High-precision flatness detection jig

Abstract

The utility model provides a high-precision flatness detection tool, and belongs to the technical field of detection tools. The high-precision flatness detection jig comprises a connecting framework, three horizontal equal-height columns and a plurality of micrometers. The connecting framework is of a plane structure; the three horizontal equal-height columns are arranged in the mode of being perpendicular to the connecting framework, and the upper ends of the three horizontal equal-height columns are detachably connected with the connecting framework. When the horizontal equal-height columns are combined with the connecting framework, the axial centers of the three horizontal equal-height columns are not in the same plane; and the micrometer is arranged in a manner of being vertical to the connecting framework and is detachably connected with the connecting framework. The high-precision flatness detection jig is relatively simple in structure and low in manufacturing cost; meanwhile, the process of testing the flatness by using the high-precision flatness detection jig is relatively convenient, and a plurality of dial indicators are adopted for testing at the same time, so that the test precision and accuracy are relatively high.

Description

Technical Field

[0001] The utility model relates to the technical field of detection instruments, in particular to a high-precision flatness detection tool. Background Art

[0002] Flatness refers to the deviation of the macroscopic concave and convex height of the substrate (or substrate) from the ideal plane. In the prior art, the commonly used methods for measuring flatness error are as follows:

[0003] Flat crystal interferometry: Flat crystal interferometry uses the working surface of an optical flat crystal to reflect an ideal plane, and directly determines the flatness error value of the measured surface by the curvature of the interference fringes. This method is mainly used to measure the flatness error of small planes, such as the working surface of a gauge and the measuring surface of a micrometer probe.

[0004] The punch-meter measurement method is to place the measured part and the micrometer on a standard plate, use the standard plate as the measurement reference surface, and use the micrometer to measure point by point along the actual surface or along several straight lines.

[0005] Liquid plane method: The liquid plane method uses the liquid plane as the measurement reference plane. The liquid plane is composed of the liquid surface in the "connecting tank" and then measured with a sensor. This method is mainly used to measure the flatness error of large planes.

[0006] Beam plane method: The beam plane method uses a collimating telescope and an aiming target mirror for measurement, and selects the beam plane formed by the three points farthest apart on the actual surface as the measurement reference plane for flatness error.

[0007] Laser flatness measuring instrument: Laser flatness measuring instrument is used to measure the flatness error of large surfaces.

[0008] Most of the above-mentioned flatness error measurement methods require professional testing equipment to be implemented. The procurement cost of the testing equipment is high and the testing process is also relatively cumbersome. Utility Model Content

[0009] The utility model provides a high-precision flatness detection fixture to solve the problems existing in the prior art. The high-precision flatness detection fixture has a relatively simple structure and a low manufacturing cost. At the same time, the process of using the high-precision flatness detection fixture to perform flatness testing is also relatively convenient, and multiple micrometers are used to perform testing at the same time, so the testing precision and accuracy are relatively high.

[0010] The technical solution adopted by the utility model is:

[0011] A high-precision flatness detection fixture, comprising:

[0012] A connecting frame, wherein the connecting frame is a planar structure;

[0013] Three horizontal equal-height columns, the three horizontal equal-height columns are arranged in a manner perpendicular to the connecting frame, and the upper ends of the horizontal equal-height columns are detachably connected to the connecting frame; when the horizontal equal-height columns are combined with the connecting frame, the axial centers of the three horizontal equal-height columns are not in the same plane;

[0014] A plurality of micrometers are arranged in a manner perpendicular to the connecting frame and are detachably connected to the connecting frame.

[0015] Furthermore, the lower edge of the horizontal equal-height column transitions into a circular arc to form a ball head.

[0016] Furthermore, the connecting skeleton has n connecting arms and a central connecting piece, where n is an integer greater than or equal to 1; the connecting arms are distributed along the circumference of the central connecting piece, and one end thereof facing the central connecting piece is connected to the central connecting piece to form a planar divergent structure; at least one first mounting hole is provided on the connecting arm to cooperate with the sleeve of the micrometer; and a second mounting hole is provided in the central area of ​​the central connecting piece to cooperate with the sleeve of the micrometer.

[0017] Furthermore, a first threaded hole is provided near each of the first mounting holes on the connecting arm in a direction perpendicular to the axial center of the corresponding first mounting hole, and is matched with a first locking screw.

[0018] Furthermore, a second threaded hole is provided on the central connecting member in a direction perpendicular to the axial center of the second mounting hole, and is matched with a second locking screw;

[0019] Alternatively, the upper surface of the central connecting member has a fixing block, which is detachably connected to the central connecting member; a third mounting hole is provided on the fixing block, and its inner diameter is consistent with the inner diameter of the second mounting hole; a second threaded hole is also provided on the fixing block in a direction perpendicular to the axial center of the third mounting hole; when the fixing block is combined with the central connecting member, the axial center of the third mounting hole coincides with the axial center of the second mounting hole.

