Configuration system of silane electronic mixed gas

Abstract

The utility model relates to the technical field of preparation of electronic mixed gas, in particular to a preparation system of silane electronic mixed gas. The system comprises a bottom gas source, a raw material gas cylinder, a finished product gas cylinder, a collection gas cylinder and an absorption cell which are arranged on a gas distribution pipeline, the bottom gas source comprises a nitrogen gas source, the raw material gas cylinder is used for containing silane, and the absorption cell is used for containing alkali liquor; during gas distribution, the bottom gas source and the raw material gas cylinder are communicated with the finished product gas cylinder through a gas distribution pipeline, so that silane electronic mixed gas is prepared in the finished product gas cylinder; when silane in the raw material gas cylinder is filled into the finished product gas cylinder by a first mass through the gas distribution pipeline, the collection gas cylinder is communicated with the gas distribution pipeline, so that at least part of silane in the gas distribution pipeline is filled into the collection gas cylinder; when the residual silane is emptied, the absorption tank is communicated with the gas distribution pipeline, so that the residual silane in the gas distribution pipeline is absorbed into the alkali liquor and then is emptied. According to the technical scheme, the problems of burning explosion and raw material loss when silane in the pipeline is emptied can be effectively solved.

Description

Technical Field

[0001] The utility model relates to the technical field of electronic mixed gas preparation, in particular to a silane electronic mixed gas preparation system. Background Art

[0002] Silane electronic mixed gas is an indispensable mixed gas in the fields of semiconductor manufacturing and photovoltaic industry. It has good chemical and physical properties and plays an important role in improving the production efficiency of electronic components and improving product quality. However, silane itself is a toxic gas that will burn when it encounters air, which will bring great safety risks and raw material losses during the preparation and discharge process.

[0003] Therefore, there is an urgent need to provide a silane electronic mixed gas configuration system to effectively solve the problem of explosion and raw material loss when the silane in the pipeline is emptied. Utility Model Content

[0004] The utility model provides a configuration system for a silane-based electronic mixed gas, which can effectively solve the problems of explosion and raw material loss when the silane in the pipeline is emptied.

[0005] The utility model provides a configuration system for silane electronic mixed gas, comprising a base gas source, a raw gas cylinder, a finished gas cylinder, a collection gas cylinder and an absorption tank arranged on a gas distribution pipeline, wherein the base gas source comprises a nitrogen gas source, the raw gas cylinder is used to contain silane, and the absorption tank is used to contain alkali solution;

[0006] When distributing gas, the base gas source and the raw gas cylinder are connected to the finished gas cylinder through the gas distribution pipeline to obtain a silane-based electronic mixed gas in the finished gas cylinder;

[0007] When the silane in the raw gas cylinder is charged into the first mass of the finished gas cylinder through the gas distribution pipeline, the collecting gas cylinder is connected to the gas distribution pipeline to charge at least part of the silane in the gas distribution pipeline into the collecting gas cylinder;

[0008] When the residual silane is emptied, the absorption tank is connected to the gas distribution pipeline to absorb the residual silane in the gas distribution pipeline into the alkaline solution and then emptied.

[0009] The embodiment of the utility model provides a configuration system for silane electronic mixed gas. By setting up a collection gas cylinder, after the first mass of silane is configured in the finished gas cylinder, at least part of the silane in the gas distribution pipeline can be filled into the collection gas cylinder, thereby saving raw materials and avoiding the loss of raw materials; by setting up an absorption pool, the residual silane in the gas distribution pipeline can be absorbed into the alkaline solution and then emptied, thereby improving the safety of discharge. Therefore, the above technical solution can effectively solve the problem of explosion and raw material loss when the silane in the pipeline is emptied. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0011] Figure 1 It is a structural schematic diagram of a configuration system for a silane-based electronic mixed gas provided in an embodiment of the utility model.

[0012] Reference numerals:

[0013] 10-gas distribution pipeline;

[0014] 1a-Pneumatic valve;

[0015] 1b- one-way valve;

[0016] 1c-manual valve;

[0017] 1d-flame arrester;

[0018] 1e-pressure gauge;

[0019] 1f-Silane concentration detector;

[0020] 1-Base gas source;

[0021] 11- Nitrogen gas source;

[0022] 12- Hydrogen gas source;

[0023] 13- Argon gas source;

[0024] 14-Helium gas source;

[0025] 2-Raw gas cylinder;

[0026] 3- Finished gas cylinders;

[0027] 4- Collect gas cylinders;

[0028] 5- Absorption tank;

[0029] 6- bottom air exhaust pipe;

[0030] 7-Dilution tank;

