Plating pot placing base and vacuum evaporation device

Abstract

The utility model provides a plating pot placing base and a vacuum evaporation device, and belongs to the technical field of vacuum evaporators, the plating pot placing base comprises a base body and a supporting rod assembly, the supporting rod assembly comprises a sleeve rod and a sleeve, one end of the sleeve rod is arranged on the base body, the other end of the sleeve rod is detachably provided with the sleeve, and the sleeve is arranged on the base body. An inserting groove is formed in the sleeve, and at least one sleeving rotating piece is arranged in the inserting groove. According to the plating pot placing base, a plating pot can be conveniently placed on the plating pot placing base, loading and unloading of the plating pot are more stable and efficient, meanwhile, the plating pot can rotate, the angle can be adjusted according to use requirements, and the operation efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum evaporation machines, in particular to a plating pot placement base and a vacuum evaporation device. Background Art

[0002] The plating pot placement base is mainly used to support and fix the plating pot. It can help the operator to disassemble and assemble the plating pot and perform loading and unloading operations more conveniently. For example, when removing the plating pot from the vacuum evaporation device, by placing the plating pot on the placement base, it can be ensured that the plating pot does not tip over or shake, and it is also convenient for the operator to remove the wafer from the plating pot.

[0003] At present, the lower end of the plating pot is usually connected to the base by plugging, and a wooden plug is inserted into the base to prevent the plating pot from moving. However, the wooden plug is easily damaged during use, and the plating pot cannot be rotated due to the presence of the wooden plug, which is inconvenient for the upper and lower operations of the plating pot. Utility Model Content

[0004] Based on this, the purpose of the utility model is to provide a plating pot placement base and a vacuum evaporation device, aiming to solve the technical problems existing in the prior art.

[0005] On the one hand, the utility model provides a plating pot placing base for connecting the plating pot, the plating pot placing base includes a base body and a support rod assembly, the support rod assembly includes a sleeve rod and a sleeve, one end of the sleeve rod is arranged on the base body, and the other end of the sleeve rod is detachably provided with the sleeve, the sleeve is provided with a plug-in groove, and a sleeve rotating part is provided in the plug-in groove.

[0006] The beneficial effects of the utility model include at least: by arranging a detachable sleeve on the sleeve rod, and arranging a plug-in slot on the sleeve and a sleeve rotating part in the plug-in slot, the plating pot can be directly plugged into the plug-in slot during assembly. Compared with the prior art, the plating pot can be firmly placed on the seat body without using a wooden plug, and by using the sleeve rotating part, the plating pot can also be rotated relative to the seat body, which facilitates the upper and lower pieces of the plating pot. The operation and disassembly of the plating pot are convenient; in addition, since the sleeve and the sleeve rod are detachably connected, sleeves of different lengths can be replaced according to usage requirements, thereby improving work efficiency.

[0007] In addition, the above-mentioned plating pot placement base according to the utility model may also have the following additional technical features:

[0008] Furthermore, a thread groove is provided at one end of the sleeve rod close to the sleeve, and the sleeve is threadedly connected to the thread groove.

[0009] Furthermore, the plug-in slot passes through the sleeve, and bearings are provided at both ends of the plug-in slot.

[0010] Furthermore, at least one limiting groove is provided on the periphery of the end of the plug-in slot away from the sleeve rod.

[0011] Furthermore, one of the bearings is spaced apart from the bottom wall of the thread groove.

[0012] Furthermore, one end of the sleeve rod is rotatably disposed on the seat body.

[0013] Furthermore, a rotating shaft is provided at one end of the sleeve rod close to the seat body, an axle seat is provided on the seat body, the rotating shaft is rotatably arranged on the axle seat, and a locking piece is provided between the rotating shaft and the axle seat.

[0014] Furthermore, the locking member is a screw.

[0015] On the other hand, based on the same inventive concept, the utility model also provides a vacuum evaporation device, which uses the aforementioned plating pot placement base. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of an embodiment of the utility model;

[0017] Figure 2 for Figure 1 A partial enlarged view of the embodiment A in FIG.