[0020] Furthermore, when the upper surface of the central connecting member is provided with a fixing block, the upper surface of the central connecting member is also provided with a mounting groove, and the fixing block is arranged in the mounting groove.

[0021] Furthermore, the number of the connecting arms n is greater than or equal to 2, and the connecting arms are evenly distributed along the circumference of the central connecting piece.

[0022] Furthermore, a connecting rib is provided between two adjacent connecting arms.

[0023] Furthermore, the number of the first mounting holes on each of the connecting arms is two or more; and all of the first mounting holes are arranged in concentric circles with the axial center of the second mounting hole as the center.

[0024] Furthermore, the connecting arms are linear structures, and their number n is an even number; the two connecting arms on the opposite sides of the central connecting piece are a group; the axial centers of the first mounting holes and the second mounting holes on the two connecting arms in the same group are located in the same plane.

[0025] The beneficial effects of the utility model are:

[0026] The utility model designs a high-precision flatness detection fixture, which is composed of a connecting frame, a horizontal equal height column and a micrometer, etc. The high-precision flatness detection fixture has a relatively simple structure and a low manufacturing cost; at the same time, the process of using the high-precision flatness detection fixture to perform flatness testing is also relatively convenient, and multiple micrometers are used to perform testing at the same time, so the testing precision and accuracy are relatively high. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 It is a front view of the high-precision flatness detection fixture in this embodiment.

[0029] Figure 2 4 is a top view of the high-precision flatness detection fixture in this embodiment.

[0030] Figure 3 The three-dimensional high-precision flatness detection fixture in this embodiment Figure 1 .

[0031] Figure 4 The three-dimensional high-precision flatness detection fixture in this embodiment Figure 2 .

[0032] Figure 5 for Figure 2 AA section view.

[0033] The accompanying drawings are marked as follows:

[0034] 100-connecting frame, 200-horizontal equal height column, 300-micrometer;

[0035] 110 - connecting arm, 111 - first mounting hole, 112 - first threaded hole, 120 - central connecting piece, 121 - second mounting hole, 122 - mounting groove, 130 - fixing block, 131 - third mounting hole, 140 - connecting rib;

[0036] 310-sleeve, 320-measuring rod, 321-measuring head. DETAILED DESCRIPTION

[0037] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0038] The disclosure below provides many different embodiments or examples to implement different structures of the present invention. In order to simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present invention.

[0039] The embodiments of the utility model are described in detail below with reference to the accompanying drawings.

[0040] Figure 1 It is a front view of the high-precision flatness detection fixture in this embodiment. Figure 2 4 is a top view of the high-precision flatness detection fixture in this embodiment. Figure 3 The three-dimensional high-precision flatness detection fixture in this embodiment Figure 1 . Figure 4 The three-dimensional high-precision flatness detection fixture in this embodiment Figure 2 . Figure 5 for Figure 2 AA section view. Figures 1 to 5As shown in , the high-precision flatness detection fixture includes a connecting skeleton 100, a horizontal equal height column 200 and a micrometer 300. The connecting skeleton 100 has n connecting arms 110 and a central connecting member 120, where n is an integer greater than or equal to 1. The n connecting arms 110 and the central connecting member 120 are located in the same plane, and the n connecting arms 110 are distributed along the circumference of the central connecting member 120, and one end thereof facing the central connecting member 120 is connected to the central connecting member 120. Thus, the n connecting arms 110 and the central connecting member 120 form a planar divergent structure. The connecting arms 110 are in a linear structure (i.e., the length of the connecting arms 110 is much greater than its width and extends in a linear manner), and each connecting arm 110 is provided with at least one through first mounting hole 111. A through second mounting hole 121 is provided in the central area of ​​the central connecting member 120. Each connecting arm 110 corresponds to at least one dial gauge 300, and the outer diameter of the shaft sleeve 310 of the dial gauge 300 is roughly consistent with the inner diameter of the first mounting hole 111, so that the dial gauge 300 is arranged in the first mounting hole 111. The central connecting member 120 corresponds to a dial gauge 300, and the outer diameter of the shaft sleeve 310 of the dial gauge 300 is roughly consistent with the inner diameter of the second mounting hole 121, so that the dial gauge 300 is arranged in the second mounting hole 121. Thus, the dial gauge 300 and the connecting frame 100 are connected in a detachable manner. There are three horizontal equi-height columns 200. Each horizontal equi-height column 200 is arranged roughly in a direction perpendicular to the connecting frame 100, and its top end is detachably connected to the connecting frame 100 by bolt connection or the like, and the three horizontal equi-height columns 200 are not in the same straight line direction (that is, the axial centers of the three horizontal equi-height columns 200 are not in the same plane). In this embodiment, the principle of determining a plane with three points (i.e., the "three-point method") is utilized to determine a surface to be measured by the lower ends of three horizontal contour columns 200. After the horizontal contour columns 200 are connected to the connecting skeleton 100, the connecting skeleton 100 and the micrometer 300 disposed thereon are in a plane parallel to the surface to be measured, and then the flatness of the surface to be measured can be tested.