[0031] 71- first flow meter;

[0032] 72 - second flow meter;

[0033] 8- Vacuum assembly;

[0034] 81- Vacuum gauge;

[0035] 82-vacuum pump;

[0036] 9-Sealed box. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the utility model clearer, the technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0038] like Figure 1 As shown, the embodiment of the utility model provides a configuration system for silane electronic mixed gas, which includes a bottom gas source 1, a raw gas cylinder 2, a finished gas cylinder 3, a collection gas cylinder 4 and an absorption tank 5 arranged on a gas distribution pipeline 10, the bottom gas source 1 includes a nitrogen gas source 11, the raw gas cylinder 2 is used to contain silane, and the absorption tank 5 is used to contain alkali solution;

[0039] When distributing gas, the base gas source 1 and the raw gas cylinder 2 are connected to the finished gas cylinder 3 through the gas distribution pipeline 10, so as to obtain the silane electronic mixed gas in the finished gas cylinder 3;

[0040] When the silane in the raw gas cylinder 2 is charged into the first mass of the finished gas cylinder 3 through the gas distribution pipeline 10, the collecting gas cylinder 4 is connected to the gas distribution pipeline 10 so as to charge at least part of the silane in the gas distribution pipeline 10 into the collecting gas cylinder 4;

[0041] When the residual silane is being emptied, the absorption tank 5 is connected to the gas distribution pipeline 10 so that the residual silane in the gas distribution pipeline 10 is absorbed into the alkaline solution and then emptied.

[0042] In this embodiment, by providing the collecting gas cylinder 4, after the first mass of silane is configured in the finished gas cylinder 3, at least part of the silane in the gas distribution pipeline 10 can be filled into the collecting gas cylinder 4, thereby saving raw materials and avoiding the loss of raw materials; by providing the absorption tank 5, the residual silane in the gas distribution pipeline 10 can be absorbed into the alkaline solution and then emptied, thereby improving the safety of discharge. Therefore, the above technical solution can effectively solve the problem of explosion and raw material loss when the silane in the pipeline is emptied.

[0043] In some embodiments, an electronic scale is provided at the bottom of the finished gas cylinder 3 so that the quality of the gas entering the finished gas cylinder 3 can be monitored in real time.

[0044] In one embodiment of the present invention, the bottom gas source 1 further includes at least one of a hydrogen gas source 12 , an argon gas source 13 and a helium gas source 14 .

[0045] In this embodiment, by adding different types of base gases, the diversity of the electronic mixed gas can be increased. It should be noted that when diluting, nitrogen is preferred for dilution because nitrogen is safer on the one hand and more cost-effective on the other.

[0046] In one embodiment of the utility model, a pneumatic valve 1a and a one-way valve 1b are connected in sequence between the bottom gas source 1 and the gas distribution pipeline 10, a pneumatic valve 1a and a manual valve 1c are connected in sequence between the raw gas cylinder 2 and the gas distribution pipeline 10, a pneumatic valve 1a and a manual valve 1c are connected in sequence between the collection gas cylinder 4 and the gas distribution pipeline 10, and a pneumatic valve 1a, a manual valve 1c, a one-way valve 1b and a flame arrester 1d are connected between the absorption tank 5 and the gas distribution pipeline 10.

[0047] In this embodiment, by providing components such as a pneumatic valve 1a, a manual valve 1c, a one-way valve 1b and a flame arrester 1d, the safety of the gas distribution process can be effectively guaranteed.

[0048] In one embodiment of the present invention, the gas distribution pipeline 10 is provided with a pressure gauge 1e and a silane concentration detector 1f.

[0049] In this embodiment, by providing a pressure gauge 1e, the progress of gas distribution can be known; by providing a silane concentration detector 1f, the silane concentration can be further prevented from exceeding the standard.

[0050] In one embodiment of the present invention, the system further comprises a bottom gas exhaust pipe 6, which is connected to the gas distribution pipeline 10, and is provided with a one-way valve 1b and a manual valve 1c.

[0051] In this embodiment, the bottom gas exhaust pipe 6 is provided to discharge the residual bottom gas in the gas distribution pipeline 10 .

[0052] In one embodiment of the present invention, the system further comprises a dilution tank 7 , which is connected between the gas distribution pipeline 10 and the absorption tank 5 , and a nitrogen gas source 11 is connected to the dilution tank 7 .

[0053] In this embodiment, by providing the dilution tank 7, the residual silane in the gas distribution pipeline 10 can be further diluted, thereby more effectively ensuring the safety of emission.

[0054] In one embodiment of the present invention, the system further comprises a vacuum component 8 , which is connected to the gas distribution pipeline 10 , and is used to evacuate the gas distribution pipeline 10 .

