Spin coating device

Abstract

The utility model relates to the technical field of spin coating, and particularly provides a spin coating device. The problem that the film forming effect is affected due to the fact that an existing spin coating device cannot automatically control the atmosphere in a spin coating cavity is solved. Therefore, the spin-coating device comprises a main body, a spin-coating tray and an adsorption film, and a spin-coating cavity is formed in the main body, so that the spin-coating process can be carried out in the spin-coating cavity; the spin-coating tray is arranged on the inner bottom surface of the main body and is used for fixing the spin-coating substrate into the spin-coating cavity; and the adsorption film is arranged around the inner side surface of the main body in a detachable manner and can adsorb a suspended solvent in the spin-coating cavity. According to the utility model, the adsorption film arranged on the inner side surface of the main body in a surrounding manner is additionally arranged to effectively adsorb a solvent sputtered into the spin-coating cavity in the spin-coating process, so that a clean gas atmosphere in the spin-coating cavity is ensured, and the film forming effect is further effectively ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of spin coating, and specifically provides a spin coating device. Background Art

[0002] The existing spin coating device has a single function, which is only capable of spin coating. It is used to evenly spin the solution dropped on the substrate, and then control the film thickness by adjusting the acceleration, speed and time of the rotation, but it cannot accurately control the gas atmosphere around the device during the spin coating process. During the spin coating process, the existing spin coating device needs to use additional means and methods to control the atmosphere, so this method consumes a lot of time and consumables, and most importantly, it requires human intervention, which consumes the operator's time and energy.

[0003] Specifically, taking the perovskite experiment as an example, when the film is coated by spin coating, excess droplets will splash onto the cavity wall of the spin coating device. Since the solvent is a small molecule organic matter, these droplets will continue to evaporate, resulting in poor film quality of the device, low crystallinity in the film, small crystal particles and other problems, which in turn leads to problems such as increased series resistance and reduced current, and the uneven surface will also lead to low opening pressure. The atmosphere control of existing spin coating devices is usually achieved by manually adsorbing non-woven fabrics and blowing with a hair dryer. In this process, the non-woven fabric needs to be manually laid on the bottom of the spin coating device, but the non-woven fabric is very thin and has poor adsorption capacity. It cannot lock the liquid to prevent it from volatilizing. Therefore, the non-woven fabric often needs to be replaced after two or three spin coatings, and it is also necessary to use a hair dryer to blow the inner wall of the spin coating device frequently. The atmosphere inside the glove box can also be replaced by turning on the ventilation function of the glove box, so as to prevent impurity gases from affecting the film forming effect during the spin coating process from multiple ways. This approach is not only time-consuming and labor-intensive, but also a waste of resources, and it is difficult to accurately control the atmosphere around the sample.

[0004] In particular, when the existing spin coating device is applied to the preparation process of high-throughput full devices, the problem of being unable to accurately control the atmosphere around the substrate is infinitely magnified. Without human intervention, the CV value of the device performance is difficult to meet the experimental requirements. Specifically, during the process of the solution being spin-coated into a film, especially the solution spilled inside the cavity, the solvent in these solutions will evaporate, causing the solvent molecules to fill the entire cavity, especially around the wafer tray, affecting the film-forming effect of the device. Taking the preparation of perovskite solar cells as an example, the most important film layer in perovskite solar cells is the light absorption layer, namely the perovskite layer. For this layer, the perovskite solution needs to be dripped onto the conductive glass first, and then the spin coating device is turned on. During the spin coating process, the anti-solvent chlorobenzene (CB) is dripped to extract the solvents dimethylformamide (DMF) and dimethyl sulfoxide (DMSO) in the perovskite solution. However, if the atmosphere around the conductive glass is a CB atmosphere, the CB will first adhere to the conductive glass. During the diffusion process after the perovskite solution is dripped, the CB free in the air and the CB attached to the conductive glass will first extract the DMF and DMSO in the perovskite solution for the first time, forming crystals in advance. During the spin coating process, the anti-solvent CB is continued to be dripped, and then a second extraction is performed. Part of the perovskite crystallizes in advance, and part of the perovskite crystallizes during the spin coating process, resulting in inconsistent crystallinity and unevenness in the perovskite layer, which makes the filling lower and the opening voltage lower, and ultimately leads to lower efficiency. In summary, when preparing high-throughput full devices, if the atmosphere in the spin coating chamber, especially the atmosphere around the substrate, cannot be controlled, it is easy to interfere with the film forming process of the device, thereby leading to poor film forming effects.

