Cryopump baffle

Abstract

The utility model provides a low-temperature pump baffle plate which comprises a baffle ring assembly, a baffle plate assembly and a baffle plate assembly. The supporting assembly comprises a center plate and a plurality of supporting plates, the supporting plates are arranged around the center plate in a circumferential array mode and fixed to the peripheral edge of the center plate, a plurality of inserting grooves are formed in the supporting plates at equal intervals, and the inserting grooves and the barrier ring are installed in a matched mode. And the barrier ring assemblies are mounted on the supporting assembly and are uniformly and outwards distributed around the central point of the central plate in a diverging manner. According to the design, optimization of the structural strength and the cold conduction effect is considered and achieved separately, the center plate and the supporting plates surrounding the center plate form a stable supporting frame, the center plate outwards supports the supporting plates, and the inserting grooves inwards hold the barrier ring, so that the overall strength of the barrier plate is structurally guaranteed, and the service life of the barrier plate is prolonged. It is ensured that the ring and the supporting plate are in close contact and cannot be separated, and meanwhile dependence on welding strength is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum cryogenic pumps, in particular to a cryogenic pump baffle. Background Art

[0002] The baffle of the cryopump is one of the key components to ensure the stable operation of the equipment in a low-temperature environment. Its main function is to provide pre-cooling effect for the gas and isolate the heat source to ensure the normal operation of the cryopump. In terms of structural design, the baffle assembly is usually composed of multiple sets of baffle rings and support components. However, due to the large difference in thickness between the baffle rings and the support components, traditional high-melting-point welding methods such as argon arc welding are not applicable, and low-melting-point welding such as tin soldering has the problem of weak welding and easy falling off.

[0003] In the prior art, the baffle of a cryogenic pump is composed of a support member and a barrier ring assembly. The support member can be made of a rod or a plate, and each barrier ring needs to have a corresponding avoidance hole or groove. The processing accuracy of these holes and grooves is high, and the manufacturing process is complex and cumbersome. In order to ensure a good cooling effect, the avoidance holes or grooves of the support member and the barrier ring need to be connected by welding, and the connection strength mainly depends on the welding quality. However, during transportation or other vibration conditions, the weld is prone to breakage and falling off, affecting the stability and service life of the baffle assembly. Utility Model Content

[0004] In order to solve all or part of the problems of the above-mentioned prior art, the utility model provides a low-temperature pump baffle, which is formed by slotting a support plate, inserting the baffle rings into the slots in sequence, and then using a center plate to support the center of the support plate. The strength of the overall structure is ensured by welding, which not only improves the firmness of the connection, but also simplifies the manufacturing and maintenance process.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A cryogenic pump baffle includes: a baffle assembly including a plurality of baffles; a support assembly including a center plate and a plurality of support plates, the support plates being arranged in a circular array around the center plate and fixed to the outer edge of the center plate, the support plate being provided with a plurality of slots, the slots being matched and installed with the baffles. The baffle assembly is installed on the support assembly, and the baffle assembly is evenly distributed outward around the center point of the center plate. This design considers and implements the optimization of structural strength and cooling effect separately, the center plate and the support plates surrounding it form a stable support frame, the overall strength of the baffle is structurally guaranteed by the center plate supporting the support plate outward and the slots holding the baffle inward, ensuring the close contact between the baffle and the support plate and preventing them from coming apart, while reducing the reliance on welding strength.

[0007] The diameter of the side of the barrier ring gradually decreases from the lower opening to the upper opening, forming a trumpet shape that converges upward. This design can optimize fluid dynamics, reduce turbulence and resistance of the fluid around the barrier ring, thereby improving the flow efficiency of the fluid and the overall performance of the equipment.

[0008] The inclination angle of the side of the barrier ring is 45° relative to the horizontal direction. The inclined design can effectively guide the fluid through the barrier ring, allowing the fluid to pass more smoothly and reducing the resistance during the fluid flow process.

[0009] The barrier ring presents a vertically symmetrical structure, and the diameter of the side of the barrier ring gradually decreases from the middle part to the upper and lower openings, the diameter of the middle part is the largest, and the side forms a tapered profile. This design optimizes the flow path of the fluid, helps to reduce eddy currents and turbulence, thereby reducing energy loss and system noise, and improving the overall efficiency of the equipment.