[0018] Figure 3 A cross-sectional view of an embodiment of the utility model;

[0019] Description of main component symbols:

[0020] The seat body 100 , the shaft seat 110 , the support rod assembly 200 , the sleeve rod 210 , the threaded groove 211 , the rotating shaft 212 , the sleeve 220 , the plug-in groove 221 , the limiting groove 2211 , the sleeve rotating member 222 , and the locking member 300 .

[0021] The following specific implementation manner will further illustrate the present utility model in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0022] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0024] Reference Figures 1 to 3 , a plating pot placement base provided by the utility model comprises a base body 100 and a support rod assembly 200, wherein the support rod assembly 200 comprises a sleeve rod 210 and a sleeve tube 220, wherein the lower end of the sleeve rod 210 is mounted on the upper surface of the base body 100. The upper end of the sleeve rod 210 is detachably provided with a sleeve tube 220, that is, during assembly, the sleeve tube 220 can be conveniently assembled on the sleeve rod 210 and removed from the sleeve rod 210. The sleeve tube 220 is provided with a plug-in slot 221, and a sleeve rotating member 222 is provided in the plug-in slot 221. When the plating pot is placed on the plating pot placement base, the corresponding plug-in portion on the plating pot is plugged into the plug-in slot 221, and the sleeve rotating member 222 is sleeved on the plug-in portion, so that the plating pot can rotate relative to the sleeve tube 220.

[0025] In this embodiment, the plating pot can be conveniently, quickly and stably installed on the sleeve 220 through the sleeve 220 and the plug-in slot 221 provided on the sleeve 220. At the same time, by providing the sleeve rotating member 222, the plating pot is conveniently rotated, and when the plating pot rotates, its plug-in portion will not directly contact the inner wall of the plug-in slot 221, thereby avoiding the plug-in slot 221 and the plug-in portion on the plating pot from being greatly worn. In the future, only the sleeve rotating member 222 with greater wear needs to be replaced, and there is no need to replace the sleeve 220 as a whole.

[0026] In some optional embodiments, such as Figure 3 As shown, a thread groove 211 is provided inwardly at the upper end of the sleeve rod 210, and a thread is provided on the side wall of the thread groove 211. The lower end of the sleeve 220 is inserted into the opening of the thread groove 211, and the side wall of the sleeve 220 is provided with a thread. In this way, the sleeve 220 can be firmly installed on the sleeve rod 210 through the thread, and the connection relationship is simple and easy to assemble.

[0027] In some optional embodiments, such as Figure 3 As shown, the plug-in slot 221 runs through the middle of the sleeve 220, and a bearing is provided at both the upper and lower ends of the plug-in slot 221. During assembly, one end of the sleeve 220 is first assembled into the threaded slot 211 on the sleeve rod 210, and then the corresponding plug-in part on the plating pot is inserted into the plug-in slot 221 and mounted on the bearing, so that the plug-in part can rotate in the plug-in slot 221, and thus the plating pot can be rotated, which is convenient for the upper and lower pieces of the plating pot, as well as the disassembly and assembly of the plating pot.

[0028] In some optional embodiments, such as Figure 2 As shown, at least one limiting groove 2211 is provided at the periphery of the port at the upper end of the plug-in slot 221. Exemplarily, four limiting grooves 2211 are provided at the port at the upper end of the plug-in slot 221, and the four limiting grooves 2211 are arranged in a cross shape as a whole. After the corresponding plug-in portion on the plating pot is plugged into the plug-in slot 221, when the plating pot does not need to be rotated, the corresponding convex strip on the plating pot can be embedded in the limiting groove 2211. When the plating pot needs to be rotated, the plating pot is lifted outward to make the corresponding convex strip on the plating pot disengage from the limiting groove 2211.

[0029] In some optional embodiments, such as Figure 3 As shown, the bearing arranged at the lower end of the plug-in groove 221 is spaced apart from the bottom wall of the threaded groove 211, so as to prevent the inner ring of the bearing from rubbing against the bottom wall of the threaded groove 211 when rotating, thereby increasing the resistance when the plating pot is rotated. In addition, it is also convenient to put the corresponding plug-in part on the plating pot on the inner ring of the bearing, so that when the corresponding convex strip on the plating pot is embedded in the limiting groove 2211 or detached from the limiting groove 2211, the corresponding plug-in part on the plating pot can be completely put on the inner ring of the bearing. It can be understood that at this time, it is necessary to match the spacing between the bearing arranged at the lower end of the plug-in groove 221 and the bottom wall of the threaded groove 211, the depth of the plug-in groove 221, and the length of the corresponding plug-in part on the plating pot.