[0005] Accordingly, the art needs a new spin coating device to solve or alleviate the above technical problems to a certain extent. Utility Model Content

[0006] The utility model aims to solve or alleviate the above technical problem to a certain extent, that is, the problem that the existing spin coating device cannot automatically control the atmosphere in the spin coating chamber and thus affects the film forming effect.

[0007] The utility model provides a spin coating device, which comprises:

[0008] A main body, wherein a spin coating cavity is formed on the main body;

[0009] A spin coating tray, disposed on the inner bottom surface of the main body, and used for fixing the spin coating substrate into the spin coating chamber;

[0010] The adsorption film is detachably arranged around the inner side surface of the main body and can adsorb the solvent suspended in the spin coating chamber.

[0011] In a preferred embodiment of the above spin coating device, the adsorption film covers the inner side of the main body; and / or

[0012] The cross-sectional shape of the spin coating chamber is circular, and the spin coating tray is arranged in the middle position of the inner bottom surface of the main body; and / or

[0013] The thickness of the adsorption film is set between 0.8 cm and 1.2 cm.

[0014] In a preferred embodiment of the above spin coating device, the adsorption film is a polar solvent adsorption film, which can adsorb the polar solvent suspended in the spin coating chamber; or

[0015] The adsorption film is a non-polar solvent adsorption film, which can adsorb the non-polar solvent suspended in the spin coating chamber; or

[0016] The adsorption film is a mixed solvent adsorption film, which can adsorb the polar solvent and the non-polar solvent suspended in the spin coating chamber.

[0017] In a preferred embodiment of the above-mentioned spin coating device, an exhaust hole is arranged on the inner bottom surface of the main body, and the spin coating device also includes an exhaust component connected to the exhaust hole, and the exhaust component can extract air in the spin coating chamber through the exhaust hole.

[0018] In a preferred embodiment of the above spin coating device, there are multiple air extraction holes, and the multiple air extraction holes are arranged around the spin coating tray.

[0019] In a preferred embodiment of the above spin coating device, the spin coating tray has a plurality of mounting notches, the number of the mounting notches is equal to the number of the exhaust holes, and the exhaust holes are correspondingly arranged near the mounting notches.

[0020] In a preferred embodiment of the above spin coating device, the spin coating tray is arranged to protrude from the inner bottom surface of the main body so that the height of the spin coating substrate fixed on the spin coating tray is higher than the height of the exhaust hole; and / or

[0021] The inner bottom surface of the main body includes a mounting plane located in the middle and a recessed surface arranged around the mounting plane. The spin coating tray and the air extraction holes are both arranged on the mounting plane, and the outer side of the recessed surface is connected to the inner side surface.

[0022] In a preferred embodiment of the above-mentioned spin coating device, a blowing hole is provided on the inner side surface of the main body, and the blowing hole is located above the spin coating tray. The spin coating device also includes a blowing component connected to the blowing hole, and the blowing component can blow air into the spin coating chamber through the blowing hole.

[0023] In a preferred embodiment of the above spin coating device, there are a plurality of the blowing holes, and the plurality of the blowing holes are evenly distributed on the inner side surface of the main body along the circumferential direction.

[0024] In a preferred embodiment of the above spin coating device, the axial direction of the blowing hole is horizontally arranged, so that the blowing member can output a horizontal airflow into the spin coating chamber through the blowing hole; or,

[0025] The axis direction of the blowing hole is arranged to be inclined upward, so that the blowing member can output an inclined upward airflow into the spin coating chamber through the blowing hole, wherein the angle between the axis of the blowing hole and the horizontal direction is arranged between 0° and 60°.

[0026] The spin coating device of the utility model comprises a main body, a spin coating tray and an adsorption film. A spin coating cavity is formed on the main body so that the spin coating process can be carried out in the spin coating cavity. The spin coating tray is arranged on the inner bottom surface of the main body and is used to fix the spin coating substrate into the spin coating cavity. The adsorption film is arranged around the inner side surface of the main body in a detachable manner and can adsorb the solvent suspended in the spin coating cavity. The utility model effectively adsorbs the solvent sputtered into the spin coating cavity during the spin coating process by adding an adsorption film arranged around the inner side surface of the main body, thereby ensuring a clean gas atmosphere in the spin coating cavity and effectively ensuring the film forming effect.