[0041] For example, as attached Figures 2~4In the high-precision flatness detection jig shown in , the connection skeleton 100 has eight connection arms 110; each connection arm 110 is provided with two first mounting holes 111. At the same time, there are nine micrometers 300 in total, which are respectively arranged on the eight connection arms 110 and the central connection member 120, and the eight micrometers 300 on the eight connection arms 110 are staggered. When using the high-precision flatness detection jig for flatness detection, firstly, the high-precision flatness detection jig is placed on a marble with a flatness of less than or equal to 2μm, the measuring rod 320 of the micrometer 300 extends from the shaft sleeve 310 and the probe 321 at its lower end contacts the surface of the marble, each micrometer 300 is adjusted to the 0 position based on the marble, and then the object to be tested is placed on the marble, and finally the high-precision flatness detection jig is placed on the object to be tested, and the value on the micrometer 300 is observed and recorded. To ensure accurate measurement, the high-precision flatness detection fixture is moved multiple times to repeat the measurement and record the results. The highest and lowest values ​​are taken to determine the height error, and the flatness error can be obtained.

[0042] The high-precision flatness detection fixture in this embodiment has a relatively simple structure and low manufacturing cost; at the same time, the process of using the high-precision flatness detection fixture to perform flatness testing is also relatively convenient, and multiple micrometers are used to perform testing simultaneously, with high test precision and accuracy.

[0043] In this embodiment, the lower edge of the horizontal contour column 200 is arc-shaped to form a ball head, which can reduce the contact area between the horizontal contour column 200 and the surface of the object to be tested and reduce the interference of the horizontal contour column 200 on the test results.

[0044] In order to ensure the reliability of the connection between the connecting arm 110 and the corresponding micrometer 300 in this embodiment, a first threaded hole 112 is opened near each first mounting hole 111 on the connecting arm 110 in a direction perpendicular to the axial center of the corresponding first mounting hole 111. Figures 2~4 As shown in . The first threaded hole 112 passes through the corresponding first mounting hole 111, and is matched with a first locking screw (not shown in the figure). When the first locking screw is installed in the first threaded hole 112 and the tail end of the first locking screw abuts against the sleeve 310, the position of the micrometer 300 is locked, which can effectively prevent the micrometer 300 from loosening during the test and affecting the measurement precision and accuracy.

[0045] Similarly, in order to ensure the reliability of the connection between the central connecting member 120 and the corresponding micrometer 300 in this embodiment, a second threaded hole is provided on the central connecting member 120 in a direction perpendicular to the axial center of the second mounting hole 121, and a second locking screw is provided in cooperation. When the second locking screw is installed in the second threaded hole and the tail end of the second locking screw abuts against the sleeve 310, the position of the micrometer 300 is locked, which can effectively prevent the micrometer 300 from loosening during the test process and affecting the measurement precision and accuracy.

[0046] When the number of connecting arms 110 is large, the distance between two adjacent connecting arms 110 will gradually become narrower, and the installation convenience of the second locking screw will be reduced. Figure 2 , Attachment Figure 3 And as attached Figure 5 As shown in , in order to improve the convenience of installing the second locking screw, a mounting groove 122 is provided on the upper surface of the central connecting member 120, and the second mounting hole 121 is provided at the bottom of the mounting groove 122. At the same time, a fixing block 130 is detachably provided in the mounting groove 122. The thickness of the fixing block 130 is consistent with the depth of the mounting groove 122, and the fixing block 130 is detachably connected to the central connecting member 120 by bolts (not shown in the figure). After the fixing block 130 is combined with the central connecting member 120, the upper surfaces of the two are flush. At the same time, a third mounting hole 131 corresponding to the second mounting hole 121 is provided on the fixing block 130, and the inner diameters of the two are consistent. The second threaded hole is provided on the side wall of the fixing block 130 in a direction perpendicular to the axial center of the third mounting hole 131. When the micrometer 300 is fixed, the sleeve 310 is arranged in the combined structure of the second mounting hole 121 and the third mounting hole 131 and is locked by the second locking screw, thereby improving the installation convenience of the micrometer 300 installed on the second locking screw on the central connecting member 120.