[0030] In some optional embodiments, in order to facilitate the operation of loading and unloading the plating pot and improve the working efficiency, it is necessary to adjust the angle of the plating pot, such as Figures 1 to 3 As shown, the lower end of the sleeve rod 210 is rotatably disposed on the upper surface of the seat body 100 .

[0031] In some optional embodiments, such as Figure 1 and Figure 3 As shown, a rotating shaft 212 is provided at the lower end of the sleeve rod 210, and an axle seat 110 is provided on the seat body 100, and the rotating shaft 212 is rotatably provided on the axle seat 110. Specifically, an axle hole can be provided on the axle seat 110, and the rotating shaft 212 is inserted into the axle hole during assembly, so that the rotating shaft 212 can rotate in the axle hole. In order to prevent the plating pot from rotating after the angle is adjusted to a certain angle, a locking member 300 is provided between the rotating shaft 212 and the axle seat 110, and the rotation between the rotating shaft 212 and the axle seat 110 is controlled by the locking member 300.

[0032] In some optional embodiments, such as Figure 3As shown, the locking member 300 is a screw. Specifically, the screw can be set at the end of the rotating shaft 212. When the plating pot rotates, the screw is loosened so that the head of the screw does not contact the shaft seat 110. When the plating pot does not need to rotate, the screw is tightened so that the head of the screw is tightly pressed on the shaft seat 110, so that the rotating shaft 212 and the shaft seat 110 will not rotate. It can be understood that in order to provide sufficient resistance to hinder the rotation of the rotating shaft 212, multiple screws can be set at the end of the rotating shaft 212.

[0033] On the other hand, the utility model also provides a vacuum evaporation device, which uses the aforementioned plating pot placement base. It should be noted that in the semiconductor field, a vacuum evaporation device is a device for thin film deposition in a vacuum environment, which is mainly used to heat the material to an evaporation or sublimation state, and then condense it on the surface of the substrate to form a thin film. By setting the plating pot placement base in the present application, the vacuum evaporation device can conveniently and quickly temporarily place the plating pot on the plating pot placement base, so as to facilitate the upper and lower sheet operations of the plating pot, and also facilitate the disassembly and assembly of the plating pot.

[0034] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0035] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the protection scope of the utility model. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model shall be subject to the attached claims.

Claims

1. A plating pot placement base, used to connect the plating pot, characterized in that: The plating pot placement base comprises: seat body; A support rod assembly, the support rod assembly includes a sleeve rod and a sleeve tube, one end of the sleeve rod is arranged on the seat body, and the other end of the sleeve rod is detachably provided with the sleeve tube, the sleeve tube is provided with a plug-in groove, and a sleeve rotating member is provided in the plug-in groove.

2. The plating pot placement base according to claim 1, characterized in that: A thread groove is provided at one end of the sleeve rod close to the sleeve pipe, and the sleeve pipe is threadedly connected to the thread groove.

3. The plating pot placement base according to claim 2, characterized in that: The plug-in slot passes through the sleeve, and bearings are arranged at both ends of the plug-in slot.

4. The plating pot placement base according to claim 3, characterized in that: At least one limiting groove is arranged on the periphery of the end of the plug-in slot away from the sleeve rod.

5. The plating pot placement base according to claim 3, characterized in that: One of the bearings is spaced apart from the bottom wall of the thread groove.

6. The plating pot placement base according to any one of claims 1 to 5, characterized in that: One end of the sleeve rod is rotatably arranged on the seat body.

7. The plating pot placement base according to claim 6, characterized in that: A rotating shaft is arranged at one end of the sleeve rod close to the seat body, an axle seat is arranged on the seat body, the rotating shaft is rotatably arranged on the axle seat, and a locking member is arranged between the rotating shaft and the axle seat.

8. The plating pot placement base according to claim 7, characterized in that: The locking piece is a screw.

9. A vacuum evaporation device, characterized in that: A plating pot placement base as described in any one of claims 1 to 8 is used.

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