[0027] Furthermore, the utility model also adds exhaust holes and exhaust components on the inner bottom surface of the main body to form a negative pressure state inside the spin coating chamber, so that the clean air in the external environment can be continuously replenished into the spin coating chamber, replacing the gas atmosphere in the spin coating chamber, and then accurately controlling the gas atmosphere around the spin coating tray, so that the spin coating process can always be carried out in a clean gas atmosphere, so that each layer of solution will not be affected by impurity gases when forming a film, thereby ensuring its good crystallinity, reducing surface defects, and maximizing the final film-forming effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The disclosure of the present invention will become easier to understand with reference to the accompanying drawings. It is easy for those skilled in the art to understand that these drawings are only for illustrative purposes and are not intended to limit the scope of protection of the present invention. In addition, similar numbers in the drawings are used to represent similar components, among which:

[0029] Figure 1 The overall structural schematic diagram of the spin coating device of the utility model is shown;

[0030] Figure 2 The overall structural schematic diagram of the main body of the spin coating device of the utility model is shown, wherein the spin coating tray is also shown;

[0031] Figure 3A top view of the main body of the spin coating device of the utility model is shown, wherein the spin coating tray is also shown;

[0032] Reference numerals:

[0033] 11. Main body; 111. Inner bottom surface; 1111. Installation plane; 1112. Concave surface; 1113. Air extraction hole; 112. Inner side surface; 1121. Air blowing hole; 12. Cover body; 13. Spin coating tray; 131. Installation notch; 14. Outer shell. DETAILED DESCRIPTION

[0034] The optional embodiments of the present invention are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the scope of protection of the present invention. Those skilled in the art can make adjustments to it as needed to adapt to specific applications. For example, the spin coating device of the present invention can be used for the preparation of perovskite solar cells, and can also be used for the preparation of other high-throughput devices, which are not restrictive. Such changes in specific application objects do not deviate from the basic principles of the present invention, and therefore will fall within the scope of protection of the present invention.

[0035] It should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] In addition, in the description of the present invention, terms such as "center", "upper", "lower", "left", "right", "inside", and "outside" indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings. This is merely for the convenience of description and does not indicate or imply that the structure must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present invention.

[0037] See first Figure 1 ,like Figure 1As shown, the spin coating device of the utility model includes a main body 11, a cover body 12 and a spin coating tray 13. A spin coating cavity is formed on the main body 11 so that the spin coating process can be carried out in the spin coating cavity; the cover body 12 is pivotally connected to the main body 11 so that the cover body 12 can be covered above the opening of the main body 11, so that it can form a relatively closed spin coating cavity together with the main body 11, that is, the inner bottom surface 111 and the inner side surface 112 of the main body 11 and the bottom surface of the cover body 12 together form the spin coating cavity, so that the spin coating process can be carried out in a relatively closed space; the spin coating tray 13 is arranged on the inner bottom surface 111 of the main body 11, and the spin coating substrate (not shown in the figure) can be fixed on the spin coating tray 13, so that the spin coating substrate is fixed to the spin coating cavity through the spin coating tray 13; the adsorption film (not shown in the figure) is arranged around the inner side surface 112 of the main body 11 in a detachable manner so as to be able to adsorb the solvent suspended in the spin coating cavity. The utility model effectively absorbs the solvent sputtered into the spin coating chamber during the spin coating process by adding an adsorption film surrounding the inner side surface 112 of the main body 11, thereby ensuring a clean gas atmosphere in the spin coating chamber and effectively ensuring the film forming effect.