[0010] The support plate includes a first support portion, and the first support portion is used to install the trumpet-shaped barrier ring, so as to effectively fix the position of the trumpet-shaped barrier ring in the device and ensure its stable operation.

[0011] The support plate further comprises a second support portion, and the second support portion is used to install the barrier ring of the symmetrical structure, thereby ensuring the stability and correct positioning of the barrier ring of the symmetrical structure in the device.

[0012] The support plate includes a first support portion and a second support portion, wherein the first support portion and the second support portion are connected via a step portion, and one end of the second support portion is connected to the center plate. This design can effectively combine different parts of the support plate to ensure their stability and functionality in the device. Through the connection of the step portion, the various parts of the support plate can work closely together, while the connection between the second support portion and the center plate ensures the firmness and reliability of the overall structure.

[0013] The first support portion has a higher level than the second support portion. This design can ensure that the tops of the trumpet-shaped barrier ring and the symmetrical structure barrier ring are kept consistent in level.

[0014] The sizes of the plurality of barrier rings are different, and the plurality of barrier rings are arranged at equal intervals on the support plate. By arranging at equal intervals, it is ensured that the influence of the barrier rings during the flow of fluid is evenly distributed, and the installation and maintenance process can be simplified.

[0015] The support plate is located at the outer edge of the center plate and is fixedly connected by welding; the barrier ring is installed in the slot of the support plate and the connection is fixedly connected by welding. This method can effectively prevent air leakage or structural loosening.

[0016] The low-temperature pump baffle of the utility model significantly enhances the stability of the overall structure and the fluid dynamics performance through innovative structural design. By opening slots with equal spacing on the support plate, inserting the baffle rings into the slots in sequence, and then using the center plate to support the center of the support plate, this design structurally ensures the overall strength of the baffle. The stable fit between the center plate and the support plate reduces the dependence on welding strength, while ensuring close contact between the baffle ring and the support plate, preventing the occurrence of detachment. In addition, the trumpet-shaped design of the baffle ring and the 45° inclination angle optimize the flow characteristics of the fluid, reduce the turbulence and resistance of the fluid around the baffle ring, and improve the flow efficiency of the fluid. The conical profile of the symmetrically structured baffle ring further optimizes the flow path of the fluid, reduces eddies and turbulence, reduces energy loss and system noise, and thus improves the overall efficiency of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the specific embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 This is a schematic structural diagram from a first perspective of a cryopump baffle in an embodiment of the utility model.

[0019] Figure 2 It is a schematic structural diagram from a second perspective of the cryopump baffle in an embodiment of the utility model.

[0020] Figure 3 It is a side view of the cryopump baffle in the embodiment of the utility model.

[0021] Figure 4 It is a schematic diagram of the structure of the support plate in the embodiment of the utility model.

[0022] Figure 5 It is a structural schematic diagram of the center plate in an embodiment of the utility model.

[0023] Figure numerals: 1-barrier ring assembly; 11-barrier ring; 2-support assembly; 21-center plate; 22-support plate; 221-first support portion; 222-second support portion; 223-step portion; 23-slot. DETAILED DESCRIPTION

[0024] The technical solutions in the specific embodiments of the utility model are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] The implementation of the present utility model is described in detail below in conjunction with specific embodiments.

[0026] In the present utility model embodiment, combined with reference Figure 1-Figure 5 As shown, a cryopump baffle is provided, which is mainly composed of two parts: a baffle assembly 1 and a support assembly 2, wherein the baffle assembly 1 is firmly mounted on the support assembly 2. The baffle assembly 1 is composed of a plurality of baffles 11 of different sizes, which are not only structurally independent, but also functionally complementary and work together in the operation of the cryopump. The support assembly 2 is composed of a center plate 21 and a plurality of support plates 22. In this embodiment, four support plates 22 are specifically provided. These support plates 22 are arranged around the center plate 21 in the form of a circular array, and slots are correspondingly provided at equidistant positions on the outer edge of the center plate 21. The four support plates 22 are respectively fixedly installed in the slots of the center plate 21. In other specific embodiments, other positioning tooling or other methods can also be added to replace the slots. In order to ensure the precise fit between the baffle assembly 1 and the support assembly 2, a plurality of slots 23 with equal spacing are provided on the support plate 22, and each baffle 11 is fixed on the support plate 22 through the corresponding slot 23. This design not only ensures the stability of the barrier ring assembly 1, but also enables the barrier ring assembly 1 to be evenly distributed outward around the center point of the center plate 21. This uniform layout helps to optimize the fluid flow path inside the pump, reduce fluid resistance and turbulence, and thus improve the efficiency and performance of the pump.

