting plate 31, and the thread directions of the thread structures on both sides are opposite, two groups of symmetrically distributed sliding grooves 11 are opened inside the supporting plate 1, a sliding slider 231 is inserted into the inside of the sliding groove 11, and the end of the slider 231 is fixedly connected to the outer wall of the supporting plate 23.

[0032] It should be noted that: during use, when the driving motor 211 drives the driving rod 22 to rotate, the driving rod 22 will drive the supporting plate 23 to move relative to each other through the threaded structure with opposite thread directions on both sides of the outer wall. At this time, the slider 231 can make the supporting plate 23 move stably by abutting against the slide groove 11, and then the external clamping assembly 3 can be driven to move through the supporting plate 23.

[0033] In the embodiments of the present invention, please refer to Figures 1 to 7 A fixedly connected extrusion cylinder 314 is arranged on the top of the sliding plate 312, a fixedly connected inclined block 321 is arranged on the bottom end of the supporting plate 32, the inner wall of the extrusion cylinder 314 is an inclined structure, and the inner wall of the extrusion cylinder 314 abuts against and is slidably connected to the outer wall of the inclined block 321, a symmetrically distributed telescopic rod 322 is arranged on the outer wall of the supporting plate 32, and the ends of the two telescopic rods 322 are provided with the same fixedly connected adapter plate 324, and the outer wall of the adapter plate 324 is fixedly connected to the outer wall of the column 311, a spring 323 is arranged between the supporting plate 32 and the adapter plate 324, one end of the spring 323 is fixedly connected to the supporting plate 32, and the other end of the spring 323 is fixedly connected to the adapter plate 324.

[0034] It should be noted that: through the setting of spring 323, the force of spring 323 can always squeeze the support sheet 32, so that the support sheet 32 ​​has a force toward the side away from the column 311. When in use, when the electric push rod 313 drives the sliding plate 312 and the extrusion cylinder 314 on its top to move, so that the extrusion cylinder 314 squeezes the inclined block 321, the extension force of the electric push rod 313 can be converted into a force to drive the support sheet 32, so that the support sheet 32 ​​can smoothly drive the arc-shaped clamping piece 33 of the side wall to move toward the seed crystal placed inside, so that the arc-shaped clamping piece 33 can smoothly clamp and fix the seed crystal.

[0035] The working principle of the seed crystal clamp for single crystal silicon production provided by the utility model is as follows;

[0036] After completing the installation of the support plate 1, the staff can take out the required seed crystal and place it between the clamping trays 34 on both sides. At this time, the driving motor 211 can be controlled to rotate through the controller of the terminal, and the rotating driving motor 211 will drive the driving rod 22 to rotate. At this time, the rotating driving rod 22 will drive the supporting plate 23 to move relatively through the threaded structures with opposite thread directions on both sides of the outer wall, and the relatively moving supporting plate 23 will drive the clamping tray 34 on the outer wall to move relatively.

[0037] When the side walls of the clamping trays 34 on both sides abut against the ends of the seed crystal, the pressure sensor 35 at the bottom can be squeezed by the clamping trays 34. At this time, the controller of the terminal can detect the value change of the corresponding pressure sensor 35 in real time. When the pressure value is the same as the set value, the rotation of the drive motor 211 can be stopped, thereby realizing accurate control of the squeezing force on the ends of the seed crystal;

[0038] After completing the clamping of the seed crystal end, the electric push rod 313 can also be controlled to extend. The working electric push rod 313 will drive the extrusion cylinder 314 at the end to squeeze the inclined block 321 at the bottom of the support plate 32 through the sliding plate 312. At this time, the resistance of the inclined block 321 and the extrusion cylinder 314 will convert the vertical extension force of the electric push rod 313 into a horizontal driving force for the support plate 32, so that the support plate 32 can smoothly drive the side wall arc clamp 33 to move toward the side wall close to the seed crystal. When the outer wall of the arc clamp 33 resists the side wall of the seed crystal, it can also squeeze the pressure sensor 35 of the side wall. At this time, the terminal controller can also accurately control the resistance force of the arc clamp 33 with the side wall of the seed crystal by detecting the value change of the pressure sensor 35, so that the arc clamp 33 can clamp the side wall of the seed crystal more accurately, and by combining with the clamping tray 34, the stability of the seed crystal clamping can be improved.