[0038] Specifically, in the present embodiment, the main body 11 is in a cylindrical structure as a whole, so that the main body 11 can form a cylindrical spin coating chamber with a circular cross-sectional shape, that is, the inner bottom surface 111 of the main body 11 is circular, and the spin coating tray 13 is arranged in the middle position of the inner bottom surface 111 of the main body 11. Preferably, when the spin coating substrate is fixed in place, the center of the spin coating substrate and the center of the inner bottom surface 111 are located on the central axis of the spin coating chamber, so that the distance between the center of the spin coating substrate and each point on the same plane of the inner side surface 112 of the main body 11 is equal, and accordingly, the cover body 12 is in a circular cover structure as a whole, so as to correspondingly close the circular opening above the main body 11. Based on this setting, during the spin coating process, the probability of the sputtered solvent splashing to each point on the same plane of the adsorption film is the same, so that each part of the adsorption film can well adsorb the sputtered solvent during the spin coating process, effectively improving the adsorption effect of the adsorption film, and ensuring the cleanliness of the gas in the spin coating chamber.

[0039] It should be noted that, although the spin coating chamber in this embodiment is a cylindrical structure with a circular cross-section, this is not restrictive, and the spin coating chamber can also be other shapes, such as a cylindrical structure with a square cross-section, or even a spherical structure, etc. The shape of the cover 12 also needs to be changed accordingly, and the specific setting position of the spin coating tray 13 can also be adjusted according to actual needs. In addition, the spin coating chamber can also be formed by the main body 11 alone, and these specific structures related to the spin coating function are not restrictive.

[0040] For further information, see Figures 1 to 3 ,like Figures 1 to 3As shown, the spin coating tray 13 is arranged at the middle position of the inner bottom surface 111 of the main body 11, and four convex structures with an arcuate cross-section are formed on the top of the spin coating tray 13, the arc surface of the arcuate convex structure faces outward and the flat surface faces inward, so that the inner side surfaces of the four arcuate convex structures together form a square groove to accommodate the square spin coating substrate, and a certain distance is spaced between two adjacent arcuate convex structures to form a mounting notch 131, so that the spin coating substrate can be grasped through the mounting notch 131. Of course, this is not restrictive, and those skilled in the art can also set the specific structure of the spin coating tray 13 according to actual use requirements, as long as the spin coating tray 13 can fix the spin coating substrate into the spin coating chamber; for example, the groove formed on the spin coating tray 13 can also be circular, etc.

[0041] Of course, it is understandable that the specific way in which the adsorption film can be detached is not limited. For example, it can be achieved by gluing or by using Velcro, as long as the adsorption film and the inner side surface 112 can be detachably connected. Preferably, the adsorption film covers the inner side surface 112 of the main body 11, that is, the width of the adsorption film is equal to the height of the inner side surface 112, and the length of the adsorption film is equal to the circumference of the inner side surface 112. When the adsorption film is attached to the inner side surface 112 of the main body 11, the adsorption film can be spread from the bottom edge of the inner side surface 112 to the top edge of the inner side surface 112, thereby covering the entire inner side surface 112. In addition, the adsorption film can be a whole piece or can be made up of multiple pieces. Moreover, when the adsorption film is multiple pieces, it can also be arranged at intervals on the inner side surface 112. The full arrangement is only a preferred arrangement for improving the adsorption effect. Based on the setting of the adsorption film, during the spin coating process, the splashed solvent is suspended in the air and can be adsorbed by the adsorption film, so that the adsorption film can firmly lock the solvent and reduce the volatilization of solvent molecules, so as to achieve an efficient adsorption effect through a simple structure.

[0042] It should be noted that the present invention does not limit the specific shape, number of settings and attachment position of the adsorption film. For example, the adsorption film can be a square sheet structure, a circular sheet structure or an elliptical sheet structure; for another example, the adsorption film can be a long strip of a whole piece, or a plurality of small pieces, which are not restrictive. In addition, the specific thickness of the adsorption film can also be set according to actual use requirements. Preferably, the thickness of the adsorption film is set between 0.8 cm and 1.2 cm; more preferably, the thickness of the adsorption film is set to 1 cm, so as to effectively ensure the adsorption effect, and at the same time, it can effectively avoid the attachment of the adsorption film affecting the gripping of the spin-coated substrate.

