Machine vision measuring mechanism of energy storage type sealing welding machine

Abstract

The utility model discloses a machine vision measuring mechanism of an energy storage type sealing and welding machine, which belongs to the field of semiconductor packaging equipment and comprises a horizontal reciprocating moving assembly, a horizontal rotating assembly and a vertical rotating assembly, the upward vision assembly is fixed on one side of the horizontal reciprocating motion assembly and is used for measuring the position of the material above; and the overlook vision assemblies are arranged in one-to-one correspondence with the upper vision assemblies, are located under the same sides of the upper vision assemblies, are arranged on the horizontal reciprocating motion assembly in an up-and-down sliding mode and are used for measuring the positions of the materials below. According to the utility model, through the unique double-lens machine vision measurement mechanism, the positions of the upper side material and the lower side material can be measured at the same time, and the measurement problem of material position deviation when the materials are accurately positioned in the industry is effectively solved.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor packaging equipment, and in particular relates to a machine vision measurement mechanism of an energy storage type sealing and welding machine. Background Art

[0002] At present, the semiconductor packaging industry has higher and higher requirements for packaging precision. If the materials such as tube sockets, tube caps, cover plates, chips, etc. are directly moved from the material carrier to the process station for welding or mounting as before, the process requirements cannot be met. Now, the materials need to be accurately positioned at the welding process station or positioning station before welding or mounting to meet the process requirements.

[0003] In order to solve the problem of measuring material position deviation during precise positioning of materials in the current industry, a machine vision measurement mechanism for energy storage sealing and welding machines is urgently needed. Utility Model Content

[0004] The main purpose of the utility model is to provide a machine vision measurement mechanism for an energy storage type sealing and welding machine, so as to solve the problem of measuring the position deviation of materials when the materials are precisely positioned in the prior art.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A machine vision measurement mechanism for an energy storage type sealing and welding machine, comprising:

[0007] Horizontally reciprocating moving assembly;

[0008] An upward vision component, fixed to one side of the horizontal reciprocating moving component, for measuring the position of the material above;

[0009] The downward-looking visual component is arranged corresponding to the upward-looking visual component and is located directly below the same side of the upward-looking visual component. The downward-looking visual component can be slidably arranged on the horizontal reciprocating moving component up and down to measure the position of the material below.

[0010] Furthermore, the horizontal reciprocating moving assembly comprises:

[0011] Module base;

[0012] A linear module is fixedly arranged on the upper side of the module base;

[0013] A module slide plate is disposed on the upper side of the linear module so as to be horizontally reciprocatingly movable;

[0014] A driving unit is arranged on one side of the module base and is drivingly connected to the linear module, and is used to drive the module slide to move horizontally back and forth along the linear module;

[0015] A module support plate, fixed to one side of the module slide plate;

[0016] Among them, the upward visual component is fixed on one side of the module support plate; the downward visual component is arranged directly below the same side of the upward visual component and can be slid up and down on the module support plate.

[0017] Furthermore, the upward-looking visual component comprises:

[0018] An upward-viewing lens bracket is fixed to one side of the module support plate;

[0019] An upward-looking industrial camera, mounted on one side of the upward-looking lens bracket;

[0020] An upward-view lens is arranged on a side of the upward-view lens bracket away from the upward-view industrial camera and connected to the upward-view industrial camera, and the upward-view lens is placed horizontally;

[0021] An upward light source, disposed on one side of the upward lens and connected to the upward lens;

[0022] The upward-looking 90° prism is arranged on a side of the upward-looking lens away from the upward-looking lens bracket and is connected to the upward-looking lens.

[0023] Furthermore, the top-view visual component includes:

[0024] A downward-looking lens bracket is slidably disposed directly below the upward-looking lens bracket;

[0025] A downward-looking industrial camera, located directly below the upward-looking industrial camera;

[0026] A down-view lens is located directly below the up-view lens and connected to the down-view industrial camera, and the down-view lens is placed horizontally;

[0027] A downward-looking light source, located directly below the upward-looking light source and connected to the downward-looking lens;

[0028] The downward-looking 90° prism is located directly below the upward-looking 90° prism and is connected to the downward-looking lens.

[0029] Furthermore, it also includes:

[0030] A linear stepper motor bracket is fixed to a side of the module support plate away from the upward-viewing lens bracket;

[0031] A linear stepper motor is installed on the upper end of the linear stepper motor bracket; a groove is formed on the module support plate, and the groove is located on the lower side of the linear stepper motor bracket;

[0032] A skateboard connecting plate, a first end of which passes through the groove and is drivingly connected to a driving end of the linear stepping motor;

[0033] A downward-looking lens slide plate is arranged on a side of the module support plate away from the linear stepping motor bracket and is fixedly connected to the second end of the slide plate connecting plate. A slider is arranged on one side of the downward-looking lens slide plate, and the downward-looking lens bracket is fixedly connected to the downward-looking lens slide plate.