[0027] In this embodiment, the barrier assembly 1 is designed to include two different forms of barriers 11 to meet the needs of different application scenarios. The design feature of one barrier 11 is that the diameter of its side gradually decreases from the lower opening to the upper opening, forming a trumpet-shaped structure that converges upward. This design has significant advantages in fluid dynamics. The side inclination angle of the barrier 11 is 45° relative to the horizontal direction. The careful selection of this angle helps to optimize the flow characteristics of the fluid, reduce the resistance and turbulence of the fluid when passing through the barrier 11, and thus improve the overall efficiency of the pump. The design of another barrier 11 presents a symmetrical structure from top to bottom, and the diameter of its side gradually decreases from the middle part to the upper and lower openings, and the side forms a conical profile. This design makes the central part of the barrier 11 have the largest diameter, thereby providing a larger flow area when the fluid passes through, further reducing the fluid resistance. The symmetrical design is more stable in structure. The designs of the two barrier 11 are not only independent in structure, but also complementary in function. By rationally combining and arranging the two barrier 11, the flow path of the fluid can be more effectively controlled and the operating performance of the pump can be optimized. The trumpet-shaped barrier ring 11 can be used to guide the fluid into the suction port of the pump, while the symmetrical barrier ring 11 can be used to optimize the flow of the fluid inside the pump and reduce energy loss.

[0028] The support assembly 2 is designed to adapt to different forms of barrier ring assemblies 1 to ensure accurate matching and efficient installation between the barrier ring assembly 1 and the support assembly 2. Specifically, when the barrier ring assembly 1 is entirely composed of trumpet-shaped barrier rings 11, a first support portion 221 is designed on the support plate 22. The structure and size of the first support portion 221 are optimized for mounting trumpet-shaped barrier rings 11, ensuring that these barrier rings 11 can be firmly fixed on the support plate 22, thereby forming a trumpet-shaped structure that converges upward. This design not only improves the fluid guiding efficiency, but also optimizes the suction performance of the pump. When the barrier ring assembly 1 is entirely composed of symmetrical barrier rings 11, a second support portion 222 is designed on the support plate 22. The structure and size of the second support portion 222 are specifically used to mount symmetrical barrier rings 11, so that these barrier rings 11 can be evenly distributed on the support plate 22. This design helps to optimize the flow path of the fluid inside the pump, reduce fluid resistance, and improve the operating efficiency of the pump. When the barrier assembly 1 is composed of a mixture of a trumpet-shaped barrier 11 and a symmetrical barrier 11, a first support portion 221 and a second support portion 222 are designed on the support plate 22. The two support portions are connected by a step portion 223, ensuring that barriers 11 of different forms can be installed in a coordinated manner on the same support plate 22. One end of the second support portion 222 is connected to the center plate 21 to form a stable structure. In particular, the horizontal height of the first support portion 221 is higher than that of the second support portion 222, so that the tops of the trumpet-shaped barrier 11 and the symmetrical barrier 11 are consistent in horizontal height. This modular and scalable support assembly 2 design enables the cryopump baffle system to flexibly adapt to different design requirements and application scenarios. Whether it is a single-form barrier assembly 1 or a mixed-form barrier assembly 1, the support assembly 2 can provide precise installation and stable support. Through this innovative design, the cryopump baffle system can perform excellent performance under various working conditions and meet the needs of different application scenarios, especially in low-temperature environments, its stability and reliability are particularly outstanding.

[0029] A plurality of barrier rings 11 of different sizes are arranged at equal intervals on the support plate 22, ensuring the uniformity and symmetry of the overall structure. Specifically, the outer diameter of the inner barrier ring is exactly the inner diameter of the outer barrier ring. This setting not only helps to optimize the flow characteristics of the fluid, but also helps to ensure the stability of the barrier ring assembly 1 on the support plate 22. The support plate 22 is located at the outer edge of the center plate 21 and is fixedly connected by welding. This welding connection method not only provides extremely high structural strength, but also ensures a close fit between the support plate 22 and the center plate 21, thereby enhancing the stability and reliability of the entire cryopump barrier system. The welding connection process is also carefully selected to ensure the sealing and durability of the connection. The barrier ring 11 is installed in the slot 23 of the support plate 22, and the connection is also fixedly connected by welding. This design not only ensures the precise fit between the barrier ring 11 and the support plate 22, but also improves the installation efficiency and maintenance convenience of the entire barrier ring assembly 1. The welding fixed connection process is also carefully selected to ensure the firmness and durability of the connection and reduce the risk of failure caused by loose connection.