[0043] Furthermore, as a specific embodiment, three types of adsorption membranes can be set up so that the corresponding adsorption membranes can be selected for use according to different needs, specifically including polar solvent adsorption membranes, non-polar solvent adsorption membranes and mixed solvent adsorption membranes. The main carriers of the three adsorption membranes are fluff pulp, which is used for diversion. The polar solvent adsorption membrane is mainly mixed with adsorbent phenol resin ADS-600, and the non-polar solvent adsorption membrane is mainly mixed with super absorbent resin SAP. The mixed solvent adsorption membrane is to mix the above two materials in the fluff pulp and then make the adsorption membrane structure. Specifically, if the processing involves spin coating of a polar solvent, that is, the spin coating process involves a solvent whose solvent molecules are polar molecules, and the centers of gravity of the positive and negative charges in the molecules are not at the same point, resulting in the polarity of the molecules, such as isopropyl alcohol (IPA), etc., then a polar solvent adsorption film is attached to the inner side surface 112 of the main body 11. During the spin coating process, the polar solvent will splash into the spin coating chamber, and the polar solvent adsorption film provided on the inner side surface 112 can adsorb the polar solvent suspended in the spin coating chamber; if the processing involves spin coating of a non-polar solvent, such as dimethyl sulfoxide (DMSO), etc. At this time, a non-polar solvent adsorption film is attached to the inner side surface 112 of the main body 11. During the spin coating process, the non-polar solvent will splash into the spin coating chamber, and the non-polar solvent adsorption film arranged on the inner side surface 112 can absorb the non-polar solvent suspended in the spin coating chamber; if the processing process involves spin coating of polar solvents and non-polar solvents at the same time, a mixed solvent adsorption film is attached to the inner side surface 112 of the main body 11. During the spin coating process, the solvent will splash into the spin coating chamber, and the mixed solvent adsorption film arranged on the inner side surface 112 can absorb various solvents suspended in the spin coating chamber.

[0044] Based on the setting of the corresponding type of adsorption film, during the spin coating process, the adsorption film can firmly lock the solution splashed by the spin coating in the adsorption film, thereby reducing the accumulation of impurity gases in the spin coating chamber, and ensuring that a clean gas atmosphere can be maintained around the spin coating tray 13. When the splashed solution contacts the adsorption film, the adsorption film will first contact the surface of the solution to form a layer of fluid interface. According to the principle of "like dissolves like", the groups on the adsorption film will form hydrogen bonds with the groups on the solution molecules, and there will be van der Waals forces between the molecules. The action of these two main forces makes the solution molecules quickly adsorbed in the adsorption film, effectively preventing its volatilization.

[0045] Continue reading Figures 1 to 3 ,like Figures 1 to 3As shown, an air extraction hole 1113 is provided on the inner bottom surface 111 of the main body 11, and the spin coating device also includes an air extraction component (not shown in the figure) connected to the air extraction hole 1113, and the air extraction component can extract the air in the spin coating chamber through the air extraction hole 1113. It should be noted that the utility model does not limit the specific shape, number and position of the air extraction hole 1113, as long as it is arranged on the inner bottom surface 111 of the main body 11 to extract the air near the spin coating substrate. In addition, the specific type of the air extraction component is not limited, as long as the suction function can be realized. Specifically, the spin coating device also includes a shell 14, the shell 14 is arranged below the main body 11, and the air extraction component is arranged in the shell 14; of course, the air extraction component can also be directly exposed to the outside, as long as its air extraction port is connected to the air extraction hole 1113.

[0046] like Figure 2 and 3 As shown, in this embodiment, the number of the exhaust holes 1113 is four, and the exhaust holes 1113 are through-hole structures with a circular cross-sectional shape. The four circular exhaust holes 1113 are evenly distributed around the spin coating tray 13, so that the air near the spin coating substrate can be extracted in all directions to ensure the suction effect. As a preferred setting method, the number of the exhaust holes 1113 and the mounting notch 131 are both four, and the exhaust holes 1113 are correspondingly arranged near the mounting notch 131, that is, an exhaust hole 1113 is correspondingly arranged near each mounting notch 131, so that the exhaust holes 1113 can better achieve suction through the mounting notch 131. Of course, the number of the exhaust holes 1113 can also be other numbers; for example, three, six, eight, etc. In addition, the cross-sectional shape of the exhaust holes 1113 can also be a long strip, etc. The inner bottom surface 111 of the main body 11 includes a mounting plane 1111 located in the middle and a recessed surface 1112 arranged around the mounting plane 1111. The two side edges of the recessed surface 1112 are smoothly connected to the inner side surface 112 and the mounting plane 1111, that is, the inner side edge of the recessed surface 1112 is smoothly connected to the outer side edge of the mounting plane 1111, and the outer side edge of the recessed surface 1112 is smoothly connected to the lower side edge of the inner side surface 112. The spin coating tray 13 and the air extraction hole 1113 are both arranged on the mounting plane 1111, so as to form a better suction airflow with the help of the mounting plane 1111 and the recessed surface 1112 to ensure the suction effect. In addition, the spin coating tray 13 is arranged to protrude from the inner bottom surface 111 of the main body 11, so that the height of the spin coating substrate fixed on the spin coating tray 13 is higher than the height of the air extraction hole 1113.

