Quartz boat structure for improving left-right lodging after wafer loading

Abstract

The utility model relates to a quartz boat structure for improving left-right lodging of a wafer after mounting, and belongs to the technical field of integrated circuit or discrete device chip manufacturing. Comprising three quartz rods, the three quartz rods are arranged in parallel along an arc line, and the quartz rods are fixedly connected through connecting rib units to form a three-rod quartz boat; a plurality of grooves are formed in any quartz rod, the grooves are evenly distributed in the axial direction of the quartz rod, the grooves are obliquely arranged towards the boat tail direction of the three-rod quartz boat, wafer containing cavities are formed among the grooves, at the same position, of the three quartz rods, and wafers are obliquely inserted into the wafer containing cavities. The center of an arc formed by the three quartz rods coincides with the center of the wafer, and the included angle between the quartz rods of the two edge portions is 58-62 degrees. The inclination angle of the groove ranges from 3 degrees to 5 degrees. The three-rod quartz boat is simple in structure, prevents the wafer from falling left and right when the wafer is loaded on the three-rod quartz boat, and guarantees the consistency of in-chip and inter-chip parameters of an operation product.

Description

Technical Field

[0001] The utility model relates to a quartz boat structure which improves the left-right falling of wafers after wafer loading, and belongs to the technical field of integrated circuit or discrete device chip manufacturing. Background Art

[0002] The diffusion process is a key process in the manufacturing process of discrete devices. It is well known that there are three elements of diffusion: temperature, time, and airflow. Among them, airflow plays a crucial role in the uniformity of intra-chip parameters. Once the wafer is loaded on the boat and falls over left and right, it will affect the airflow distribution, and then affect the uniformity of intra-chip and inter-chip parameters. If the fall is serious and the "chip overlap" phenomenon occurs, it will have a fatal impact on the uniformity of intra-chip and inter-chip parameters of the operating product. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide a quartz boat structure that improves the left-right falling over of wafers after loading in accordance with the above-mentioned prior art. The structure is simple and the installation is convenient. The structure can avoid the left-right falling over of wafers loaded on the quartz boat, thereby ensuring the uniformity of parameters within and between wafers of the operating product.

[0004] The technical solution adopted by the utility model to solve the above-mentioned problem is: a quartz boat structure that improves the left-right falling over after wafer loading, comprising three quartz rods, the three quartz rods are arranged in parallel and along an arc, and the other two quartz rods are symmetrically arranged on both sides of the middle quartz rod; the quartz rods are fixedly connected by multiple groups of connecting rib units to form a three-rod quartz boat; a plurality of grooves are opened on any of the quartz rods, and the plurality of grooves are evenly distributed along the axial direction of the quartz rod, and the grooves are respectively opened obliquely toward the stern direction of the three-rod quartz boat, and a wafer placement cavity is formed between the grooves at the same position of the three quartz rods, and the wafer is obliquely inserted into the wafer placement cavity; the wafer placement cavity is in contact with the bottom of the wafer.

[0005] The center of the arc formed by the three quartz rods coincides with the center of the wafer, and the angle between the quartz rods at the two edges is 58° to 62°.

[0006] The groove has an inclination angle of 3° to 5°.

[0007] A baffle is provided at the head of the three-rod quartz boat.

[0008] Any of the connecting rib units comprises two connecting ribs, and the three quartz rods are fixedly connected by the connecting ribs.

[0009] The width of the groove matches the thickness of the wafer.

[0010] Compared with the prior art, the advantages of the utility model are: a quartz boat structure that improves the left and right falling over of wafers after loading, with a simple and ingenious structure, which can effectively prevent wafers loaded on the three-rod quartz boat from falling over, thereby ensuring the consistency of parameters within and between wafers of the operating product, and at the same time reducing the frequency of scrapping of the three-rod quartz boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is a schematic diagram of a quartz boat structure that improves the ability to fall over left and right after wafer loading according to an embodiment of the utility model;

[0012] Figure 2 for Figure 1 A top view of

[0013] Figure 3 for Figure 1 Side view of

[0014] Figure 4 This is a partial picture of a quartz rod;

[0015] In the figure, 1 is a quartz rod, 1.1 is a groove, 2 is a connecting rib, 3 is a baffle, and 4 is a wafer. DETAILED DESCRIPTION