[0039] The circuits and controls involved in the present invention are all prior art and will not be described in detail here.

[0040] The above are only embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A seed crystal fixture for single crystal silicon production, characterized in that: include: A support plate (1), wherein a driving assembly (2) is provided on the support plate (1), and a clamping assembly (3) for clamping a seed crystal is symmetrically provided on the driving assembly (2); The clamping assembly (3) comprises a mounting plate (31), the mounting plate (31) being movably arranged on one side of the support plate (1), a fixedly connected column (311) being provided on the mounting plate (31), an electric push rod (313) being provided on the outer wall of the mounting plate (31), a fixedly connected sliding plate (312) being provided at the end of the electric push rod (313), the inner wall of the sliding plate (312) being abutted against and slidably connected to the outer wall of the column (311), and a plurality of annularly distributed supporting sheets (32) being provided on the outer wall of the column (311); The clamping assembly (3) further comprises an arc-shaped clamping piece (33) and a clamping tray (34), wherein a plurality of the arc-shaped clamping pieces (33) are provided and correspond one to one with the supporting piece (32), and pressure sensors (35) are provided on the outer walls of the arc-shaped clamping piece (33) and the clamping tray (34), and the other side of the pressure sensor (35) installed on the arc-shaped clamping piece (33) is connected to the supporting piece (32), and the other side of the pressure sensor (35) installed on the clamping tray (34) is connected to the end of the column (311).

2. The seed crystal fixture for single crystal silicon production according to claim 1, characterized in that: The driving assembly (2) comprises a supporting block (21), wherein two supporting blocks (21) are provided and symmetrically distributed on the supporting plate (1), a rotatably connected driving rod (22) is provided between the two supporting blocks (21), and a driving motor (211) for driving the driving rod (22) is provided on the side wall of the supporting block (21).

3. The seed crystal fixture for single crystal silicon production according to claim 2, characterized in that: Threaded support plates (23) are provided on both sides of the outer wall of the driving rod (22); the outer wall of the support plate (23) is fixedly connected to the outer wall of the mounting plate (31), and the thread directions of the thread structures on both sides are opposite.

4. The seed crystal fixture for single crystal silicon production according to claim 3, characterized in that: Two groups of symmetrically distributed slide grooves (11) are provided inside the support plate (1), a sliding block (231) is inserted into the inside of the slide groove (11), and the end of the sliding block (231) is fixedly connected to the outer wall of the support plate (23).

5. The seed crystal fixture for single crystal silicon production according to claim 4, characterized in that: The top of the sliding plate (312) is provided with an extrusion cylinder (314) which is fixedly connected, the bottom end of the support plate (32) is provided with an inclined block (321) which is fixedly connected, the inner wall of the extrusion cylinder (314) is an inclined surface structure, and the inner wall of the extrusion cylinder (314) abuts against and is slidably connected to the outer wall of the inclined block (321).

6. The seed crystal fixture for producing single crystal silicon according to claim 5, characterized in that: The outer wall of the support plate (32) is provided with symmetrically distributed telescopic rods (322), the ends of the two telescopic rods (322) are provided with a same fixedly connected adapter plate (324), and the outer wall of the adapter plate (324) is fixedly connected to the outer wall of the column (311).

7. The seed crystal fixture for producing single crystal silicon according to claim 6, characterized in that: A spring (323) is arranged between the support plate (32) and the adapter plate (324); one end of the spring (323) is fixedly connected to the support plate (32), and the other end of the spring (323) is fixedly connected to the adapter plate (324).

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