[0047] It is understandable that during the spin coating process, when the spin-coated solution expands and forms a film on the surface of the spin-coated substrate, the solvent molecules will actually evaporate, and since this is volatilization directly on the surface of the spin-coated substrate, these volatile gases will be more shrouded above the spin-coating tray 13. Therefore, the utility model also adds an exhaust hole 1113 below the spin-coated substrate to continuously extract the volatile gases through the exhaust component arranged in the outer shell 14, and four exhaust holes 1113 are arranged around the bottom of the spin-coated substrate so that the four exhaust holes 1113 and the spin-coated substrate form a pyramid-like shape. This arrangement can ensure that the gas flow formed when the exhaust component is working covers the entire spin-coated substrate, so that a negative pressure state is maintained in the spin-coating chamber, and the external clean air (or nitrogen) will be continuously replenished into the spin-coating chamber to replace the gas atmosphere containing impurities in the spin-coating chamber, so that a clean atmosphere can always be maintained around the spin-coating tray 13, thereby effectively ensuring the film forming effect.

[0048] Continue reading Figure 2 ,like Figure 2 As shown, a blowing hole 1121 is provided on the inner side surface 112 of the main body 11, and the blowing hole 1121 is located above the spin coating tray 13, that is, the setting height of the blowing hole 1121 is greater than the height of the support surface of the spin coating tray 13 for supporting the spin coating substrate, and the spin coating device also includes a blowing component (not shown in the figure) connected to the blowing hole 1121, and the blowing component can blow air into the spin coating chamber through the blowing hole 1121, specifically, blow air above the spin coating substrate. It should be noted that the utility model does not limit the specific shape, setting number and setting position of the blowing hole 1121, as long as it is set on the inner side surface 112 of the main body 11 so as to be able to blow air above the spin coating substrate. In addition, the specific type of the blowing component is not limited, as long as the blowing function can be achieved. Preferably, the blowing component is also arranged in the shell 14, and the blowing hole 1121 is connected with the blowing port of the blowing component arranged in the shell 14 through a pipe; of course, the blowing component can also be directly exposed to the outside, as long as its blowing port is connected with the blowing hole 1121, and technical personnel in this field can set it according to actual usage requirements.

[0049] like Figure 2As shown, in this embodiment, the number of the blowing holes 1121 is two, and the blowing holes 1121 are through-hole structures with a circular cross-section shape, and the two blowing holes 1121 are arranged opposite to each other; when the number of the blowing holes 1121 is set to more, the multiple blowing holes 1121 are evenly distributed on the inner side surface 112 of the main body 11 along the circumferential direction, so that air can be blown to the top of the spin-coated substrate in all directions. As a setting mode, the axial direction of the blowing hole 1121 is set horizontally, that is, the blowing hole 1121 is a horizontally set circular through hole, so that the blowing component can output a horizontal airflow to the spin-coating chamber through the blowing hole 1121, that is, output a horizontal airflow above the spin-coated substrate. As another setting mode, the axial direction of the blowing hole 1121 is set to be inclined upward, so that the blowing member can output an inclined upward airflow to the spin coating chamber through the blowing hole 1121, that is, output an inclined upward airflow above the spin-coated substrate, and the angle between the axis of the blowing hole 1121 and the horizontal direction is set between 0° and 60°, that is, the inclination angle is set within a range greater than 0° and less than 60°. Preferably, when there are multiple blowing holes 1121, the angles between the axis directions of the multiple blowing holes 1121 and the horizontal direction are set to be the same.