[0016] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0017] like Figure 1 , 2 As shown in Figures 3 and 4, a quartz boat structure for improving the left-right prostration of the wafer after loading in this embodiment includes three quartz rods 1, which are arranged in parallel and along an arc, the middle quartz rod 1 is set at the lowest point, and the other two quartz rods 1 are symmetrically set on both sides of the middle quartz rod. The center of the arc formed by the three quartz rods coincides with the center of the wafer 4, and the angle between the quartz rods on both sides is 60°. The three quartz rods are fixedly connected by connecting rib units to form a three-rod quartz boat. A plurality of grooves 1.1 are respectively opened on any quartz rod, and the plurality of grooves are evenly distributed along the axial direction of the quartz rod. The grooves are respectively opened in an inclined direction toward the tail of the three-rod quartz boat, and the inclination angle is 3°. The width of the groove matches the thickness of the wafer. A wafer placement cavity is formed between the grooves at the same position of the three quartz rods, and the wafer is obliquely inserted into the wafer placement cavity, and the wafer placement cavity fits the bottom of the wafer. After the wafers are loaded, the wafers on the three-rod quartz boat cannot swing left and right during the process of entering and exiting the furnace, so there will be no falling over or overlapping. As the three-rod quartz boat is repeatedly managed with HF, although the width of the groove gradually increases, the groove is tilted 3° toward the tail of the three-rod quartz boat. After the wafers are loaded, they still cannot swing left and right, avoiding the phenomenon of wafer falling over and overlapping.

[0018] The three quartz rods are fixedly connected by five groups of connection rib units evenly spaced. Each connection rib unit includes two connection ribs 2, and the three quartz rods are fixedly connected by two connection ribs.

[0019] A baffle 3 is provided at the head of the three-rod quartz boat. The hook rod breaks when dragging the three-rod quartz boat in and out of the furnace. The baffle 3 protects the first wafer and avoids damage to the first wafer.

[0020] The top of the groove has a chamfer, and the opening of the chamfer is 60°, which is convenient for inserting the wafer into the groove. The inclination angle of the groove 1.1 is 3° to 5°. If the inclination angle is too large, it is difficult to install the wafer in the wafer storage slot; if the inclination angle is too small, the wafer will still fall over or overlap.

[0021] The application has a simple and ingenious structure. After use, it can effectively prevent the wafers loaded on the three-rod quartz boat from falling over to the left or right, ensure the consistency of parameters within and between wafers of the operating product, and at the same time reduce the frequency of scrapping the three-rod quartz boat.

[0022] In addition to the above embodiments, the present invention also includes other implementation modes. Any technical solutions formed by equivalent transformation or equivalent replacement should fall within the protection scope of the claims of the present invention.

Claims

1. A quartz boat structure for improving the left-right lodging of wafers after loading, characterized in that: It comprises three quartz rods, which are arranged in parallel and along an arc, and two other quartz rods are symmetrically arranged on both sides of the middle quartz rod; the quartz rods are fixedly connected by multiple groups of connecting rib units to form a three-rod quartz boat; any of the quartz rods is provided with a plurality of grooves, which are evenly distributed along the axial direction of the quartz rod, and the grooves are respectively inclined toward the stern direction of the three-rod quartz boat, and a wafer placement cavity is formed between the grooves at the same position of the three quartz rods, and the wafer is obliquely inserted into the wafer placement cavity; The wafer placement cavity is in contact with the bottom of the wafer.

2. A quartz boat structure for improving the left-right lodging of wafers after loading according to claim 1, characterized in that: The center of the arc formed by the three quartz rods coincides with the center of the wafer, and the angle between the quartz rods at two sides is 58° to 62°.

3. The quartz boat structure for improving the left-right falling over of wafers after wafer loading according to claim 1, characterized in that: The groove has an inclination angle of 3° to 5°.

4. The quartz boat structure for improving the left-right falling over after wafer loading according to claim 1, characterized in that: A baffle is provided at the head of the three-rod quartz boat.

5. The quartz boat structure for improving the left-right falling over of wafers after wafer loading according to claim 1, characterized in that: Any of the connecting rib units comprises two connecting ribs, and the three quartz rods are fixedly connected by the connecting ribs.

6. The quartz boat structure for improving the left-right falling over of wafers after wafer loading according to claim 1, characterized in that: The width of the groove matches the thickness of the wafer.

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