[0047] As attached Figure 2As shown in , in this embodiment, when the number n of connecting arms 110 is two or more, the connecting arms 110 are evenly distributed axially along the circumferential distribution of the central connecting member 120, and the uniformity of the distribution of the test points is improved. In addition, in order to improve the structural stability of the connecting skeleton 100, a connecting rib 140 is provided between two adjacent connecting arms 110, and the two ends of the connecting rib 140 are connected to the corresponding side walls of the connecting arm 110. In this embodiment, the addition of the connecting rib 140 can effectively reduce the shaking of the connecting arm 110 and improve the overall structural stability of the connecting skeleton 100. Furthermore, when two or more first mounting holes 111 with different positions are provided on each connecting arm 110, all the first mounting holes 111 can be centered on the axial center of the second mounting hole 121 to form a first mounting hole group arranged in a concentric circle manner, thereby obtaining a plurality of test points arranged in a concentric circle manner, thereby detecting the flatness of a plurality of areas continuously expanded in a ring shape on the object to be tested. Furthermore, in this embodiment, when the number n of the connecting arms 110 is an even number, the two connecting arms 110 on the two sides of the central connecting member 120 are a group, as shown in the attached Figure 2 The axial centers of the first mounting holes 111 and the second mounting holes 121 on the two connecting arms 110 in the same group are located in the same plane, so that the micrometers 300 are arranged diagonally on the connecting frame 100, and the uniformity of the test point distribution is further improved.

[0048] For example, when the high-precision flatness detection jig in this embodiment is used for wafer chuck flatness detection, the size of the connecting arm 110 and the position of the first mounting hole 111 can be designed so that the test points are evenly distributed in a concentric circle manner and can cover the entire surface of the wafer chuck at the same time. During the test, the high-precision flatness detection jig after zeroing is placed on the wafer chuck to perform the test; the high-precision flatness detection jig can be rotated to repeat multiple test point detections to quickly and accurately obtain the flatness detection results.

Claims

1. A high-precision flatness detection fixture, characterized in that: include: A connecting frame, wherein the connecting frame is a planar structure; Three horizontal equal-height columns, the three horizontal equal-height columns are arranged in a manner perpendicular to the connecting frame, and the upper ends of the horizontal equal-height columns are detachably connected to the connecting frame; when the horizontal equal-height columns are combined with the connecting frame, the axial centers of the three horizontal equal-height columns are not in the same plane; A plurality of micrometers are arranged in a manner perpendicular to the connecting frame and are detachably connected to the connecting frame.

2. The high-precision flatness detection jig according to claim 1, characterized in that: The lower end edge of the horizontal equal-height column transitions into a circular arc to form a ball head.

3. The high-precision flatness detection jig according to claim 1, characterized in that: The connecting skeleton has n connecting arms and a central connecting piece, where n is an integer greater than or equal to 1; the connecting arms are distributed along the circumference of the central connecting piece, and one end thereof facing the central connecting piece is connected to the central connecting piece to form a planar divergent structure; at least one first mounting hole is provided on the connecting arm to cooperate with the sleeve of the micrometer; a second mounting hole is provided in the central area of ​​the central connecting piece to cooperate with the sleeve of the micrometer.

4. The high-precision flatness detection jig according to claim 3 is characterized in that: A first threaded hole is provided near each of the first mounting holes on the connecting arm in a direction perpendicular to the axial center of the corresponding first mounting hole, and is matched with a first locking screw.

5. The high-precision flatness detection jig according to claim 3 or 4, characterized in that: A second threaded hole is provided on the central connecting member in a direction perpendicular to the axial center of the second mounting hole, and is matched with a second locking screw; Alternatively, the upper surface of the central connecting member has a fixing block, which is detachably connected to the central connecting member; a third mounting hole is provided on the fixing block, and its inner diameter is consistent with the inner diameter of the second mounting hole; a second threaded hole is also provided on the fixing block in a direction perpendicular to the axial center of the third mounting hole; when the fixing block is combined with the central connecting member, the axial center of the third mounting hole coincides with the axial center of the second mounting hole.

6. The high-precision flatness detection jig according to claim 5, characterized in that: When the upper surface of the central connecting member is provided with a fixing block, the upper surface of the central connecting member is also provided with a mounting groove, and the fixing block is arranged in the mounting groove.

7. The high-precision flatness detection jig according to claim 3, 4 or 6, characterized in that: The number of the connecting arms n is greater than or equal to 2, and the connecting arms are evenly distributed along the circumference of the central connecting piece.

8. The high-precision flatness detection jig according to claim 7, characterized in that: A connecting rib is arranged between two adjacent connecting arms.

9. The high-precision flatness detection jig according to claim 7, characterized in that: The number of the first mounting holes on each connecting arm is two or more; all the first mounting holes are arranged in concentric circles with the axial center of the second mounting hole as the center.

10. The high-precision flatness detection jig according to claim 7, characterized in that: The connecting arms are linear structures, and the number n is an even number; the two connecting arms on opposite sides of the central connecting piece form a group; the axial centers of the first mounting holes and the second mounting holes on the two connecting arms in the same group are located in the same plane.

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