Diameter-variable guide cylinder for reducing oxygen of crystal bar

Abstract

The variable-diameter guide cylinder comprises an outer guide cylinder and an inner guide cylinder, a variable-diameter adjusting arc-shaped plate is arranged at the joint of the bottom of the outer guide cylinder and the bottom of the inner guide cylinder, and the outer circumferential surface of the arc-shaped plate is located in an arc-shaped groove in the bottom of the inner guide cylinder. The included angle between the inclined part and the horizontal part of the outer guide cylinder is 15 degrees, so that the oxygen content of the single crystal silicon rod is reduced, the distance between the two arc-shaped plates meets the requirements of pulling crystals with different diameters, meanwhile, the disassembly and assembly are convenient, the growth rate of the single crystal silicon rod is improved, and the single crystal quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace crystal pulling manufacturing, in particular to a variable diameter flow guide tube used for crystal rod oxygen reduction. Background Art

[0002] The guide tube is the most important thermal field component that must be used in the crystal pulling process. The guide tube is indispensable in the crystal pulling process. It plays the role of heat preservation and air flow guidance during the crystal pulling process, which can increase the pulling speed and improve the single crystal yield.

[0003] The existing guide tube is generally composed of an outer guide tube, soft felt, inner guide tube, water-cooled heat shield, and top solid felt. The outer guide tube is made of carbon-carbon composite material. Viscose-based soft felt is placed inside the carbon-carbon outer guide tube to keep warm during the crystal pulling process. A quartz inner guide tube is placed inside the viscose-based soft felt to isolate the soft felt from the water-cooled heat shield. The upper part of the traditional carbon-carbon outer guide is a straight arm, and the lower part has an angle of 30°. The crystal pulling process will cause the oxygen content of the crystal rod to increase. At the same time, the bottom of the traditional guide tube cannot adapt to the pulling of crystal rods with different required diameters. Utility Model Content

[0004] The utility model aims to provide a variable diameter guide tube for crystal rod deoxidation, by adjusting the horizontal angle of the bottom of the outer guide tube and arranging two arc plates, and by adjusting the distance between the arc plates, crystal pulling without using a crystal rod can be achieved, thereby solving the above-mentioned technical problems existing in the prior art.

[0005] In order to solve the above technical problems, the utility model adopts the following solutions:

[0006] A variable diameter guide tube for crystal rod deoxidation comprises an outer guide tube and an inner guide tube. A diameter-adjustable arc plate is provided at the bottom connection of the outer guide tube and the inner guide tube. The outer peripheral surface of the arc plate is located in an arc groove at the bottom of the inner guide tube.

[0007] Preferably, the outer guide tube comprises a vertical portion, an inclined portion and a horizontal portion, and the angle between the inclined portion and the horizontal portion is 15°.

[0008] Preferably, the horizontal portion is connected to the bottom of the inner flow guide tube, an adjustment groove is provided in the horizontal portion, and a through hole communicating with the adjustment groove is provided at the bottom of the inner flow guide tube.

[0009] Preferably, an arc-shaped groove is provided at the bottom of the inner guide cylinder extending from the inner wall to the outer wall, and the arc-shaped groove is adapted to the arc-shaped plate.

[0010] Preferably, an adjustment plate is provided on the outer peripheral surface of the arc-shaped plate, and the adjustment plate is inserted into the through hole and the adjustment groove in sequence.

[0011] Preferably, the top and bottom of the horizontal portion are provided with symmetrical first and second threaded holes, the adjustment plate is provided with a plurality of third threaded holes, and the first threaded holes, the second threaded holes and the third threaded holes are provided with screws for locking.

[0012] Preferably, an adhesive-based solid felt is provided between the outer guide tube and the inner guide tube.

[0013] Preferably, the screws, the adjustment plate and the arc plate are all made of carbon-carbon material.

[0014] The utility model has the beneficial effects:

[0015] The angle between the inclined portion and the horizontal portion of the outer guide tube of the utility model is 15°, which makes the argon flow in the single crystal furnace smoother and can quickly carry away the oxygen content in the argon, so that fewer oxygen atoms in the argon enter the single crystal silicon rod, thereby reducing the oxygen content of the single crystal silicon rod.

[0016] By arranging the arc plate and the adjusting plate, the movement of the adjusting plate in the assembly groove and the through hole drives the arc plate to move in the arc groove, so that the distance between the two arc plates meets the requirements of crystal pulling with different diameters, and the assembly and disassembly is convenient.