[0034] The linear rolling guide rail of the top-view lens is arranged in cooperation with the sliding block, and the linear rolling guide rail of the top-view lens is fixed on the module support plate.

[0035] Furthermore, two sliders are arranged in parallel on one side of the overhead view lens slide plate, two linear rolling guide rails for the overhead view lens are arranged, and the two linear rolling guide rails for the overhead view lens are arranged in a one-to-one correspondence with the two sliders.

[0036] Furthermore, a bracket adjustment pad is provided between the upward-viewing lens bracket and the module vertical support plate.

[0037] Beneficial effects of the utility model:

[0038] The utility model is mainly used for measuring the position deviation of materials during the precise positioning of materials in semiconductor packaging equipment such as energy storage sealing machines, parallel seam welding machines, crystal bonding machines, eutectic machines, and transfer machines. It has the advantages of high positioning accuracy, high efficiency, compact structure, small appearance, and stable performance.

[0039] The utility model can simultaneously measure the positions of the upper and lower materials through a unique dual-lens machine vision measurement mechanism, effectively solving the problem of measuring the position deviation of materials when accurately positioning materials in the industry. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 This is a schematic diagram of the structure of a machine vision measurement mechanism for an energy storage type sealing and welding machine of the utility model. Figure 1 ;

[0041] Figure 2 This is a schematic diagram of the structure of a machine vision measurement mechanism for an energy storage type sealing and welding machine of the utility model. Figure 2 ;

[0042] Figure 3 It is a schematic diagram of a front view of a machine vision measurement mechanism of an energy storage type sealing and welding machine of the utility model;

[0043] Figure 4 This is a schematic diagram of the rear view of a machine vision measurement mechanism of an energy storage type sealing and welding machine of the utility model.

[0044] Figure 5It is a schematic diagram of a top view of a machine vision measurement mechanism of an energy storage type sealing and welding machine of the utility model;

[0045] Figure 6 The utility model is a schematic side view of a machine vision measurement mechanism of an energy storage type sealing and welding machine.

[0046] In the figure: 1. module base; 2. servo motor; 3. coupling; 4. linear module; 5. module skateboard; 6. module support plate; 7. upward lens bracket; 8. bracket adjustment pad; 9. upward industrial camera; 10. upward lens; 11. upward light source; 12. upward 90° prism; 13. linear stepper motor; 14. linear stepper motor bracket; 15. downward lens linear rolling guide; 16. downward lens skateboard; 17. downward lens bracket; 18. downward industrial camera; 19. downward lens; 20. downward light source; 21. downward 90° prism. DETAILED DESCRIPTION

[0047] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present utility model will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0048] Example 1

[0049] refer to Figures 1 to 6 , a machine vision measurement mechanism for an energy storage type sealing and welding machine, comprising:

[0050] Horizontally reciprocating moving assembly;

[0051] The upward vision component is fixed on one side of the horizontal reciprocating moving component and is used to measure the position of the material above;

[0052] The downward-looking visual component is arranged corresponding to the upward-looking visual component and is located directly below the same side of the upward-looking visual component. The downward-looking visual component can be slidably arranged on the horizontal reciprocating moving component up and down to measure the position of the material below.

[0053] During specific implementation, the upward-looking vision component detects the material position above, and the downward-looking vision component detects the material position below. The two sets of vision components are installed on the same horizontal reciprocating moving component and move in the horizontal direction at the same time. The reciprocating motion of the horizontal reciprocating moving component realizes the switching between the measuring position and the waiting position, and the material position in the upper and lower directions is detected at the same time.

[0054] The utility model has high positioning accuracy, high efficiency, compact structure, small appearance and stable performance.

[0055] The utility model can simultaneously measure the positions of the upper and lower materials through a unique dual-lens machine vision measurement mechanism, effectively solving the problem of measuring the position deviation of materials when accurately positioning materials in the industry.

[0056] Example 2

[0057] In order to better improve the practicability of the device, this embodiment is further configured on the basis of the embodiment 1.

[0058] In this embodiment, the horizontal reciprocating moving assembly includes:

[0059] Module base 1;

[0060] The linear module 4 is fixedly arranged on the upper side of the module base 1;

[0061] The module slide plate 5 is disposed on the upper side of the linear module 4 so as to be horizontally reciprocatingly movable;

[0062] The driving part is arranged at one side of the module base 1 and is drivingly connected to the linear module 4, and is used to drive the module slide plate 5 to move horizontally back and forth along the linear module 4;

[0063] In this embodiment, the driving part is a servo motor 2 , and is drivingly connected to the linear module 4 via a coupling 3 .