[0055] In this embodiment, by providing the vacuum assembly 8, vacuuming can be performed before the gas distribution begins, thereby ensuring the purity of the gas distribution.

[0056] In some embodiments, the vacuum assembly 8 includes a vacuum gauge 81 and a vacuum pump 82 .

[0057] In one embodiment of the utility model, a first flow meter 71 is provided between the nitrogen source 11 and the dilution tank 7, and a second flow meter 72 is provided between the gas distribution pipeline 10 and the dilution tank 7. When the mixed gas of the gas distribution pipeline 10 is charged into the dilution tank 7, the nitrogen flow rate detected by the first flow meter 71 is at least five times the mixed gas flow rate detected by the second flow meter 72, and the mixed gas includes silane and nitrogen.

[0058] In this embodiment, the nitrogen flow rate entering the dilution tank 7 is at least five times the mixed gas flow rate entering the dilution tank 7, which can fully ensure complete dilution and thus effectively ensure the safety of emissions.

[0059] In one embodiment of the utility model, the raw gas cylinder 2 , the finished gas cylinder 3 , the collection gas cylinder 4 , and the vacuum assembly 8 are all arranged in a closed box 9 .

[0060] In this embodiment, a sealed box 9 is provided, and a slight negative pressure state is formed in the box through exhaust, so that the safety of personnel can be guaranteed if leakage occurs.

[0061] In one embodiment of the present invention, the exhaust pipeline of the absorption tank 5 is provided with a flame arrester 1d.

[0062] In summary, the above technical scheme has the following advantages: 1) The principle of gas distribution is the weight method, and the value is determined by an electronic scale. After the silane is added, the high-pressure silane remaining in the pipeline is collected and reduced in pressure through a collecting gas cylinder, which greatly reduces the risk of discharge; 2) After the silane in the collecting gas cylinder reaches a certain amount, it does not need to be processed and can be directly used in the production of new products. When producing new products, the silane in the collecting bottle is used first. After the silane in the collecting gas cylinder is consumed, it can play a collecting role again to achieve the effect of repeated utilization; 3) A dilution tank is added at the emptying rear end, which greatly reduces the content of silane in the exhaust gas before discharge, greatly improving the safety of preparation; 4) The addition of a silane concentration detector allows operators to accurately understand the dilution of silane concentration in the pipeline, which is convenient for subsequent operations; 5) The entire gas distribution pipeline, related components and gas cylinders are all in a closed box, and the box is exhaust to form a micro-negative pressure state, which can ensure the safety of personnel in case of leakage.

[0063] The following is a detailed description of the workflow of the above solution:

[0064] S1. After weighing the finished gas cylinder to be filled and recording the empty weight G0, connect it firmly and reliably to the filling equipment pipeline with a clamp, and open the exhaust facilities of the closed box;

[0065] S2. Turn on the vacuum pump, evacuate the gas distribution pipeline and the dilution tank, and after the value of the vacuum gauge is stable, replace the system with bottom gas (such as nitrogen) for multiple times before opening the pneumatic valve. After the value of the vacuum gauge is stable, open the valve of the finished gas cylinder and measure the vacuum degree of the finished gas cylinder. If the value does not increase significantly, then proceed with the subsequent preparation;

[0066] S3. Add silane to the finished product gas cylinder, slowly open the valve of the raw material gas cylinder, and control the speed of adding the silane raw material gas, while observing the values ​​of the electronic scale and the pressure gauge, and stop adding when the required amount is reached;

[0067] S4, close the valves of the finished gas cylinder and the raw gas cylinder, start the collection operation, that is, open the collection gas cylinder and its corresponding valve, and after the value of the pressure gauge is stable, close the valve of the collection gas cylinder. At this time, the collection of the silane residual gas in the gas distribution pipeline is completed;

[0068] S5. Start the dilution operation, open the valve of the nitrogen gas source, and fill the gas distribution pipeline with nitrogen to dilute the silane concentration. For example, after filling to 10MPa, control the indications of the first flowmeter and the second flowmeter, pass the tail gas diluted multiple times into the absorption tank, and finally exhaust the tail gas through the exhaust pipe. Repeat the above dilution operation until the silane concentration in the gas distribution pipeline is lower than the detection limit of the silane concentration detector, close the relevant pneumatic valve and manual valve, remove the connection fixture, weigh the weight of the finished gas cylinder and record G1, calculate the difference between the two weighings G1-G0 and record it, which is the weight of the silane added;