[0030] The low-temperature pump baffle of the utility model is provided with slots 23 at equal intervals on the support plate 22, and the baffle ring 11 is inserted into the slots in turn, and the center plate 21 is used to support the center of the support plate 22, and the strength of the overall structure is ensured by welding, thereby simplifying the manufacturing and maintenance process. This design reduces the dependence on traditional welding processes and reduces manufacturing costs. At the same time, the design of the baffle rings 11 arranged at equal intervals and the slots 23 on the support plate 22 simplifies the installation and maintenance process, making the replacement and maintenance of the baffle ring 11 faster and reducing maintenance costs. The baffle ring assembly 1 is composed of two forms of baffle rings 11. The designs of the trumpet-shaped baffle ring 11 and the symmetrical structure baffle ring 11 are not only independent in structure, but also complementary in function. The diameter of the side of the trumpet-shaped baffle ring 11 gradually decreases from the lower opening to the upper opening, forming a trumpet-shaped structure that converges upward, and the side inclination angle is 45°, which helps to reduce the resistance and turbulence of the fluid when passing through the baffle ring 11, thereby improving the overall efficiency of the pump. The side tapered profile design of the symmetrical structure barrier ring 11 provides a larger flow area, further reduces fluid resistance, and optimizes the flow path of the fluid. This design makes the fluid flow inside the pump smoother, reduces eddy currents and turbulence, thereby reducing energy loss and system noise, and improving the overall efficiency of the equipment.

[0031] It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made to the utility model without departing from the principle of the utility model, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A cryogenic pump baffle, characterized in that: include: A barrier ring assembly (1) comprising a plurality of barrier rings (11); A support assembly (2), comprising a central plate (21) and a plurality of support plates (22), wherein the support plates (22) are arranged in a circular array around the central plate (21) and fixed to the peripheral edge of the central plate (21), and the support plates (22) are provided with a plurality of slots (23), and the slots (23) are matched and installed with the barrier ring (11); The barrier ring assembly (1) is mounted on the support assembly (2), and the barrier ring assembly (1) is evenly distributed outward around the center point of the center plate (21).

2. The baffle according to claim 1, characterized in that: The diameter of the side surface of the barrier ring (11) gradually decreases from the lower opening to the upper opening, forming a trumpet shape that converges upward.

3. The baffle according to claim 2, characterized in that: The inclination angle of the side surface of the barrier ring (11) is 45° relative to the horizontal direction.

4. The baffle according to claim 1, characterized in that: The barrier ring (11) presents a vertically symmetrical structure, the diameter of the side of the barrier ring (11) gradually decreases from the middle part to the upper opening and the lower opening, the middle part has the largest diameter, and the side forms a tapered profile.

5. The baffle according to claim 2, characterized in that: The support plate (22) comprises a first support portion (221), and the first support portion (221) is used for mounting the trumpet-shaped barrier ring (11).

6. The baffle according to claim 4, characterized in that: The support plate (22) further comprises a second support portion (222), wherein the second support portion (222) is used for mounting the barrier ring (11) of a symmetrical structure.

7. The baffle according to claim 1, characterized in that: The support plate (22) comprises a first support portion (221) and a second support portion (222); the first support portion (221) and the second support portion (222) are connected via a step portion (223); and one end of the second support portion (222) is connected to the center plate (21).

8. The baffle according to claim 7, characterized in that: The first supporting portion (221) has a higher level than the second supporting portion (222).

9. The baffle according to claim 1, characterized in that: The sizes of the plurality of barrier rings (11) are different, and the plurality of barrier rings (11) are arranged at equal intervals on the support plate (22).

10. The baffle according to claim 1, characterized in that: The support plate (22) is located at the outer edge of the center plate (21) and is fixedly connected by welding; the barrier ring (11) is installed in the slot (23) of the support plate (22), and the connection is fixedly connected by welding.

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