[0064] The module support plate 6 is fixed to one side of the module slide plate 5;

[0065] Among them, the upward visual component is fixed to one side of the module support plate 6; the downward visual component is arranged directly below the same side of the upward visual component, and can be slid up and down on the module support plate 6.

[0066] In this embodiment, the upward-viewing lens 10 measures the position of the tube cap in the upper electrode, and the downward-viewing lens 19 measures the position of the tube base in the lower electrode.

[0067] In this embodiment, the upward vision component includes:

[0068] An upward lens bracket 7 is fixed to one side of the module support plate 6;

[0069] An upward-looking industrial camera 9 is installed on one side of the upward-looking lens bracket 7;

[0070] The upward-view lens 10 is arranged on a side of the upward-view lens bracket 7 away from the upward-view industrial camera 9 and connected to the upward-view industrial camera 9. The upward-view lens 10 is placed horizontally;

[0071] An upward light source 11 is disposed on one side of the upward lens 10 and connected to the upward lens 10;

[0072] The upward-looking 90° prism 12 is disposed on a side of the upward-looking lens 10 away from the upward-looking lens bracket 7 , and is connected to the upward-looking lens 10 .

[0073] A bracket adjustment pad 8 is provided between the upward-viewing lens bracket 7 and the module support plate 6 .

[0074] In this embodiment, the top view visual component includes:

[0075] The downward-looking lens bracket 17 is slidably disposed directly below the upward-looking lens bracket 7;

[0076] The downward-looking industrial camera 18 is located directly below the upward-looking industrial camera 9;

[0077] The down-view lens 19 is located directly below the up-view lens 10 and is connected to the down-view industrial camera 18. The down-view lens 19 is placed horizontally;

[0078] The downward light source 20 is located directly below the upward light source 11 and is connected to the downward lens 19;

[0079] The downward-looking 90° prism 21 is located directly below the upward-looking 90° prism 12 and is connected to the downward-looking lens 19 .

[0080] In this embodiment, it also includes:

[0081] The linear stepper motor bracket 14 is fixed to the side of the module support plate 6 away from the upward lens bracket 7;

[0082] The linear stepper motor 13 is installed on the upper end of the linear stepper motor bracket 14; a groove is opened on the module support plate 6, and the groove is located on the lower side of the linear stepper motor bracket 14;

[0083] A slide plate connecting plate, a first end of which passes through the groove and is drivingly connected to a driving end of the linear stepping motor 13;

[0084] The down-viewing lens slide plate 16 is arranged on a side of the module support plate 6 away from the linear stepping motor bracket 14 and is fixedly connected to the second end of the slide connecting plate. A slider is arranged on one side of the down-viewing lens slide plate 16. The down-viewing lens bracket 17 is fixedly connected to the down-viewing lens slide plate 16.

[0085] The top-view lens linear rolling guide rail 15 is arranged in cooperation with the slider, and the top-view lens linear rolling guide rail 15 is fixed on the module support plate 6 .

[0086] In this embodiment, two sliders are arranged in parallel on one side of the down-viewing lens slide plate 16, two down-viewing lens linear rolling guide rails 15 are arranged, and the two down-viewing lens linear rolling guide rails 15 are arranged in one-to-one correspondence with the two sliders.

[0087] In this embodiment, two groups of visual components are installed on the same linear module 4 and move in the horizontal direction at the same time. The linear module 4 is driven by the servo motor 2 to realize switching between the measuring position and the waiting position; the upward visual component is fixedly mounted on the linear module vertical support plate 6, so the upward visual component can only move in the horizontal direction with the linear module 4; the downward visual component is installed on the linear module vertical support plate 6 through the downward lens linear rolling guide 15, and performs lifting and lowering movements under the drive of the linear stepper motor 13 to adjust the lens object distance.

[0088] During specific implementation, the linear stepping motor 13 drives the slide connecting plate to move up and down, driving the overhead lens slide plate 16 to move synchronously, and finally the overhead lens bracket 17 moves up and down along the overhead lens linear rolling guide rail 15 to achieve the object distance in the height direction of the overhead lens 19.

[0089] In this embodiment, two linear rolling guide rails 15 are provided for the slider and the top-view lens, so that the top-view lens is more stable when sliding up and down.