[0017] An adhesive-based solid felt is provided between the outer guide tube and the inner guide tube, which is convenient for disassembly and assembly, has high thermal insulation performance, and can increase the growth rate of the single crystal silicon rod and improve the quality of the single crystal. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the utility model;

[0019] Figure 2 For this utility model Figure 1 A schematic diagram of the partially enlarged structure of the middle circle A;

[0020] Figure 3 This is a schematic diagram of the structure of the curved plate of the utility model;

[0021] Figure 4 It is a structural schematic diagram of the arc groove of the utility model.

[0022] Figure markings: 1-outer guide cylinder, 10-vertical portion, 11-horizontal portion, 110-adjusting groove, 111-first threaded hole, 112-second threaded hole, 12-inclined portion, 2-inner guide cylinder, 20-through hole, 21-arc groove, 3-arc plate, 30-adjusting plate, 31-third threaded hole, 4-screw. DETAILED DESCRIPTION

[0023] The present invention will be further described in detail below in conjunction with the embodiments and drawings, but the implementation manner of the present invention is not limited thereto.

[0024] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model.

[0025] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "open", "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] Example 1

[0027] Embodiment 1 of the utility model is a variable diameter guide tube for deoxidation of crystal ingots, comprising an outer guide tube 1 and an inner guide tube 2, wherein a diameter-adjustable arc plate 3 is provided at the bottom connection of the outer guide tube 1 and the inner guide tube 2, and the outer peripheral surface of the arc plate 3 is located in an arc groove 21 at the bottom of the inner guide tube 2. The outer guide tube 1 comprises a vertical portion 10, an inclined portion 12 and a horizontal portion 11, and the angle between the inclined portion 12 and the horizontal portion 11 is 15°.

[0028] Reference Figure 1 In the present application, two arc plates 3 are interspersed at the bottom of the guide tube. The arc plates 3 are adjusted at the bottom thereof so that the distance between the two arc plates 3 adapts to the required crystal pulling size requirement of the crystal rod, thereby improving the utilization rate of the guide tube. At the same time, the angle between the inclined portion 12 and the horizontal portion 11 of the outer guide tube 1 is set to 15°. Under specific angle conditions, the argon gas in the single crystal furnace flows more smoothly, and the oxygen content in the argon gas can be quickly taken away, so that fewer oxygen atoms in the argon gas enter the single crystal silicon rod, thereby reducing the oxygen content of the single crystal silicon rod and improving the quality of the crystal rod. When the horizontal angle of the bottom of the guide tube is 15°, the oxygen content can be reduced by 0.8ppm.

[0029] In some preferred embodiments, the horizontal portion 11 is connected to the bottom of the inner guide tube 2, an adjustment groove 110 is provided in the horizontal portion 11, and a through hole 20 communicating with the adjustment groove 110 is provided at the bottom of the inner guide tube 2. An arc groove 21 is provided at the bottom of the inner guide tube 2 extending from the inner wall to the outer wall, and the arc groove 21 is adapted to the arc plate 3. An adjustment plate 30 is provided on the outer circumference of the arc plate 3, and the adjustment plate 30 is inserted into the through hole 20 and the adjustment groove 110 in sequence.

[0030] Specifically, refer to Figure 3 and Figure 4 The adjustment plate 30 connected to the outer periphery of the arc plate 3 passes through the through hole 20 and the adjustment groove 110 in sequence, and the adjustment plate 30 moves in the through hole 20 and the adjustment groove 110, thereby driving the arc plate 3 to move in the arc groove 21, thereby adjusting the distance between the two arc plates 3, so that this distance is suitable for pulling single crystal silicon rods with different diameters. At the same time, the adjustment process is simple and convenient, the adjustment time is short, and the work efficiency is improved.

[0031] In some preferred embodiments, the top and bottom of the horizontal portion 11 are provided with symmetrical first threaded holes 111 and second threaded holes 112, the adjustment plate 30 is provided with multiple third threaded holes 31, and the first threaded holes 111, the second threaded holes 112 and the third threaded holes 31 are provided with screws 4 for locking.

[0032] Specifically, a plurality of third threaded holes 31 are provided in the adjustment plate 30, and the second threaded hole 112 in the horizontal portion 11 is a blind hole. After adjusting the spacing, the two ends of the third threaded hole 31 correspond to the first threaded hole 111 and the second threaded hole 112 respectively. The screw 4 is used to pass through the first threaded hole 111 and the third threaded hole 31 in sequence and stop in the second threaded hole 112. The position of the arc plate 3 is fixed by the adjustment plate 30 to prevent it from falling off during use. At the same time, the installation position of the screw 4 is at the bottom of the horizontal portion 11, which is convenient for the installation of the screw 4.