[0069] S6. Connect the finished gas cylinder to the equipment fixture firmly and reliably again, prepare the bottom gas, evacuate the gas distribution pipeline, and after the value of the vacuum gauge stabilizes, fill the gas distribution pipeline with bottom gas, requiring the pressure to be slightly higher than the pressure in the gas cylinder, open the valve of the finished gas cylinder, and add the second weight of bottom gas;

[0070] S7. Close the valve of the finished gas cylinder. At this time, the bottom gas is non-toxic and non-hazardous gas and does not need to be diluted at multiple stages. It can be directly discharged through the bottom gas exhaust pipe. After venting, remove the connecting fixture, weigh the weight of the finished gas cylinder and record G2. Calculate the difference between the two weighings G2-G1 and record it, which is the weight of the bottom gas added.

[0071] It should be noted that, in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "comprise a ..." do not exclude the presence of other identical factors in the process, method, article or device including the elements.

[0072] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A system for configuring a silane-based electronic mixed gas, characterized in that: The invention comprises a bottom gas source (1), a raw gas cylinder (2), a finished gas cylinder (3), a collection gas cylinder (4) and an absorption tank (5) arranged on a gas distribution pipeline (10), wherein the bottom gas source (1) is a nitrogen gas source (11), the raw gas cylinder (2) is used to contain silane, and the absorption tank (5) is used to contain alkali solution; When distributing gas, the base gas source (1) and the raw gas cylinder (2) are connected to the finished gas cylinder (3) through the gas distribution pipeline (10), so as to obtain a silane-based electronic mixed gas in the finished gas cylinder (3); When the silane in the raw gas cylinder (2) is charged into the first mass of the finished gas cylinder (3) through the gas distribution pipeline (10), the collecting gas cylinder (4) and the gas distribution pipeline (10) are connected to each other so as to charge at least part of the silane in the gas distribution pipeline (10) into the collecting gas cylinder (4); When the residual silane is being emptied, the absorption tank (5) and the gas distribution pipeline (10) are connected to absorb the residual silane in the gas distribution pipeline (10) into the alkaline solution and then emptied.

2. The silane-based electronic mixed gas configuration system according to claim 1, characterized in that: A pneumatic valve (1a) and a one-way valve (1b) are connected in sequence between the bottom gas source (1) and the gas distribution pipeline (10); a pneumatic valve (1a) and a manual valve (1c) are connected in sequence between the raw gas cylinder (2) and the gas distribution pipeline (10); a pneumatic valve (1a) and a manual valve (1c) are connected in sequence between the collection gas cylinder (4) and the gas distribution pipeline (10); and a pneumatic valve (1a), a manual valve (1c), a one-way valve (1b) and a flame arrester (1d) are connected between the absorption tank (5) and the gas distribution pipeline (10).

3. The silane-based electronic mixed gas configuration system according to claim 1, characterized in that: The gas distribution pipeline (10) is provided with a pressure gauge (1e) and a silane concentration detector (1f).

4. The silane-based electronic mixed gas configuration system according to claim 1, characterized in that: It also comprises a bottom gas exhaust pipe (6), the bottom gas exhaust pipe (6) being connected to the gas distribution pipeline (10), and the bottom gas exhaust pipe (6) being provided with a one-way valve (1b) and a manual valve (1c).

5. The silane-based electronic mixed gas configuration system according to claim 1, characterized in that: It also comprises a dilution tank (7), the dilution tank (7) being connected between the gas distribution pipeline (10) and the absorption tank (5), and the nitrogen gas source (11) being connected to the dilution tank (7).

6. The silane-based electronic mixed gas configuration system according to claim 5, characterized in that: It also comprises a vacuum component (8), the vacuum component (8) being connected to the gas distribution pipeline (10), and the vacuum component (8) being used to evacuate the gas distribution pipeline (10).

7. The silane-based electronic mixed gas configuration system according to claim 5, characterized in that: A first flow meter (71) is provided between the nitrogen gas source (11) and the dilution tank (7), and a second flow meter (72) is provided between the gas distribution pipeline (10) and the dilution tank (7). When the mixed gas in the gas distribution pipeline (10) is charged into the dilution tank (7), the nitrogen flow rate detected by the first flow meter (71) is at least five times the mixed gas flow rate detected by the second flow meter (72).

8. The silane-based electronic mixed gas configuration system according to claim 6, characterized in that: The raw material gas cylinder (2), the finished product gas cylinder (3), the collection gas cylinder (4), and the vacuum component (8) are all arranged in a sealed box (9).

9. The system for configuring a silane-based electronic mixed gas according to any one of claims 1 to 8, characterized in that: The exhaust pipeline of the absorption tank (5) is provided with a flame arrester (1d).

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