[0090] Directions:

[0091] First, the linear module 4 moves the upward vision component and the downward vision component to the measuring position at the same time. The downward vision component is driven by the linear stepper motor 13 to adjust the object distance of the downward lens 19 in the vertical direction. The object distance of the upward lens 10 is adjusted by the upper electrode equipped with a tube cap. After the object distance is adjusted, the upward lens 10 measures the position of the tube cap in the upper upper electrode, and the downward lens 19 measures the position of the tube seat in the lower electrode. When in use, the position deviation of the tube cap and the tube seat is calculated by the machine vision system, and the equipment control system is notified. The control system controls the three-axis positioning mechanism to accurately position the material according to the data provided by the machine vision system, which can make the positioning accuracy of the material in the XY plane (horizontal plane) as high as ±0.003mm. At the same time, the machine vision component is driven by the linear module to move to the waiting position and wait for the next working cycle.

[0092] The above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. For those skilled in the art, the utility model may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model are included in the protection scope of the utility model.

Claims

1. A machine vision measurement mechanism for an energy storage type sealing machine, characterized in that: include: Horizontally reciprocating moving assembly; An upward vision component, fixed to one side of the horizontal reciprocating moving component, for measuring the position of the material above; The downward-looking visual component is arranged corresponding to the upward-looking visual component and is located directly below the same side of the upward-looking visual component. The downward-looking visual component can be slidably arranged on the horizontal reciprocating moving component up and down to measure the position of the material below.

2. According to the energy storage type sealing machine vision measurement mechanism of claim 1, it is characterized in that: The horizontal reciprocating moving assembly comprises: Module base; A linear module is fixedly arranged on the upper side of the module base; A module slide plate is disposed on the upper side of the linear module so as to be horizontally reciprocatingly movable; A driving unit is arranged on one side of the module base and is drivingly connected to the linear module, and is used to drive the module slide to move horizontally back and forth along the linear module; A module support plate, fixed to one side of the module slide plate; Among them, the upward visual component is fixed on one side of the module support plate; the downward visual component is arranged directly below the same side of the upward visual component and can be slid up and down on the module support plate.

3. The machine vision measurement mechanism of the energy storage type sealing machine according to claim 2 is characterized in that: The upward vision component comprises: An upward-viewing lens bracket is fixed to one side of the module support plate; An upward-looking industrial camera, mounted on one side of the upward-looking lens bracket; An upward-view lens is arranged on a side of the upward-view lens bracket away from the upward-view industrial camera and connected to the upward-view industrial camera, and the upward-view lens is placed horizontally; An upward light source, disposed on one side of the upward lens and connected to the upward lens; The upward-looking 90° prism is arranged on a side of the upward-looking lens away from the upward-looking lens bracket and is connected to the upward-looking lens.

4. The machine vision measurement mechanism of the energy storage welding machine according to claim 3 is characterized in that: The top-view visual component includes: A downward-looking lens bracket is slidably disposed directly below the upward-looking lens bracket; A downward-looking industrial camera, located directly below the upward-looking industrial camera; A down-view lens is located directly below the up-view lens and connected to the down-view industrial camera, and the down-view lens is placed horizontally; A downward-looking light source, located directly below the upward-looking light source and connected to the downward-looking lens; The downward-looking 90° prism is located directly below the upward-looking 90° prism and is connected to the downward-looking lens.

5. The machine vision measurement mechanism of the energy storage type sealing machine according to claim 4 is characterized in that: Also includes: A linear stepper motor bracket is fixed to a side of the module support plate away from the upward-viewing lens bracket; A linear stepper motor is installed on the upper end of the linear stepper motor bracket; a groove is formed on the module support plate, and the groove is located on the lower side of the linear stepper motor bracket; A skateboard connecting plate, a first end of which passes through the groove and is drivingly connected to a driving end of the linear stepping motor; A downward-looking lens slide plate is arranged on a side of the module support plate away from the linear stepping motor bracket and is fixedly connected to the second end of the slide plate connecting plate. A slider is arranged on one side of the downward-looking lens slide plate, and the downward-looking lens bracket is fixedly connected to the downward-looking lens slide plate. The linear rolling guide rail of the top-view lens is arranged in cooperation with the sliding block, and the linear rolling guide rail of the top-view lens is fixed on the module support plate.

6. The machine vision measurement mechanism of the energy storage type sealing machine according to claim 5 is characterized in that: Two sliding blocks are arranged in parallel on one side of the top-view lens slide plate, two linear rolling guide rails for the top-view lens are arranged, and the two linear rolling guide rails for the top-view lens are arranged in one-to-one correspondence with the two sliding blocks.

7. The machine vision measurement mechanism of the energy storage welding machine according to claim 3 is characterized in that: A bracket adjustment pad is arranged between the upward-viewing lens bracket and the module vertical support plate.

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