[0050] In summary, the utility model adds an adsorption film attached to the inner side surface 112 of the main body 11 to absorb the solvent splashed during the spin coating process. Compared with the prior art method of setting a non-woven fabric for manual adsorption at the bottom of the device, the adsorption film attached to the inner side surface 112 of the main body 11 can better lock the solvent, making it less likely to evaporate. It does not need to be replaced after multiple spin coatings, and can be better suitable for high-throughput automated experiments; and the utility model also adds an exhaust hole 1113 and an exhaust component to absorb the evaporated part of the solvent on the spin-coated substrate, and also cooperates with the addition of a blowing hole 1121 and a blowing component to blow air toward the top of the spin-coated substrate. The coordinated setting of the exhaust function and the blowing function can control the gas atmosphere in the spin coating chamber to the greatest extent, thereby ensuring the film-forming effect to the greatest extent.

[0051] So far, the technical solution of the utility model has been described in conjunction with the optional implementation modes shown in the accompanying drawings, but it is easy for those skilled in the art to understand that the protection scope of the utility model is obviously not limited to these specific implementation modes. Without departing from the principle of the utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will fall within the protection scope of the utility model.

Claims

1. A spin coating device, characterized in that: The spin coating device comprises: A main body, wherein a spin coating cavity is formed on the main body; A spin coating tray, disposed on the inner bottom surface of the main body, and used for fixing the spin coating substrate into the spin coating chamber; An adsorption film is detachably disposed around the inner side of the main body and is capable of absorbing the solvent suspended in the spin coating chamber; An air extraction hole is arranged on the inner bottom surface of the main body, and the spin coating device further comprises an air extraction component connected to the air extraction hole, and the air extraction component can extract air in the spin coating chamber through the air extraction hole; An air blowing hole is arranged on the inner side surface of the main body, and the air blowing hole is located above the spin coating tray. The spin coating device also includes an air blowing component connected to the air blowing hole, and the air blowing component can blow air into the spin coating chamber through the air blowing hole.

2. The spin coating device according to claim 1, characterized in that: The adsorption film covers the inner side of the main body; and / or The cross-sectional shape of the spin coating chamber is circular, and the spin coating tray is arranged in the middle position of the inner bottom surface of the main body; and / or The thickness of the adsorption film is set between 0.8 cm and 1.2 cm.

3. The spin coating device according to claim 1, characterized in that: The adsorption film is a polar solvent adsorption film, which can adsorb the polar solvent suspended in the spin coating chamber; or The adsorption film is a non-polar solvent adsorption film, which can adsorb the non-polar solvent suspended in the spin coating chamber; or The adsorption film is a mixed solvent adsorption film, which can adsorb the polar solvent and the non-polar solvent suspended in the spin coating chamber.

4. The spin coating device according to claim 1, characterized in that: There are multiple air extraction holes, and the multiple air extraction holes are arranged around the spin coating tray.

5. The spin coating device according to claim 4, characterized in that: The spin coating tray has a plurality of mounting notches, the number of the mounting notches is equal to the number of the exhaust holes, and the exhaust holes are correspondingly arranged near the mounting notches.

6. The spin coating device according to claim 4, characterized in that: The spin coating tray is arranged to protrude from the inner bottom surface of the main body, so that the height of the spin coating substrate fixed on the spin coating tray is higher than the height of the air extraction hole; and / or The inner bottom surface of the main body includes a mounting plane located in the middle and a recessed surface arranged around the mounting plane. The spin coating tray and the air extraction holes are both arranged on the mounting plane, and the outer side of the recessed surface is connected to the inner side surface.

7. The spin coating device according to claim 1, characterized in that: The number of the blowing holes is multiple, and the multiple blowing holes are evenly distributed on the inner side surface of the main body along the circumferential direction.

8. The spin coating device according to claim 7, characterized in that: The axial direction of the blowing hole is horizontally arranged, so that the blowing member can output a horizontal airflow into the spin coating chamber through the blowing hole; or, The axis direction of the blowing hole is arranged to be inclined upward, so that the blowing member can output an inclined upward airflow into the spin coating chamber through the blowing hole, wherein the angle between the axis of the blowing hole and the horizontal direction is arranged between 0° and 60°.

Images