[0033] In some preferred embodiments, an adhesive-based solid felt is provided between the outer guide tube 1 and the inner guide tube 2 .

[0034] The use of viscose-based felt makes it easier to disassemble and assemble, prolongs its service life and improves its thermal insulation performance. At the same time, it can increase the growth rate of single crystal silicon rods, and the average pulling speed of each single crystal silicon rod is increased by about 0.1mm / min.

[0035] In some preferred embodiments, the screw 4, the adjustment plate 30 and the arc plate 3 are all made of carbon-carbon material. The carbon-carbon material is used to keep consistent with the material of the outer guide tube 1 to avoid metal contamination of the material on the crystal pulling and affect the quality of the single crystal.

[0036] The working principle of the utility model is as follows: when in use, first adjust the distance between the two arc plates 3 so that the distance between the arc plates 3 is adapted to the crystal pulling size requirements. When adjusting, the movement of the arc plate 3 in the arc groove 21 is mainly driven by the movement of the adjustment plate 30 in the assembly groove and the through hole 20. After the adjustment position is determined, the screw 4 is used to lock and fix the position of the arc plate 3. The angle between the inclined portion 12 and the horizontal portion 11 of the outer guide tube 1 is 15°, so that the argon gas in the single crystal furnace flows more smoothly, and the oxygen content in the argon gas can be quickly taken away, so that fewer oxygen atoms in the argon gas enter the single crystal silicon rod, thereby reducing the oxygen content of the single crystal silicon rod; at the same time, an adhesive-based solid felt is provided between the outer guide tube 1 and the inner guide tube 2, which is convenient for disassembly and assembly, has high thermal insulation performance, and improves the growth rate of the single crystal silicon rod, thereby improving the quality of the single crystal.

[0037] The above is only a preferred embodiment of the utility model and does not limit the utility model in any form. According to the technical essence of the utility model, within the spirit and principles of the utility model, any simple modification, equivalent replacement and improvement made to the above embodiment still falls within the protection scope of the technical solution of the utility model.

Claims

1. A variable diameter guide tube for deoxidation of a crystal rod, characterized in that: The invention comprises an outer flow guide tube (1) and an inner flow guide tube (2), wherein a diameter-adjustable arc plate (3) is provided at the bottom connection of the outer flow guide tube (1) and the inner flow guide tube (2), and the outer peripheral surface of the arc plate (3) is located in an arc groove (21) at the bottom of the inner flow guide tube (2).

2. The variable diameter guide tube for crystal ingot deoxidation according to claim 1, characterized in that: The outer flow guide tube (1) comprises a vertical portion (10), an inclined portion (12) and a horizontal portion (11), and the angle between the inclined portion (12) and the horizontal portion (11) is 15°.

3. The variable diameter guide tube for crystal ingot deoxidation according to claim 2, characterized in that: The horizontal portion (11) is connected to the bottom of the inner flow guide tube (2), an adjustment groove (110) is provided in the horizontal portion (11), and a through hole (20) communicating with the adjustment groove (110) is provided at the bottom of the inner flow guide tube (2).

4. The variable diameter guide tube for crystal rod deoxidation according to claim 2, characterized in that: The bottom of the inner guide tube (2) is provided with an arc-shaped groove (21) extending from the inner wall to the outer wall, and the arc-shaped groove (21) is adapted to the arc-shaped plate (3).

5. The variable diameter guide tube for crystal ingot deoxidation according to claim 2, characterized in that: An adjustment plate (30) is provided on the outer peripheral surface of the arc-shaped plate (3), and the adjustment plate (30) is inserted into the through hole (20) and the adjustment groove (110) in sequence.

6. The variable diameter guide tube for crystal ingot deoxidation according to claim 5, characterized in that: The top and bottom of the horizontal portion (11) are provided with symmetrical first threaded holes (111) and second threaded holes (112); the adjustment plate (30) is provided with a plurality of third threaded holes (31); the first threaded holes (111), the second threaded holes (112) and the third threaded holes (31) are provided with screws (4) for locking.

7. The variable diameter guide tube for crystal ingot deoxidation according to claim 5, characterized in that: A viscose-based solid felt is provided between the outer guide tube (1) and the inner guide tube (2).

8. The variable diameter guide tube for crystal ingot deoxidation according to claim 6, characterized in that: The screw (4), the adjustment plate (30) and the arc-shaped plate (3) are all made of carbon-carbon material.

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